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INTEGRAM INTEGRAM plus plus Integrated MNT Platforms and Services Europractice Service Project providing Development Platforms for Integrated Micro-Nano Technologies and Products Carmen Moldovan, Bogdan Firtat IMT-Bucharest 1 st MEMSCON Event 07/10/10, Bucharest IMT Bucharest

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Page 1: 09 CARMEN MOLDOVAN

INTEGRAMINTEGRAMplusplus

Integrated MNT Platforms and Services

Europractice Service Project providing Development Platforms for Integrated Micro-Nano Technologies and Products

Carmen Moldovan, Bogdan Firtat

IMT-Bucharest

1st MEMSCON Event07/10/10, Bucharest IMT Bucharest

Page 2: 09 CARMEN MOLDOVAN

Carmen Moldovan – Head of Laboratory for Environmental and Biomedical Applications –15 years of experience in MEMS technologies

Associate professor Coordinator and partners of more of 25 national projects and 10

EU projects Former NEXUS Steering Committee member ISTAG group member within DG - INFSO, EC

Bogdan Firtat – Scientific Researcher, 10 years experience in MEMS technologies: design, simulation and modelling for mechanical, chemical and biological microsensors and FEM microfluidic modelling.

Laboratory of Microsystems for Environmental and Biomedical Applications

Page 3: 09 CARMEN MOLDOVAN

Carmen Moldovan, IMT Bucharest

INTEGRAMplus - FP6 Integrated Project

Europractice Service Project providing Development Platforms for Integrated Micro-Nano Technologies and Products

Page 4: 09 CARMEN MOLDOVAN

Aim: Highly integrated microsystems combining smart Si functionality with polymer platforms in a multi-domain environment

Address and stimulate future market needs via higher levels of integration in stable, manufacturable MNT processes enabling nano via micro

Emerging markets: biomedical & healthcare; pollution & security; comms (RF & optical) Multi-domain integration: bio-optical-fluidics, MEMS and/or electronics; mixed process technologies

(silicon-polymer) Stimulate take up of smart (integrated) MNT products Reduce barriers to MNT access

training and standardisation provide development platforms and standard modules

Provide low cost MNT prototyping services enable virtual manufacturing based on Design for Manufacture principles Silicon MEMS and polymer prototyping

Provide seamless service across the MNT supply chain from concept to production 10 partners from 7 countries + extended supply chain network

INTEGRAMplus - Integrated MNT Platforms and Services

Page 5: 09 CARMEN MOLDOVAN

PARTNERS

QinetiQ Ltd., Malvern, UK

CSEM, Alpnach, Switzerland

Epigem Ltd., Redcar, UK

Institut für Mikrotechnik, Mainz, Germany

Silex, Sweden Yole Dévelopment, Lyon, France

Coventor sarl, Paris, France

Lancaster University, UK

National Institute for R&D in Microtechnologies, Bucharest, Romania

Institute of Electron Technologies, Warsaw, Poland

Page 6: 09 CARMEN MOLDOVAN

INTEGRAMplus Organisation

QinetiQ(silicon)

Coventor(Multi-domain software & Design for Manufacture)

Silex Microsystems(Silicon / glass manufacture)

VOLUME MANUFACTURE

U. Lanc.(PATENT)

DESIGN SERVICES, PROTOTYPING & LOW VOLUME MANUFACTURE

CSEM (polymer, silicon)

CAD TOOLS & VIRTUAL MANUFACTURE

ITE(Electronics &

microfluidic design)

IMM(polymer)

EPIGEM (polymer manufacture)

IMT(Biointegration &

microfluidic design)

CUSTOMER SUPPORT

Yole Developpement(Strategic Marketing)

X-Fab (CMOS manufacture)

C-MAC(volume assembly)

DELTA (packaging)

MCE (packaging)

Hymite (packaging)

Micronit(glass manufacture)

AMIS (CMOS manufacture)

AML (bonding)

Expert Consultants(PATENT-DfMM

members)

SUPPLY CHAIN PARTNERS

Page 7: 09 CARMEN MOLDOVAN

The INTEGRAMplus Partners’ Technology Portfolio

Design & simulation

PrototypingLow and high

volume productionMacrosystem

integration

DEVICES AND COMPONENTS

CAPABILITIES FOR WHOLE PRODUCT LIFE CYCLE

Silicon

FLEXIBLE INTEGRATION

Testing

Micromachining

Bio-Integration Polymer & electrodesCombined integrationPolymer & Silicon

MillingMoulding

Packaging

CMOS integration

MicrofluidicsPhysical sensors

Power sources

ElectronicsMicro-Optics

Bio-devices Memory DSP/µC Comms

Metal deposition

Polymer BondingSurface

FunctionalisationGlass

Embossing

MATERIALS AND FABRICATION TECHNIQUES

European partners in micro and nanotechnologies with complementary expertise in: Silicon, polymer, glass, hybrid solutions Multi-domains (optics, fluidics, MEMS, bio, chemical, electronics) Multi-level integration (material, electronics, functions and system) Development and production along the supply chain

