1. 3572-pk sno.28 instruction manual
TRANSCRIPT
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M3572V00P20060825E
3572-PK
MAP PICKER
INSTRUCTION MANUAL
TESEC Corporation
391-1, Kamikitadai 3-chome,
Higashiyamato, Tokyo 207-0023
JAPAN
Phone (042)566-2111
Fax (042)561-3519
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i
IMPORTANT- Read carefully before proceeding with the operation ofthe equipment.
TESEC License Agreement
(1) The written materials are subject to copyright. No part of this document may be reproduced
or transmitted in any form or by any means for any purpose, without the express written
permission of TESEC.
(2) Information in this document is subject to change without notice.
(3) Every effort has been dedicated to ensure the contents free from any mistakes or faults.
Should any errors to be detected, TESEC appreciates being informed of them.
(4) TESEC is not liable for any damages resulted from accident, abuse, or misapplication of the
equipment, when:
the product has been subjected to adverse operation and/or environmental conditions to those
described in the operation manual.
the product has been subjected to rough handling, negligence, and/or delinquency on the part
of the user's personnel.
the product has become difficult to repair owing to the use of the parts or optional units other
than the TESEC standard without prior authorization of the use by TESEC.
the product has been altered by other personnel than TESEC's authorized service or technical
personnel.
(5) As the licensee, you may physically transfer the software from one computer to another
provided that the software is used on only one computer at a time. You may not electronically
transfer the software from one computer to another over a network. You may not distribute
unauthorized copies of the software or accompanying written materials to others. You may
not modify, adapt, translate, reverse engineer, decompile, disassemble, or create derivative
works based on the software.
(6) TESEC may create, from time to time, updated versions of the software, and notify any person
of such revision or changes.
In no event shall TESEC be liable for any damages whatsoever (including, without limitation,
damages for data program or other intangible assets, damages for loss of business profits,
business interruption, loss of business information, or any other pecuniary loss) arising directly
or indirectly out of the use of or inability to use this software.
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I nt r oduct i on
Succeeding the device-size-independent current model 3271-PK (MAP PICKER), this machine
(3572-PK) has proven its high flexibility to comply with smaller size devices as picker.
It is possible to comply with smaller size devices compared with a Strip Test Handler because the
devices are attached on the wafer ring with dead bug and the devices such as CSP and BGA with its
dicing completed already are adopted.
The machine is composed of an Auto Loader Unit, a Base Machine with a transfer arm and an
Unloader Unit. The auto loader can mount a ring cassette which can be stored 25 wafer sheets.
The un-loader unit is equipped with 1(2) lanes of taping unit / 1 bin (Reject bin). In addition, it
can select the classification by purpose.
The specifications are subject to change without notice.
This instruction manual consists of the following chapters.
Chapter 1 Safety
This chapter describes the safety precautions for the use of the handler.
Chapter 2 Construction and Installation
This chapter describes the construction of the handler and the installation
procedure from the set-up to the power-on.
Chapter 3 Parts and Main Functions
This chapter describes the name and function of each unit of the handler, and
the control panel, etc.
Chapter 4 Operation
This chapter describes how to operate the handler and how to deal with an
alarm situation and an operator call.
Chapter 5 Setting Method and Display
This chapter describes the setting procedures, the functions, and the displays.
Chapter 6 Chapter 6Conversion ProcedureThis chapter describes the procedure of converting
handling devices.
Chapter 7 Specifications
This chapter describes the standard specifications and the performance.
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Chapter 8 Inquiry about Maintenance and Operation
This chapter describes the address of TESEC, and the warranty and service
after shipment.
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Table of Contents
1. Safety ....................................................................................................... 1-1
1.1 Operating Safety ..................................................................................... 1-2
1.2 Definition of Terminology...................................................................... 1-2
1.3 Danger, Warning, Caution Labels........................................................... 1-3
1.4 Cautions in Application .......................................................................... 1-5
2. Construction and Installation......................................................................... 2.1
2.1 Construction of Handler.......................................................................... 2-2
2.2 Unpacking and Installation ..................................................................... 2-4
3. Units and Main Functions.............................................................................. 3-1
3.1 Names of Units ....................................................................................... 3-2
3.2 Functions of Components and Units....................................................... 3-4
3.3 Names and Functions of Components in control site ............................. 3-8
4. Operation ................................................................................................. 4-1
4.1 Preparation for Operation ................................................................. 4-3
4.2 Operating Procedures ........................................................................ 4-7
4.3 Vision Functions ............................................................................... 4-20
4.4 How to Stop Operation .....................................................................4-127
4.5 Monitor Display and How to Recover from Error ................................ 4-129
5. Setting Method and Display ....................................................................5-1
6. Conversion (Option) .................................................................................. 6-1
7. Specifications ...........................................................................................7-1
8. Inquiry about Maintenance and Operation ..............................................8-1
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1-1
Safety
1.1 Operating Safety.................................................................................. 1 2
1.2 Definition of Terminology .................................................................... 1 2
1.3 Danger, Warning, Caution Labels ........................................................ 1 3
1.4 Cautions in Application ........................................................................ 1 5
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1-2
C UTION
D NGER
W RNING
1.1 Operating Safety
Before operating the machine, the user is requested to peruse this operation manual
concerning the machine installation, operation procedures, and safety.
Pay attention to warnings, cautions, and safety precautions as briefed below or as
described in the manual, when operating, maintaining, or repairing the machine, for the
proper operat ion and sa fe ty . Danger , warning, caution, and notice labels stuck on the
machine are for safety of operators.
1.2 Definition of Terminology
In this operation manual, the degree of hazardous condition that may be caused by the
use of controls, adjustments or performance of procedures other than those specified in
the manual is categorized into the following categories.
Indicates an imminently hazardous situation which, if not avoided,
may result in death or serious injury.
Indicates a potentially hazardous situation which, i f not avoided, may
result in shock of electricity or serious injury.
Indicates a potentially hazardous situation which, i f not avoided, may
result in minor or s light injury.
Describes how to operate the machine properly, not causing machine
trouble.
Describes instructions and useful tips for the smooth machine
operation.
C UTION
NOTICE
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1-3
1.3 Danger, Warning, Caution Labels
Danger, warning, and caution labels are affixed on the machine for the safety of the
operators and the qualified service/technical personnel. Utmost care is required when
operating the equipment or the parts affixed with the label. Do not attempt to remove
those labels under any circumstances.
Be careful to operate the equipment because its
electrical mechanism includes the parts of high
voltage. Before the maintenance work, be sure to
turn off the power supply of the machine and pull
out the plug from the outlet.
When the space available is small, the following labels are affixed.
Moreover, the following label gives advance notice of warning the possibility of an
electric shock in specific conditions.
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1-4
Do not try to detach any protective covers during
the machine operation, nor start the machine
operation with the protective cover detached or
opened. Keep hands and face away from anymobile parts under the cover.
Keep hands and face away from any mobile parts
under the cover.
To connect an interface cable to the connector
indicated with the left mark, be sure to refer to
instruction manual. Performing connection
without reading the instruction manual may
causes loss in the quality of the machine.
The concrete notice is described in the CAUTION
item in the instruction manual.
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1-5
1.4 Cautions in Application
Power Source
(1) Handler must be grounded for prevention of electric shock. The power cable of
the machine is of 3 or 2 prong plug type with a grounding conductor, of which
surface is green with one or more yellow stripes.
(2) Do not touch conductors with bear hand. When maintaining the machine or
replacing the parts, turn off the power source and disconnect power cables.
