TIPMEDOPb1113MEPEHliq BAKYYMA GRANVILLE-PHILLIPSO

000 KpHocHcTembi npeanaraeT npovicumo amepHicaticicai xomnaHHH Granville-Phillips® ARA penteHHHJTIO6NX 3aAaii rio 143MepeHHIO Haxyma. Bce iIaTLIHKH, anexTpokunca, MO,ayJIH H CHCTeMbI H3MelpeHH5I Haicyyma IIOCTpOeHbI no cosepineHHoti

'TeXHOJIOTHH, pa3pa6oTaHHoti AAA nposeiteHHH mmepet-Hal B IIIHpOKOM AHana3oHe, C JI0KaabHbIM H AHCMHHHOHHbIM KOHTpOJIeM

H fflI4pOHHM BbI6OpOM (1WHKII1R H BbIX0,1111bIX

• HI'vomit'''. AHalla3OH H3mepeHHA: HocKomacy Qum TeXHOJIOTH5I He MO)KeT 6bITb HCHalIb30BaHa AAA H3MepeHH5I Bcero

Altana3ona Haxyyma, Granville-Phillips® npeztliaraeT pemeHHH KOHKpeTHbIX 3aztag C HOMOIHMO IlpaB14.11bH0 oTo6pamibix

TeXHOJIOTHR B IllHOKHX 1Hana3oHax ,ztatmeHHil OT 110 " Topp (1•10-9 Ha) Ito aTmocckepm.

• fflnpOKriul Hm6op 1-banamti H BbIX0,411bIX CHTHaTIOB: C MO,V.TIbHbIMH ztaTtnucamH HaKyyma Granville-Phillips® BbI HmeeTe

BO3MOXIIOCTb BbI6Opa AC/Ka-IMHOF() AH0E-meg Ha camom /tar-mice H BbIXOAHOTO cHrHalla ,74/134 AHCTaHIIHOHHOTO H3MepellH5I H

KOHTpOJIH, 11TO CHH3HT CTOHMOCTb HHTerpHp0BaHHOCI HaKyymHoct CHCTeMbI. BbI6Op BbIX0Al1bIX CHFHJIOB HapbHpyeTcA OT

aHaTIOTOBOTO lO COBPeMeHHbIX HHCDPOBbIX KOMMYHYIKaHHOHHbIX IIPOTOKOJI0B, TaKHX KaK RS-232, RS-485 H DeviceNet. Tal0Ke

MOACHO 3aKa3aTb TpapanAHOHHyto Kom6l4Han4lo AaTT-IHK + KoHTpoJuIep. CHcTembi H3mepeHH5i Granville-Phillips®

HCHOJIb3y1OTCH ceroztHH B MHOTOrIHCJICHHbIX IIpHJIOACCHH5IX B Hp0MbIIIIJIeHHOCTH, B aHaJIHTWIeCKHX npH6opax, B KpyllHbIX

HCCJIe,a0BaTeJIbCKHX ripoeicrax.

Tonnonposopme

MONICI84M0111/MO

Komimmpotwooltoe

la" laic' lag 104 104 10' 10 10 10' 10 2 10.'

0 100 1000

gaanemtie, Topp

MoAynblible peuiemag Ang mameroemis BaKyyma OT Granville-Phillips® 5{BJIBIOTC5I ,140C711HhIMH HO 'wife K0M6HHa11145IMH BaKyyMHbIX irjar114KOB CO BcTpoeHHoti yupaanstiometi anexTpoHmcoil, pa3MenjeHlIbIMI4 B

0,14110M mckayne.

1103B0J15110T H36aBIlTbC5I OT yCTapeB1HHX 1(om6HHatulti "karmic + KOHTpaluiep (noxa3mBalollu1ii HpH6op). Pea.imaytoT corTemeHHmit noaxo,4 Henocpe,acTBeHHoti no,aagH cHrHana C ,aaTLIHKa (aHanoroBoro 14.1IH cpa3y Hmtposoro) Ha KomrimoTepHbdi HHTepttletic, npki meHbmeil HeHe, gem aa KOM6HHaHHIO ,r4al‘MK + Koicrpoznep. 06ecnenmalur BO3M0)KHOCTb Ha6moileHHA Be.1114'414Hb.1 HamepBemoro Baicyyma Ha itHcanee, a Talace HC110/1b30BaH1451 BCTpOeHHIAX pew j1.1151 ynpaRneHHH 1(0MTI011eHTaM14 BaxyymHoii CHCTeMbI. HeOrpaHHIleHHOe KOJIHLIeCTBO Awl:wadi MO?KeT 110AKTI10,1aTbC5I K Homy xomnbloTepy.

KON1614HaLly1OHHbICI unip0K0ruiana30FthtbIO Mogyrib Micro-lon Plus® (ceptisi 356) 1103BOJIBeT 11130BORLITb inwepeHtig OT BbICOKOF0 HaKyyma 10 -9 Topp xto a -rmoccf)epbl.

rlpelfrAymecima:

• IIIHpotansi ,axanaaoH HamepHremoro Baxyyma: OT 10-9 Topp (10-7 Ha) aTmoutlepm; • BbIX0,411011 CHTHaJI: aHano] oBbIti 0-10 B (JII4HetiHbIti 110 ,14aBJICHH10) HJIH III4(f)P0B0I1 ,Etast CB5I3H C

icommagrepom: RS-485 14./114 DeviceNet;

• ABTOMaTIfileCK0e BIVIIOqeHUe 14 BbIK/HOLIeHHe HOHH3a11110HHOTO ilarmica;

• BO3M0XCHOCTb HaCT

• CourBeTcTByeT esponeRcxy

• BbI110./IHeH B meTaznatgecxo

• ..,cTpoeHmail twfportoti JIB

• BcIrpoeHHhie pew ;Aim yupz

• ,L(Ba BCTI)OellHbIX gyBcTsure H Beek' Batcyym Hp0143BI

.01311bIX anemettra A.7151 yBempleHma BpeMeHH HenpepbutHoti pa6oTm momula *terBeHHoil cHcTemm;

cHneti;

13.11eH1431 KOMHOHeHTaMH BaxyymHoti cHcTemm.

pothcH C HOMOMMO KHOTIOK Ha xopnyce;

M Tpe6oBaHastm CE;

m KOpHyCe H HegyscTHHTenen K paztHemacTombim (RF) nomexam.

- B Ha 3x10-9 Ha /To 3

- B Ila 3x10 8 11a;To 3

- B TOpp

2x10 " o 2x10 -2 - B TOpP

2x10 " 2x10-2

± 1 0% OT 143MepSleMOR BeJIWIHHbI OT 1X1 0 -8 AO 5x10-2 Topp

CmepxmbIcomomamyymnbili /Tarim(

IIIHp0K014HaI1a3011HbIll J(a.T'IHK

TOMHOCTb 143MePeHHil HO a3oTy:

TexmatiecKme AaEmbie :

Anana3oti mmepetudi no a30Ty 14 B0311yXy (CM. npnm. 1 tame) :

- B TOpp lx10-9 TONI ito aTmoc(Depta

- m Ha 1x10-7 Ha Ao aTmoakepm

TO‘THOCTb 113Mepe141411 no a3oly: <15% OT 143MepBeM011 BeJII4‘114HbI OT 1x10-8 Topp ,ao 50 Topp

BocnpoHnommocTb H3mepelmii: <5% OT mmepmemoti mejapanim OT 1X1 0 -8 TOPP AO 50 Topp

Bec 567 r c 41.11anmem NW16KF

HalTp.SDKeHHe 1114TaHH51 14 HOTPe6.131eMail MOW-10CM

24B DC ±15% , man. 26 BT

j(nana3on pa6ognx TemnepaTyp OT 10 °C AO 40 OC (6e3 xonzemcammi)

A14ana.3om Temnepalyp xpamemm OT -40 °C Ao 70 °C

IlyBCTBI4TelIbI1OCTb 110111101.0 4tal'114Ka

20 Topp4 ; 15 m6ap4 ; 0,15 Ha-' (±15%)

MaTepmall 1111TH naicaintsatutm HOHHOM garmxa

Mpw:mci C HTTpHeBbIM 1-10KpbITHeM

MaTepmaz 1114TH HaKaJII4BaHI451 KOHBeK14140HHOTO itar-unca Boabtlyam C .30.40TbIM HOKpbITHeM

Jpyrme MaTep14aJIM B KonTaicre c m3mepmemoii cpejloti

304 nepx. CTaJIb, TaHTaJI, nonbcDpam, 1114KeIlb, Crum nince.nb-xceJle3o, 6opockumicaTnoe cTeKno

TemnepaTypa nporpena Aaranca (6e3 allexTponincn)

150 °C

Hpmmetiamme: 1. 143Mepe111451 3aBHC5IT OT TRIM Ta3OB H HX cmeceti.

110H113a14140HHblik MOilyJlb Stabil-lon® (cepinsi 347) Ana plamepemeifi CBel3XBbICOK010 BaKyymaO 10-11 Topp

rlpetinnytmecTsa:

• BblnycKaeTcsi B ,71Byx moaKinmammmx: 11114POKOAHalla30HHbI14 (OT 2X1 0 4° AO

2x10-2 Topp) 14 CBePXBbICOKOBaKyyMHbIll (OT 2x1 2X1 0-2 TOW);

• LIT443•pomoil mbnammoil cm-man: RS-485 HJII4 DeviceNet; • Ana BCTpOeHIlbIX IlyBCTBHTCJII3HbIX anemenTa /VDT ysemme1-n4A npemenn

nenpepbtatioil pa6oTm MOATIR H mceiA BaKyyMHoil npon3BoAcTnemlog CHCTeMbI;

• Burpoetnime pane JI5i yIIpaBJIeHH51 KOMHOHeHTaM14 Baityymno* CHCTeMbI;

• BcTpoeimmil Intelvonoil mcrtnet • DeviceNet sepcuff COOTBeTCTByeT emponeRcimm Tpe60maim51m CE;

TexHwiecKme taHHbIe:

• BbITIOJIHeH B MeTaJIJIHMeCKOM Kopnyce H negyncTni4Tenen K pailmo-qaCTOTHbIM (RF) nomexam.

A14ana.3on n3mepenklii HO a30Ty H B0371yXy (CM. npmm. 1) :

BOCIIp0143BOAHMOCTb 3mepemul: ±3% OT H3mepRemoti BeJIW114HbI OT 1x10-8 ,ao 5x10-2 Topp

IlpeACJI HO petriTenOacKomy nanyttemuo :

- cmepxnblcomomaxyymmbeTi ikanmx 2x10-"Topp; 3x104 'm6ap; 3x10 -9Ha

- umpomomana3ommbdi A1TT1HK 2x10-10Topp; 3x10 - "m6ap; 3x10-8Ha

MaTepman HHTH HaKa.114BaHHA Mmumil C IITTpHeBbIM 110KpbITHeM I4JIH Baud:Tam

Anana.3on pa6ognx TemnepaTyp OT 10 °C ZO 40 °C (6e3 motmemcaumm)

A14ana3om TemnepaTyp xpameimm

OT -40 °C /To 70 °C

Temnepalypa nporpena Aarntxa (6e3 3nexTponma4)

450 °C

Hanpmxcemme IIHTall1431 H noTpe6agemast MOIHHOCTb 24B DC ±15% , maim 75 BT; 3,75 A npm 20 B

Bec 800r

,TAHatneil (no Bbthopy)

4x-HO3HHHOHHA AcK ;WWI (3 TIO3I4H. C AeCHTWIIIMM noKa3aTenem)

MaTepHama B iconTax-Te c H3mepnemoil cpenoti

Bce OTOAOKeHlIbIe B BaNyyme, 11p1IMeHHMbI A.7131 CBepXBbICOKOTO naxyyma.

