09sn70 sputtering system op_maual_eng
TRANSCRIPT
SYSTEM Magnetron Sputter
MODEL(S/N) PSP 5004(09SN70)
SUPPLIER SNTEK
CUSTOMER UTHM
MAGNETRON SPUTTERING SYSTEM
SNTEK Co.,Ltd
Contents
1. INSTALLATION
1.1 Preparations before installation ·································································································1
1.2 Basic check before operation ········································································································2
1.3 Checking period for each part ······································································································3
1.3 Explanation of warning and caution marks ····················································································4
2. SYSTEM CONFIGURATION
2.1 Block Diagram ································································································································5
2.2 Hardware configuration ··················································································································6
2.3 Program configuration ··················································································································11
3. SYSTEM OPERATION
3.1 Quick Start ····································································································································12
3.2 Operation.(Manual mode) ···············································································································17
1) PCW, CDA, GAS Supply ···········································································································17
2) System power on ····················································································································18
3) Chamber Pumping ··················································································································19
4) Gas injection ·······················································································································20
5) Working Pressure Control ·····································································································21
6) Sputter Gun Power Supply ···································································································24
4. MAINTENANCE
4.1 Replacement of sputter target ·····································································································25
4.2 Rotary pump oil check & Refill ···································································································27
5. Explanation of part set up & use
5.1 Baratron gauge ···························································································································29
5.2 ATM sensor ····································································································································34
5.3 CDA, Air regulator ······················································································································37
5.4 CDA, Air Pressure switch ············································································································39
5.5 PCW Pressure switch ····················································································································40
6. TROUBLESHOOTING ·······························································································································41
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Appendix A.
Roles of various sensors and failure occurring situation ··························································43
Appendix B.
Interlock list ··································································································································44
1. INSTALLATION
1.1 Preparations before installation
Item Details
System S/N - 09SN70
Model - PSP 5004
Power source - AC 415V, 3phase, 30A
Earthing - 1 class earthing equivalent device
- Be sure to connect with Chamber Ass'y Body
PCW - DI water : recommended of 15~20 ℃.
- Optimum hydraulic pressure : 2~4 Kgf/Cm3
- Optimum flux : 15 L/min
- Connected with Φ12 urethane tube
CDA - Use compressed air without water
- Optimum air pressure : 4~6 Kgf/Cm3
- Connected with Φ6 urethane tube
Process Gas - 99.999% class high purity Gas recommended for Ar, N2, O2 Gas .
- Optimum pressure: 2~3 Kgf/Cm3 (25 ~ 40 psi)
- Connected with Lock, VCR Type
Purge Gas - Use of N2 gas recommended for venting.
- Optimum pressure: 2~3 Kgf/Cm3 (25 ~ 40 psi)
- 2 -
1.2 Basic check before operation
➀ Vacuum ChamberThe inside of process chamber should be kept clean consistently, and vacuum state should always be
maintained in no operation of the equipment. O-ring part should be no contamination to avoid leakage.
➁ Vacuum PumpThis plays an important role to generate and maintain vacuum. If Chamber inside is not clean, it
takes much time to maintain vacuum state, and trouble occurring frequency of vacuum pump would
increase.
- Dry pump type : a vacuum pump requiring not so frequent maintenance and repair, to be checked
occasionally if the supply state of purge N2 and PCW are normal.
-Oil pump type : Oil gauge at the back of pump should be checked. If oil color has changed or oil
volume is below optimum level, it should be replaced or supplemented for use.
➂ MFC & Gas Line As the leakage of process gas used for generating Plasma may cause damage to devices or human body,
any damage or leakage of gas line should be checked at all times. In addition, by checking process
pressure occasionally, always be careful that problems in the process would not occur due to the gas
shortage during the process.
To supply gas in the required volume. MFC(Mass Flow Controller) is used. Gas pressure at the inlet
be adjusted to around 2~3Kg/Cm2(25~40 psi). the supply of high pressure gas may cause malfunction and
trouble of MFC.
➃ Air pressure supply part As vacuum valves of this equipment are operated by air pressure with constant pressure, you should
always check if the pressure of air pressure supply part is at 5~6 Kg/cm2.. If the pressure is
supplied below 5~6 Kg/cm2,, abnormal function of vacuum valves may occur. And, be careful that water
be not contained in the compressed air, since compressed air containing water may cause troubles of
air compressed valves. .
