25 gbps and beyond: vcsel development at philips [8639-18] · 25 gbps and beyond: vcsel development...

12
25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach, Michael Riedl, Roger King Philips Technologie GmbH U-L-M Photonics, Lise-Meitner-Str.13, 89081 Ulm Germany Abstract In comparison to widely used InGaAs Quantum Wells (QW) in high speed VCSELs operating at 25 Gbps and beyond, we present an investigation on the use of GaAs QWs, which have proven their ability to serve reliably in 10 Gbps and 14 Gbps VCSEL products and allow for an evolutionary extension of data rates based on mature technology. As data centers continuously increase in size, the demand for longer reach optical links within these data centers is addressed by the proposal of using small spectral width single-mode VCSELs that offer the potential of significantly reduced chromatic dispersion along optical fibers of several 100 m length. Performance and modeling parameters of single-mode VCSELs are being compared to those of typical multi-mode VCSELs built from identical epitaxy and process technology. Keywords: VCSEL, high speed modulation, optical interconnect,active optical cable,single- mode, 25 Gbps Introduction In recent years several groups have reported excellent results on high speed data transmission using VCSELs as light sources. Data rates of 25 Gbps up to 55 Gbps have been shown even at elevated temperatures. A list of recent publications can be seen in Table 1. Very low power consumption, as well as extended reach by utilizing the benefits of single-mode VCSELs have been presented 8 . These results are encouraging in order to meet the demands of next generation data transmission standards like 100GBASE-SR4, FIBRE CHANNEL32, or INFINIBAND EDR. Whereas InGaAs QWs in multi-mode VCSELs are widely used in VCSEL technology for achieving very high data rates at or above 25 Gbps due to their higher differential gain, we would like to focus differently on two crucial aspects of VCSEL developments for these emerging and short term demands. First, we evaluate experimentally the proposed advantage of compressively strained InGaAs Quantum Wells (QWs) against GaAs QWs at 25 Gbps. Second, we compare the performance of GaAs QW based multi-mode VCSELs and single-mode VCSELs at operating speed of 25 Gbps. The presented results are taken into account in design considerations for next generation VCSELs that will enable high-speed active optical cables, transceivers, and interconnects. Vertical-Cavity Surface-Emitting Lasers XVII, edited by Kent D. Choquette, James K. Guenter, Proc. of SPIE Vol. 8639, 86390J · © 2013 SPIE · CCC code: 0277-786X/13/$18 doi: 10.1117/12.2002029 Proc. of SPIE Vol. 8639 86390J-1

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Page 1: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

Michael Riedl, Roger King

Philips Technologie GmbH U-L-M Photonics, Lise-Meitner-Str.13, 89081 Ulm Germany

Abstract In comparison to widely used InGaAs Quantum Wells (QW) in high speed VCSELs operating at 25 Gbps and beyond, we present an investigation on the use of GaAs QWs, which have proven their ability to serve reliably in 10 Gbps and 14 Gbps VCSEL products and allow for an evolutionary extension of data rates based on mature technology. As data centers continuously increase in size, the demand for longer reach optical links within these data centers is addressed by the proposal of using small spectral width single-mode VCSELs that offer the potential of significantly reduced chromatic dispersion along optical fibers of several 100 m length. Performance and modeling parameters of single-mode VCSELs are being compared to those of typical multi-mode VCSELs built from identical epitaxy and process technology.

Keywords: VCSEL, high speed modulation, optical interconnect,active optical cable,single-mode, 25 Gbps