TemnepaTypa uporpena naTginc.a (He pa6oTaxnunk', 6e3 xa6enn) 450 °C

flpHmegam4e: 1. 143mepetnol 3aBHOIT OT mita Ta3OB H HX crdeceii

110H113aUMOHHblA moLtyrib Micro-Ion® (cepvisl 354) KOMIlaKTHOB11 3K0H0NIVILIHOB peweHtie vmrsnepetiviii B ,O,viana3oHe or 10- 9 Topp ow 10 -2 TOPP

npetipAyugecTea :

• ,T1Hana3oH H3mepHemoro BaKyyma: OT 1x10-9 ,ao 5x10-2 Topp (oT 1x10-7 go 5 Ha); • R —huto,nHoil cHrHaa: aHaJTOTOBbIii 0-10B (anitecnibtA HO HaBJIeHHIO) HJIII unffbponoil

RS-485; • BcTpoeHHHe pene aim ynpartneHHA KOM11011ellTaMH BaKyymHoil CVICTeMbI;

• 4(Ba BCTpOeHHbIX VBCTBHTe./IbHbIX anemeina gag yrienwlermn BpeMeHH Henpephilmoti pa6oThi mogyJm H weft BaKyyrsuioil 11p0H3BOACTBeHHO1 clicTemm;

• Ft —crpoemimil mickporsoti glicnneti; • c —00TBeTCTByeT esponeticKim Tpe6osainum CE; • Mame zen.noradge.nemm, KOTOpOe MOTTIO 6bI TIOBJIHATb Ha npouecc HIM 3KCHepHMeHT

(noTpe6a5IeT TOJIbK0 8% OT MOIHHOCTI4 TpazolitHoHHba ,aaTt1HKOB C 3nemeitTaNn4 IlaKaJIHBaHH5I);

• 11 B meTa.n.uwiecicom xopnyce H HegyncTimTeneH K paHHOT-IaCTOTHKIM (RF) nomexam.

TexHi44ecKiie

,L(Hana3oH H3NrepenHil no 230T37 H BO3AyXy (CM. npHm. 1 HH)Ke) :

- B Topp

lx10-9 go 5x10-2

- B Ha lxlO 7 fla Ao 7

TOK 3MHCCHI4 0,1, 4 MA

3aunrra no namemno ,f1a.rqm< nbnunogaercn npH ,aocTHweHHH nepxHero imenena ITO .HaRITHHIO

(3aBOAC1a51 yeTaHonxa)

Bec 370r c (fkrianuem NW16KF

A11ana3on pa6ognx TemnepaTyp OT 10 °C ao 40 °C (6e3 KoRaencaum4)

A4ana3oH TemnepaTyp xpaneHnn OT -40 °C ao 70 °C

AHanoronan Bepcm 1B/nexa,aa, .norapknimsi., 0-9 B

Lb4cm-left (no nbt6opy)

2X-TIO3HHHOHHEA C AeCRTWIHIAM noKa3areaem, 3e.nerimil /wog

114ponan BepcHn RS-485, pene c onHoil no3HuHeti

PeryJnyyembte napameTpai

CicopocTb o6meHa AaHHbIMH (baud rate)

T-IyBCTBHTWII3HOCTb

MaTepHaJI HHTH HaicanHnamin

ApyrHe MaTepHaThbI B KOHTaKTe C H3mepnemoii cpenofi

HHTb HaKaJIHBaHH51 geramposanne BKJI./BbIKJI.,

Bbthop TOKa 3MITCCHH, Bb.16op III4TH HaKaJIHBaHHA, yCMHOBCMHa5I HO3HH45I pene

19200 Baud (yeraHomen)

20 Topp '; 15 Nt6ap '; 0,15 Ha - '

HpKtuitl C HTTpHeBbIM II0KpbITHeM HJIH Bani4pam

304 Heim. CTalIb, OKCHA aJII0MHHH5I, TaHTaJI, Banbcivam, 3BTeKTHKa MeAb-

cepe6po, 'comp

TemnepaTypa nporpena jaqna (6e3 melcrpomm4)

200 °C

Himmegaime-

1. H3MepeHH5I 3aBI4C5IT OT Tuna ra3on H MX cmeceii.

KOM6101HaLA1IOHHbIll foo,qynb Mini-Convectron0 (cernasi 275) 1103B011SleT npoBoxwirb 1,43roepeFansi BaKyyma OT 1 0 - 4 Topp O wrivioc4oepb1

IlpetianymecTBa :

• IIII4POKHR A4ana3on H3MePe111451 OT 1x10 TOpP (1x10-2 Ha) IA0 aTmoaDepia, HO cpamiemmo C TPa,a141.1HOHHbIMH Tepmonapnbam BaKyyMHbIMH AaT,Lnucamn H AaT'114KaMH Pirani;

• .....H,1414BH,VaJ1bHaSI ICaj1116p0BKa rapanimpyeT BbICOKI411 yponenb TCRHOCTI4 V T

BOCIIPOH3BelleHHA AaHHbIX;

• BbIxoimoil cnrilan: anafloroamik 14J114 nwpponoil RS-485; • Hofponoil 3-x pa3pnainel Ancameti anTomaTypiecia4 nepecTpannaeTcn mexcay

i(ByM51 mxamamn (Topp/mTopp HJIH xlia/Ha) • c .._,OOTBeTCTByeT esponeilcimm Tpe6onann5Im CE; • B .....crpoeimbie pane AAA yripan.nennsi xomnonefframn Baxyymnoil CHCTeMbI;

• Bb1110JIllell B meTamimmemom xopnyce 14 negyncTanTe.nen K Pa,1(140T4aCTOTHMM

(RF) nomexam.

TexiimecKtie LtaliFibie :

Anana3on mmepermil a6C0J110THOTO ,IjaaleH1451 HO a3OTY (CM. npi4m. 1 mom) :

- B TOpp

1x10-4 Topp o 1000

- )3 Ha lx10-2 Ha o130xHa

Bec 340 r c 1/8 NPT (1)11THHICIM

Anana3on pa6otmx Temnepaiyp OT 0 °C AO 40 °C (6e3 xon.aencan44)

Anana3on TemnepaTyp xpaneimn OT -40 °C Act 70 °C

89/336/EEC; EN 50081-2, EN 50082-2

COOTBeTCTBI4e Tpe6ortamulm CE:

- AI4peKTI4BaM EMC

Bepcm c Jilmethibmt anamoroBbim BbIXOAOM

Ananoronmil BbIX0,14 1 0 AO 10 B DC AAR ilaBJIeHH11 OT 0 AO 1000 TON) HO a3oTy, Jametinbni

AHaJIOTOBbIii BbIXOA 2

0,375 "to 5,659 B DC /um Am:mei-11A OT 0 o 1000 Topp no a.3o1y, HeJHHelhIbIfi

HoTpe6JIneman M0111110CTI3 H naripsoxenne 12,5 ,zto 26,5 B DC, 0,1 A npm 12,5 B DC, maxc. 1,6 BT

Pamem 9-nnn D male

Bepcnsi c niuDposhIm micnneem 0 14.7IH 2 pew

EAHHHIAM H3MePeH1451 Topp 14.1114 Ha

Ancumeti

3X-1103HLAHOHHbIr1 C ,IleC5ITI4nHMM noxa3aTeaem, 3eaemAil XI( nnorA, abrromaTmecimil Bbthop Anana3ona

Ana.noronmil nbrxori 0,375 ,no 5,659 B DC MASI jtannennti OT 0 Ao 1000 Topp no a3oTy,

nemmetintail

HoTpe6nsiemasI MOIIIHOCTb H HallP5DKeHHe 11,5 zto 26,5 B DC, 0,1 A npn 11,5 B DC, maim 3,5 BT

Pamem 15-nkm D male

MaTepnaA ‘.1yl3CTB 14 T e J H I' 4 0 anemetcra Aaranca Boambpam C 30JIOTIAM 110KpbITYIeM

ilpyrne MaTeP14aJIbI B KOHTaKTe C BaKYYMOM 304 nep)x. CTaJIb, 60POCHJIHKaTHOe CTeKJIO, KoBap, ainommi. crumbs, crumb' Faucejm-xcene3o, nonnamna

TemnepaTypa nporpena Aarnma ) 150 °C (He pa6oTaionwil, 6e3 na6e.rol

lipnmeganne: 1. 143Mepelln51 3aBI4C5IT OT THIIa Ta3OB H HX. cmeceit

KOM611HaL1,110HHblVlroogynb Convectron® ATM (cernisi 385) 1103BOTISIBT 11POBOAVITb TOLIFIblefri BOCn130113BIDAVIMble vmmepel-mn pa3HOCT4I Am:mem/A iviewty eaKyInsnom B

Kamepe fri oKpywaloakei,-;cpeo , alcnietipyeT BCTPOBHHble pene, KOTOPble NICIryT 6b1Tb 14C110.11b3OBBHbl ABA

ynpae.nemin p,pyrynvna K0lvin0tiewramt4 eaKyymHoiii CIACTeMbl.

nperudyutecrEta :

• C .._,OCTOHT 113 ,/jByX xopomo 3apexometmonammtx ce6H ilar-114KOB: rermonpo- BO,L(1101-0 H aubcPepemmanbtioro imatkparmermoro, KOTOpide B comeramtu C

yripatuunoutert 3JIeKTPOHHKOti 1103BOJISHOT IIPOBOAHTb H3MePeH11A B mtana3one OT 1310-4 Topp (1x10-2 Ha) /to armoccbephi;

• To=Mbie immepemm pa3HOCTH

• Umbposon' Aticrmeil; • BMXJHO1 CHTHaJI: ana.noroubdi HAIL Inttkponort RS-485 JUIH CB313H C

KOMIlblOTePOM;

• 11 —crpoetmme perm wm ynpatmem43 xomnonetrramn Batcyymnoti CHCTeMbI;

• KOMIlaKTHEA MO,Ky.ab, BbIHOJIHeHHhIti B merawmgeutom xopnyce H nemyucr-K pawtogacrormam (RF) nomexam H ILIyMaM, COOTBeTCTByeT

rpe6unammm CE

TexHiviecKtie gamible :

,atiana3on immepetani a6COJHOTHOTO IlaBJIeH1431 HO a30Ty (CM. npum. 1 HI4)Ke) :

- B TOP') 1x10-4 Topp Ao 1000

1x10-2 Ha Ao 130 xlia

750 Topp "mice arm. iko 250 Topp nnue aTM.

±(2,5 Topp + 2,5% OT H3MePHeMOVI BeJaPIHHIA)

OT 0 °C AO 40 °C (6e3 KOHAeHCaLIHH)

OT -40 °C ;Jo 85 °C

- BHa

j1I4ana3on 113MePe11H51 Pa3HOCTI4 aBJIeHHii

TO‘IHOCTI, immepemail Pa3HOCTH KaBJIeHHil

Anana3on pa6omtx remneparyp

anana3on remneparyp xpanentra

COOTBeTCTBlie rpe6oBammm CE:

- mipeimmam EMC

89/336/EEC; EN 50081-2, EN 50082-2, EN 61326-1

- AHpeKTI4BaM HH3K0r0 HalIPSDKeHHA

73/23/EEC; EN 61010-1

ATIaJIOrOBbIil BidX0A

0,375 /to 5,659 B DC

T4HCJI0 YCTaHOBCRIThIX nomnutit /Ise: mum AAA mtana3ona a6COJHOTIbbIX 3HageHHil zkarmemm, mum AAA AntlxPepemma.abnoro imana3mta imunemni

Hotpouam Bepum RS-485

ASCII dz■opmar

Cxopocrb o6mena immimmit (baud rates) 1200, 2400,4800, 9600, 19200 (ycranou.), 38400

T-114c.no ycranosommix II03HHHfi Tiermpe: xaxita51 He3aBHCHMO moxer HCHOJIb30BaTbC5I B a6C0JHOTH0M

RAH Anclxbepemmammtom intana3one gatutemtil

Anumeil (no ma6opy) 3-no3mt. >KK, auromar. Bm6op ,zmana3ona

I/0 pamem

Tun "nana", 15-mm, D-sub BbICOKOR HJIOTHOCTH

Horpe6rmemam monutocrb :

Ana.rioroum BepCH5I

1,6 BT

RS-485 Bepcm 3,3 BT

Marepuaa HIITH tfaxammatm3 Bcobilvam C 30JI0TbIM HOKPbITHeM

Apyrne MaTepHaJIbI B xoffraxre C Baxyymom 304 tiepxc. cranb, 60POCHJIIIKaTHOe CTeKJIO, xonap, aJHOMIIH. crums, CHIMB HHKe.41.-)KeJIe30, rmpexc, icepammta CHJIHKOH, 3HOKCHa.