Page 8: 09 CARMEN MOLDOVAN

INTEGRAMplus offer

Consultancy

DesignServices

FabricationServices

Productisation

PrototypingServices

Design &Simulation

Devices &Components

FunctionalModules

Prototypes

Products / Production

Customers

Customers

Customers

Customers

Courtesy Epigem

Courtesy IMM

Courtesy Epigem

Processing

Page 9: 09 CARMEN MOLDOVAN

Service Offerings

Currently 3 Prototyping Platforms:

1. QinetiQ Silicon MEMS Prototyping Service

2. Epigem Modular Microfluidic Prototyping Service

3. IMM Rapid Prototyping Service for Lab-on-a-chip

Page 10: 09 CARMEN MOLDOVAN

Fabrication of chips with electrodes

Fabrication of polymer parts with electrical leads (injection molding, lithography, …

Fabrication of microstructured gaskets (casting, laser cutting, punching, …)

Fabrication of polymer parts (micromachining, casting, embossing, injection molding, …)

Electric contacts between chip and leads (flip-chip, solder bumps, wire bonding, …)

Hybrid bonding technologies (surface activation, thermal bonding, …)

Hollow waveguides (fabrication, sealing, integration)

Adhesive bonding technologies (glues, double sided sticky tapes, …)

Surface functionalization (biochemistry, nanopatterning, …)

Connections to macro world (fluid ports & reservoirs, electrical contacts, light contacts)

Fabrication of silicon/SOI parts (DRIE, anisotropic wet etch, chemical vapour etch, …

(Si) chip fabrication

Microchannel fabrication

Optical components

Channel sealing

Microfluidic interfacing

Optical interfacing

Electrical interfacing

Integration of silicon into polymer

Surface functionalization

Competencies needed

Issues being addressed

Substrate Chip

Fluid

Underfill

Multi-domain Integration - Technological issues

Page 11: 09 CARMEN MOLDOVAN

Si chip scale package with polymer microfluidic chip and

electrical connections

Epigem microfluidics chip with integrated electrodes and pcb headers mounted

Innovative silicon-polymer integration technology for chips onto substrates with fluid access opening using flip-chip bonding

Hollow waveguide Advanced optical circuit

modules Combined fluidic and

optical modules

INTEGRAMplus multi-domain multi-technology platforms

Page 12: 09 CARMEN MOLDOVAN

INTEGRAMplus Summary

Provides industry with a world-leading facility to stimulate take-up and accelerate time-to-market of smart mixed-technology components and solutions. A consortium offering tried and tested micro and nano technology expertise

from10 partners operating across 7 European countries. A design and prototyping service with route to volume manufacture for highly

integrated microsystems. High degree of flexibility to address the need for increased complexity in

microsystems without sacrificing the requirement for manufacturable processes.

A flexible customer interactive approach ensures access to INTEGRAMplus at any stage in the product lifecycle.

Web-sites: www.integramplus.com www.QinetiQ.com/mems

Email: [email protected]

Tel: +44(0)1684896262

Page 13: 09 CARMEN MOLDOVAN

Mission and main activities

The Laboratory of Microsystems for Biomedical Applications is doing research, focused on development of microsensors and sensors integration such as: - chemosensors (O2, pH, NO2, NOx, CO, CO2, humidity etc.); - biosensors (enzymatic, immunosensors, biomicrosensors array); - nanowire based ISFET - microprobes for recording of electrical activity of cells and tissues, - microfluidic platforms, - signal processing and data acquisition for microsensors array, technologies for sensor integration, data processing, transmission and acquisition.

The Lab is running services for industry in design, simulation, technology, testing and data acquisition, processing and transmission and education in the field of mixed technologies.

The Laboratory was involved in several FP6 projects in the area of technologies for sensors integration, microfluidics and software and hardware development for data acquisition. IMT’s tasks in the project are: simulation and modelling of fluidics and temperature distribution inside the microsystem channels, and computational modelling of the integrated multi-sensing system. Also IMT will be developing the auxiliary sensors for monitoring the cell culture’s environment and will work on microfluidic microsystem integration.