Residual high voltage may remain for a while after disconnecting the power cables.
Discharge the residual electricity completely before touching inside of the machine.
(3) Wait at least ninety seconds after turning the power switch from "ON" to "OFF"
and vice versa.
(4) Apply the power source and fuses appropriate to the supply voltage and the rated
current.(5) Turn off the power switch when replacing the fuse. Confirm that the fuse fitting to
the rating and type is to be used.
(6) When connecting or disconnecting the cable of the equipment to the service power
outlet, hold the plug securely.
(7) For energy isolation, the earth leakage breaker is able to be locked in OFF position
with the handle-locking device. For details, refer to the instructions below.
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1-6
C UTION
(8) An uninterruptible power supply (UPS) is installed in the main unit of the personal
computer at the lower portion in the left side of the handler.
Name and type : DC Backup Battery Pack PCPS-RBP-01A
Main Unit of Personal Computer
Main Unit of
Personal Computer
Replacement Procedure
Loosen the lock screws (2 pcs), and draw out
the UPS from the personal computer.
Replace the UPS and assemble the parts in
reverse steps.
Please process the UPS (battery) according to the
predetermined waste disposal method.
When you cannot process, please consult to our
company. When processing is requested to our
company, the expense will be charged separately.
Uninterruptible Power Supply (UPS)
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1-7
Installation and Safe Storage
(1) Install the machine on the level floor having sufficient strength.
(2) Avoid installing the machine at the following place.
* Where the temperature is extremely high or low.
Temperature of operation environment: 25 5C
* Where the humidity is extremely high or low.
Humidity of operation environment: 20 to 60 %
* Dusty place
* Where it is exposed to direct sunlight.
* Near a high voltage power source
* Where an instrument generating intense magnetic fields or electr ic noise is used
nearby.
* Where a lot of noise, impacts, or vibrations are inevitable.
* Where vapor of volatile solvent (medicine or drug) permeate.(3) Avoid disassembling the equipment for the purpose of storage or partial application
of the disassembled equipment
(4) If the electrical parts are damaged, replace it. Damaged parts will cause the other
parts to be damaged.
(5) Before starting the machine operation, check to see that no foreign object is put in
the equipment. Do not put a tool box in the machine when being operated.
(6) Do not detach any protective covers during operation, nor operate the machine with
a protective cover for the mobile parts being detached or opened. Only the
authorized operator must be allowed to detach the protective cover.
(7) Do not put inflammable objects on the machine.
Whenever the machine is cleaned, make sure that on the machine there are no
leftover rags containing volatile solvent.
The machine is manufactured without combustible material.NOTICE
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1-8
C UTION
EMERGENCY OFF Switch
Press the red button to stop the picker in an emergency.
Stopping the handler using the EMERGENCY OFF switch turns off
the power to the handler including the vacuum control mechanism;
the air supply switch remains turned on, though.
After clearing the trouble having necessitated the emergency stop,
conduct safety checks on the inside and outside the handler.
To resume the handler operation, unlock the EMERGENCY OFF
switch by giving it one-quarter rotation in the arrow direction. To
restart the handler operation, turn on the POWER switch (KeySwitch) to boot up the personal computer and to activate the
application software, and then restart the handler by pressing the
START switch.
In case the EMERGENCY OFF switch is pressed, the EMERGENCY
OFF switch remains pressed.
In case where the EMERGENCY OFF switch is pressed, the picker
does not resume operation when the POWER switch turned on.
NOTICE
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1-9
W RNING
INTERLOCK Function
The machine is equipped with the interlock function.
When opening any cover, the interlock function performs and interrupts the motors at
corresponding site.
Use this switch to turn on and off the interlock function.
ENABLE : Interlock function used mode
When the interlock function has performed, close all covers and
press the INTERLOCK RESET switch to re lease the in terlock
function.
Then, press the START switch to restart the handler operation.
During operation, any cover can not be opened as the
covers are locked.
DISABLE : Interlock function not used mode
The background of display screen changes in yellow.
When it is necessary to access the movable parts by
inserting your hands, fingers, or face into inside the picker,
wait until all the movable parts stop completely. After the
picker stops completely, the message of STOP" appears
on the operation screen, and the red lamp of the STOP
switch lights up.
Especially be careful of pressing the START switch.
On pressing the START switch for the first time after
turning ON the power supply of the picker, t he movableparts will perform the following in it ia l opera tions at low
speed (about 20% of high speed).
NOTICE
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1-10
Start the initial operation Move to the initial check
position Move to the waiting position
Then, the picker stops under usual operation.
The following three functions show that the picker is
under initial operation.
The message of initializing in progress appears at upper
right on the operation screen.
All three lamps (green, yellow, red) of the signal tower unit
blink.
Alarm sound is raised.
Make sure that all the movable parts stop completely after the
initial operations.
[Operational Flowchart for Interlock Function]
START
COVER
INERLOCK
RESET SW
START SW
MOTOR POWER ON
Handler START
COVER
MOTOR POWER OFF
ON
OPEN
OFF
CLOSE or MAINTENANCE
(INTERLOCK DISABLE)
ON
OFF
OPEN
CLOSE or MAINTENANCE(INTERLOCK DISABLE)
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1-11
[Applicable Covers and Doors for Interlock Function]
Door L
Door R
Side Cover
Auto Loader
Front Cover
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2-1
Construction
and
Installation
2.1 Construction of Handler ............................................................................ 2-2
2.2 Unpacking and Installation........................................................................ 2-4
2.2.1
Initial Uncrating and Inspection ............................................................ 2-4
2.2.2 Installation ............................................................................................ 2-5
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HANDLER 3572-PK
2. Construction and Installation 2-2 2006063000T
2.1 Basic Configuration of Equipment
Refer to the below General View on this and the next page.
Auto Loader Unit
Unloader Unit
Operation Panel
Main Unit
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HANDLER 3572-PK
2. Construction and Installation 2-3 2006042100T
2.2 Unpacking and Installation
The unpacking and installation procedures are described below.
2.2.1 Initial Uncrating and Inspection
TESEC packed the following products with utmost care. However, if any
damage or abnormality that has been caused during the transportation is found,
please contact to TESEC immediately.
Main body of the handler with its accessories 1 set
Place the packages on the flat floor to unpack.Attention must be paid to the following.
When lifting up the package by using a forklift truck, fully insert the forks
under the crate so that the package does not tilt.
Place the packages on the flat floor carefully so that any impact or vibration is
not given to the products.
Loosen the fixing screws and remove them to uncrate. Do not pry the crate by
using a crowbar and so on. If a crowbar hits the product, the product may be
damaged.
Some parts such as a safety cover may have been packed separately from the
main body. Be sure to attach these parts when setting up the handler.
The mechanical parts and the movable parts are secured by cushions and/or
strings to avoid impact and vibration during the transportation. Remove the
cushions and the strings to unpack.
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HANDLER 3572-PK
2. Construction and Installation 2-4 2006063000T
2.2 Unpacking and Installation
The unpacking and installation procedures are described below.
2.2.1 Initial Uncrating and Inspection
TESEC packed the following products with utmost care. However, if anydamage or abnormality that has been caused during the transportation is found,
please contact to TESEC immediately.
Main body of the picker with its accessories 1 set
Unloader unit of the picker 1 set
Place the packages on the flat floor to unpack.
Attention must be paid to the following.
When lifting up the package by using a forklift truck, fully insert the forks
under the crate so that the package does not tilt.
Place the packages on the flat floor carefully so that any impact or vibration is
not given to the products.