Bec 340 r c 1/8 NPT cpurtntrom

Hpumegatute: 1. H3mepenum 3aBHC3IT OT THHa Ta3OB H HX cmeceii.

IlaTLINKI1 11 Komporuiepw P,I1S1 143MepeHMS1 BaKyyma OT Granville-Phillips®

BaKyymHbie P,a1T9101K111 (BaKyymeipb1)

370 1010H113aLp1OHHblA Stabil-lon0

• ,L(Ha11a30H H3rdepeHna HaKyyma: ILIHpOKOAHalla3OHHMA - OT 2X1 04° AO 2X10-2 Topp, CBepXBIACOKO-

BaKyymmAil - OT 2x10-" o 2x10-2 Topp;

• HepB1Ii HOHH3aHHOHlIbIll JlaTT-MK CO CTH6HJIbHhIMH BO BpeMeHH ITOKa3aHIHIMI4 H BO3M0>KHOCTMO

HHAHBHAyaRbHOI1 HaAH6poincH;

• HHAHHHAyanbHaH KanH6p0inca rapaHTHpyeT BhICOI(HFI ypOBeHb TOTIHOCTH H BOCHp0H3BeACHHH

AaHHbIX, HOCTUJI3leTCH Ha xagre namHTH C KaNclIhIM ,aaTiuncom;

• Asa BCTPOeHHIAX TlyBCTBHTWIbHbIX anemeirra y1BOBHH5I HperdeHH Henpepbn3Hoil pa6oTbi ,aannuca H Hceil HaKyymHoti 11p0143BOACTBeHHOR clicTembr,

• Bce KOMII0HellTbI OTO)10KeHbI B Halcyyme;

• BbMOJIHeH B meTaziumecKom Kopnyce, HYBCTBHTeJIbHbIe anemeHTEa 3aummeHm OT mexampleocoro 110BpeKLIeHHH

PeKomeHAyemble Kowrpon.nepu:

— KoHTpozzep cepHH 370 (1103BOJI5leT nozucmomeHme 2x AaTTIHKOB Stabil-Ion® vi 2x itaTTIHKOB

Convectrone)

355 140HVI3aL11,11010HHblii Aar-II1K MiCr0 - 10n0

• ,L[Hana3oH H3MepeHR5I Haxyyma OT 5x10-9 o 5x10-2 Topp;

• Camblii maim-thud-I B Alive HOHH3HHHOHHHIA HaPIHK, 3aH4HaeT JIHILIb 5% npocTpaHcTsa B CpaBileHHH

CO CTeKJIAHHbIMH AaTTIHKaMH;

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• Bb1110JIHeli B MeTaJIJIWIeCKOM xopnyce, 3anu4neH OT RF nomex, ploaneTBopHeT Tpe60BaHHOm CE.

375 KoHTponnep jJ,Jici KOHBBKLIMOHHbIX ABTLIPIKOB COMBCtron®

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• IC JIeTKO yCTBIIBBJ114BBeTCH Ha npn6opHoil naHem4; • a....oTaeT C 14H1.114B14Aya.abH0 OTICBJM6pOBBHHbIMH ,EIBT‘114KBM14 Convectron® 40110JIH14-

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• Komrmicrmilfi, mum ycTaHaarnmaeTcH Ha Hp146opHoil naHeAn; • a_oTaeT C HHAHBI4AyaJII3H0 0TKBJIH6p0BallHhIMH AaTq14KBM14 Convectron®

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istonaimmeabHam HacTpotixa npn cmeHe ABTY141(a. He Tpe6yeTcH; • Pa6oTaeT c eMKOCTHbIMH maHomeTparvm MKS Instruments 220B, 221A, 222A/B (422B),

224, 227A 14 Apyrux nponaBoAnTeadi; • A -HaAoroBbni H unctopoBbte Hbucorkm RS-232, RS-485 AAH 6bIcTpoil nepeAa‘n4 ABHHbIX Ha

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307 KoHrponnep Arm 10110H113BLI11OHHbIX ABTLIVIKOB Basippia-AnbnepTa

• n —AHospemeHHoe ynpaHAeHHe AsyNta HOHH3BLI4OHI4MM14 Aar-ancamn B-A 14 AnymB ICOHBeK11140H11bIM14 impuncarsm Convectrone;

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• R .....03M0)1CHOCTb KOHTp0J131 H 6JIOKHpOBICI4 11p011eCCOB B CI4CTeMe aa eget. BCTpOeHHbIX pew (ito mecTn pane HO BbI6Opy);

• R B MeTaJIJIHT4eCKOM Kopnyce, 3BLIIHIBeH OT RF nomex.

04:1)1LmanbHblia npeAcTaavrrenb KomnaHloui GRANVILLE-PHILLIPS B POCC1411 cTpaHax CHr:

117105, MOCKI3a, HaropHb1171 np. 7 Ten.: +7-495-543-7360, 730-2778 Coakc: +7-495-543-7361

E-mail: info@cryosystems.com.ru 11H-repHer: www.cryosystems.com.ru

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E-mail: info@cryosystems.comau 11 HTepHeir: www.cryosystems.com.ru

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MAPANNUM H r&WAHAAMAMPbt NORM SIM tinems%

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o6opyijoHaHHH JI1 KOHTpOJI5I pacxozta H cocimita raaa H XCHAICOCTH. KomnaHHH cra.aa nepshni pa3pa6oruncom 1114(14/0BbIX H KOMHaKTHbIX pacxogomeport H peryawropoH pacxoga, HoTopme B

Hacromuee HpeNtH CMJIH o ciraHztapiom B BbICOKOTeXHOJIOUPIHbIX oTpacanx Hp0MbIIIIJICHHOCTH.

TeXHO.TIOTHH cotipemeHmAx HOJIyHpOBOAHHKOBbIX ycrpoticTH Hepenum Ha HaHO-TeXHOJIOTHileCKFIVI

yposem). aro omailaur, 11TO Hp0H3B0,121CTBCHHW npoueccm B 3T011 06JIaCTH Tpe6poT 00060 TOIIHOTO

KOHTpOJI51 1'330B H )1(14,71KOCTeil ,11J151 CO3Z13H1451 TOHICHX HJIeHOK, a Tamice KOMHaKTHbIX ymoticTH moHHTopHllra, HoTopme HO3BOJISHOT KOHTpOJIHp0BaTb npoueccm, npoHcxoaHmHe HenocpegumeHHo HHyrpH HpoH3BoacimeH11oil Hamepid. IfuOpoobie modeau pezy.gnmopo8 pacxoda Horiba npomecmupoaanbc u omo6paubt cezodun d.nn acex 03014x npou.modana malcumu ZaeeCmliblAtli npou3ao9ume.gnmu no.nynpocodnuuosozo o6opydo6anun, mrac Applied Materials (CHIA) u Tokyo Electron (Hnomui).

MaccoBble pacxogoniew 11 peryfISITOpb1 pacxoila 1a30B (PPr)

OCHOBHble npeionyateci-Ba:

)10- Oco6o qHcTbIe , HOJIHOCT1,10 meraiumgeciute

Bpemsi OTKJIHKa B .111060M ititallaaorie 143MeHeH1451pacxou mellee 1 cm

Koppoallormo-crothate

HporpeBaemme Ao 350 °C

)10- Moitenx citozppoimmut korrepttleficamH RS 422, RS 485 H DeviceNet

)0- Bm6op ram H itHanaaoxa Hamepexml B 1114(1WOBbIX mo,ae.45Ix IIPOH3BOAHTC51 110/11330BaTeMM C

IIK gepea HOCTaB./I51eM0e uporpammlloe o6ecrieiterme.

COXpalfellHe AaHlIbIX IIK 14 o6pa6anca .1II06bIM14 CMH,1IapTHbIMH HporimivntamH Tgga Excel, 14 T.II.

)11" ABASHOTCSI Ae-tbaxTo crattztapTom B rianynposoitxtwoBoil Hp0MBIIIIJIeHHOCTH

Pacxoq ra3a nepe3 parere Pairnac a pornix Maccoaoro

pacxorra qepe eonrponnep

pereare. 6agnac ••■■■■

Or

k=12,/ 0.

CI pacxoq Or : Pacroq eepea aarqIlK

Pacroq gepea 6amnac lc Ornowaree nOTOKCe

3aencemocrb pacroqa or nepenaqa qaenerare cencopa Ann qar ,erea H Oacinaca (nepenycenar Kaman) Ammo,

20

IN1111111111111111111111,1- M=IMPINIM

1111111111•111111111111=111 Pritill11111111111111111111 a Or b 20 15

neeonae menetere. ker H20

TM16. PorYrerPileetna mamma

nbea0ArivapwieClall

Tennoeoii mason rippeori coneNomora npilBOA

npruiwan Aecicnstig

MaccoHbdi pacxoikomep 14.7114 perymrrop pacxoila ra3a COCT014T 143 ile-reicropa, 6agnaca, manalla H amexTpwlecicoti CXeMbI

ynpas.neHm. ra3, BX0i011.104F1 B rpr, pa3ite.rmeTcA Ha HOTOK, Hpareicalow& gepe3 AeTexTop 14 MI4M0 AeTetcropa gepe3 6agnac. B ileTeKTope maccosbdi pacxo,4 onpeaeimeTcH nponopitHoHaabHo H3meHeHmo Temneparrypm, KoTopoe tlepe3 HeIIb mocTa Hpeo6pa3yeTcA B aneicrpagecicHil CHTHaJI. aTOT CHFIlaJI 3aTeM 11p0X0,7114T .lepe3 yCHJIHTOJIb 14 KOpp0KTOp 14 BbIX07114T B B14,71e

JumeilHoro HaripsDKeHHH OT 0 AO 5 B. TOT )KeCaMbIi cHrHa.a nonapper B genb KOHTp0J151, KOTOpa5I CpaBHHBaeT ero C cHrHanom 3a,11aHHOTO pacxo,aa H HOChl.ThaeT pa3HOCTb CHTHaJI0B B Heim yllpa13.11HHH51 KnanaHom. KnanaH nepememaercsi B HallpaRTICHHH

yMeHbILIeHH51 pa3HOCTH CHTHa..110B JO HyJM. ApyrHmH CJI0BaMH PPf pery.allpyeT pacxga TaK, TITO6bI OH cera 6bin paBell 3azta1iHoil Hem-Lame.