➄ Exhaust line You should check appearance and leakage of the exhaust line for treating exhaust gas discharged from
vacuum chamber, and, if any trouble found, use it after remedy.
➅ the state of Input power device and accessories Fixing state of input power cable, earthing state, operation state of sensor lamp and each switch
should be checked occasionally.
- 3 -
1.3 Checking period of each part
Item Checking period
Replace/Inspection·Correction/
Repair period
Daily Weekly Monthly Quarterly Weekly Monthly 6 Month Yearly
Cleanness of
Chamber inside- ◎
Input power 415V ±10V ◎
CDA Pressure
Supply Line
0.5 ~ 0.6 Mpa
(5 ~ 6kgf/cm2)◎
Process gas
line pressure
0.2 ~ 0.4 Mpa
(2 ~ 4kgf/cm2)◎
PCW Pressure
Supply Line
0.2 ~ 0.4 Mpa
(2 ~ 4kgf/cm2)◎
PCW flow 15L/min ◎
PCW Temp < 25 ℃ ◎
Vacuum gaugeCheck Base pressure
Working pressure◎ ◎
Low vacuum pump
(Oil type)
Maintain Oil gauge
over 80% ◎ ◎
High vacuum
pumpRPM = Normal ◎ ◎
RF Power
Supply
Max output power:
600W ◎ ◎
Gas control
device
(MFC)
Operation check of Gas
flow ◎ ◎
O-Ring Check surface state ◎ ◎
Viewport GlassCheck surface
contamination◎ ◎
RF Power
Cable
Check damages, short
circuit ◎ ◎
Fitting &
Accessaries◎ ◎
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1.4 Explanation of warning and caution marks
Warning and caution marks Relevant contents
Operate according to the procedure
Notice
Refer to relevant manuals before use
Caution
Work requiring for clean tools, as the place is sensitive to dust
and other foreign materials.
Caution
Operation prohibited by non-authorized.
Caution
Use with care as it is risky
Warning: Life Threatening Voltage!
Danger of high voltage
Warning : High Temperature !
Be careful of burn due to high temperature
Warning : Electromagnetic field !
Danger of electromagnetic field
Danger : High frequency !
Users especially with cardiac pacemakers should work out of danger
range as the area requires cautions for high frequency emission.
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2.SYSTEM CONFIGURATION
2.1 Block Diagram
- 6 -
2.2 Hardware Configuration
[Fig.1 System front]
[Fig.2 System bottom]
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[Fig.3 System side]
[Fig.4 Sputter gun power connector]
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[Fig.5 Sputter gun & process chamber]
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[Fig.6 System control unit]
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[Fig.7 System control back panel]
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2.3 Program configuration
[Fig.8 Main control window]
[Fig.9 Data view window]
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3. S YSTE M O PE R ATIO N
3.1 Q uick S tart
STEP 0 System Main Power ON
1) U nlock the key switch.
2) Turn on the power (the green button).
- If the main power (220V) is applied normally, the red button (the 'O FF' button) is remained 'O N '.
3) Turn on the PC power.
4) Execute the control program on the PC screen.
※ As the actual Power O N /O FF buttons may differ from the image above, please use them according to
the actual system.
STEP 1 PCW, CDA Supply
1) PC W , C ompressed Air (C D A) Supply
2) System Alarm check
C aution
In case of alarm or warning signals, please check the corresponding parts and then proceed.
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STEP 2 Sample Loading
1) Chamber vent
2) Sample Loading
1) Chamber Vent
- M/V, R/V close
- GSD/V open
- Vent/V open
- ATM signal ON check
2) Sample loading
- Main shutter open
- Sample Loading
- Main shutter close
C aution
Please use the clean tool when installing a sample.
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STEP 3 System Pumping
1) TMP normal stand-by
- Rotary pump start
- Line gauge pressure check
- F/V open
- TMP start
- TMP normal signal check
2) Chamber low vacuum pumping
- F/V close
- R/V open
- Low vacuum T/V 100% open
- Chamber pressure check (Chamber pressure < 5.0E-2 Torr)
3) Chamber high vacuum pumping
- R/V close
- F/V open
- M/V open
- T/V 100% open
C aution
O peration of the vacuum valves or pumps should only be conducted by the qualified personnel.
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STEP 4 Sample Deposition
1) Setting of C onditions for Sample Vapor D eposition
- Set the R PM .