Loosen the fixing screws and remove them to uncrate. Do not pry the crate by
using a crowbar and so on. If a crowbar hits the product, the product may be
damaged.
Some parts such as a safety cover may have been packed separately from the
main body. Be sure to attach these parts when setting up the picker.
The mechanical parts and the movable parts are secured by cushions and/or
strings to avoid impact and vibration during the transportation. Remove the
cushions and the strings to unpack.
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HANDLER 3572-PK
2. Construction and Installation 2-5 2006063000T
2.2.2 Installation
About Power Supply
To prevent a hazard of electric shock, be sure to ground the picker.
The power cable is of 2- or 3-prong plug type with a grounding conductor.The grounding conductor is green with yellow stripes.
Use the specified power voltage. Regarding the specifications of the power supply,
refer to Chapter 6, "Specifications". If the power voltage is not stable, adjust the
voltage by using a voltage regulator.
Hold the main body of the power supply plug to plug and unplug.
Before connecting the power supply cable, be sure to turn off the power switch ofpicker.
About Air
Use clean air which does not include water or oil.
Be sure to use the clean air at the specified pressure. Regarding the specifications of
the air pressure, refer to Chapter 6, "Specifications".
Installation Procedure
(1) Place the picker on the flat floor.
(2) Loosen all the lock nuts to lift up the level adjusters from the floor.
Lock Nut
Level Adjuster
Caster
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2. Construction and Installation 2-6 2006063000T
(3) Set up the picker at the predetermined position.
Lift down the level adjusters to lift up the caster from the floor, and fasten the all lock
nuts.
(4) Set the unloader unit to the picker in position and firmly secure by locking levers.
(5) Connect the power cable and the communication cables of the unloader unit to the
picker mainframe in position.
(6) Attach the signal tower unit, which is packaged separately from the picker body, to
the picker. Connect the cable to the connector inthe frame.
Signal Tower Unit
Connector
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2. Construction and Installation 2-7 2006082500T
(7) Set up the peripheral equipment at the predetermined position, and connect the
interface cables to the picker.
For details, refer to the manual of the peripheral equipment.
(8) Connect the power cable and an air supply tube to the picker.
Air Supply Tube
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2. Construction and Installation 2-8 2006063000T
(9) Connect a ground cable to the ground terminal.
Be sure to ground the picker to prevent a hazard of electric shock.
(10) Turn On the air switch.
Check the pressure gauge. If necessary, adjust the pressure to the specified value by
using the adjustment knob of the regulator installed in the picker.
Power Cable
Grounding Terminal
Pressure GaugeAir Switch Adjusting Knob
Filter RegulatorMist Separator
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2. Construction and Installation 2-9 2006063000T
(11) After checking that there is no foreign object inside of the picker and power switches
of every apparatus (personal computer, hard disc unit, LED lighting supply etc.) are in
on state, turn on the circuit breaker. Thereafter turn on the POWER switch of the
picker.
The installation work is completed.
To operate the picker, refer to Chapter 4, "Operation".
POWER Switch
Earth Leakage Breaker [Rated Interrupting Capacity 7.5kA]
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3-1
Units and Main Functions
3.1 Name of each Section............................................................................................................................3-2
3.2 Functions of Components and Units..................................................................................................3-4
3.3 Names and Functions of Components in control site......................................................................3-8
3.3.1 Operation Switch .............................................................................................................................3-8
3.3.2 EMERGENCY OFF Switch and POWER Switch.....................................................................3-14
3.3.3 Personal Computer and Peripheral Equipment............................................................................3-16
3.3.4 Front panel of Power Supply Unit................................................................................................3-21
3.3.5 Connector Panel of Power Supply Unit .......................................................................................3-23
3.3.6 Taping Controller Panel.................................................................................................................3-24
3.3.7 Air Switch Panel and Air Line Conditioning Equipment...........................................................3-27
3.3.8 Others..............................................................................................................................................3-29
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HANDLER 3572-PK
3.1 Name of each Section
Refer to the below General View on this and the next page.
Operation Panel
Unloader Unit
Main Unit
Auto Loader Unit
3. Units and Main Functions 3-2 2006063000T
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3. Units and Main Functions 3-3 2006042100T
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3. Units and Main Functions 3-4 2006082500T
3.2 Functions of Components and Units
(1) Device Loading Section Devices are supplied by one storing cassette of wafer sheets.
Storing capacity of cassette: 25 wafer sheets
Operator sets one storing cassette of 8 inches wafer sheets at theloading position.
One wafer sheet is withdrawn from the cassette, carried to the loader
table, turned 90 degrees clockwise and transferred to the sorting site.
Then, the succeeding wafer sheet proceeds up to the loader table and
stands by there.
When the sorting of all the devices on the proceeding wafer sheet
completes, the wafer sheet returns to the upper slot of the loader table.
After transferring the succeeding wafer sheet to the sorting site, the
proceeding wafer sheet is turned 90 degrees counterclockwise and
re-stored into the cassette.
Repeats the above consecutive operations to supply devices to the
sorting site. When the wafer sheet is turned 90 degrees clockwise, the
barcode reader reads the barcode marked on the wafer ring.
Barcode Reader
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HANDLER 3572-PK
(2) XY Table XY Table holds the wafer sheet rigidly not to cause position deviation.
Based on the Map File Data given by the picker, XY Table carries out
compensation of X-Y position against the device pick up position.
Also, it is possible to take newly the image data of device leads at each
3 corners of the device plates on the wafer ring using the own visionsystem and manage it as the Map File Data.
(3) Sorting Site In accordance with the sort designation controlled by the Map
System, the picker sorts each device to tray, tube or tape.
When each device is picked up, plural needles (push up pins) push the
device to float and the nozzles of the reverse unit suck the devices one
by one.
The nozzles sucking the devices turn 180 degrees clockwise and
transfer the devices to the sorting arm. The devices sucked on the
nozzles of the sorting arm transferred to the designated position after
carrying out q compensation.
When all the devices on the wafer sheet are sorted completely, the
wafer sheet returns to the loader table site.
Number of Sort Signals :32
3. Units and Main Functions 3-5 2006063000T
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HANDLER 3572-PK
(4) Device Storing Site
(Depending on the specifications, the combination of storing types vary.)
Taping Refer to (5) "Taping".
Bin Storing Stores the devices.
Set the bulk bin on the designated place.
(5) Taping Site Stores device in the embossed cup of the carrier tape, seals the
embossed cups by a sealing tape and winds up the on a reel.
The empty embossed cup is detected by sensor and the taping
operation stops. In this case an operator must put a good device in
the cup and start the taping.
When the taping device count reaches the setting value, carrier tape is
forwarded by the setting number of blank taping and the picker stops
with an alarm.
3. Units and Main Functions 3-6 2006063000T
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3. Units and Main Functions 3-7 2006082500T
(6) Wafer sheet string site 1 set of wafer sheet cassette stores the wafer sheets.
Cassette capacity 25 sheets of wafer sheet
When all the devices on the wafer sheet are sorted, the wafer sheet
returns to the loader table.
After sending the succeeding wafer sheet to the sorting position, the
wafer sheets of which devices have been sorted is rotated 90 degrees
counterclockwise and stored into the cassette.
The wafer sheet is stored at the same position as supply position.
When the sorting of all the devices in the cassette is completed and all
the wafer sheets are returned to the cassette, the picker stops.
(7) Control Section Control section consists of power supply, operation and logic sections.
The picker is operated by personal computer with 12.1 inches LCD
display and several switches. The screens required by maintenance etc.
are protected from the change by password or hidden keys.
