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1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen, Shamik Das, Victor Zhirnov and Jim Hutchby

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Page 1: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

ITRS Public ConferenceEmerging Research Devices

2013 ERD Chapter Preparation

An Chen, Shamik Das, Victor Zhirnov and Jim Hutchby

Page 2: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

2 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Hiro Akinaga AIST Tetsuya Asai Hokkaido U. Yuji Awano Keio U. George Bourianoff Intel Michel Brillouet CEA/LETI John Carruthers PSU Ralph Cavin SRC Chorn-Ping Chang AMAT An Chen GLFOUNDRIES U-In Chung Samsung Byung Jin Cho KAIST Sung Woong Chung Hynix Luigi Colombo TI Shamik Das Mitre Antoine Khoueir Seagate Bob Doering TI Tetsuo Endoh Tohoku U. Bob Fontana IBM Paul Franzon NCSU Akira Fujiwara NTT Mike Garner Stanford Dan Hammerstrom PSU Wilfried Haensch IBM Tsuyoshi Hasegawa NIMS Shigenori Hayashi Panosonic Dan Herr UNCG/JSNN Toshiro Hiramoto U. Tokyo Matsuo Hidaka ISTEK Jim Hutchby SRC Adrian Ionescu EPFL Kiyoshi Kawabata Renesas Tech Seiichiro Kawamura JST Suhwan Kim Seoul Nation U Hyoungjoon Kim Samsung Atsuhiro Kinoshita Toshiba Dae-Hong Ko Yonsei U. Mark Kryder INSIC

Franz Kreupl Tech. U. Munich Zoran Krivokapic GLOBALFOUNDRIES Kee-Won Kwon Seong Kyun Kwan U. Jong-Ho Lee Hanyang U. Thomas Liew ASTAR DSI Lou Lome IDA Matthew Marinella SNL Hiroshi Mizuta U. Southampton Kwok Ng SRC Fumiyuki Nihei NEC Dmitri Nikonov Intel Kei Noda Kyoto U. Ferdinand Peper NICT Er-Xuan Ping AMAT Yaw Obeng NIST Yutaka Ohno Nagoya U. Dave Roberts Nantero Shintaro Sato Fujitsu Labs Barry Schechtman INSIC Sadas Shankar Intel Takahiro Shinada AIST Masayuki Shirane U. Tokyo Kaushal Singh AMAT Satoshi Sugahara Tokyo Tech Shin-ichi Takagi U. Tokyo Ken Uchida Keio U. Thomas Vogelsang Rambus Yasuo Wada Toyo U. Rainer Waser RWTH A Franz Widershoven NXP Jeff Welser NRI/IBM Philip Wong Stanford U. Dirk Wouters IMEC Kojiro Yagami Sony David Yeh SRC/TI Hiroaki Yoda Toshiba In-K Yoo SAIT Victor Zhirnov SRC

Emerging Research Devices Working Group

Page 3: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

3 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

year

Beyond CMOS

Elements

Existing technologies

New technologies

Evolution of Extended CMOS

More Than Moore

Page 4: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

4 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

2013 ERD ChapterAssessing Emerging Research --

Memory Devices Logic Devices More-than-Moore Devices Architectures

Benchmarking Emerging Devices

Page 5: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

5 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Key Messages♦ Emerging Research Memory:

Remove Nanomechanical Memory from ERD technology table Recommend close tracking of RRAM by PIDS Workshops on Memory Select Devices and Storage Class Memory completed

Quantitative data for roadmapping Implement multilevel energy analysis for different memory technologies

♦ Emerging Research Logic: Emerging logic device workshop completed: device maturity evaluation Recommend close tracking of p-III-V, n-Ge, nanowire FET, TFET by PIDS Add emerging interconnect discussions in ERD Together with RFAMS, mapping ERD devices for analog/RF applications

♦ More-than-Moore Section: New entry will be added: on-chip energy harvesting devices Develop appropriate figure-of-merits for emerging devices in MtM applications