Ten.nocou aemeicmop Horiba STEC COCT014T 143 Kan 14J1J131p0B, BOICpyr KOTOpbIX o6epHyrbI ,TIBa HarperiaTemq, 14 HeI1H

3JIeKTpi4IL1eCKOTO MOCTa. FIpH HpoxoxikeHHH ram =lepe3 HarpeTbie Ka1114.71J151pHbIe Tpy6KH, Bo3HHHaeT pa3HOCTb TeMITepaTyp Me)K,ay

TOT41CaM14 Hxo,Aa 14 BbIX0i1a HOTOKa. Pa3H141Aa TemnepaTyp C nomouudo meicrpwiecicoro mocTa Hpeo6pa3yeTcH B CHTHaJI,

HponopHHoHa.abHmil Be.1114=mHe pacxoita ra3a. HOCKOJIbKy 11p0X0/04MOCTb Kanniumpa itereKTopa orpaHmena, TO 60.71b111a51 =IacTb Horroxa Hpoxo,H4T =lepe3.1a.munapnbiu 6aunac C aHaJ1011474HbIM 110p011aAOM AaRTIeHH11. PFIC. 2 Hoica3mBaer, =no oTHomeHHe pacxo ottos icankuumpa H 6afilIaCa He 331314CHT OT BJII451H1451 BHeIIIHHX CbaKT0p0B, H TOYHOCTb H3mepeHH5I pacxoita ocTaeTcH Bcerila BbICOKOti, 6.71aT0,441.51 HpeicpacHtam xapaxTepHcimicam mmHHapHoro 6armaca.

Puc2 Puc.3

CyatecmyeT TpH THIIa 11pHBOAa KJIa11aHOB, KOTOpMe 14C110J1b3y1OTC51 B COBpeMeHHbIX Hbe30-, TeI1J10B0ii H 1-1p14B0,71 tlepe3

COJI0H014,11. KOMHaHH5I Horiba STEC IlepBOVI B Mlipe 14306peJIa KJIallaH yripaalleHna C Hbe30-11p14BOITOM. 111314B04 HpeAcrammer co6oti Haó0p Ilbe303J1eMeHOB, KOTOpbIe HaHpaB.710HHO ite()opmHpyloTcH HpH rickaage Ha HHX 3J101CTpHileCKOTO TOKa H nepemewasur

MeM6pally, KOTOPa5I orpaHH=H4Baer HOTOK ra3a. KoHcippcung Bcex 3JIeMeHTOB nbe3o-Hp11Hozta Bb1110JIHella 113 meTaalla. Tem CaMbIM B pacxoilomepax PI pery.urropax pacxoika ra3a Horiba STEC o6ecneimsaloTcH CBCpXYHCTb.10 yCJI0B1451 01.7151 ripoxoita ra3a. B TelIJIOBBIX manaHax nepementeHlie or_tHalwarmm npomocoAHT 3a ClIeT TemnepaTypHoro paCHIHPHHHA HarpeHaemoro maTepHam HITOKa TIPHBOAa (pHc. 3). HepemenleHHe HITOKa Hpliso,rta Taxxce moxeT npoHcxozu4Tb 3a c=ler CO3,11aHH51 3JI0KTPOMaTHHTHOTO

110.7151 BHyT1314 KaTy1.11K14 C0J1e14014Aa. TaicHe mom.7114 Taime 11130I43BOXITC5I xomnaHHeti Horiba STEC.

H14)Ke 11PeACTaBJI0Hb.1 OCHOBHbIe CepHH PPF Horiba STEC. Bce OHH OTH005ITC51 K Knaccy 0C060 1114CTbIX ympoRcTs C 111303011p14BOAOM.

gruppoable MaCCOBble perynaTopm pacxma ra3a ceptim SEC-Z500

HporpammHpyemmil ullitposoil peryzaTop pacxo,aa Timm/vim HOKOJI011515I. BO3MO11CHOCTb H3MeHeH11.11 1Ioah3oHaTeaem num raaa H HOJIH011 HIKHAbI, C coxpaHemem BbICOKOil TOLIHOCTH H spemeHH OTICJIHKa.

rIpetarvwu.kec -rea :

sha6op ra3oH / ilHana3oHba pacxoptos AHana3oH OT 3 CTalta. CM3/MI4H o 50 CTall,a. JI/MHH

H3meHeHHe HOJIHOR IILKaJIbI 110JIb30BaTe.fleM mexcity 25% 14 100% • Oco6o micTme: MeTazawiecicam AHasEPparma / Hepmas. CTa7Ib 316 c aneKrpomexaHmiecKoii

110J114p0BK011

BbICOKa5I TOMHOCTb: ±1% yCMHOB.71eHHOM 3Ha1eHHA

)0- fibIcipoe Bpena oncamca: meHee 1 ceicymam do 3i06010 ycmanowlennow 3namenusi 3a ciler

coHpemeHHoil HcrpoeHHog 11:1)3THK1U1H PID KOHTPOJI5I

Coxpanome Aammx H camomaantocnfica c nomommo npanaraemoro nporpammHoro o6ecnegeHHA

• IbubpoBoii H HHHAOTOBla BbIXCIAM: RS485 14.7114 DeviceNet 1411Tep4)efic

)10. KomnarrHocm

Z512MG (Moaegh Z514MG c DeviceNetTM ) Z522MG (Monti% Z524MG c DeviceNetTM ) Mo,Itcob

SEC- MaTepHaJlIal B KOHTaKTe C

namepnemmm raaom Tun manana

CT4H4apTliblcl 41,1a11a30H ilamepelma pacxo4a (N2 MKBHBaaeHTHIA6

nommii 1441ae F.S.*) ,ananaaon perynnponannn pacxoaa

Bpema OTKARK4

TOBHOCTI,

JIHBefillocTi,

BOCrip0143BOAHMOCTI,

Pa60Baff in3HOCTb 4annet046

Maxaimanbnoe pa6ogee 4annenne Col IpOTITIVICHHC 4acoefnui

Harenanne Pa6ovan remneparypa

Hacrpoilna alumna paCx0,4a

Bmxoanon cnraan pacxoaa

Hanpsonenne nitramta

Cran4apinoe coe4nnemae

M: THH, necoKaneloulasi CTaab SUS316L, myrpetninn nonepxmcrb cmni1apmoti110.1114p0BK14

OTKpMT 111341 OTKJI10,1eHH0M incrati44 - 0 aaernaT 111314 OTICHOBeliTIOM nwraliml - C #01: 30/ #1,5: 55/ #02: 100/ #2,5: 175/ #03: 300/ #3,5: 550 SCCM #07: 30/ 408: 50 SLM

#04: 1/ #4,5: 1,75/ #05: 3/ #5,5: 5,5/ #06: 10 SLM *npitmeforrenbno K N 2, H2, Ar,

Or 240 100% ES. Menee I CelCyli4bl B /11060firogxe 40ana3orm pery.704p0namta pacxo4a (T98)

±1% S.P. (or 30 4o 100%F.S.) ±0,25%S.P. (or 2.4o 25%F.S.) (coornercrnyer cmn4apry SEMI E56-1296 Mexaynapoanofi acconnamut nponanworre)ieil

no4yripono4Hninonoro 060py4onamin H marepitanon) ±0,5 F.S. ±0,2 F.S.

OT 50,10 300 iffla #7: oT 200 4o 300 nIla (d) [#5.5 H #06 OT 100 40 300 K[Ia] #08: 200 (K4ailati C)/250 (K.11ariali 0) 40 300 xlla (d)

450 eIla (036brrognoe) 1 MBa (1136bITCB1110e)

Menee, qem 5x10' 2 11a-m3/c (no He) Or 5 40 50°C

IlinDponoil: RS-485 (F-net npcnorcon) DeviceNetTm: (SEC-Z514MG/Z524MG) AnaloroBbni: oT 0,1 40 5 B (nonnoe BX04110e COnpOTHIBICHHe: 60.1lee gem 1 MOM)

1114p0BOH: RS-485 (F-net (TOTOWA) DeviceNetTM: (SEC-Z514MG/Z524MG) AB4J10r0Bblii: OT 0,1 40 5 B (MBBBNIa.lniMe C011poTHallell He Harpy3KH 2 '<Om)

5 B±5% 150 mA -15 B±5% 150 mA / DeviceNet: comacno cratutapry Accounanon naroronirreneti yerpon 4/131 OTICIMATIAX cncrem (HOMIIIIBAbH0e 30astemte 24 B (oT 11 40 25 B) 3,5 BA

1/4" VCR lima 14.414 1GS

E40/E40MK3 E40

E50/E50MK3 E50

E60 I f)

E70 E70

E80 E80

Moae.11, SEC-peryJIATOrl SEF-113Me I HTe.11b

Timm 1230B

Marepna4m B KOHTarfe c namepnemum raaom

ilexoppoaahiame ra3b1(moSeab MK3 moseer onepnponarb C N 2, 02, B034yX, 11 2 , Ar 14 He)

SUS316L, Bkrron, no.orrerparkroparmilen (regmon), martorrnan nepx(anelontan CT4J1b

N2, 02, nomyx. H2, Ar, C3H8, C111, C411 10 N2, 0, mama, H2

SUS3I6L, nounrrerpartrropanulen marinman nepwanetonaan CTailb

OT 040 100% F.S. Menee 1 C01(301461 (T98)

±1% F.S. ±0,5 F.S.

±0,2 F.S. OT 10 SCCM ao 5 SLM: OT 50 ao 300 Kila

OT 10 40 30 SLM: OT 10040 300 xIIa 300 xlia. (1436mr)

450 ella (046brr) 4011OJIHHTBALH0T0 4aBaema c noTepa AaRBBLIBB McBee gem Ha I% qepea 10 manyr

OT 5 ;to 50°C (rapaBanposainiaSI ToveocTE, meway 1511 34 ° C) OT 5 go 45°C (raparrrapoaaanaa Togliocib NICIK43, 15 if 34 °C)

SEC-E40(MK3).E50(MK3): OT 0,1 40 5 B (mime intomoe conpormanenne: 6onee ' ,tem 1 MOM) SEC-E60.E50.E80:0T 0,25 so 5 B (nountoe monoe conpoinnuleme: 6onee gem 1 M0m)

ABamOrOcbdi: OT 040 5 B (romPlmailblloe colipomBulenHe Harpyint 2 Wm) +15 B±5% 50 mA I +15 B±5% 50 NIA

-15 B±5% 150 mA, 3 BA -15 B±5% 200 mA, 3,9 BA 1/4" Smagelok 3/8" Swagelok 1/2" Swagelok

350 ella (MONT)

lx10 " Ha.m3/c ( no He)

ana0aaoll perynnponamtn pacxoaa (Cepila SEC) /114ana3on H3Mepelik151 pacxona (cepitn SEF)

Bpemn OTKJIHKa

TOBILOCTb JTnIleikHoCTb

BOCHp0}13BORIIMOCTb

Pa60HaC paanocrb 4aBACHHi4 (cepna SEC)

Menee 2 ceeyno (T98) ±2% F.S. T1% F.S. ±1% F.S.

OT 200110 350 Oh ±0,5 F.S.

OT 100 ,J0 300 eIla

I Mlla (045brr) lx10-1 ° Ha.m3/c (no He)

Tim manana Crap/lamina Ananaaort noroxa

(N2 4KBliBaJleHTHbIll F.S.*)*1

Pa6ogee 4anuemae (cepna SEF) ConpOTHBAeHine 4aBACHBR

Harexainie

Pa6ogan remneparypa Hacrpoilea an-liana pacxoTta

Bhixo4Hoti cnreaii pacxoa Hanpweenne nmanon

CTaH4apTHOe coe4HBel I He*2

10/20/30/50100/ 200/300/500 SCCM

1/2/3/5/10 SLM OT 240 100% F.S.

3axpbyr 11pM OTIC410WHH0M 1114141-0114 - C 50/100 SLM 200 SLM

OT 5 110 100% F.S.

