© Fraunhofer IMM

© Fraunhofer IMM

History

1990 - Founded as a non-profit GmbH by the federal state Rhineland-Palatinate

2015 – Start of interim phase for transfer to the Fraunhofer organzation, affiliated to Fraunhofer ICT, Pfinztal

Since Jan 1st, 2018 - Fraunhofer Institute for Microengineering and Microsystems

© Fraunhofer IMM

Key Research Areas

Energy & Chemical Technology

Analysis Systems & Sensors

© Fraunhofer IMM

GENERAL RESEARCH AREAS

Analysis systems and sensors

System engineering

Development and realization of custom sensors and analyticalsystems for chemical, physical, biochemical and biomedicalapplications

System integration

Implementation of analysis systems in automated processes

© Fraunhofer IMM

Analysis Systems & SensorsResources, Capabilities, Technologies

Interdisciplinary teambiologists, chemists, physicists, and engineers (polymers and plastics processing, microsystems, silicon technology, mechanics, design, electronics, software, …)

Precision manufacturingultra precision milling, electrical discharge machining, laser machining, injection molding, hybrid assembly and joining technologies

Clean roomSi-based sensors and actuators, thin film technology

Microfluidics / „Lab on a Chip“lab protocol microfluidic cartridge

System integrationsubsystems, instruments, automation

© Fraunhofer IMM

Customized (Micro) Systems for Analytics and DiagnosticsInstrumentation + Consumable = System

ConceptRequirements//Device Architecture//User Interface// CAD

MechatronicsValves//Pumps//Motors & Actuators//Electronics//Sensors//Pneumatics

SoftwareDevice Control//User Interfaces// Communication// Data Processing

Optics/C4DFluid Control

MicrofluidicsFluidic Circuitry//Membranes//Valves//Channels//Mixers//Chambers//Pumps

AssayDevelopment//Adaption

PrototypingInjection Moulding//Bonding//LaserProcessing//Freeze Drying//Component Integration// Micromilling

Reagent StorageLiquid//Freeze-dried

SensorsProcess Control//Diagnostics// Analytics

SimulationFluidic//Biological//Thermal

ConceptSystem Architecture// FluidicProtocol// Physical, Chemical & Biological Methods//Sample Preparation

PrototypeReady to use// FullyAutomated//Compatible withManufacturing Requirements

ValidationAt Point of Use//Real Samples

© Fraunhofer IMM

Competences in system development

SoftwareControl / firmwareAnalytical algorithmsGUICalibrationSelf testing

ConstructionOpticsActorsValve technologyMicro pumpsPneumaticsInterfaces and connectionsLight barriersReagent handlingMixing technology

ElektronicsMicro-controllersMotors / pumpsStepping motorsOptical light sourcesFibers and detectorsPressure sensorsChemical sensorsFluidic sensorsHeaters / coolers

DisposablesRapid prototypingInjection mouldingHot embossingAssembly & interconnectionLithographyLaser machining

BiologyAssay modificationFeasibilityReagentsStorage / freeze-drying

ChemistrySurface modificationBinding chemistryAnalytical methods

SimulationNumerical simulation forfunctional optimization ofcomponents and systems

© Fraunhofer IMM

IMM – IN-HOUSE TECHNOLOGY BACKBONE

Precision machining 2 & 3D milling Bulk & Wire EDM Ultra precision turning & milling Polymer processing (Inj. molding, embossing, ..)

1 mm Laser micro-machining

Excimer laser ablation / laser milling Welding (polymers, metals) Cutting (polymers, metals, glasses) fs & ps laser micro machining Holographic patterning

Silicon & thin-film technology Deep wet & dry structuring of Silicon Stress optimized film deposition Thick resists Micro electroforming

© Fraunhofer IMM

Technical possibilities at IMM

Simulation

Biology Electronics

Chemistry

Workshop

Laser

EDM

Cleanroom

CAD

Consulting

System Engineering

Moulding

Software

Assembly &Packaging

© Fraunhofer IMM

Product Areas and Applications

Environmental MonitoringImmission//Emission Control// Air// Water//TVOC//Pathogens