♦ Emerging Architectures: Plan workshop on emerging research architectures (Dec. 8, San Francisco, CA) Add emerging memory interface for Storage Class Memory

Page 6: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

6 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Cross-TWIG Interactions• Discussions with PIDS on emerging research memory and

logic devices for close tracking of maturing technologies – RRAM

– Nanowire FET, Tunnel FET, p-III-V, n-Ge

• Formed a taskforce with RF/AMS for evaluation of ERD devices for RF/Analog application– Envisioned outcome: a parametrization table in ERD MtM section

• Formed a taskforce with Interconnects for exploring emerging interconnects solutions for emerging research devices– Envisioned outcome: expanding ERD tables to include emerging

interconnect solutions

• Initiated discussion with Design and AP on exploring circuit design and application space for ERD

Page 7: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

7 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 7

2012 ERD Workshops(Co-sponsored by NSF)

• Workshop on assessment of options for emerging memory select devices– Noorwijk, the Netherlands, April 22, 2012– Status: Completed and report finished

• Workshop on emerging architectures for storage class memory  – Monterey, CA, July 8, 2012– Status: Completed and report finished

• Workshop on emerging research logic devices – Bordeaux, France, September 21, 2012 (ESSDERC-linked)– Status: Completed and report in progress

• Workshop on emerging research architectures – San Francisco, CA, Dec 8, 2012 (IEDM-linked)– Status: Agenda completed

Page 8: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

8 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 8

Select Device Workshop Outcome• Workshop presentations will be put on ITRS website

• Workshop results are summarized in a report (finished)

• Several take-away messages– There are several categories of memory select devices depending on memory

device type and applications• e.g. RRAM or PCM; embedded vs. stand-alone

• ERD Storage Class Memory workshop in July 2012 reiterated the importance of select devices

– A theoretical exploration of a ‘selector-less’ memory cell needs to be performed

• Memory element with a build-in select element (e.g. a Schottky diode)

• Materials/structure optimization for both memory and selector functions

• Materials and Devices modeling could provide an important insight

– Contact resistance is an important practical performance limit • ERM/ERD contact resistance e-workshop being planned

Page 9: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

9 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Storage Class Memory Workshop

9

Page 10: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

10 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 10

SCM Workshop Outcome• Over 50 participants

• Workshop presentations will be put on ITRS website

• Workshop results will be summarized in a report

• Several take-away messages

– A comprehensive multilevel energy analysis of different memories is needed

• A follow-up ERD study is planned

– Flexible interfaces (device-independent)

• A new topic for emerging architecture

– 'Generic' memory specs may need some discussion and rationalization

– Some memory devices are unlikely candidates (e.g., FRAM, Macromolecular memory)

Page 11: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

11 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

ERD Logic Workshop

11

9:00 Overall workshop goals and objectives Victor Zhirnov / NCSU & SRC – USA  

Session I: Circuit Requirements & Expectations for Emerging Research Devices9:15 Digital Circuits David Frank / IBM - USA9:45 Analog/Mixed Signal/ RF Circuits David Robertson / Analog Devices – USA10:15 Programmable nanowire circuits for

nanoprocessorsShamik Das / MITRE – USA

 10:45 Break

 Session II: Emerging Research Devices for Nanocircuits11:00 Tunnel FET Marc Heyns / IMEC – Belgium 11:30 CNT FET Subhasish Mitra / Stanford – USA 12:00 Graphene transistors Frank Schwierz / TU Ilmenau – Germany

12:30 – 14:00 Lunch14:00 NEMS Devices Adrian Ionescu / EPF Lausanne – Switzerland 14:30 Atomic switch and memristor Dmitri Strukov / UC Santa Barbara – USA15:00 MOTT FET Akihito Sawa / AIST – USA15:30 Break15:45 Spin FET Viktor Sverdlov / TU Wien – Austria 16:15 Nanomagetic and all spin logic Wolfgang Porod / U Notre Dame – USA 16:45 Spin wave devices Alexander Khitun / UCLA – USA 17:15 Break17:30 Summary and wrap up Jim Hutchby/ SRC- USA18:00 Adjourn