Cassette
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3. Units and Main Functions 3-8 2006082500T
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3.3 Names and Functions of Components in control site
3.3.1 Operation Switch
(1) START switch
Use the START switch to start the operation of the picker.
The green lamp is ON during the operation.
Before pressing the START switch, check that no potential hazardous situation exists in
and around the picker.
When an alarm situation exists in the picker, the operation does not start by pressing the
START switch.
On pressing the START switch for the first time after turning ON the power supply of
the picker, the movable parts will perform the following initial operations at low speed
(about 20% of high speed).
Start the initial operationMove to the initial check positionMove to the waiting position
Then, the picker stops under usual operation.
The following three functions show that the picker is under initial operation.
The message of initializing in progress appears at upper right on the operation
screen.
All three lamps (green, yellow, red) of the signal tower unit blink.
Alarm sound is raised.
When it is necessary to access the movable parts by inserting your hands, fingers, or face
into inside the picker, wait until all the movable parts stop completely after the initial
operations. After the picker stops completely, the message of STOP" appears on the
operation screen, and the red lamp of the STOP switch lights up.
NOTICE
NOTICE
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3. Units and Main Functions 3-9 2006082500T
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(2) STOP Switch
Use the STOP switch to cease the operation of the picker.
Press this switch during the operation to carry out a cycle stop. The red lamp lights up when the
operation is ceased.
Some mechanical parts may not stop as soon as pressing the STOP switch.
When it is necessary to open the safety cover(s), wait until all the mechanical parts
stop completely.
(3) TEST Switch
During stop condition of the picker operation, the TEST switch function is effective.
When the TEST switch is pressed, a trigger signal for output image of the camera installed at device pick
up section is output to the vision system (optional). This function is used for checking visually the device
conditions.
The orange color switch lamp is lighting during this switch is pressed.
(4) RESET switch
Use the RESET switch to clear an alarm situation.
If an alarm situation is generated in the picker, the operation is ceased and the white lamp is flashing.
Before pressing the RESET switch, read the alarm message on the monitor display to
find the cause, and clear the alarm situation.
If the picker is ceased by plural causes, clear all the causes before pressing the RESET
switch.
To clear an alarm situation in the picker, press RESET switch after conducting safety
checks on the inside and outside the picker.
Do not insert your hands, fingers, or face into the around movable parts when you
press the RESET switch. Doing so may result in serious bodily injury and/or severe
equipment damage.
Some movable parts may move a cycle after pressing the RESET switch.
When it is necessary to access the movable parts, wait until all of them stop completely.
The red lamp of the STOP switch lights up when all movable parts carry out a cycle
stop.
(5) UNLOAD switch
Returns the wafer sheet under sorting or during transportation to the cassette.
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(6) UNLOCK switch
The UNLOCK switch has two functions of releasing the door lock for the device supply site and
releasing the interlocked state.
(a) Pressing the UNLOCK switch can release the door lock provided to the door for the device supply site.
Use the UNLOCK switch to unload the wafer-sheet-containment cassette from the device supply site.
The door of device supply site will not be opened unless pressing this UNLOCK switch.
(b) Pressing the UNLOCK switch can release the interlocked state.
Use the UNLOCK switch to restart the picker when the interlock circuit has been activated.
UNLOCK Switch
Cylinder driven
Door lock lever
Door
NOTICE
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Only when this RING STORE indicator is
lighting, wafer sheet can be manually withdrawn
from the table unit.
Only when this RING LOAD indicator is lighting, wafer
sheet can be manually supplied to the table unit.
Wafer Sheet Take Out Position
Wafer Sheet Supply Position
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(8) SUPPLY switch (on the OPERATION screen)
Supplies the wafer sheet to the sorting position from the cassette or the table unit.
AUTO Mode: Wafer sheets are automatically supplied from the cassette at device supply site.
Press the SUPLLY switch to supply the first wafer sheet. The succeeding wafer
sheets will be supplied automatically.MANU Mode: Wafer sheet is supplied from the table unit. Press this switch each time when the
wafer sheet is supplied manually.
(9) NEW CASSETTE switch (on the OPERATION screen)
Use this NEW CASSETTE switch only when supplying the first wafer sheet from the cassette. The top
one of the piled wafer sheets in the cassette is supplied to the table unit.
If the sorting is suspended by some reason, the wafer sheet is restored into the cassette
before ending the sorting of all the devices and removed the cassette from the picker,
press the SUPPLY switch instead of the NEW CASSETTE switch after setting the
cassette at the device supply site. The suspended wafer sheet will be supplied to the
sorting position and the sorting starts from where it was suspended. In the other words,
the wafer sheet and address of the last sorted device(s) are memorized. By pressing the
SUPPLY switch the picker restarts the sorting of the succeeding device on the
suspended wafer sheet.
(10) Z Mark switch
Not in use.
(11) Arrow Mark switch
During stop condition of the picker operation, the Arrow Mark switch is functionable.
These switches are used for manually shifting the devices on the wafer sheet on the XY table.
Shifting direction of the device is the same direction shown by each arrow mark. Each time when the
arrow mark switch is pressed, devices make one shift towards the direction indicated by the arrow
mark.
NOTICE
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C UTION
3.3.2 EMERGENCY OFF Switch and POWER Switch
(1) EMEREGENCY OFF Switch
Press the red button to stop the picker in an emergency.
Stopping the picker using the EMERGENCY OFF switch turns off the main power to
the picker including the vacuum control mechanism; the air supply switch remains
turned on, though.
After clearing the trouble having necessitated the emergency stop, conduct safety checks
on the inside and outside the picker.
To resume the picker operation, unlock the EMERGENCY OFF switch by giving it
one-quarter rotation in the arrow direction. To restart the picker operation, turn on the
POWER switch (Key Switch) to boot up the personal computer and to activate the
application software, and then restart the picker by pressing the START switch.
In case the EMERGENCY OFF switch is pressed, the EMERGENCY OFF switch
remains pressed.
In case where the EMERGENCY OFF switch is pressed, the picker does not resume
operation when the POWER switch turned on.
EMERGENCY OFF Switch
POWER Switch
NOTICE
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(2) POWER Switch
Use this switch to turn on and off the electric power of the picker.
| : ON
: OFF
- To power ON, insert the key and turn it toward " | " dead-end. When unhanding the key, it returns to " | "position.
- To power OFF, turn the switch to "" position.
The key can be pulled out at either position. Do not remove the key unnecessarily by
other than the responsible personnel of the picker.NOTICE
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C UTION
3.3.3 Personal Computer and Peripheral Equipment
(1) System Units of Personal Computer
CPU :
Main Memory :
HDD :FDD :
CD-ROM :
An uninterruptible power supply (UPS) is installed in the main unit of the personal
computer at the lower portion in the left side of the picker.
Name and type: DC Backup Battery Pack PCPS-RBP-01A
Main Unit of Personal Computer
Main Unit of
Personal Com uter
Replacement Procedure
Loosen the lock screws (2 pcs), and draw out the UPS from
the personal computer.
Replace the UPS and assemble the parts in reverse steps.
Please process the UPS (battery) according to the predetermined
waste disposal method.
When you cannot process, please consult to our company. When
processing is requested to our company, the expense will be charged
separately.
Uninterruptible Power Supply (UPS)
NOTICE
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(2) Keyboard
109-keyboard
(3) Trackball
To be connected to the PS/2 mouse port
(4) SVGA Monitor (800 x 600)
A 12.1 inches LED display is applied.