- Set the heater temperature (Power O N ).
- C lose the G SD /V .
- Set the flow rate (M FC values) of process gas and open the gas valves.
- Adjust the process pressure (Throttle/V : set 'pressure mode')
- Set the D C or R F Power values.
- Set the vapor deposition time.
2) Sample Vapor D eposition
- O pen the gun shutter.
- Turn on the gun power (D C or R F).
- O pen the main shutter.
3) End of Sample Vapor D eposition
- Turn off the gun power.
- Turn off the heater power.
- C lose the gas valve.
- O pen the Throttle/V 100% .
- The sample stay in the chamber at least the heater temperature go down 200℃.
- C lose the M /V .
- O pen the G SD /V .
- O pen the Vent/V .
C aution
Please be careful of burns as temperature around the sample holder and the sputter gun is very high.
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STEP 5 System OFF
1) Turn off the TMP.
- Stand-by during the time required for TMP to stop.
2) Close the F/V.
3) Pumping for Low Vacuum Chamber
- Open the R/V.
- Set the chamber pressure at < 5.0E-2 Torr.
- Close the R/V.
4) Stop the rotary pump.
5) Turn off the system power.
N otice
The process chamber must be switched to the 'vacuum' condition after use to protect from foreign materials and/or moisture.
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3.2 O peration.(M anual mode)
N otice
P lease get fully familiar with the manuals and the sequence of system operation before use.
1) PC W , C D A, G AS Supply
PCW, CDA, Gas port size
Port Port spec Note Pressure spec
System PCW 1/2 inch Lock type 2~3kgf/cm2
Sputter Gun PCW 1/2 inch Lock type 2~3kgf/cm2, 3 L/min
CDA 1/4 inch Lock type 0.4~0.6Mpa
GAS 1/4 inch Lock type 0.2~0.3Mpa
Please install as shown in the picture below for PCW, CDA, Gas supplies before use.
N otice
P lease use high purity gas above 4N for the process.
C aution
Please set the pressure at 0.2 to 0 .3M pa by use of a regulator for the initia l gas supply to each gas line. U se of excessive pressure that this may cause malfunction or failure of M FC .
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2) System power on
Connection of main power cable
Voltage Current Pulse Cable spec
220 MAX 60A 3 10sq.
System power supply
1) Switch to the 'key switch unlock' status.
2) Switch to the 'System Power On' status. (the green button).
3) Turn on the control PC power and execute the sputter operation program.
4) Check the alarm signals as shown at the left bottom.
Window Alarm Normal Note
System Ready Lamp ONPC, PLC Communication Status
Water Pressure Lamp ON System PCW
Gun Water Flow Lamp ON Sputter Gun PCW
Gun Water Pressure Lamp ON Sputter Gun PCW
Air Pressure Lamp ON System compressed Air
Rotary Pump Trip Lamp OFF Rotary pump status
TMP Fault Lamp OFF TMP status
C aution
If an a larm is given, only use the system after correcting the cause of such alarm. Arbitrary changes in the alarm signals or adjustments in the sensitivity of sensors may cause a system fa ilure.
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3) C hamber Pumping
Pumping for Low Vacuum Chamber
1) Start the rotary pump.
2) Check the current pressure at the line convection gauge.
(The pumping line is 'normal' if the value at the line gauge drops below 5.0E-2 Torr.)
3) Start pimping for the low vacuum chamber by opening the R/V.
4) Leave the manual T/V completely open during pumping for low vacuum chamber.
C aution
D O N O T disassemble the pumping line or the chamber blank port during pumping as this may affect the vacuum speed and the vacuum status of the chamber as well as breakdown of the rotary pump.
TMP start
1) For normalization of the TMP, close the R/V to stop pumping the chamber.
2) Stand-by the line gauge until the pressure at line gauge drops below 5.0E-3Torr.
(See the picture above)
3) Open the F/V.
4) Stand-by until the normal speed signal is turned on after starting the TMP.
Open the M/V to start the high vacuum pumping if the chamber pressure drops below 5.0E-2 Torr
upon the TMP normal signal.
When the chamber pressure is above 5.0E-2 Torr, open the M/V after repeating the 'low vacuum
pumping'.
- 20 -
4) G as injection
Either the low vacuum pumping or the high vacuum pumping status should be maintained to inject the
process gas into the chamber.