20/30 SLM 300/500 SLM

Xapatcrepvicrpooi u,rotipoeboc PPI ceptal SEC-Z500

F.S. - 110.1111aSi Liman inamepemoi * SCCM il SLM o6o3navenon, nonaamnalontme pacxo4 tnaa (m.4/mkni, .a/mvin ripn 0°C, 101,3 xlla)

Manoromae maccoswe pacxmonnepw (SEF) w perynsrropw pacxoxia ra3a cepa,' SEC-E40

AHailLOTOBbIti Heotkoporoft peryllscrop pacxoila C COJIeHOHAIIBIM 111314B0AOM WI51 paw-twit-thy( npommuutemnax, fla6opaToptibtx nplime-HeHHII 14 Hayqxbuc mute/Aortal-1Hk

flpeponywgc -roa :

)11,' HH3Kail CTOHMOCTb

Yfr 11114pOKHR A1{HHH3OH pacxorlos: itHalla3OH OT 0,2 CTaH,B. CM VAD111

,a0 500 cratia. .71/MI4H 110 a3oTy

BbICOICHH TOMHOCTb: ±1% yczaHomextloro 3Hattermst

Bbicipoe B13eMH OTKJIHKH : mexee 1 cetcyx,Ibt

Jlimetiobiti manoroomil obixox 0-5B 110CTO5IHHOTO TOKa

xaparrepricnam aHanoroBbix PPr ceptiti SEC-E40

* 1 I41401)Maillii0 HO Apyrmm maim MOXCHO yanarb 3' 11p01,1380)1}1TeJISI *2 Moryr 14C110.41330BaTbCSI rainne necralvaprnme COBLualiefulA F.S. - nonliam mearia H3Ntepefflisi

*Mmensim SEC-E40, SEC-E50, SEC-E40MK3 H SEC-E50MK3 xapanrepita aaTomanviecaaa yuralloma HYJISI

*Bmotoe ;tan/mine 44n SEC-E40/50/60E40MK3/E50MK3: mamma/11,110e 300 411a (1136brr.) turn 1-1112Ke. LL.TIA SEC-70/80: MaKCHMBAbH0e 350 KIIa (41361,IT.) WIN tame. * SCCM H SLM 0603nagennn, noxaamnalonme pacxos ram (ma/mnit, 4/mint npn 0°C, 101,3 KIL)

MaTepnanm B KOliTaKTC C

namepnemmm raxom Tun xnanana

CTannap-nnati nmana3on itamepennn pacxona 3KBIIBBJ1eHTIIMil

110111100 inKane F.S.*) Linannon peryjnaposafuni pacxop

Bpont orxmixa TOHHOCTb

JIuHelaHocTb

BOCHp0H3BOAHMOCTI,

Pa6OHBA Pa3H0CTI3 nannenuil Manumanbnoe pa6owe nannenue

ConpoTunnenne gametal), 1111C.710 yreqex YHJIOTHellHe

Pa6ogasi xeminepaTypa Haciporma curnana pacxoTta Bbixoxfoil curtail pacxma

14CT0411141( 1111TBIIHH

pacxona

CmiulapTnoe coeminenue

M:mn, nepacaneiomam CTBIlb U 316L, nontnexpanTopwninen TB WIOH)

3axpuT npu OTIOHOYCHHOM mrramin - C 10/20/30/50

100/200/300/500 SCCM 1/2/3/5/10 SLM

012 Ao 100% F.S. Meoee 1 cexpokm a oo6oa TOHKe goallamia perymipoomoo pacxoaa (T98)

±1% F.S. ±0,5 F.S. ±0,2 F.S.

OT 50 no 300 Oa (d) I OT 100 no 300 Kila (d) 300 KIIa (G)

1 MHa (G) lx10 "Ila.m3/c (no He)

Merannugeme yft110THCHHe

OT 5 Ao 50°C (rapanmponannan TCRHOCTI, mexcny 15 H 35°C) OT 0,1 AO 5 B (nonnoe nxonnoe conpoTunnenne: 6onee gem I MOM)

0 no 5 B (MHHHMH7113HOO conpolunnenne narpymni 2 KOM) +15 B±5% 60 mA +15 B±5% 60 mA

-15 B±5% 150 mA -15 B±5% 200 mA 3,2 BA 3,9 BA

1/4 VCR

20/30 SLM

Nloje:lb SEC-

J 1

nollFICOCTWO MeTannwiecnie perynsTOpbIpacxoAa ra3a Ans KOpp03110HHbIX 1a3os cepa.' SEC-E400J

AHMOTOBbIll Ile,a0pOTOrl peryawrop pacxo,ria C MeTaJIJIWIeCKHMH YHJIOTHeHHHMH HJI5I 113MeTWHI451 pacxo,aa ICOppO3HOHlIbIX Ta3OB

B TeXHOJIOTHWCKI4X Hpoileccax B 11130MbIIIITICHHOCTI4, .11a6oparopmx YI Hayinthoc HCCJIeLLOBaHHHX.

ilpetimymecima :

)1P. KOpp0311011Has1 CTORICOCTb

• HH3K051 CTOHMOCTb

)11," 1.11xpoicHfi Altai -mom pacxcvlos: AHanaaoH OT 10 crawl. cm3/mHH

,ao 30 cTawl. JI/MHH HO aacrry

• CseroBasi cHniamoagna H CHTHWI 6.1I0KIWOBKH B c.ayHae oHn46KH

pery.impoBaHHH

)11.• BMCOICa51 TOIIHOCTb: ±1% yffaHOBJICHHOTO 3HalleHRYI

• Bbicrpoe BpCM51 OTKIIHKH : meHee 1 ceKyliata

• JIHHeilma axamoroBbdi mocog: 0-5B HOCT051HHOTO TOKa

Xapaicreptic-rmui aHanoroBbor PPI ceptai SEC-E400J

*F.S. - 110.11Ha51 maim u3mepeinuf * SCCM H SLM o6oanamennu, noxammalowe pacxon raaa (mn/muu, n/minf npu 0°C, 101,3 KM)

MaccoBble pacxopprinepbi ii perynwropw pacxma muipxocTell (PP)K)

MaccoBble pacxmomepw PI peryns -rophd pacxoAa moiAxocreil ceptal LF/LV

OCHOSatIbI Ha IlepBOM B MHpC ceHcope C yHHKaablibIM MeT0J10M ox.namczteHHH.

ripetamymecTila :

P ery.imposaHHe MJIbIX pacxoaoH, HatmHaR OT MIIK1:10-JIHTp0B

)111* BbICOKaH TO11110CTb noitaepAcaHHH H HamepeHma pacxo,aoH HH3KOKHILFIIIMX H 135I3KHX

XHAKOCTeii: H20, TEOS, TiC14 H milorinc Apyrinc, HCIIOJIb3yeMbIX B TIOJITIpOBOAHHKOBbIX

TeXHOJIOTH5IX H ApyrHx orpaciffix Ilp0MbIIIIJIellilOCTH

30* Oco6o HCTbLH

▪ Ka.aH6posica

Jo. BbICTpOe BpeM51 OTKJIHKa BO BCeM otwaria3oHe H3MepeHH5I

Yo- ABTOMaTHIleCKHYi 1114,11-KOHTpOJIb H HporpammHoe o6ecnegeHHe

0/0 BbICOKail TOIIHOCTIa (±1%F.S.)

He HoortHepxcell HomeficTinuo Temnepaiypm oxppicaloweii cpeAN

OP' MOXeT HCHOJIb30BaTbC5i JJi01 HamepeHna ›KHAEocTeil C HH3KOVI TemnepaTypoil KI4HeH145I

Wt4,0,KOCT6 TeHeT

• Sow

PacnpeAerieHoe Temneparypbi B o6nacm Aar-RiKa

>KHAKocTb He TetieT

Kanonn9pHaq Tpy6Ka Heowaselowe0 crarni

}KKA K0CTb =O.

TepwanerrpoLiecniA anemeHT (3nemeHT flenbme)

Tem

nepa

Typa

, C

Memee 3 cexyma (T98) Memee 2 ceicyffo (T98)

MaTepaIaJI B IcolnurcTe C iucaeocmio

Granaaprmoe coeameelme 1/4" ynnunixembiii

B primp°, 1/4" VCR

1/16", 1/8" yFITIOTHSIOMMTI B prmyto, 1/8" VCR

1/8" ELTIOTHROMIA

B WM3,10, 1/8" VCR

1/4" yrulcammemmt1

B primyla 1/4" VCR

Tan PO SUS316L, Ni, PTFE, PFA Tcn 0 SUS316L, Ni SUS316L, Ni 1/8"

ynxmammemblii B pymmyro, 1/8" VCR

1/16", 1/8" y11.11011151CMIA B pymmylo, 1/8"VCR

IrlpHHumn ;IRA CTE31491 :

,LIar-unc perymiTopa pacxoaa X14,AKOCTI4 (PP)K) cepHH LF/ LV COCTOHT 143 3J1eKTp011HOTO

omaxcztaiourro anemeHm (allemenT HeabThe), HaxownHerocx H KoHmxTe c xankuumpHoft Tpy6xoii, a Taxxce HOCKOTH3K4IX TemllepaTypHmx 4a1,114K0B.

HpH HpoTeKaHH14 ACHAKOCTI4 AaTLIFIK itmxcHpyeT pOCT TemriepaTypm (AT), COOTBOTCTBy101111,41 pacxosv 14 110Ka3bIBaeT 3HatleHHO B eallimiax pacxQzka. B OTJIHT4He OT MeT0,7110B, re 14C110J1b3yeTC5I HarpeHaHHe ACHAKOCTI4, MOTOA H3mepeHH5I C ox.aaKaelinem 1103BOJI51OT H3Mep51Tb paCX0A XHAKOCTOVI C H143K0ii

TemnepaTypoii K1411eHH51. 3TOT NICTIDA Tamice 1-103BOJI5IOT 1436eXaTb Hpo6.nem CB513aHHIAX C 110MeXaM14,

B031114Ka1011114MH BCJIe1jCTBI4e HcHapeHHH, H 311a1114TeJlbH0 HOBbIlIlaCT TCP4HOCTb H3mepeHHIA.

XapaKTepilcimma Ltvolvoebix 1.1aHal1010BbIX PPM( Ceptit4 LF/LV

LF-F50M-A LF-F60M-A LV-F20 ( PO/MO)

LV-F30 LV-F40 (PO/MO) (PO/MO)

Wien). LF-F20M- A

Paexoa Amman) mamepemmm

PIC1103bayeMbIe ./K14;4KOCTI4 * 1 11331131COCTb * 2

TO1IHOCTb * 3 .1111HORHOCTb

BOCIIp0143B01114MOCTb

Bpemm aricamma*4 Pa6omam TemnepaTypa*5

TexmepaTypmmii matiximulmemr Pa6omee Oaenemme*6

0,02/0,05/0,1

I .1 , -F30M-A LF-F40M-A LV-F50 LV-F60 (P0/M0) (P0/M0)

0,2/0 1/2/5 0/20 I 50/100 I 0,02/0,05/0,1 0,2/0,5 1/2/5 10/20 OT 5 eo 100% F.S.*

Bce >KHAKOCTIT, xporme KOPPO3110HIMIX K HepicaBoomeii (manpmmep, HC1 a HF) mace. 0,1 Ha.c (100 cp) Mame. 0,01 Lla•c (10 cp)

±1% F.S. ±0,5% F.S. ±0,5% F.S.