(5) Bar Code Reader
BL-80V (DOS/V keyboard connecting type of KEYENCE made) is adopted.
The bar code used is CODE39.
Handy Terminal
Bar Code Reader
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(6) Handy Terminal
Fics-RT1 (Dynamics made) is provided.
Use this terminal for the correction of the motor position and also individual movement of motors for
alignment.
(a) OutlineManual operation of a control motor can be performed by the handy terminal.
For operating the loader & main site, connect the handy terminal to the connector installed on the left
side surface. For operating the unloader site, connect the handy terminal to the connector installed on the
right side of the sort bin.
Once the handy terminal is connected to the connector, the motors can be operated by the handy
terminal.When the position of any motor is changed at the time of adjustment, it is necessary to move the position
back under the handy terminal. (Reset the numeric value back to the origin.)
If the numeric value is not reset back, perform the initial operation of the motor, or reboot the 3572-PK
application software.
(b) Operation mode
Initial operation (ORG lights on.)
The mode for carrying out motor initialization
On pressing an axial direction key, initialization operation is performed.
Jog operation (LED lights out.)
The mode for operating a motor for the minimum pulse
In keeping on pressing a key, the motor operates at a uniform interval.
Low speed Scan operation (One LED lights on.
Low-speed uniform move mode
In pressing a key, the motor operates at a uniform velocity.
High speed Scan operation (Two LEDs light on.)
High-speed uniform move mode
In pressing a key, the motor operates at a uniform velocity.
Index operation (Three LEDs light on.)
The mode for operating a motor the set-up amount of movements
In keeping on pressing a key, the motor operates at a uniform interval.
C UTION
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(c) Handy terminal display
1st line (Upper tier) : Group name displayed currently.
2nd line (Middle tier) : Current position coordinates of 1st axis (X) and 2nd axis (Y)
3rd line (Lower tier) : Current position coordinates of 3rd axis (Z) and 4th axis (W)
* It is not displayed when any motor is not set to the corresponding axis.
An example of the display
(d) Key assignment
START : On pressing the switch, the handy terminal becomes effective and the STARTLED lights up.
ORG : On pressing the switch, the mode shifts to the initial operation mode.
The specified motor is initialized by pressing the axial direction key mentioned
below.
MODE : Every time pressing the key, the operation mode changes between-.
X : Leftward movement or initialization on X axis
X: Rightward movement or initialization on X axis
Y : Frontward movement or initialization on Y axis
Y: Backward movement or initialization on Y axis
Z : Downward movement or initialization on Z axis
Z: Upward movement or initialization on Z axis
W : Clockwise rotary movement or initialization on axis
W: Counterclockwise rotary movement or initialization onaxis
: The group is changed to an effective group which is smaller than the current
number.
: The group is changed to an effective group which is larger than the current
number.
0 - 9 : Direct key for changing the group.
< Transfer-A >
X= 0.000 Y= 0.000
Z= 0.000 W= 0.000
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(e) Group assignment
Loader & Main site
Group 0 : Table group
X-axis control of Table, using the X-key
Y-axis control of Table, using the Y-keyNeedle Up (pushing up) axis control, using the Z-key
-axis control of Table, using W key
Group 1 : Transfer-A group
X-axis control of Transfer-A, using the X-key
Z-axis control of Transfer-A, using the Z-key
-axis control of Transfer-A, using the W-key
Group 2 : Transfer-B group
X-axis control of Transfer-B, using the X-key
Z-axis control of Transfer-B, using the Z-key-axis control of Transfer-B, using the W-key
Group 3 : Loader group
Ring Clamper motor control, using the X-key
(CassetteRotary table)
Ring Exchange motor control, using the Y-key
(Rotary tableMain table
Elevator motor control, using the Z-key
Unloader site
Group 0 : Sorting group
X-axis control of Sorting Arm, using the X-key
Y-axis control of Tray, using the Y-key (*In the case of the picker having a Tray
mechanism)
Z-axis control of Sorting Arm, using the Z-key
-axis control of Sorting Arm, using the W-key
Group 1 : Taping 1 group
Pitch motor control, using the Y-key
Seal motor control, using the Z-key
Group 2 : Stick group
Shuttle motor control, using the Y-key
Index motor control, using the W-key
* However, the group configuration is changed according to the specifications of the picker.
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3.3.4 Front panel of Power Supply Unit
Earth Leakage Breaker
Serves as the power switch, which breaks the power circuit of the picker when excessive current or leak
current flows in the power circuit.
| : ON
: OFF
To start the picker operation, turn on the Earth Leakage Breaker first and turn on
the Power Switch.
When the Earth Leakage Breaker activated, return the trip lever to ON position
after clearing the cause.
Handle-Locking Device (Option)
With the handle-locking device, the earth leakage breaker is able to be locked in OFF
position.
NOTICE
NOTICE
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MAIN Indicator (Green)
This indicator lights up when the earth leakage breaker is ON and the power circuit of the picker is
energized.
Hour MeterThe hour meter indicates the uptime of the picker.
5 digits, resettable
Circuit Protector (F1 - F12)
If an over-current occurs in each circuit, the corresponding protector will protrude and power supply to
the circuit will be interrupted.
After clearing the cause, push the protector to the original position. For details of the circuit, refer to the
schematic circuit diagram.
DC 1 Connector
Connects the power supply cable.
PE Terminal
Connects the ground cable.
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3.3.5 Connector Panel of Power Supply Unit
Connects the internal power cables. (Already connected)
The shape, quantity and fixing positions of connectors may vary depending on the specifications of the
picker.
For details, refer to the schematic circuit diagram.
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3.3.6 Taping Controller Panel
Each taping unit is equipped with one TAPING CONTROLLER box , respectively.
(1) SEAL Switch
Deactivates or activates the sealing operation, when the AUTO/MANU
switch in this panel is set to MANU position.
ON (): Deactivates
When this switch is set to OFF, sealing
operation is canceled, and the switch lamp
lights.
OFF (): Activates
(2) WIND UP MOTOR
Deactivates or activates the drive motor for wind-up reel.
ON (): Deactivates (the motor is not energized state)
OFF (): Activates
(3) REEL REPLACE Switch
Is used when exchanging a wind-up reel without stopping the picker
operation.
For details, refer to the following flow diagram;
Taping Controller
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Function of REEL
REPLACE Switch
F.BLANK WITHOUT
SEAL
FRONT BLANK
Taping
REAR BLANK
R.BLANK WITHOUT
SEAL
One sealing action erforms per
passing n embossed cups
Taping stops
Is REEL COUNT preset value ?REEL REPLACE message
appears on OPERATION
STATUS monitor screen
Replace a w ind-up reel
Press REEL REPLACE
sw itch
Alarm message appears
"Number of reel counters
reached to presetnumber"
Press RESET sw itch
REEL COUNT No. is
cleared
NO
YES
Note : The number [n] is specified on the
Taping 1/2 tab in System Configuration
dialog box of Setting menu.
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(4) START switch
Starts the taping operation, when the AUTO/MANU switch in this panel is set to MANU position.
(5) AUTO/MANU Switch
Selects the taping operation mode.MANU() : Independent taping operation only
AUTO () : Automatic taping operation by interacting with the testing
and bin sorting operations.
(6) SUPPLY MOTOR switch
Rotates the supply motor, when the AUTO/MANU switch in this panel is set to MANU position.
While pressing this switch, the tension motor rotates until the supply sensor is ON state, and the switch
lamp lights.
(7) PITCH MOTOR switch
Deactivates or activates the pitch motor.