Set the MFC values for gas required for the process.
Supply the process gas.
1) G.M/V open
2) Gas valve open
- 21 -
5) W orking Pressure C ontrol
In the Throttle/V Pressure Mode
1) Set the Throttle/V into 'Remote' mode.
2) Enter the process pressure value to the window of Throttle/V by the unit of mTorr after supplying
the process gas.
3) Transmit the pressure value to the Throttle/V controller by using the set press button.
4) Start the pressure control by clicking the Throttle/V run button.
5) Wait until the input pressure value equals the current pressure value.
Window Control Normal
Set PressTransmit the input process pressure value to the T/V controller.
Set Pos Transmit the input T/V position value to the T/V controller.
Local Mode Switch the T/V controller into the 'Local Mode'.
Remote Mode Switch the T/V controller into the 'Remote Mode'.
Position Mode Adjust the T/V by the input T/V position value.
Pressure Mode Adjust the T/V by the input process pressure value.
Full Open Open the T/V 100%.
Full Close Close the T/V 100%.
Run Start the T/V Control.
Stop Stop the T/V Control.
- 22 -
In the Throttle/V Position Mode
1) Switch the Throttle/V Control Mode to the "Remote Mode'.
2) Enter the Throttle/V position value (0~100%) in the Throttle/V window after supplying the process
gas.
3) Transmit the Throttle/V value by using the Set Pos button.
4) Click on the Throttle/V Run button to start the position control.
5) Adjust the Throttle/V position value to search the required pressure value.
- 23 -
In the Throttle/V Controller Local Mode
1) Switch the Throttle/V Control mode to the 'Local' mode.
2) Use the keys on the Throttle/V Controller panel to enter the required pressure and position values in
the set point values (A~E).
3) Press the Set Point buttons (A~E) to start adjusting pressure for the chamber.
Throttle/V controller panel
No Key Description
1 MODE To enter to the 'System Setup' mode.
2 UP To move to the System Setup mode and to the Parameter Set mode in turn, also to increase the setup values in the Parameter Set mode
3 DOWN To move to the System Setup mode and to the Parameter Set mode in turn, also to decrease the setup values in the Parameter Set mode.
4 SHIFT To select setup values for the System Setup mode, also to select the setup digit in the Parameter Setup mode.
5 ENT. To be used at the beginning and at the end of entering parameters.
6 OPEN To open the valve completely.
7 CLOSE To close the valve completely.
8 STOP To stop the Open/Close/Run valve operations.
9 A To select and start to control the Set point A.
10 B To select and start to control the Set point B.
11 C To select and start to control the Set point C.
12 D To select and start to control the Set point D.
13 E To select and start to control the Set point E.
14 LEARN -
15 ZERO To reset the current pressure value to '0'.
- 24 -
6) Sputter G un Power Supply
Enter the DC or RF Power values after the process pressure is stabilized.
The set vapor deposition time will be counted after the main shutter is opened.
Switch to the RF or DC Power Local mode.
1) Press the remote/local switch located in front of the generator to switch OFF the LED in order to
enter the DC Power Local mode.
2) To switch to the RF Power Local Mode, replace the interface connector (D-sub 25-pin) terminal
located at the rear of the generator with the one for local use.
- 25 -
4. MAINTENANCE
4.1 Replacement of sputter target
Switching to the RF / DC Power Local Mode.
1) Open the Target Shutter and remove the target shield cover.
2) Remove particles at the front and side of the target (by using N2 Blower).
3) Remove the clamp bolts located in front of the target. Take care that the target should not fall.
4) Remove the target after removing the target clamp bolts. Take care that the magnet should not be
detached from the gun (for the Gun type where magnet is exposed at the rear of the target).
5) Use the correct clamp and bolt to fit the target thickness during replacement.
6) Install the target tightly close to the gun.
7) Remove particles at the front and side of target after fixing all clamp bolts (by using N2 Blower)..
8) Fit the target shield cover.
9) When fitting the target shield cover, keep a distance of 2~3mm from the target.
C aution
Poor contact between the target and the gun may cause excessive heat to generate on the target surface during processes resulting in deformation or creak of the target.
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- 27 -
4.2 R otary Pump O il C heck & R efill
For oil check and replacement, please refer to the attached sub-manual.
Before check and/or replacement, please check if the TMP is turned off and the rotary pump
is stopped.