Introduction In recent years several groups have reported excellent results on high speed data transmission using VCSELs as light sources. Data rates of 25 Gbps up to 55 Gbps have been shown even at elevated temperatures. A list of recent publications can be seen in Table 1. Very low power consumption, as well as extended reach by utilizing the benefits of single-mode VCSELs have been presented8. These results are encouraging in order to meet the demands of next generation data transmission standards like 100GBASE-SR4, FIBRE CHANNEL32, or INFINIBAND EDR. Whereas InGaAs QWs in multi-mode VCSELs are widely used in VCSEL technology for achieving very high data rates at or above 25 Gbps due to their higher differential gain, we would like to focus differently on two crucial aspects of VCSEL developments for these emerging and short term demands. First, we evaluate experimentally the proposed advantage of compressively strained InGaAs Quantum Wells (QWs) against GaAs QWs at 25 Gbps. Second, we compare the performance of GaAs QW based multi-mode VCSELs and single-mode VCSELs at operating speed of 25 Gbps. The presented results are taken into account in design considerations for next generation VCSELs that will enable high-speed active optical cables, transceivers, and interconnects.

Vertical-Cavity Surface-Emitting Lasers XVII, edited by Kent D. Choquette, James K. Guenter,Proc. of SPIE Vol. 8639, 86390J · © 2013 SPIE · CCC code: 0277-786X/13/$18

doi: 10.1117/12.2002029

Proc. of SPIE Vol. 8639 86390J-1

Page 2: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

Table 1: Recently published results of high data rate transmission using VCSELs

Requirements on high-speed VCSELs As a general requirement, optical interconnects must offer performance and scalablity, e.g. highly dense large number of ports, at the same time. In order to enable this density, low power consumption and small size is important to achieve. As already mentioned, an additional requirement on longer reach connections while maintaining the use of standard OM3 or OM4 fibers is asking for reduced spectral width lasers. VSR optical interconnects, addressing, e.g., on board chip to chip communication are requiring very low bit error rates (BER) of less than 10-18 at 25 Gbps as error correcting protocols are not acceptable due to their impact on latency.

For all mentioned applications, a longevity greater 10 years at temperatures between 0°C and 70°C is required.It is important to note that the junction temperature within the VCSEL structure will be at 15 and 85°C, respectively. According to roadmaps of IEEE, INFINIBAND association, and FIBRE CHANNEL association, the market introduction of 25/28 Gbps VCSEL based active optical cables is expected latest in 2014.

VCSEL design consideration The basic improvement needed towards 25/28 Gbps is of course increasing the bandwidth. An appropriate approach is to use compressively strained QWs built of InGaAs instead of GaAs, which results in an increase of differential gain. In addition, by reducing the photon lifetime the damped resonator behavior can be optimized. Obviously, parasitic capacitances need to be minimized, which is achieved by the use of semiinsulating substrates that minimize pad capacitance, and the implementation of a second

data rate wavelength QW material

FINISAR1 55 Gbps 850nm InGaAs

TU BERLIN2 49 Gbps 980 nm InGaAs

CHALMERS3 44 Gbps 850 nm InGaAs

VI SYSTEMS4 40 Gbps 850 nm InGaAs

FURUKAWA5 25 Gbps 1060 nm InGaAs

AVAGO6 25 Gbps 850 nm

SUMITOMO7 25 Gbps 850 nm InGaAs

current apperture (see Fig. 1) in adddition to a ssmall mesa ddiameter of oonly 28 µm ffor the multii-mode devvices and 23 µm for the single-modee devices (Fiig. 2), whichh finally resuults in a reduuced mesa cappacitance.

Proc. of SPIE Vol. 8639 86390J-2

Page 3: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

-

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parison orence betweetructure we hthe QW stru

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f

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Fig. 2VCSE

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2: SEM photoEL mesa stru

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esigns is abo

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ograph of a 2ucture.

with GaAined InGaAsand processel other param6 µm active drent of 6.0 m

mW vs. 2.2 msigns and wiout 12 mW to

ly low operaµm to 4 µm l

25 Gbps

As QWs s QWs and 3ed devices thmeters identidiameter VC

mA, the differmW at 85°C thin the obseo 13 mW.

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hat ical. CSEL rence are erved

Fig. 3: LIdiameter QWs.

IV charaterisVCSEL con

stics of a 6 µmtaining 5 InG

m GaAs

Fig. 4diameQWs.