ON () : Deactivates
When this switch is set to ON, the pitch motor becomes free state, and
the switch lamp lights.
OFF () : Activates
(8) COUNTER RESET switch
Is used to initialize the taping operation status.
This switch is valid while the picker stops in a normal operation.
When this switch is pressed 2 seconds or more, the counts of Reel Capacity for corresponding taping unit
and its memory data are cleared.
At any of the following occasions, the taping operation status must be initialized.
(a) When normal taping operation is disrupted and the carrier tape is to be newly installed.
(b) When the carrier tape is intentionally replaced during a taping operation.
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3.3.7 Air Switch Panel and Air Line Conditioning Equipment
Filter Regulator (AW30-03)
Adjusts the air pressure for the picker and removes particles included in the air.
The secondary pressure is set by turning the adjustment knob.
Clockwise................The secondary pressure increases
Counterclockwise.....The secondary pressure decreases
Mist Separator (AFM30-03)
Removes mist included in the supply air.
Pressure Switch
Detects the low pressure in the air line.
When the pressure in air line drops below the setting value of pressure switch, the picker stops with an
alarm.
By turning the trimmer (Vacuum pressure Trimmer) clockwise, the detection
pressure becomes high.
Adjustment Knob
NOTICE
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AIR Switch
Turns on and off the air supply to the picker.
Pressure Gauge
Indicates the air pressure supplied to the picker.
Air Inlet Port
Connects the air supply tube to the picker.
Air Outlet Port
Connects air tube for air gun etc.
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3.3.8 Others
3.3.8.1 Bar Code Reader
BL-180 Series (KEYENCE) is adopted. Refer to the attached manual in the APPENDIX.
The bar code reader reads the code number printed on the wafer ring after it is transferred to the loader table ,
turned 90 degrees clockwise and lifted up to deliver to the sorting site. If the bar code reader detects any
irregular code number, the picker stops with the error alarm and the below dialog box appears on the display
screen. Select the process on the screen and press the reset switch to clear the alarm.
By inputting the bar code number, the wafer sheet is transferred to the sorting site.
The bar code reader reads the code number printed on the wafer ring again.
The wafer sheet is discharged from the manual loader slot.
The timing to take out the rejected wafer sheet must be according to the indication lamp of the RING
STORE indicator provided on the front of the manual loader door. The wafer sheet can not be taken out
when the RING STORE indicator is not lit up.
Bar Code Reader
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3.3.8.2 Surface Potential Sensor
Once the wafer sheet is transferred to the loader table, turned 90 degrees clockwise and lifted up to the
feeding position to sorting site, the surface potential sensor starts to monitor the level of the static electricity
built up on the surface of the wafer sheet. If the surface potential sensor detects excess electrostatic charge
than the preset value, the picker stops with an alarm. The wafer sheet must be removed from the manual
loader site.
The timing to take out the wafer sheet must be according the indication lamp of the RING STORE indicator
provided on the front of manual loader door. The wafer sheet can be taken out when the RING STORE
indicator lights up.
After taking out the wafer sheet, press the RESET switch to clear the alarm status.
After clearing the alarm status, press the START switch to start the picker operation.
Digital Panel Meter for Surface
Potential Sensor Control
Surface Potential Sensor
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W RNING
3.3.8.3 INTERLOCK Key
Use this switch to turn on and off the interlock function.
ENABLE: Interlock function used mode
When opening any cover, the interlock function performs and interrupts the
motors at corresponding site.
When the interlock function has performed, close all covers and press
the INTERLOCK RESET switch to release the interlock function.
Then, press the START switch to restart the handler operation.
During operation, any cover can not be opened as covers are locked.
DISABLE: Interlock function not used mode
The background of display screen changes in yellow.
When it is necessary to access the movable parts by inserting your
hands, fingers, or face into inside the picker, wait until all the
movable parts stop completely. After the picker stops completely,
the message of STOP" appears on the operation screen, and the
red lamp of the STOP switch lights up.
Especially be careful of pressing the START switch.
On pressing the START switch for the first time after turning ON
the power supply of the picker, the movable parts will perform the
following initial operations at low speed (about 20% of high speed).
Start the initial operationMove to the initial check position
Move to the waiting position
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Then, the picker stops under usual operation.
The following three functions show that the picker is under initial operation.
The message of initializing in progress appears at upper right on
the operation screen.
All three lamps (green, yellow, red) of the signal tower unit blink.
Alarm sound is raised.
Make sure that all the movable parts stop completely after the initial
operations.
[Operational Flowchart for Interlock Function]
START
COVER
INERLOCK
RESET SW
START SW
MOTOR POWER ON
Handler START
COVER
MOTOR POWER OFF
ON
OPEN
OFF
CLOSE or MAINTENANCE(INTERLOCK DISABLE)
ON
OFF
OPEN
CLOSE or MAINTENANCE(INTERLOCK DISABLE)
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[Applicable Covers and Doors for Interlock Function]
Door L
Door R
Side Cover
Auto Loader
Front Cover
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4-1
Operation
4.1 Preparation for Operation...................................................................................................................4-3
4.2 Operating Procedures ..........................................................................................................................4-7
4.3 Vision Functions..................................................................................................................................4-19
4.3.1 Theta Rough Alignment Function ................................................................................................4-19
4.3.2 Pre Alignment Function.................................................................................................................4-24
4.3.3 Plate alignment...............................................................................................................................4-53
4.3.4 Device alignment function ............................................................................................................4-80
4.3.5 Real time edge frame check function ...........................................................................................4-87
4.3.6 Pocket Visual function...................................................................................................................4-95
4.3.7 Illumination check function.........................................................................................................4-116
4.4 How to Stop Operation.....................................................................................................................4-126
4.4.1 Cycle Stop ................................................................................................................................... 4-126
4.4.2 Emergency Stop.......................................................................................................................... 4-127
4.5 Monitor Display and How to Recover from Error......................................................................4-128
4.5.1 Flow Chart for Starting Handler after Alarm Trouble.............................................................. 4-129
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W RNING
C UTION
Be sure to use fuses which are suitable to the supply voltage and rated current. Confirm that,
when a fuse is exchanged, the supply power is turned OFF and the fuse fits to the rating andtype.
Never use a repaired fuse or shorted fuse holder.
Confirm, before turning ON power supply, that the machine is properly installed, the power
supply is adequate, grounding is properly made, and the fuses fit the supply voltage and rated
current.
Be sure to turn OFF the POWER switch of the machine, before cleaning the parts using
inflammable liquid, for prevention of possible fire or explosion.
Also, ensure that the area is adequately ventilated to remove toxic fume and vapor from the
cleaning liquid.
As general rule, always turn OFF the POWER switch, unplug the power line, and turn OFF air
supply before conducting maintenance work. Only when checking the movement of the
machine while conducting the maintenance work, connect the power line, turn ON the POWERswitch, and turn ON air supply.
Open a protective cover only when it is necessitated for performing the maintenance work.
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4.1 Preparation for Operation
Before turning on the main power switch, make sure to confirm that the equipment are
properly fixed, setting of power unit matches to the power supply source, grounding is
made properly and fuse matches to the supply voltage.
After installing the picker by referring to the "2.2.2 Installation", prepare the picker for operation as
follows:
(1) Set up the external equipment including Vision System. For details, refer to the manuals of those
equipments.
(2) Run out or remove all the devices from the picker.
(3) Confirm the type of handling device.
(4) Connect the test head to the picker and confirm Tester I/F.(5) Connect the air supply to the picker and turns on the power switch.