1) Keep the rotary pump stopped.
2) Refill the oil through the oil inlet when the oil gauge at the rear of the rotary pump is
below the appropriate level (80~90% of the full gauge).
3) When the oil is discolored (clear in normal cases), refill with new oil after emptying oil in use
completely through the oil outlet.
C aution
Pump checkup and oil refill/replacement should be conducted only by the authorized personnel.
C aution
Before checking and replacing pumps, please turn off the power.
C aution
If an excessive amount of moisture flows into the pump, it may impair performance and/or cause breakdown of the pump.
C aution
Always use the correct type of oil in service.
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- 29 -
5. Explanation of part set up & use
Notice
Instruction for the part used is a material to describe the parts commonly
applicable to the System delivered by our company. The relevant parts should
be dissembled, assembled, and calibrated accordingly.
Meanwhile, as this is a brief instruction for system users, you need to refer
to other relevant manuals for more details.
5.1 Baratron gauge
1) Use and related data
Maker Use Reange of the use
MKS InstrumentProcess pressure control
(Working pressure)MAX 10 Torr
Baratron gauge performance specification data
- 30 -
Notice
As the model of Baratron 627B type used in this system is a self heating type
of gauge, warming up time is required before use.
2 hours ≥ 1Torr, 4 hours ≤ 1Torr
Notice
As a controllable range is different from Barantron gauge Full scale Range,
you need to refer to the table and relevant manual.
ex> When using 10Torr Baratron gauge, minimum range of effective pressure is
5.0E-3 Torr, controllable minimum range 5.0E-2 Torr.
- 31 -
2) Baratron gauge calibration
Execute if sample results are different under the same conditions in process or execute in
accordance with inspection and correction period,
Notice
Warm up time should be kept before the progress of Baratron gauge CAL.
Caution
As problems may occur when operated arbitrarily, persons except authorized or
responsible ones are prohibited from the operation of Baratron gauge CAL.
1) After stan-by of the process chamber for more than 2 hours at the high vacuum state, check if
the degree of chamber vacuum is below 1.0E-4 Torr. (Checking possible by Pirani gauge)
Caution
Arbitrary CAL progress prohibited until reaching at the degree of vacuum
practicable for CAL.
2) After reaching at the degree of vacuum in the process chamber suggested in the above table,
measure the voltage of Baratron gauge.
3) Measure the DC voltage at the required position using voltage testor, (For the position, refer
to the picture below)
- 32 -
4) Progress after adjusting the voltage measuring value of PLC A/D 10 pin to 0V(zero voltage). At
this time, be sure to progress with more than 2 persons.
5) Zero voltage adjusting position
Warning
As this is Baratron gauge of heating type, be careful of the burn by the
surface while working
6) At the time of voltage adjustment, if the measuring value of PLC A/D 10 pin indicates 0V(zero
voltage) after turning to the left & right using a precision driver of (-) type, then stop the
progress of CAL.
- 33 -
3) Removal of Baratron gauge
At the time of inspection/correction of Baratron gauge, and separating work for A/S treatment,
Baratron gauge, progress according to the following procedure.
1) Progress a chamber Vent, and convert into atmospheric state.
2) Remove a Gauge power cable.(For cable removal, remove a fixing bolt first using a driver.
3) Separate from chamber after removing the fixing clamp.
4) To prevent the sensor part from the contamination after removing a vacuum gauge, put on the
sensor part the cover in protection caps, foils, or wraps, Separating work should be done by clean tools.
Notice
Sensitive area to dust and other foreign materials. Work required with
Clean tools.
- 34 -
5.2 ATM sensor
1) Use and related data
Maker Use Range of the use
Autonics
Check the atmospheric (760Torr)
signal
(ATM signal)
0 ~ 100kpa
(0 ~ 750 Torr)
ATM sensor performance specification data
- 35 -
2) ATM sensor calibration
When the gas pressure of Vent Gas(GN2) is at the normal state, and if vent state at more than
average vent time is sustained ,
Checking method of the atmospheric state at troubles of ATM sensor
1) When venting is done with Gas(GN2), if the chamber inside is at the atmospheric pressure or
over-pressure state(760Torr이상), gas comes out to the outside at the adhering part of Door and other
vacuum-applied items.
If the above occasion happens, progress the CAL(zero point) according to the following procedure.