Memee 3 cexyma (T98) 1VICHCC 2 cexyma (T98)

±0,1% F.S./C maxc.±1% ay 15 45°C)

50 100

OT 0,05 am 0,3 MIla Maxe. 5 MIla (i(ax pacxoaomep)/ OT 50 Ao 300 xlla

mace. 500 Ha AmaJloroma OT 0 ao 5 B 114p0e011 RS485

+15 B±5% 200 MA 15 B±5% 200 mA 5x10 12 Ila.m3/c (He) Tim PO melee mem lx10-'s Ila.m3/c (He)

TIM MO memee mem 5x10 Ha.m3/c (He)

*F.S. - 110AHa51 mican 143Mepe11143

* 1 AAA cepHil LF/LV Ka.m6pcomca pacxoila 11p0143BOA4TC51 C 14C110A1330BaHHeM 3aAaHHOTO THIla >KHAKOCTH (YKa3b1BailTe THH licnomoyemoii XHAKOCTI4 HpH 3aKa3e HpH6opa) - )1(HikKocm co/ler:1)1<mm THeckapo (13e3y He H3mepsnoTcH - HpoKoHcyJIBTHpykecb C HocTamificord, eCJII4 nnampyeTe 14C1111J1b30BaTb HpH6op CO memo xatalcocTeil, COCTaB KOTOpOii MOXOT

meHanc.a. - HpH 14C110Ab30BaH1411 HpH6opoH THHa LV /psi 143MepeHI451 XHAKOCTI4 coikepxameii Me..11KHe I4aCT141113I, 3/CMHOBI4Te (1)14AbTp 0,2 MKM (AIM)

C OCHOBH011 CT0p0HbI.

*2 HpH6opm THHa LV B 3aBHCHM0CTH OT pacxo,aa mom. HpHMe1151T13C51 HpH MaKCI4M3/1bH014. B513KOCTI4 0,01 Ha•c. Hpolcollcyammpyiirrecb C HOCTaBIAPIKOM, OCJIH mnainwyeTe HCHOT11)3013aTb HpH6op 0J151 XCHAKOCTeii C BbICOKOF1 B513KOCTb10.

*3 XapaicrepHurliKH TOT4HOCTI4, Alillei1HOCTI4 14 HOBTOp5TeMOCT14 rapaHrlippurm HH Ka.1.1146p0BKH >K14,AKOCTH Ha OCHOBaHI4H SEMI E56-1296. *4 3Ta. xapaicTepHcmca KoppenupyeTcH 4))/Inaweil AUTO-PID C KOHTp0J1bHbIM HbO30 xnanaHom. *5 06ecneimailTe Hamexcaumu o6pa3om TOIIHOCTI3 H3mepeHum, c.11eilme IIT06b1 TemnepaTypa Hxoximeii XHAKOCTH 6Bum He mom 10°C H

He BbIllle 3°C TemnepaTypm mcppicameti cpmm. *6 XapaicrepHcnixa pa6omero 4aBAOHH51 COOTBOTCTBM a4ana3oHy AaBAO111451 HpH KOTOpOM 13513KOCTI3 >K14AKOCTH 0,001 Ha•c. *7 XaparrepHc-rifica. nepenaip Aaalle111114 onpme.neHa rum BBOAOH1414 >KHAKOCTH (Ramocm 0,001 H&c) HpH 100% F.S. TO‘11(14 HmslepeHH.a.

flepenma aamaemma*7 Cmrmaz pacxmaa

P1CT0111114K 1114TaH1151

HaTeKaHae

BX0,14 Bbixo,n,

MCTO4H141( MIT81114A npinima

Bbixoxpio0i eitnian pacx0p,a YamosourtA airman pacxo4a

Ilbe3o3nacrp1uecKi1Vi npinotl.

KrianaH ynpasnesmq pacxop,om

MerannmecKasi AvacOparma

I KOHTOOHbHbIti

06nacm CMOWHBBHHH

Kordnakmble ticnapwrenm H113KOKl1n 14X xiv,Koc-regi cepiiii MI/MV

CaolicToa H npemmywecTaa cepmm MI:

>0- KomnaKTHEde • Ilbe3o3.aeKTpimecKmI HpHrioa

)1. VICII0J1b3y1OT Fa3OHOCHTe.71b ,71.1151 BCPCPeKTI4BHOPO Hpoueeca HcHapeHHH HOXIep)KaHHe TOt1Hoil TemnepaTypm 3a CgeT HeTpoeHHoro HarpeHareaa, Tepmonapm 14 PID KOHTpOJIH

)o- 14cHaperme H143KOKHIDILIII4X 14 BH3K14X xmaKocrefi )1•• (DyHKIAHH KOHTpOJIH paexoaa Ha BbIXO,L1e

)fr Pa6cyraer B yCJI0BMIX HaKyyma 14 Hp14 ammeckepHom ,aa.H.neHHH

OCHOBHble warm npogecca mcnapemma pa6oLnix )1(I11WOCTO H

no,plaw PAX B TexHanorwiecKylo !campy:

1. 143mepmeTc5T pacxcla pa6cRefi )1C144KOCTI4 143 14C40,1HVIKa. Pacxcka Kompawyerma KaanaHom HocpeAcmom CI4CTeMbI o6pamoli C1351314

2. )1CH,aKocTb HOJIHOCT1310 14 MPHOBeHHO HcnapHeTca 3. 06pa3yfoumficm ra3 11041aeTCH B TeXHOJIOrkeleCK3710 Kamepy 6e3 peKoHaeHeaum4 B )1CH4Ky10 C14a3y

CHnian Hacrpokm normca KoprrpommrIA icy:am SIM NM NM MM.

Ow/scowls

MI-1000

Komponnep macconoro pacxo,ost raKa

flap

Komnawrmile HcnapwreaH ceppm MI/MV AAA

cBoei pa6oTKI 14C110J1b3y104 maccosbdi pacxo,aomep )104,TIKOCTH, a mioKe PPF Korropmfi KOHWOJII4pyeT

HBO,/ ra3a-H0cHTeJm B HcHapHTe.m. IlpHHHHH pa6urm HcnapHTe.neti cep1411 MI HOKa3aH

Ha pHcymce enesa.

TomnopsTypmiti Kompom

MaccosmA pacx0omep LFM perymipyeT oupbrime nbeaonpHoop,a KOHTPOTIIDHOr0 Knanama MI-100, CIMBHHBUI 3magetimm 143Mepefil0f0 1 Havrpoomoro flOTOICOB

Caoiivraa H nperumyw,evraa cepmm MV:

• OAHHaKoBbiti c cepHefi MI HpHH111411

AeFICTBI4H

14meeTcH HacTpoiiKa pa3HOCTH TeM1lepaTypbI B 06J1aCT14

CMe11114BaHI451 II HCH3peHI451

• H143KaH TemllepaTypa 06J13CTI4

cmenn4Ham11m HpeaurHpawaur TemHepaTypHoe paccmeHHe cmecH

• BmcoKasi TemnepaTypa 06AacTH FICHapeH1451 COMM' BbICOKy10

CKOpOCTb HenapeHlia (20 r/mm)

FIHrb, wznnoBpyBaum maneuynu

*:z

ft

-

40.1. A

! °oil]

10

Q. Q 0.0

HHTb (HCIYPIHHIC HOHOB)

llama (Dapaikesi (iteTeicmp)

KBAJAPYR0.11bHbI1i MACC -CilEKTPOMETP (AHAIIII3ATOP) OCTATO4HbIX rA3OB MICROPOLETM

Corpememnae 110.11ylip0BOAHHKOBbIe TeXH0J101-1414 10CTHTJIH Hallo-yposHB H TemaTHIca M1101-14X HCCJIe,140BaHH1 H 11p0H3BOACTB,

TaK HJIH CTaBHT 3aikav CTa6HJIbliOTO BOCHp0H3BeileHH31 XHMkPleCKI4XAM3HtleCKHX yCJI0M414 Hpouecca. Oco6oe BM4MaHHe

o6paumeTcH Ha H3MepeHHe H aHa11143 ocTaToimoro ram B pa6cotmx Kamepax paaimimbix BaKyyMHMX cHcTem. HORIBA STEC npezwaraeT aHa.11H3aTOpbI OCTaTOYHOTO rma (RGA) C cammm MaTIeHbKHM B MHpe ICBMpylIOJIbHbIM macc-cneKTpomeTpom.

Came Mai1eHbK0e a Knipe acnormeame cavretAbt macc-cnerrpowierpaa :

10- CamaB MajIeHbKa51 H .nericaa B mHpe

)0- HocTpoeHa Ha ileB3ITI4 Hapax xmapyrBaneil

MOACeT pa6oTaTb B yCJIOBH51X HH3ICOTO Baicyyma (BMCOKOTO AaaneHHH) 1,46 Ha (11 mTopp)

BbICOKa51 CKOpOCTb H3mepeHHH. CKOpOCTb cxaHHpoBaHHH: 0,6 cex/macc.

Igte Pa3pemeH1Le: 0,5 AMU. Hpejte.11 o6HappKeHHH: 1x10 -8 Ha

• 14C110J1b3y1M'CiI CbeMHbIe H Aerico 3aMeH5IeMbIe CeHCOpHbIe TOJIOBKH

)1.- He Tpe6yeT Aera3aiTHH

BO3MOACHOCTb coeAHHeHna C clmainlem CF35

40CTy1111bI paaaHimme rpacimmecicHe peACHMbI TOR aHami3a OCTaTOT4HOTO ram

ripaagan mameperaia

AnazH3aTop OCMT0.1HOTO ram mullogaeT B ce6a HOHHMA HCT0'1HI4K, macc-cHeicrpomeTp H H3MepHTeJIbHy10 qacm. OCTaTOTIHMIA

Ta3 HOHH3HpyeTC5I npu CTOJIKHOBeHI414 C pa3p5DKeHHbIMI4 Tepmo-aneKTpoHamH, HCITYCKaeMbIMH BbIcoKoTemllepaTypHoil HHTMO.

06pa3ylowHecH HpH 3TOM HOHbI yCKOpHIOTCA H co6HpaToTcH B macc-cnelopomeTpe. B macc-crlexTpomeTpe TIOCTORH1100 H

nepemenHoe HanpsDiceHHe noimeTcH Ha geTbIpe IIHJIHHAp1411eCKHX arieicTpoAa (KBaapynaaH), KOTOpMe pa3ite.unoT HOHbI HO macce. Pa3,7.1e.11eHHme 140HbI onpeile.amoTcH, Kai< 3.71eKTpHgecKHil TOK B =lame Coapaite.a. HOHHbIii TOK nponopuHoHa.aeH macce (HapuHa.abHomy LMBJ1eH1410) OCTaTOITHOTO ram.

flpIVIOZCHifil unmeant* An anaaita Froiennudi mamma HOlibi C pa3111P1M4M antowatuat taccaimerrpuiteemdl lam COOTHCICTIrOT H3ilpfiXeMt10, OMNI, npunexcantomy IC nanyynano

Hun tbokyouss flume

00011132114111H

r; I Hu. co6panume gam* 'Dames Hapymisalom &Ix moupwice-taik

Ksnrynas Lbw *spays 1\

Amaninarop MicroPoIeTM XapaKTepHCTHICH, KOTOpbIMH o6.naAaeT aHaAH3aTOp OCTaTO1111bIX Ta30B, o6ecHeimBaloTcH yHHKa./IbHbIM aHaAH3aT0p0M MicroPoleTM (MPA), COCTORIIIHM 143 ileB5ITH imaiwynaaell. KaLlecTso imailpynaaeti o6ecneimBaeTcH coHpemeHHoci TexHanorHeil o6pa6oTKH yilbTpa-HpeuH3Hoinnam 011THIleCKHM TpaBJIeHHeM F TexHanorHeil CTbIKOB cTemo/meTall.I. MicroPole - 3TO cambdi MaJIeHbKHi B MHpe allammaTop OCTaT0,1HOTO ra3a C noxoxeti HJIH Arline* tlyBCTBHTeJlbHOCTb10 Ho cpaBHeHHH C Tpa,141,114HOHHbIMH

H 6o.ribmHmH macc-cnexTpomeTpamH. CeHcopHmil 6.nox aHallH3aTopa yAce oTicam46poBaH Ho ott napiwa.abHoe ilaB.neHHe, H

1103BOJ11IeT 110J1rIHTb TIOJIHOe a6comoTHoe H napillimbHble 1aBJIeHH5I OCTaTOI1HbIX ra30B.