When the picker starts up normally, the below screens appear on the display one after another.
If the below screen does not appear but the desktop screen of Windows 2000, double click the
Icon of 3572PK on the desktop to boot up the control software.
The below screens will appear in order.
Press the INTERLOCK switch which is blinking.
NOTICE
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(6) Press the Start Switch.
The following screen appears and each section starts initialization.
The movable parts perform the following initial operations at low speed (about
20% of high speed).
Start the initial operationMove to the initial check position
Move to the waiting position
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W RNING
The following three functions show that the picker is under initial operation.
The message of initializing in progress appears at upper right on the operation screen.
All three lamps (green, yellow, red) of the signal tower unit blink.
Alarm sound is raised.
When it is necessary to access the movable parts by inserting your hands, fingers, or
face into inside the picker, wait until all the movable parts stop completely after the
initial operations. After the picker stops completely, the message of STOP" appears
on the operation screen, and the red lamp of the STOP switch lights up.
(b) The following screen appears when initialization of each section completes.
Specify an operator name and a password for logging in, and press the LOGIN button.
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(7) Open the door of supply section and withdraw the base plate on which the wafer sheet storing cassette is
placed.
(8) Set the wafer sheet storing cassette on the base plate and put it back to the original position.
(9) Close the door of supply site.
(10) The preparation for operation completes by the above. When there is abnormality in the picker or if
there is an operator call, the alarm screen showing the contents and position will be displayed. Take
necessary steps in accordance with the instructions indicated in the alarm message or operation call.
For the details of the alarm message and the operation call, refer to the "4.4 Monitor
Display and How to Recover from Error".
Wafer sheet Storing Cassette
Base Plate
Door
NOTICE
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4.2 Operating Procedures
After completing the preparation for the picker operation by referring to the "4.1 Preparation for
Operation", start to operate the picker as follows:
(1) Set the bulk bin at bin storing position.
(2) Set the taping unit in the following steps. Turn off all the switches on each taping controller unless
otherwise instructed.
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(a) Set the AUTO/MANU switch to MANU, and turn on the PITCH MOTOR switch and the WIND UP
MOTOR switch.
(b) For each taping unit, set the carrier tape reel, the seal tape reel, and the wind-up reel.
Carrier Tape Reel
Reel Clamper
Winding Reel
After setting the carrier tape to the reel,
hold it by the clamper.
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Seal Tape
Seal Tape Cover
Screw Cap
After setting the seal tape to the reel,
hold it by the clamper.
Seal Tape Reel
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(c) Set the carrier tape as follows:
(i) Set the carrier tape to each pulley as shown in the figure below, and set it to the sprocket by raising theguide roller on the inlet side.
Wind-up Reel Reel Hook
The reel hook must be unhooked (raised) before setting or taking off
the wind-up reel.
After setting/taking off the reel, be sure to hook the reel hook.
Taping Unit
Carrier Tape
Carrier Tape Reel
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(ii) Insert the carrier tape into the tape loader as shown in the figure above, and set it to the sprocket on the
taping inlet side.
Pulley
Tape Loader
Sprocket (inlet side)Sprocket (outlet side)Rubber Roller
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(iii) After setting carrier tape to the sprocket on the taping inlet side, turn the handle manually to send the
carrier tape forward. After the carrier tape has arrived at the sprocket on the outlet side, lift the rubber
roller and make the front end of the carrier tape out about 10 cm from the sprocket by manually rotating
the handle.
(iv) Turn OFF the PITCH MOTOR switch.
Rubber Roller
Handle
Sprocket
PITCH MOTOR Switch
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(v) Set a seal tape to the tension assy and guide roller as shown in the picture below.
Seal Tape Reel
Tension Assy
Guide Roller
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(6) Set the carrier tape on the wind-up reel as shown in the picture below.
(7) Turn off the WIND UP Motor switch. Then the wind-up reel rotates to wind the carrier tape about the
required quantity and stops the rotation.
(8) Set the AUTO/MANU switch to AUTO.
Carrier Tape
Wind-up Reel
WIND UP MOTOR Switch
AUTO/MANU Switch
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(9) Perform the setting of each item (parameter). For the details of setting, refer to the Operation Manual
Chapter 5.
This section explains the setting of Lot ID, Device ID and Sort Mode as examples.
(10) Click the OPERATION button. Then, the following dialog box appears.
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4. Operation 4-17 2006082500T
(11) Click the LOT SET button. Then, the following dialog box appears.
(12) Specify the Lot ID, the Device ID and the Sort Mode, and click the OK button.
(13) Press the AUTO button.
When selecting the MANU button, open the door for manual
supply and set a wafer sheet at the lower lane of table unit.
After checking the indication light at the front of door, press
the SUPPLY button to supply the wafer sheet.
NOTICE
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NEW CASSETTE Switch
SUPPLY Switch
(14) Press the blinking NEW CASSETTE switch, then press the SUPPLY switch.
Use the NEW CASSETTE switch only when loading the wafer sheets automatically
from the first top of the piled wafer sheets in the cassette at device supply site.
If the sorting is suspended by some reason and the wafer sheet is restored into thecassette before ending the sorting of all the devices, press the SUPPLY switch. The
restored wafer sheet is loaded again to the sorting site and the sorting starts from where it
was suspended.
(15) Press the START switch. The following screen appears and the picker starts loading of wafer ring.
NOTICE
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(16) When a wafer sheet is transferred to the sorting site, in accordance with the Map File
Data (each alignment data and test result data for sorting) supplied by the picker, the picker starts
sorting.
(17) When the sorting of the first wafer sheet completes, the first wafer sheet is replaced with the secondwafer sheet. After the replacing, the sorting of a second wafer sheet starts. Repeating those actions, the
picker sorts the devices on wafer sheets in the cassette successively.
(18) When the sorting of all the devices on every wafer sheet in the cassette completes, the picker stops by
lot end. The NEW CASSETTE switch starts blinking and an alarm sounds.
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4. Operation 4-20 2006082500T
4.3 Vision Functions
4.3.1 Theta Rough Alignment Function
4.3.1.1 Outline
This function supports model image registration (Pre Align 1, 2, 3, 4 and Top, Right, Left, Bottom) which is
performed in camera1 when a new device parameter is created. Normally, at the time of model imageregistration for PreAlign1,2,3, 4, and Top, Right, Left, Bottom, after correcting a plate inclination using a
handy terminal, it must register, but since this function corrects automatically before registration, it becomes
easy to register.
4.3.1.2 Necessary condition
If the following two conditions are applicable, this function is performed automatically.
Condition 1 Pre Alignment is enabled.
[Operation menuSettingControl ModeFunction Setting / Main Common]
Fig1
Refer to the PreAlignment_English.doc for the detail of function.
Condition 2 There are some which are not registered at least one of eight model
images (PreAlign1,2,3,4 and Top, Right, Left, Bottom).
Pre Alignment Function
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4.3.1.3 Flow
Please advance as the following procedures.
(1) Model registration
First, because the following alarm occurs, register a model image, please. At this point, because the machinestops at the first corner of plate, register a model image of the first corner device.
a. Alarm occurs (No Model Registration for Theta Rough Align). (Fig2)
Fig 2
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4. Operation 4-22 2006082500T
b. Set the window so that the first corner device is surrounded. (Fig3)
Fig 3
c. Set the origin to the center of the first corner device. (Fig4)
Fig 4
Window setting
Origin setting
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4. Operation 4-23 2006082500T
d. Push Model Regi. and register a model image.
Because this model image is used temporarily, it is not saved at a file.
The position of first corner.