1) Check if the chamber is at atmospheric state or over.
2) Convert the program into Manual mode(If in progress in Auto state, stop the Auto state)
3) Close the Vent valve.
4) Check the contact point of the current situation of ATM sensor.
Normal Signal in ATM Status Abnormal Signal in ATM Status
5) If No. 2 contact signal coms out at ATM state, progress Zero point CAL.
6) If pushing the up/down buttons( ) for over 1 second at the same time, On cones on No. 1
Contact signal.
6) Check On of ATM lamp on the program screen.
- 36 -
3) CN range change of No. 1 Contact point of ATM sensor
Execute if there are frequent progresses of ATM zero point CAL.
The output operation mode of ATM sensor used in this system is F-6 window mode.
Signal output of F-6 window mode
ON(stand-by state) range change method of No. 1 Contact point
Notice
Progress after reading sufficiently the relevant manuals when changing inside
parameters of ATM sensor.
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5.3 CDA, Air regulator
1) Use and related data
Maker Use Range of the use
SMCOperate Diaphragm valve and
Cylinder
Detting pressure 0.4 ~ 0.6 Mpa
(4 ~ 6kgf/cm2)
2) Adjustment of used pressure
If Main CDA or Air pressure is changed, adjust the gauge to the using pressure with Pressure
control knob, and thereafter convert the knob into the Lock state.
Notice
After rotating the knob toward (-) direction at maximum at the initial
pressure setting, progress at no pressure supplied to the regulator out.
Use after moving the indicating label to the desired place for the using range,
- 38 -
3) Water removal
If contained water is supplied through filter while using CDA or Air, moisture gathers near the
filter. If moisture stays while checking, remove it.
1) Rotate the moisture removing nozzle at the lower part of regulator toward the Unlock direction.
2) If a little air venting sound is heard while rotating, sustain at that state.
3) While the inside compressed air comes out, the moisture stayed inside flows outward.
4) When moisture removal is completed, rotate the nozzle again to the Lock direction to prevent the
inside compressed air from flowing outward.
Caution
If the moisture removal nozzle is open too much, that may bring about
temporary low pressure, resulting in system alarm, or stops or malfunctions
of valves and other parts in operation.
Progress prohibited for danger in process.
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5.4 CDA, Air Pressure switch
1) Use and related data
Maker Use Renage of the use
SMC CDA, Air Pressure check sensorSetting pressure 0.4 ~ 0.6 Mpa
(4 ~ 6kgf/cm2)
2) Adjustment of using pressure
Main CDA or Air pressure is being supplied within the usable range, but adjust if Air pressure
alarm occurs.
1) Adjust by rotating the upper lever to (-)(+) directions until the Air pressure lamp is ON
2) If the regulator pressure is used at 4Mpa, and if Air pressure sensor is set at 4Mpa, Air
pressure alarm may occur frequently, Thus, if the regulator pressure is used at 0.4Mpa, the range of Air
pressure sensor needs to be set at below 0.4Mpa (about 0.3~0.35Mpa) for use.
Notice
As the operating pressure of Diaphragm valve used in this system is 0.4~0.7Mpa
with Main Regulator pressure of 0.6Mpa, Air sensor needs to be set at 0.4Mpa
for use.
Alert in
Lamp Off
- 40 -
5.5 PCW Pressure switch
Maker Use Range of the use
- PCW pressure check sensorSetting pressure 0.2 ~ 0.3 Mpa
(2 ~ 3kgf/cm2)
2) Adjustment of the using pressure
PCW pressure is being supplied within the usable range, but adjust if a pressure alarm happens,
1) Adjust by rotating the upper lever to Water pressure (-)(+) directions, until the Water
pressure is ON.
Caution
Too low setting of a Water pressure sensor may cause normal signal output of a
Water pressure sensor under no actual PCW supply. If system operation is
progressing without the supply of PCW, system part deformation or troubles may
follow.
Notice
The figures of PCW Flow meter are not in proportion to those of PCW pressure.
Even if the Pressure is measured high, actual figure of PCW Flow meter may be
measured low.
Adjuster
Adjuster
- 41 -
6. TROUBLESHOOTING
(1) If there is any trouble in vacuum, that is, if vacuum vent is not done properly or the Leakage
rate is relatively high
<Cause>
- breakage of vacuum O-Ring
- if the degree of vacuum is not indicated correctly due to the breakage of vacuum sensor
- if there is no vacuum due to the failure of piping and gas line
- failures of vacuum valves.