Page 12: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

12 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

ERD Logic Devices

Mechanism

State variableC

harg

eN

on-c

harg

e

Conventional Novel

Planar Si FETPlanar Si FETSpinFETSpinFET

Spin wave logicSpin wave logic

IMOSIMOS NEMSNEMS

TFETTFETAtomic switchAtomic switch

Mott FETMott FET Neg-Cg FETNeg-Cg FET

Nanomagnet logicNanomagnet logic

BiSFETBiSFET STT logicSTT logic

All spin logicAll spin logic

Red: devices covered in the

Logic Workshop

III-VIII-V CNT FETCNT FET

GNR FETGNR FET FinFETFinFET

Page 13: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

13 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Messages from the Logic Workshop (1)• Logic is only a small portion of energy consumption

and chip area • Massive parallelism may or may not work • Cost = manufacturing cost + usage cost (energy per

operation) • The insertion of emerging devices will be at 3D

structures (e.g., FinFET, nanowire, etc.). Is surface-type device relevant?

• Design solutions for device problems, e.g., imperfection-immune VLSI CNT circuits

• Design-device-material interactions

Page 14: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

14 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Messages from the Logic Workshop (2)• Evaluate tradeoffs in emerging devices, e.g.,

mobility-bandgap constraints of graphene devices • How to utilize unique characteristics of emerging

devices, e.g., nonvolatility, multiple states, re-programmability, etc.

• How to utilize unique emerging material properties, e.g., graphene/2D-materials heterostructures? How does integration impact material properties, e.g., topological insulators?

• Appropriate figure-of-merits to evaluate beyond-CMOS devices

Page 15: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

15 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Emerging Architecture WorkshopDec. 8, 2012 (Saturday), Hilton San Francisco Union Square, 333 O’Farrell Street, Room Franciscan A

Page 16: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

16 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Key Messages♦ Emerging Research Memory:

Remove Nanomechanical Memory from ERD technology table Recommend close tracking of RRAM by PIDS Workshops on Memory Select Devices and Storage Class Memory completed

Quantitative data for roadmapping Implement multilevel energy analysis for different memory technologies

♦ Emerging Research Logic: Emerging logic device workshop completed: device maturity evaluation Recommend close tracking of p-III-V, n-Ge, nanowire FET, TFET by PIDS Add emerging interconnect discussions in ERD Together with RFAMS, mapping ERD devices for analog/RF applications

♦ More-than-Moore Section: New entry will be added: on-chip energy harvesting devices Develop appropriate figure-of-merits for emerging devices in MtM applications

♦ Emerging Architectures: Plan workshop on emerging research architectures (Dec. 8, San Francisco, CA) Add emerging memory interface for Storage Class Memory

Page 17: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

17 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Backup slides

Page 18: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

18 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

One Diode – One Resistor (1D1R) Memory Cell

H-S. P. Wong – Stanford U.

Page 19: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

19 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Memory Hierarchy – Future Memory Challenge

Source: Al Fazio (Intel)NVM cost/gigabyte ~ $1

SCM

Page 20: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

20 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

3 nm

Pt PtTiO2 TiO2-x

oxidized reduced

ERD Memory Candidates

Page 21: 1 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012 ITRS Public Conference Emerging Research Devices 2013 ERD Chapter Preparation An Chen,

21 ERD 2012 ITRS Winter Conference – Hsinchu, Taiwan – Dec. 05, 2012

Potential of Memory Candidates for SCM Applications

21

 

 Prototypical (Table ERD3)

     Emerging (Table ERD5)  

 

Parameter FeRAM STT-MRAM PCRAMEmerging

ferroelectric memory

Nanomechanical

memory

Redox memory

Mott Memory

Macromolecular memory

Molecular Memory

Scalability

MLC

3D integration

Fabrication cost

Endurance

?

?

?

?

?

?

?