4: LIV charaeter VCSEL.

ateristics of aL containing 3

a 6 µm 3 GaAs

Proc. of SPIE Vol. 8639 86390J-3

Page 4: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

s

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Based onobvious aresponsesobvious dfor 25 Gbthe InGaAand 3.4 moffer the Gbps or 1

Fig. 5: Eywith InGamA, modstream is

n the prospecadvantage ins in Fig. 5 (fdifference ofbps and PRBAs based VC

mW respectivpossibility n14 Gbps VC

ye diagram oaAs QWs. Biulation volta25 Gbps PR

ct of significn the high spfor the InGaAf the eye ope

BS31 data strCSEL and 5.vely. The feanot to change

CSEL produc

f a 6 µm VCias current isage 0.50 Vpp

RBS31.

antly highereed characteAs based devening, jitter, ream, look re0 dB for theasibility of ue the materiacts.

SEL s 6.0 . Data

r differential eristics is expvice) and Figor ringing ceasonably go

e GaAs basedusing GaAs Qal compositio

Fig. 6with Gmodustream

gain for thepected. Wheg. 6 (for the an be seen. Bood. The extd VCSEL. TQWs also foon in the QW

6: Eye diagraGaAs QWs.

ulation voltagm is 25 Gbps

e InGaAs basen comparingGaAs basedBoth eye diatinction ratio

The OMA vaor data rates Ws compare

am of a 6 µmBias currentge 0.50 Vpp s PRBS31.

sed device, ag the large s

d device), noagrams, recoo is 4.9 dB foalues are 3.1 of 25 Gbps dd to mature

m VCSEL t is 6.0 mA, . Data

an signal o orded for

mW does 10

Commparison oof single-mmode vs. multi-moode VCSELLs Single-mmode VCSELLs are offerinng inherent aadvantages wwhen being ccompared wiith multi-moode VCSELs:

- loower operatinng currents, thus smallerr power conssumption - hiigher photonn densities, thhus expectedd higher moddulation banndwidth

On the otther hand, thhe stronger confinement of current annd optical fieeld may resuult in higher current densities, highher series resistance, andd comparablle reliability has to be prroven.

In the folllowing subcchapters, singgle-mode (3 µm aperturee) and multii-mode (6 µmm aperture) VCSELs are being coompared. Alll devices havve been prodduced on thee same waferr for fair comparisson.

Proc. of SPIE Vol. 8639 86390J-4

Page 5: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

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emperatures the multi-moral width and

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8: LIV charae VCSEL for. Operating c

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ences betwee0.5 mW andating laser c

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or the compaode VCSEL

acteristics of r temperaturcurrent is 2.0

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. 9 mode on in

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Fig. 9: OpVCSEL aat 20°C a

ptical spectruat 2.0 mA lasnd 85°C.

um of a singler current m

le-mode measured

Fig. 1VCSEat 20°

10: Optical spEL at 2.0 mA°C and 85°C

pectrum of aA laser curreC.

a multi-modeent measured

e d

Proc. of SPIE Vol. 8639 86390J-5

Page 6: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

-20 -7 -2

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Fig. 11: GdistributiLaser cur For opticshould ploptical fib

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a donut shapce angle is sir divergenceA are 24 deg

Gaussian shapion of a singlrrent is 2.0 m

al coupling lay a minor rber have to b

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SEL.

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Figg. 13: Electriical equivalent circuit of the combinaation of VCSEEL driver annd VCSEL.

Proc. of SPIE Vol. 8639 86390J-6

Page 7: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

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urrent [mA]

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T

n S11 measure regarded asgnificant diffingle-mode Vr the tempera

ation of R1 foures is slightr 25°C and 8

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Table 2: List

rements, R1,s constant anferences betwVCSEL is alatures of 25

or the multi-tly higher (F85°C, respec

are introduc

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iption r output resir output capawire inductaapacitance on/oxide capr resitance on/aperture

elements of t

have been dis set to 1 fF- and multi-mant across thend a laser cu

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lowing parag

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the equivalen

derived from F. The mirrormode VCSEe current ran

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graph will on

nt circuit.

appropriate r resistance R

ELs. As shownge and is almA.

nge and alsocurrent are 3

nly focus on

fitting curveR1 does not wn in Fig. 14so constant a

o for the diffe31 Ohms and

n the

es.