<Measure>
- If any breakage of O-Ring occurs due to the long use of vacuum O-Ring or
mistake of workers
- Replace an O-ring, check occasionally the state of Vacuum O-ring,
and apply Vacuum grease.
- Be careful of the impact as vacuum sensors are sensitive to the impact.
Replace the sensor if broken.
- Check occasionally the state of gas line and replace if any failure.
- Replace immediately if a vacuum valve is in failure.
(2) If no discharge even at the vacuum state.
<Cause>
- short circuit of electric wire connected between the electrode and the Vacuum Chamber
- Connection between the electrode and the Ground(Short state)
- when we want to generate the discharge at too high vacuum or too low vacuum
- Power supply failure
<Measure>
- Cut off Main Power, check the state of connected electric wire, and if any failure, replace.
- Install the electrode again and check the discharge state.
- Check if any failure of vacuum gauge, adjust to the proper degree of vacuum,
and start the discharge.
- Repair and replace the Power supply(request to the maker)
- 42 -
(3) If Plasma discharge is not constant
<Cause>
- If the gas supply is not done or not normal
- If it is turned into the vacuum state improper to discharge
<Measure>
- Check any locking failure of gas line including gas pressure and air pressure valves,
and, if any failure, replace.
- Check the operation of MFC, and, if any failure, replace
- Check the motion of vacuum gauge, and, if any failure, repair or replace.
(4) In case of severe arc,
<Cause>
- Local discharge phenomena occur due to particles by heavy contamination
at the Vacuum Chamber inside
<Measure>
- Arc generates from the excessive electric current inside Vacuum Chamber.
First of all, clean the Vacuum Chamber.
- After loading the sample properly, and start the process again.
(5) In case of sustaining the high degree of vacuum
<Cause>
- Failures of gas supply valves and MFC
<Measure>
- Check the gas line, operating state of gas pressure or air compressure valves,
and the degree of air compressure. Take actions for gas supply.
(6) Others
- When an excessive current cut-off switch is down, check the short circuit of supply power
and electric wire, secure the power and replace the disconnected wire.
If any electric problem happens, down the line breaker and check any failures.
- 43 -
Appendix A.
- Roles of various sensors and failure occurring situation.
(1) Water Pressure Switch
Action Detects a water pressure, Interlock happens in case of
insufficient pressure
Interconnection below setting pressure : Interlock, above setting pressure :
signal ON
Failure
1) below setting pressure & signal ON state
- All devices can operate the signal ON, but device damages
happen due to the heat by cooling failure of Vacuum Flange
2) above setting pressure & signal OFF state
- Processing operation does not work in Interlock state
(2) Air Pressure Switch
Action Detects an air pressure. Interlock happens in case of insufficient
pressure
Interconnection below setting pressure : Interlock, above setting pressure :
signal ON
Failure
1) below setting pressure & signal ON state
- All devices can operate with signal ON, but smooth
operation is impossible.
2) above setting pressure & signal OFF state
- Processing operation does not work in Interlock state.
(3) ATM Sensor (Atmospheric sensor)
Action Detects an atmospheric pressure. Signal On when reaching at
the atmospheric pressure,
Interconnection below atmospheric pressure : Interlock, above atmospheric
pressure : signal ON
Failure
1) above atmospheric pressure & signal OFF state
- Consistent Vent Valve Open state and constant Vent Gas
inflow cause damages to devices due to high pressure.
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Appendix B.
- Interlock list
1. Main Valve(M/V) is not set in the TMP and currently not used.
- Basic Interlock setting is done.
- Openable below 5*10-2 Torr Convection Gauge Sensor Display value
- M/V Open possible only for F/V Open
2. TMP S/W is currently not used.
- On possible only for BR.P operation.
3. Vent Valve(V/V) can operate only in R/V and M/V Off.
- V/V Automatic Off if the value of ATM Sensor Display is 0.00 Torr (S.P 1 On).
4. Gas Valve can operate in On of Gas Main Valve(G.M/V).
MEMO
- 46 -
987-1, Gosaek-dong, kwonsun-gu
Suwon-Shi, Gyonggi-Do, Korea
TEL : 82-31-299-3823
FAX : 82-31-299-3829
http: www.sntek.com