SpaceIon Analysis // Optical Modules

WaterpH//Legionella//Ions

Liquid BiopsyExosomes//CTC//cfDNA// NGS

BioanalyticsProteins//Nucleic Acids// Cells//Sample Preparation// Glucose

BiotechnologyTemperature//Biomass/pH// Optical Density

SecurityHazarduous Gases//Pathogenic// Microorganism//Toxins

Lab AutomationLiquid Handling//TemperatureControl// Sample Preparation

Sensor SystemsHelium//MEMS//Bolometer// Probes & Medical Sensors //Gas Sensor Platform

Oil & LubricantsAsphaltenes//TAN//TBN// OilQuality// Color Number

Process Control & MonitoringChemical//Biological/ Optical//Microtitration

FoodToxins//Pathogenes

© Fraunhofer IMM

Enabling Technologies

Precision Processing

CNC-Milling Techniques

Spark-Erosion

Ultra-Precision Processing

UP turning & UP milling

Injection Moulding

Clean Room Technology

Deep lithography, Photolithography, Etching

© Fraunhofer IMM

Enabling Technologies

Laser Processing & Micromachining

Cutting & Drilling, Laser Milling,Laser Engraving

Surface Modifikation

Bonding

Microfluidic Tools

Valves, Filter, Electrodes

Fluid Connectors, Inlets

© Fraunhofer IMM

Post processing

Surface Modification

Plasma Treatment /Deposition

Coating

Immobilization of biomolecules (spotting)

Bonding

Solvent Bonding

Laser Welding

Ultrasonic Bonding

Glueing/Lamination

© Fraunhofer IMM

Simplex: Cost effective nucleic acids based point-of-need testing

Flexible platform technology

Semidry and liquid samples

High ease of use Designed for non-trained operators

Cost effective production

Broad field of application: personalized medicine civil safety environmental and veterinary testing pathogen or microbe detection in

food, cosmetics or industrial raw materials

© Fraunhofer IMM

Innovation for Food SafetyFully Automated System for Mycotoxin Detection

Disposable microfluidic chip

Reagent storage on chip

Portable device for point-of use analysis

Extraction module for direct processing of raw, solid material (e.g., corn, seed, pellets)

Optical immunoassay based technique (quantitative ELISA test, e.g., Alfatoxin B1)

Dynamic sensitivity: 2nM - 50nM

On-chip Liquid Storage

Optical Detection

MicropumpValves

Extractor

© Fraunhofer IMM

Portable micro-analysis-system for chemical analytics

Low reagent consumption (1ml/hr)

Iodometry, Redox-titration, ISE-analytics

Process control in pharmacy, food- and beverage-production, galvano-technology

Online titration system for quantitative determination ofthe pH-value

© Fraunhofer IMM

Legionella counting bacteria detection Circulating Tumour Cells particle sizingcomplex liquids or media(milk)

Modules for flow-cytometry

Compatible with conventional coloration methods

Integrated sample preparation

Cost-efficient and robust optical solutions

Low cost consumables

No calibration or adjustment required

Optimal for laboratory automation and on-site detection

© Fraunhofer IMM

Innovation for Human DiagnosticsCTCelect – Automated Single Cell Isolation from Blood

Detect single tumor cells in a 7.5 ml blood sample

Count and collect the CTCs in a microtiter-plate

enrich label detect isolate

NGS

IMACS ABs & QDs μF FACSSingle CellDispensing

Sample

CTCelect Instrument IMACS results

© Fraunhofer IMM

Automatic oil color number determination

Partner: 0 1 2 3 4 5 6 7 80,0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

0,9

1,0

Farb

ante

il

Farbzahl ISO 2049

Farbwertanteil Rot Farbwertanteil Grün Farbwertanteil Blau

ColorCheck:

• Measurement in VIS by3-colour LED (spectrometer-less!)

• Acquisition time: <20s• Accuracy: +/- 0,5• Colour number after DIN ISO 2049• Cost efficient

Manual determinationof oil color numberinaccurate and irreproducible

© Fraunhofer IMM

Lubrication oil quality omline-monitoring with non-dispersive MIR spectroscopy

0 5 10 15 200,00

0,05

0,10

0,15

0,20

0,25

0,30

Ab(T

BN) [

o.E

.]