Cepen: CA-03 kai5eat. nepexvut Toupopstautut RS-485

In 0636 12 xi)

Pa6018 C ileCKRIMMUCII atiasnEraropamm MOH MeWV Bce CHUCklb ncnomay-forcs RS-485 Fact -6cm, crapr c nepzoro anwutsa.opa

PS-10 AC a,iarrrep

Ceram CA-02 Ka6em, nepeaaqn mbtopssaumt RS-232C (1,83/3-5/6

Cep= CA-06 Offleremwatrabens (1,813/4,5 at)

,_, CA-04-01 Ukakieatatuil Frakamtemms:

II

Bakyymuan kmmepa

Celicopu cepnn

MPAJSMPA Crterrponpeo6pnoaarena.

ceptlit SC

I Dp Haripsmeme 100-'40 B

nap

IZIR

InH

oe

HameHosatme %mem,

Airanaaon roaccoma tincen (AMU) Paapeuleme

Maxciimanbnoe pa6ogee ABB/Ieline

(no awry) MaHlsMalIbHOB onpeziexaemoe

napumaxmoe Anaemic MIIHI4MB.Tb110 onpeaeiniemax crenenb uarexanna (no He)

Marepnax 105TH ceucopa Maxamanbria pa6ovaa

rexineparypa

OT 2 uo 45 0,5 AMU 0,133 Ha 1 mTopp

OT 2 Too 45 1,5 AMU 1,466 Ha 11 NiTopp

OT 2 ao 65 0,9 AMU 0,933 Ha 7 iwTopp

OT 2 oo 65 0,8 AMU 0,666 Ha 5 NiTopp

OT 2 60 100 1 AMU

0,666 Ha 5 luTopp

OT 4 ao 300 OT 2 Ao 45 OT 2 as 45 Or 2 go OT 2 a() 65 1,5 AMU 0,5 AMU 1,5 AMU 0,9 AMU 0,8 AMU 0,133 Ha 0.133 Ha 1,466 Ha 0,933 Ha 0,666 Ha

1 Diropp 114Topp 11 riTopp 7 mTopp 5 xiTopp

Or 2 ao 100 OT 4 00 300 1 AMU 1,5 AMU

0,666 Ha 0,133 Ha 5 mTopp 1 xiTopp

2x10 9 11a.m3/c 2x10 8 arm.cc4 3/c

2x10 lia.ma/c

2x10-7 aTnuene/c

1,33x104 Ha (1%12)

2x10 5 Fla-43/c 2x10 -5 11a.m3/c 2x10-8 arxrcid 3/c 2x10-5 a-rm-cm3/c

Y20,/Ir (crawraprinasi) win tnicnni B0.14113M

2x10 Ila.NO/c

2x10' wrm.cmYc

2x10 9 lia443/c 2x 10 5 amvog/c

150°C (mamma:mm-1am remneparypa riporpena [cencopnax qacrb]: 350°C)

npocoeamnrremablii dmalleu

Trin C: CF35; Tern K: KF16

C6-11 SC6-18 SC6-14 S C6-11 C6-14 S SC6-07 SC6-18 S Moueab cneicrpo- npeo6pa3oaareml

Hirrep(belic Hporpammnoe o6ecnegeinie

RS232C/RS485 (cxopocrb o6mena: 9600/19200/38400) Win MPA (Microsoft Windows XP 2000, Me, NT 4.0, 95/98, 11, 3.11)

CxeMa KOMI7OHOBK14 (1-leCKOnbK0 anamiaa -ropoa 11C11011b3y1OT RS-485 Ansi CI351314)

Hpouece yTI4JIH3a141414 mamma T-II4CTKI4 M0HHT0p14111" upoilecc HaI1b1.11eHR5I

ROJIII0C MIA 4 BagaMO) 111°' (nriamq ilownim) . 242.(aers)

Tkomeanisocneomccia • HO sour *gam* (rem sown* C■OleseeNco)

Xapaicrepticrtim anamaaaTopoa OCTaTCP4HbIX raaoa (RGA)

Moaeab c roamemoil Icaproil (SMPA-) 5 1 1-2 45 11-2:45 7.,2 65 5-2/65 5-2/400 1-4/300

CencopHasi nomeab (MPA6-)*1 1-2 - - 7-2/65 5-2/65 5-2/100 1-4/300

*1 MarmaTopm MicroPole BERIYCKBIOTOT B myx MOATKINIKBIBUIX SMPA 14 MPA. Anannaarop SMPA moacer mcnoxbaonancx B axcrpemaxhinsix YCJI0B145IX, B TOM MHCJIB 11 B rumaidennbix npoueccax.

OcImaimanblibik npeAcTaBlirrenb KOMBH1111 HORIBA STEC B PcD ((101,10CliCTeMbl»

117105, Mown, Haropnblii np., 7 Ten.: +7-495-543-7360, 730-2778 cDaKc: +7-495-543-7361

E-mail: info@cryosystems.com.ru tInTepner: www.cryosystems.com.ru KPH

B Aviana3oHe 1...5 x 10 -12 — 100 fla*m3/ceK [He]

1 800 C Ma11-114THbIM OTKAOHeHHeM, FIAOTHOCTb MaFHHTHOF0 FIOTOKa 0.17 TA

ABOHHaSI CFIHpaAb, MaTerMaA cnHpaAH - HpHAHH, 110KpbITbIVI OKCHAOM TopHsi aBTOMaTHLIeCKaAROACTIZIOOKa KaAH6p0BKH, TemnepaTypHaR K0MFIeHCa0142

r-H6pHAHbiki BbICOKOBaKyyMHbIRHaCOC11130143BOAHTeAbHOCTb10 60 niceK nAaCTHHLIaTO-pOTOpHb10 (MSE-2000A) HAH mem6paHHLAO (MSE-2000A DRY) ABa BaKyyMMeTpa THIla 1111paHH Ha Ka>KAOPi AHHI4H OTKaLIKH

MaKCHMaAbH0e AaMeHHe 2000 Ha (neperomoLieHme Ha cpopBaKyymHbin Hacoc npm 1000 Ha) -ifin C0eAHHeHH51 - NW25KF

45 Kr

529 x 280 x 487 NAM

AC 220B, +-10%, 1 4, 501u, 0.6KBA

LuicppoBon RS-232C, HH-repcpekic np4H -repa

tlyBCTBPITeAbHOCTb

AHaA113aTOp

BaKyyMHall CHCTeMa OTKaLIKH

TeCTOBblril nopT

Bec

1.36apr1nible pawepm, AxWx B

Hanpsmetirte I1iffaH101

NH -rep:kik BUM:Ma

Fr: 'Olt .E1,1( KATE-Ab

SHIMADZU MSE-2000A • a

Access to your success

SHIMADZU

npeunnyinecrza: BbICOKaSI tlyBCTBIITeAbHOCTb H HII3K1O1 43OHOBblii ypoBeHb:

YHHKaAbFlb10 aHaAH3aTOp C MaFFIHTHbIM AelmeK-ropom (1800) onpeAensieT BbICOKkffl

ypOBeHb LlyBCTBI4TeAbHOCT14: 10 12 fla * M 3/Cet< [He];

C -Ta-HAIDHEAR CroOHOBbIn ypOBeHb AOCTHFaeTCA cpa3y >Ke nocne BKAIOLleH1151 B pe3yAbTare To4Hoci cenapaufrm Mc:men/A BOAN H BOA0p0Aa OT moneKyn renvm; 00141- 1,1HaAbHa51 3allaTeHTOBaHHa1 TeXH0A0F1451 1 -103BOASIeT 0TAeA51Tb TaK>Ke

TI3eXBaAeHTHble HOHbI a30Ta;

BO3M0>KHOCTb OTKaLIKI4 fa30B, calep>Kawmx meAKoAmcnepcHyto flblAb;

EthICTpOe BOCCTaH0BAeHl4e pa6OTOCII0C06HOCTH FlOCAe BO3H1,1KHOBeH1451 BbICOKOF0

C130HOBOr0 y130BH51 (B qaCTHOCTI4, 60AbLIOVI yTei-B(H), KoTopoe AOCT141aeTC5 3a cLieT 013HrHHaAbHOPI CXeMbI BKAIOLIeHfrisi cneumanbHonp rH6pHAHonn HaCOCa C npomeAy-TOLINbIM BBOAOM FlOTOKa me>KAy Typ6omoAeKyA5IpHon H moneKyn51pHo0 cryneHsyym.

CeHcopHaB naHenb ynpaBneHHH: fi Ao_Hoe yripaBneHHe C 110MOLUb10 Ha)KaTHSI 3D KAaBHW Ha CeHCOPHOO

naHeAH pa3mepom 12ctvi x 9cm; H BCTIDOeHHOVI C19)/HKUHH "Launcher" 1103BOASIeT HenpepuBHo B

AHHaMHLIeCKOM pe>Kmme YCTaHaBAHBaTb H H3MeHATb napameTpbi, TaKHe KaK:

BK/uoveHme B pa6o-ry, LlyBCTBHTeAbHOCTb, KaA146p0I3Ka 14 TeCTOBa51 npoBepKa. Bce 3TI4 CID)/HKU1414 OCyLlleCTBA5110TC9 aBTOMaTHLIeCKH 6e3 riacTinsi onepaTopa. (DyHKLIHA moHH -ropoHr-a B pe>Kfrime peanbHoro BpemeHm oTo6pawaeT Ha rpacl)Hi-iecKom Amcnnee BeAHLB4Hy Tem, a TaioKe HHAHKaLIHIO Kpfrn-epHq npoBepKH HaTeKaHHSI

MOAeAb MSE-2000A DRY C 110AHOCTb10 6e3Anacmffloii cHaremok OTKaLIKII:

Ansi npHmeHeHmi B LIVICTIDIX KOMHaTaX A106010 KAaCCa

5A0K AlICTaHUHOHH010 yripaBnewisi H 3ByKOBOe onoBeinewie: 1103B0A5110T onepaTopy onpeAeng-rb BeAHLimHy yTet-IKH Ha AHCTaHLIHH 10M

(MaKCI4MaAbHaSI AAHHa Ka6ensi 6A0Ka AHCTaHUH0HH010 ynpaBnem451) H 60Aee OT TetiemcKa-reAB.

XapalcrepHc-nem TeHericKaTensi MSE-2000A

Onumm:

Blyn-npoöo3a6opHuK, MOAeAb

NST-2000F pacxot. 0.5-1 cm3/ceK

Bpemq OTKAHKa 1 ceK LlyBCTBVITeAbHOCTb 1 X 10 9 na tvt3 keK [He], comp)KaHme reAVIA B BO3AyXe Ha ypoBHe 5 ppm CHH>KaeT clyBCTBHTeAbHOCTb AO 10 7 Fla m 3/ceK [He] Bec 1 KI

AAHHa 4-4.5 ts4

Flpiimepm 11010Ab30BaH11511 TeLiericKarensi MSE-2000A AAA ClöHaprKeH1151

HerepmeTwAHOCTH (yTel-HcH)

Te9eucKaTem, Shimadzu MO)KeT 6bITb HCH0Ab3013aH Ha pa3M14HbIX 3Tallax npoueeeuust HCHIATaHHA o6beKTa Ha repmeTuLmocTb:

0 Ha npeABapm -reAbHom 3 -rane, tamelowem LieAb10 OLleHI4Tb o6turo 1epMeTH4HOCTb o6betcra;

0 Ha yrane noiacKa flp0BOASILlleMCSI npi4 yCTaHOBAeH1114 CPaKTa Herepme -rwaHocTki;

Ha 3Tane 011eHK14 crenema 1epMeTWAHOCTI4 06beKTa TexHwnecKiann -rpe6oBaHmAnn.