Resources: The Laboratory has 11 permanent researchers and 2 part time co-workers from a total of 170 employees (researchers and administration).

Page 14: 09 CARMEN MOLDOVAN

Sensors technology

-2

0

2

4

6

8

10

12

14

16

18

0 5 10 15 20 25

Time [min]

C [

nF

], G

[uS

]

C[nF]

G[uS]

Silicon biochip in the microfluidic module, with pumps and reservoir

Gold electrodes pesticide sensor

Conductance and capacitance:A – substrate injection, B – inhibitor injection

Page 15: 09 CARMEN MOLDOVAN

Fluid

Nanowire chip

Enlarged view of the reaction area

LabView interface

NW ISFET sensor

Computer interface

Reaction area

* Cl. Moldovan, A. Dinescu, E. Manea, R. Iosub, C. Brasoveanu, B. Firtat, C. Moldovan, M. Ion, TECHNOLOGY OF A NANOWIRE BIOFET DEVICE FOR BIOMOLECULES DETECTION , CAS 2009 Proceedings; ISBN: 978-1-4244-4413-7, Vol.2, pag.549-552

Page 16: 09 CARMEN MOLDOVAN

Sensors on glass and platform

Cfr. different buffers - 46 hours dynamic test - external reference electrode

0.1

0.15

0.2

0.25

0.3

0.35

0.4

5:1

3:4

8 P

M

6:2

3:3

5 P

M

7:3

3:0

6 P

M

8:4

3:0

8 P

M

9:5

3:1

0 P

M

11:0

3:1

1 P

M

12:1

2:5

8 A

M

1:2

2:4

5 A

M

2:3

2:3

1 A

M

3:4

2:1

8 A

M

4:5

2:0

5 A

M

6:0

1:5

1 A

M

7:1

1:5

3 A

M

8:2

1:4

0 A

M

9:3

1:2

7 A

M

10:4

0:5

9 A

M

11:5

0:4

8 A

M

1:0

0:3

6 P

M

2:1

0:2

2 P

M

3:2

0:5

5 P

M

4:3

0:4

2 P

M

5:4

0:2

8 P

M

6:5

0:0

0 P

M

7:5

9:3

2 P

M

9:0

9:1

9 P

M

10:1

9:0

6 P

M

11:2

8:5

3 P

M

12:3

8:4

0 A

M

1:4

8:4

2 A

M

2:5

8:2

9 A

M

4:0

8:3

1 A

M

5:1

8:1

8 A

M

6:2

7:5

0 A

M

7:3

7:5

2 A

M

8:4

7:3

9 A

M

9:5

7:1

1 A

M

11:0

7:1

6 A

M

12:1

7:0

5 P

M

1:2

6:3

9 P

M

2:3

6:2

8 P

M

time

vo

ltag

e (

V)

pH+ - ref - pH4 buffer pH- - ref - pH4 buffer pH+ - ref - pH5 buffer

pH- - ref - pH5 buffer pH+ - ref - pH7 buffer pH- - ref - pH7 buffer

y = 10.938x - 735.56

35

35.5

36

36.5

37

37.5

38

38.5

39

39.5

40

70.45 70.5 70.55 70.6 70.65 70.7 70.75 70.8 70.85 70.9 70.95

Resistance(Ohm)

Tem

pe

ratu

re(C

)

Series1

Linear (Series1)

Platform

Microfluidic module with the reference electrode

Temperature sensorpH sensor

Page 17: 09 CARMEN MOLDOVAN

Auxiliary sensor - pH sensor nanofiber polyaniline based

The pH sensor is a solid state sensor based on conductive polymers, miniaturized, developed on silicon substrate

The sensor measurement is a voltage measurement at zero current. The voltage is measured between two electrodes: the active electrode and the reference electrode (Ag/AgCl,

KCl 3M). The gold electrode was deposited with a layer of

polyaniline conductive emeraldine base form as seen in the SEM.