TBN Konzentration [mgKOH/g]

Ab(TBN) Fit

Modell MnMolecular

Gleichungy = A*( 1 - exp(-k*(x-xc)) )

Chi-Quadr Reduziert

8,81761E-6

Kor. R-Quadrat 0,99926Wert Standardfehler

A_TBN-A_RefA 0,96963 0,22844xc 0,07212 0,17188k 0,01671 0,00463

0 1000 2000 3000 4000 50000,0

0,1

0,2

0,3

0,4

0,5

Ab(

H2O

)

Wasserkonzentration [ppm]

Ab(H2O) Fit

Modell MnMolecular

Gleichungy = A*( 1 - exp(-k*(x-xc)) )

Chi-Quadr Reduziert

4,10486E-6

Kor. R-Quadrat 0,99987Wert Standardfehler

A_H2O-A_Ref A 0,56656 0,00728A_H2O-A_Ref xc 9,69899 8,04557A_H2O-A_Ref k 3,29973E-4 8,61952E-6

• Measuring duration: <10s • Water conetent: 0-5000 +/-100 ppm• TBN: 0-20 +/-1 mgKOH/g• Oxidation: 0-1 +/-0.05 A/cm• Applicable pressure: ~2bar• Optical transmission cell with band pass filters

Flow-through cell withMEMS thermal emitter

Sensor housing withdisplay

© Fraunhofer IMM

DSP Online-Monitoring

Specification:

c(H2O2)=1-4% + c(H2SO4)=2-8%

c/c=2%

DSP Dilute Sulfuric Peroxide(cleaning agent in semiconductor industry)

UV-VIS

NIR

Dispersionless measurement (LED-based)

© Fraunhofer IMM

Cost-efficient on-site monitoring of nanoparticle contents

Laser Light Scattering Analysis to test the presenceof nanoparticle fractions in aqueous solutions:

High sensitivity (LOD: 2-3 mg/L for 29 nm SiO2 colloid)

Determination of particle diameter (5-100 nm) and concentration

Low manufacturing costs

Low personnel costs

Batch or continuous operation (GLP conditions)

Fully automated measurement and data analysis

Small and robust device

© Fraunhofer IMM

MEMS-Sensor: Vibrating Tube for Density Measurement

beam length: 10 mm

cross section beam: 850x500 μm²

cross section channel: 450x300 μm²

sample volume: ~1.5 μl

Confidence interval is better than0.0003 (95 % CI)

Results are as good as withstandard lab equipment!

© Fraunhofer IMM

Micro bridges

Material: SiNx

Thickness: 1 μm

Width: 20 - 120 μm

Length: 400 - 2000 μm

Bi-directional

Independent determination of

Velocity

Thermal conductivity

Thermal capacity

Silicon Micromachined Mass Flow Sensor

b

v

0 10 20 30 40 50 60

1

2

3

4

5

0 10 20 30 40 50 60

1

2

3

4

5

Working point 4,00V @ 20sccm Working point 4,00V @ 40sccm

Vol

tage

dro

p / V

N2 Flow / sccm

0 10 20 30 40 50 60 7 0

0

20

40

60

80

100

120

dT at 1 bar dT at 10 bar dT at 20 bar

Tem

per

atu

re d

iffer

ence

/ K

Gas Flow / sccm

response curves

channel pressure

© Fraunhofer IMM

Bolometer-Detectors for ITER

Essential diagnostic tool for control of fusion reactors Determination of total photon power and plasma

density distribution Special requirements to ITER bolometers:

Sensitivity of IR – X-ray (21,5 keV) High temperature stability up to 450 °C High radiation hardness for and n

Cooperation with EU-project „Fusion for Energy“ (f4e) and MP-IPP, Garching

Actual IMM detectors already successfully implemented in 5 international fusion reactors: NSTX-U (Princeton, USA), MAST (Culham, UK), EAST (Hefei, China), ASDEX-U (Garching), W7-X (Greifswald)

© Fraunhofer IMM

Portable decentralized gas detection unit

During episodes caused by gases, usually the monitoring of the gas distribution is essential for successful evacuation procedures!

Monitoring of gas concentration, air pressure and humidity, wind speed, temperature

Battery operation Operating time of more than 24h Data akquisition every second and

automatic data storage

Networked, portable sensor system for detection ofgases and their distribution