Cn0006111

1. Cnoco6 o6Ayaa (AAR o6beAnoH He 6o/we 5 AHTpoH)

Cnoco6 o6AyBa npeAHa3HaL1eut AAR 11014CKa H AOKaA143aLIHH mecT Teqe

BFir-peHiamin o6bem 1401b1TyeM010 o6beKTa BaKyymiapyeTc51, Flpo6Hbiki Ta3 (remafi)

pacnbIAReTcsi Ha ero BHeWH1010 nosepxHoc -rb. B cAraae HerepmeTwaHocm, reman

flp0H14KaeT BO BHyTpeHHI010 110AOCTb o6beK-ra. 3T0T TIOTOK 1eA1451 permc -rpia-

pyeTcsi -retietacKarenem. 3C14eKT14 BHOCTb mcnblTaHHR npia TaKOM cnoco6e

3a1314CHT OT KOHLIeHTpaL11414 1eA149 B Bo3Ayxe, CKOpOCTI4 H vets/tem,' o6AyBa.

2. Cnoco6 Hexnos

Mcnbn-yennoe ta3Aemae 110AHOCTb10 HAM 4aCTI4LIHO OXBaTbIBaeTCSI nAaCT14KOBbIM

4eXAOM. OTKatillBaeTCA BaKyyMHOO ciacTennoVi revelacKaTema. flpo6HbI ra3

remain) 1311pbICKHBaeTC51 BHyTpb Llexna. B cnytiae HerepmemlaHocTia, reiwci

npomaKae-r BO BHyTpeHH1010 110AOCTb 143AeA1451. 3TOT nOTOK remnsi perwc -rpmpyercsi

-retnetacKarenem. Cnoco6 tnexAoB nplanneHgeTcg np14 OTCyTCTBI4 14 B 113AeA14

HeMeTaAAHLIeCKI4X (Hanpktmep, 13141-0HOBbIX) BaKyyMHbIX ynAoTHemail, Liepe3

KOTOpble npvt AOATOBpeMeHHOM KOHTaKTe MO)KeT 11p0H14KHyTb reman.

3. Cnoco6 myna (wyn flOCTaBASIeTCSI 0TAeAbH0)

Cnoco6 myna 14010Ab3yeTC5I AAA 06Hapy)KeHl451 MeCT -retaein B 1a30HaI1OAHeHHbIX

06beKTax, (KOTAa BaKyympapoBaHme BHy -rpemeci 110AOCTI4 143AeA1451 HeB03M0)KH0).

143AeAlle 3a110AHSIeTC5I npo6Fibito 1.330M (remaem) HAM ra30M, coAep)Katumm

npo6Hbin ra3. Herepme -naLmoc-rb onpeAengeTcg c 110MOLUE40 wyna C Hapy>KHoil

CT0p0Hb1 H3AeAH51. Wyn nepemewaior BA0Ab 110BepXHOCTH 143AeA1451, CO6A10A.351

MI4HI4MaAbH0e paCCTO5IHI4e Me)KAy BCaC6113a1011114M COFIAOM H nOBepXHOCTb10. 11p14

npm6maxem4ta K MeCTy Tem 110TOK ra3a, Bcacbmaembin wynom, o6oraulaerai

npo6Hum Ta30M. YBeAHLIeHHe COAep)KaH1451 (noToKa) renkm penicTpupyeTcR

TeLiencKaTenem.

4. MeToA o6AyBa cTpyei npo6Horo ra3a (TeCTOBaS1 Kamepa 1,1

yCTaHOBKa o6AyBa IlOCTaBASIFOTCSI OTAeAbH0)

3TOT MeT0A 14a10Ab3yeTCA AAR npoBepKia 1epMeTI4LIHOCTI4 no BO3AyXy KpI4CTaAA14-

Liecianx 143/wya-renein HAM Apyrtax repmerw-nabix 143AeA14171. 143AeAl4e (A) nometuaercsi

B CTHOBK ii o6AyBae-rat TeAlleM 110A AaBAeHl4eM B -reqemie onpeAeAeHHoro

Bpennem. B cAr-iae Herepme -nat-mocm reman 11p0H14KHeT BHylpb 143AeA1451 (HP).

3a-rem iame/we nometuaeTco BHyTpb TeCTOBOV1 repmerwaHoin Kamepbl, KOTOpaR

MOHTHpyeTC51 Ha MOM TetaemcKa-remi. Kamepa BaKyymmiapyeTcsi. IeAMci , CK01114B-

WHIACSI B HerepmenagHbix nonocisix 143AeA1451, periacipiapyeTcsi -reLiekicKaTenenn.

5. lipcmepka repAneTHHHocTH 6CIAMIDIX oGbennos (BaKyyAmblii MUM

60Ab111011 f1130113BOAHTeAbHOCTII nocTaBAgeTcH OTAeAbH0)

.AA51 npoBepith Kamep 60AbW01-0 o6benna (6onee 5 AHTp0B) Heo6xomanno

14C110Ab30BaTb A0n0AHMTeAbHb1171 BaKyyMHb1c1 HaCOC 6o.weci 11p0H3BOAHTeAbHOCT14.

3TOT HaCOC OTKaLlaeT Kamepy C Bb1COKOA CKOpOCTb10. TeLlekICKaTeAb flOAKAIO9aeTC51

napaAAeAbH0 C 3THM HaCOCOM 14 peiNCTplipyer 110TOK TeA1451 B CAyLlae

He1epmeTWIHOCTI4.

ilapankerpm 3aKa3a -reviewKaTensi MSE-2000A

6a3oBasi clicrema:

Honnep B KaTaAOre, P/N a-MU'Bile

flpumetiaffile

261-61472-05

TeHemcKaTeAb MSE-2000A, AC 220 TeHemcKaTeAb C nAaCTHFILlaTO-OOTOpHb1M

cpopBaKyymHbIM HaCOCOM, AC 220B/1c13/50E- u

261-61502-05

TeLieHcKaTeAb MSE-2000A DRY, AC 220 TeLleHCKaTeAb C mem6paHHbiNt cpopBaKyymHbmt

Hacocom, AC 220B/1113/50Fu

Onumm:

Honnep B Karanore, P/N

261-61483-02

Onlicatme

Ulyn-npo6o3a6opHfrIK, NST-2000V

ilpunneliamie

BpeMSI OTKAI4Ka 3 ceK

261-61483-05 Wyn-npo6o3a6opHHK, NST-2000F BperoB OTKAHKa 1 ceK

262-64986-01 BAOK AkICTaHLIHOHHOF0 ynpaBAeHHB AAVIHa Ka6eAB 81■4

262-64986-02 EAOK AfrICTaHUHOHHOF0 yrlpaBAeHk151 AAHHa Ka6eA5l 10m

261-67230-01 PacnblAkITeAb 1e/m*1

262-69010-21 1--1porpammHoe o6ecneyeHoe AMI BbIBOAa

AaHHbIX Ha FlK

Ha aHFAHHCKOM A3b1Ke

261-61487 TpaHcnopTHasi Tene>KKa

PyKOBOACTBO FIO 3KcnAyaTauvn1 Ha pyccKom 513b1Ke.

FEAHEBblri TELIEMCKATEA,

SHIMADZU MSE-4200 AAR npoi13BOACTBa 3AeKTp0H1-1b1X yCTpOACTB

CaMbla öbICTpbIüTetwiicKarenb B npommumetmocn4 !

Ha CeFOAH5IWHI40 AeHb, reAHeBbiPi TeveHcKaTeAb MSE-4200 o6AaAae -r CaMbIM MaAbIM BpemeHem 11014CKa HerepmeTHHHocTH

cpeAH n0A061-10F0 KAaCCa yc-rponcTB.

flpellAnytueci -Ba:

_arvioe 6bIc-rpoe yc-rpoOcTBo C Kamepoi-,1300 Ky6.ctvt. AM1 143MepeH1451BeAHLB4Hbi

HerepmeTHHHocTH Ha CeFOAHAWHHA AeHb;

R -peM5ITeCTHp0BaHHFICOCTaBMIeT 6 ceKyHA, HaTeKaHHe AASIonpeAeneHHB

HerepmeTHHHOCTH 2.5x10-10 Pa*m3/s;

-bic-rpoe BOCCTaHOBAeHkle H CTa6k1AbHOCT6 CrIOHOBOF0 ypow-m;

R -03MOWHOCFb BbICOK0-LlyBCTBH -FeAbH0F0 TecTHpoBaHHB;

o ripOCTOTa. 3KalAyaTaL11,114

06/tacm nprinneHeHtim:

1/13F0T0BAeHl1e KBapUeBbIX reHepaTopoB;

MHKpopo6oTorexHIlKa;

TecmpoBaHme FlAB-OiAbTpoB;

flp0H3BOACTBO 1,13AeAfrIki 3AeKTOOHHOH TeXHI/IKH.

XapaKTepliCTIIKII Te4eucKaTensi MSE-4200

LlyBCTB1freAbHOCTb B Amana3oHe 10 -12 — 100 fla*m 3 /ceK [He]

HaTeKauffie AASI onpeeenel-pisi HerepmerwiHocrii

2.5 x 10 -10 Fla*N1 3/ceK [He]

Bpemsi TecTiaposamisi 6 ceK (C npoAyBKori cyxkim a3OTOM)

AHaA113aTop 1800 C MaIHHTHb1M OTKAOHeHHOM, FIAOTHOCTb MaTHHTHOM HOTOKa 0.17 TA ABOHHaR crwipanb, maTeppan crimpanvi - HFIAHFI, 110Kpb1Tb10 OKCHAOM Topfriq aBTOMaTHtleCKaSI noAcTpoOKa KaAH6p0BKH, TemneparypHaFi KomneFicaukiq

BaKyymHasi CHCTeMa OTKaNKIN CileuHaAbHblci Typ6omoneKyiwpFibin HaCOC

ABa 11AaCTHHHaTO-OOTOOHblx HaCOCa

ABa BaKyymmeTpa THIla IlfripaHH Ha Ka>KACM AkIHHH OTKaLIKH

TecToKaR Kamepa o6bem 300 cm 3

pa6oLivin KoHTenHep

Bec 240 Kr

HaripspKetnie 1111TaMISI AC 380B +-10%, 3113, 50/601u

iilliTepckrIC BblX0Aa ukicppoBon RS-232C, 14H -repcpenc npi4Frrepa

Fa6apuTuble pa3nnepm TegeucKarensi MSE-4200

Clout< FapaHTHH Ha Te-ieocKaTeAH Shimadzu COCTaBAReT 12 mecqueB CTb1 FIOCTaBKH 3aKa3 , 11Ky.

000 «Kpuocucrennbi» o6ecneumaaer cep -rudnumposammul peMOHT II o6cnymoisauue

regeuckarenek Shimadzu B P0 u CTpatiax CHF.

oKimocucTeNtb - 3KCKAIO3HBHbIll APICTpH6MOTOP

Typ6omoneKruipubix HaCOCOB H TegieticKareneii Shimadzu B

117105, r. MOCKBa, HarOpHblii rip., A. 7

Ten. +7-495-543-7360, 730-2778 (DaKc. +7-495-543-7361

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