The electrochemical deposited polyaniline has an intrinsic nanowires structure of 100nm diameter

Carmen Moldovan, Rodica Iosub, Radu Cornel, Eric Moore, Anna Paschero, Walter Messina, Danilo Demarchi, Cecilia Codreanu, Daniel Necula, Adrian Dinescu, Bogdan Firtat, Sensor system for on-line monitoring of cell cultures, CAS’09 (International Conference on Semiconductors), IEEE catalog Number CFP09CAS-PRT, ISBN: 978-1-424-4412-7; pp 263-267

SEM picture of electrochemical deposited polyaniline conductive layer in the form of nanofibers

Page 18: 09 CARMEN MOLDOVAN

Integration

Automatic measuring set-upLabview interface

Connections, signal processing, data acquisition, GUI

The graphic user interface designed with the LabView. By the program we can control: Acquisition time, Number of loops, Time between the loops, Flow rate in the channels

Page 19: 09 CARMEN MOLDOVAN

Integration

Visual results of the continuous flow simulation (section through the z plane) – detail

The velocity of the fluid into the channel simulation has been performed***

***B. Firtat, C. Moldovan, G. Boldeiu, FEM Microfluidic simulations for microchannels – continuous and droplet-like flow; The 4M/ICOMM Conference, 23-25 Sept. 2009, Karlsruhe, Germany; Proceedings, pp 205

Microfluidics

Microfluidic set-up

Page 20: 09 CARMEN MOLDOVAN

Sin <100> B++

Si3N4

2000 Å

Si3N4

2000Å

SiO2

5000 Å

Polysilicon 4000 ÅMetal

Electrodes

CVD - SiO2

Lift-off mask

Scheme of the sensor chip

High dose boron is implanted and diffused followed by a boron doping from solid source + diffusion (1050C, 4 hours). the p-n junction, 12 m depth, for anisotropical stop etch

A CVD oxide is deposed such as dielectric layer and the contacts on polysilicon layer are open

Cr-Au deposition and configuration follow.

CO2 GAS SENSORS

Membrane suporting sensor

Page 21: 09 CARMEN MOLDOVAN

0

100

200

300

400

500

0 1 2 3 4 5

Time (s)

Tem

p (

°C )

21,5°C

500,0°C

100

200

300

400

500

SP01

The power-on curve for the released heater element.

The heat distribution from the released heating element using FLIR 40

The heat distribution of a non- released heater element as

seen in figure Non-released heater element

The input power was 1,1 W and this should be compared with the non-released heater element that requires 2,4 W input power of to reach 490 C

Ceramic gas sensor – integrated heater

Page 22: 09 CARMEN MOLDOVAN

New developments

Flexible substrate – gas sensors, batteries

Page 23: 09 CARMEN MOLDOVAN

Ink Jet Technology – sensors on paper for gases detection

Integration: signal processing, GUI

New developments

Page 24: 09 CARMEN MOLDOVAN

Modelling and simulation activities

Page 25: 09 CARMEN MOLDOVAN

Design for Manufacture (etch simulations)

Calibration of a new software application (Etch3D – developed by Coventor, Inc.), designed for anisotropic silicon etching simulations.

test structures were used, with different sizes and shapes; the real test structures (etched in both KOH and TMAH,

with different temperatures, concentrations and etch times) were compared to the simulation results;

the program’s internal parameters were adjusted, in order to fit the lab results.

Page 26: 09 CARMEN MOLDOVAN

Design for Manufacture (etch simulations)

SEM picture of the etched test structure (TMAH, 25%, 80º C, 5 min.)

Simulation using default values of the program parameters (for TMAH, 25%, 80º C, 5 min.)

Tuned values of the program parameters (TMAH, 25%, 80º C, 5 min.).

Experimental and simulation results for the 4-crosses test structure (using TMAH)

Page 27: 09 CARMEN MOLDOVAN

Microfluidic simulations were performed, in order to analyse one fluid velocity through a specific microchannel design. The simulations were used to observe the flow speed and direction of the liquid passing through, and also dead spots in the flow (zones with much slower velocity), for different fluid flow rates.

Microfluidic modelling

Page 28: 09 CARMEN MOLDOVAN

Dead volume and cross contamination Model compatibility issues solved for different platforms

Several simulations performed: Continuous flow analysis (velocity, pressure, etc.);

Slug-flow analysis (fluid bubbles through channels);

Identification of fluids cross-contamination and dead-volumes.

Microfluidic modelling

Page 29: 09 CARMEN MOLDOVAN

Multi-domain modelling

Modelling of a thin membrane silicon pressure sensor

Micro-mechanical simulation (membrane deflection, stress induced);

Electrical and piezoresistive simulation (for determining the current change due to the mechanical stress induced by the applied pressure).

Page 30: 09 CARMEN MOLDOVAN

Conclusions

Continuing technology development New technologies for platforms develop Offering services: sensors and platform

prototyping, simulation, training Interest: New projects partnership Industry attracting, bringing inventions to

innovations Start-up development