The following figure 5 shows a corner device.
Fig 5
(2) Start the machine.
After model registration, press Start button of machine, please. As shown by Fig 5, the
machine moves in order of 1st, 2nd, 3rd, and 4th corner, when two searches of a device are
successful, angle correction is performed and it shifts to the next process
(Refer to the PreAlignment_English.doc about next action).
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4.3.1.4 Alarm
If the corner device is not found in two or more places, alarm occurs. (Theta Rough Check Error! Please
Check Theta Rough Image from Vision View) (Fig6). Prepare a ring which have four corner devices and try
again.
Fig 6
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4.3.2 Pre Alignment Function
4.3.2.1 Outline
This function searches a plate corner position by using an edge frame of the periphery part of a plate and
calculates an exact plate attachment position. This function corrects a plate inclination and protects a
mis-sorting.
4.3.2.2 Parameter
The parameter used by this function is as follows.
(1) Enable or Disable setting.Fig
[MenuSettingControl Mode SettingSelectionFunction Setting / Main Common]
Fig
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4. Operation 4-26 2006082500T
(2) Corner device position setting. (Fig2)
In order to perform a proper movement, it is necessary to set a parameter in Fig 2. The
machine uses this position data and goes to search a plate corner.
[MenuSettingProductSelectionPackage Param]
Number of Reference Mark Input the number of corner. Normally, it is 4.
Ref1, Ref2, Ref3, Ref4 Input the relative corner position from the first corner
position.
Fig
Corner device position parameter for
Pre Alignment
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The relation of each corner is as follows. (Fig3, Fig4)
Fig
The case which the ring direction is not 0 degree.
In case of 180 degree.
Fig
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4. Operation 4-28 2006082500T
(3) Brightness setting
Input a LED brightness setting for Pre Alignment.Fig
[MenuSettingProductSelectionVision Standard]
Camera 1 Light Brightness This is for device. Normally, this is used. If a device andan edge frame can be seen by same brightness setting,
this is used.
Different Brightness For Edge Frame If the edge frame can not be seen by same
brightness setting as device alignment, this is
used.
Fig5
For device For edge frame
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(4) Search Score Setting
There are two score settings for search.
The score shared between all device parametersFig
The setting in this dialog is common to all device parameters.[MenuMaintenanceConfigurationSystemVisual Config]
Reference Mark Score
Fig
Search score for edge frame
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Individual Score(Fig
In order to set for each device parameter, it sets in the following dialog.
[MenuSettingProductSelectionVision Standard]
Ref Search Score
Fig
Individual score for edge frame
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4.3.2.3 Flow
The flow of this function is as follows. Please advance as the following procedures. Because model
registration is performed first, please prepare a wafer ring with an edge frame and a corner device.
(1) The first corner ( Reference Mark Position 1 (Top Right) )(a) Model registration of Pre Alignment1
A new device parameter is created, if this function is enabled, alarm occurs, and the machine stops at the first
corner.
Alarm occursNo Model Registration for Reference Mark Check.Fig
Fig
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Model registration
Register the first corner edge frame as a model image.Fig
Fig9
Push Model Regi button and register.
Camera
Pre Alignment 1Set the window so that
the corner edge frame
is surrounded.
Set the origin to the
center of corner device.
Layout of an edge
frame is shown.
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The cautions at the time of registration
When model registration is performed in PreAlignment 1, 2, 3, and 4 , if many features
are found on an image , a message as shown in Fig10 comes out. In this case, because
registration is not completed, please register again.
Fig
Press Start button.
After registration is completed, start the machine. The machine performs the next action.
Real time edge frame check is enabled. Model registration of Top Edge (Page 11)
Real time edge frame check is disabled. Model registration of Pre Alignment2
(Page 15)
Refer to the RealTimeEdgeFrameCheck_English.doc for the detail of Real time edge frame
check function.
In this case, this message comes out.
Many features are found.
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(b) Model registration of Top Edge
If there is no model image, alarm occurs. The machine stops at the first corner.
Alarm occurs.No Model Registration for Edge Frame Check (Top Edge Frame). (Fig11
Fig
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Model registration.
Register the top edge frame as a model image.Fig
Fig12
Push Model Regi button and register.
Press Start button.
After registration is completed, start the machine. The machine performs the next action (Model
registration of Right Edge).
Camera
Top - Edge
Set the window so that the top edge
frame is surrounded.
Set the origin to the center
of device next to setting
window.
Layout of an edgeframe is shown.
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(c) Model registration of Right Edge
If there is no model image, alarm occurs. The machine stops at the first corner.
Alarm occurs.No Model Registration for Edge Frame Check (Right Edge Frame)Fig13
Fig3
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Model registration
Register the right edge frame as a model image.Fig
Fig1
Push Model Regi button and register.
Press Start button.
After registration is completed, start the machine. The machine performs the next action (Model
registration of Pre Alignment 2).
Camera
Right - Edge
Set the window so that the
right edge frame is
surrounded.
Set the origin to the center
of device next to setting
window.
Layout of an edge
frame is shown.
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(2) The second corner ( Reference Mark Position 2 (Top Left) )
(a) Model registration of Pre Alignment2
If there is no model image, alarm occurs. The machine stops at the second corner.
Alarm occurs.No Model Registration for Reference Mark Check.Fig
Fig
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Model registration
Register the second corner edge frame as a model image. (Fig 16)
Fig
Push Model Regi button and register.
The cautions at the time of registration
The same as PreAlignment1, When model registration is performed, if many features
are found on an image , a message as shown in Fig10 comes out. In this case, because registration
is not completed, please register again.
Press Start button.
After registration is completed, start the machine. The machine performs the next action.
Real time edge frame check is enabled. Model registration of Left Edge (Page 17)
Real time edge frame check is disabled. Model registration of Pre Alignment3
(Page 19)
Refer to the RealTimeEdgeFrameCheck_English.doc for the detail of Real time edge frame
check function.
CameraPre Alignment
Set the window so that the
corner edge frame is
surrounded.
Set the origin to the
center of corner device.
Layout of an edge
frame is shown.
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(b) Model registration of Left-Edge
If there is no model image, alarm occurs. The machine stops at the second corner.
Alarm occurs.No Model Registration for Edge Frame Check (Left Edge Frame)(Fig17)
Fig
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Model registration
Register the left edge frame as a model image.Fig8
Fig1
Push Model Regi button and register.
Press Start button.
After registration is completed, start the machine. The machine performs the next action (Model
registration of Pre Alignment 3).
Camera
Left - Edge
Set the window so that the
left edge frame is
surrounded.
Set the origin to the center
of device next to setting
window.
Layout of an edge
frame is shown.
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(3) The third corner ( Reference Mark Position 3 (Bottom Left) )
(a) Model registration of Pre Alignment3
If there is no model image, alarm occurs. The machine stops at the third corner.
Alarm occurs.No Model Registration for Reference Mark Check. (Fig
Fig
9
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Model registration
Register the third corner edge frame as a model image. (Fig 20)
Fig 20
Push Model Regi button and register.
The cautions at the time of registration
The same as PreAlignment1, 2, when model registration is performed, if many
features are found on an image, a message as shown in Fig10 comes out. In this
case, because registration is not completed, please register again.
Press Start button.
After registration is completed, start the machine. The machine performs the next action.
Real time edge frame check is enabled.Model registration of Bottom Edge (Page 21)
Real time edge frame check is disabled.Model registration of Pre Alignment4
(Page 23)
Refer to the RealTimeEdgeFrameCheck_English.doc for the deta