4, the at 23

erent d 28

Fig. 14: Mmode VCand at tem The diffecurrent foCompare6.0 mA, t

Mirror resistaCSEL for curmperatures o

erence in the or the singleed to only 63the ohmic lo

ance R1 for arents up to 3of 25°C and 8

junction/ape-mode VCSE Ohms at 25

oad for the dr

a single-3.0 mA 85°C.

erture resistaEL, R2 is as

5°C and 60 Oriver is almo

Fig. 1modeand a

ance R2 is ofhigh as 237 Ohms at 85°ost 4 times h

15: Mirror ree VCSEL forat temperatu

f more impo Ohms at 25°C for the muhigher.

esistance R1 r currents upres of 25°C a

ortance. At 25°C and 229

multi-mode V

for a multi-p to 8.0 mA and 85°C.

.0 mA laser Ohms at 85

VCSEL drive

°C. en at

Proc. of SPIE Vol. 8639 86390J-7

Page 8: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

400

300

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400

300

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100

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-25°C

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?.5 3.0

Fig. 16: Jfor a singcurrent is This obvireduced oplotted foconstant increasin

Junction/apergle-mode VCSs 2.0 mA.

ious drawbaoxide capacior temperatuat 152 fF. Thg steadily w

rture resistanSEL. Operat

ck for the sinitance C2. In ures of 25°C he C2 of the

with laser cur

nce R2 ting

ngle-mode VFig. 18, theand 85°C agmulti-moderent.

Fig. 1for a curre

VCSEL is pa oxide capacgainst the las VCSEL is 2

17: Junction/multi-mode

ent is 6.0 mA

artially compcitance of thser current. T273 fF at 6 m

/aperture resVCSEL. Op

A.

pensated by he single-modThe value fomA laser cur

sistance R2 perating

a significande VCSEL i

or C2 is almorrent and is

tly is ost

Fig. 18: Osingle-moat temper

In order tthe damp

The reson

current I indicates VCSEL o25°C andderived fr

Oxide capacitode VCSEL aratures of 25

to describe thping factor ar

nance freque

above threshhow fast the

operated at 2d 85°C ambiefrom Fig. 21,

tance C2 for against laser °C and 85°C

he electro-opre extracted.

ency Drf ⋅=

hold current e bandwidth2.0 mA is deent temperat, are 6 (6.0 m

the current

C.

ptical conve

thII −⋅ is i

Ith. The D-fincreases wrived from tture, respectimA, 25°C) an

Fig.mulcurr85°C

rsion under

increasing p

factor is a chwith laser curthe graphs inively. Accornd 5 (6.0 mA

. 19: Oxide clti-mode VCSrent at tempC.

modulation,

roportional t

haracteristic vrrent. The D-n Fig. 20 as 1rding values A, 85°C).

apacitance CSEL against eratures of 2

, the resonan

to the square

value for a V-factor for th12 and 13 fo for the mult

C2 for the laser

25°C and

nce frequenc

e root of lase

VCSEL and he single-moor temperaturti-mode VCS

cy and

er

ode res of SEL,

Proc. of SPIE Vol. 8639 86390J-8

Page 9: 25 Gbps and beyond: VCSEL development at Philips [8639-18] · 25 Gbps and beyond: VCSEL development at Philips Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach,

25Ñw 20a-E 154-du 10

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160in

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onance freg)Z I

300 400

[GHzZ]

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85°C

* A

(Resonan

200 300

ce freg)Z [GHz'

4

Fig. 20: Rfunction omode VC The maxiand may

Resonance freof laser curre

CSEL at 25°C

imum resonabe even high

equency as aent for the si

C and 85°C.

ance frequenher at increa

a ingle-

ncy of 20 GHased laser cur

Fig. 2functmode

Hz is reachedrrents, which

21: Resonanction of laser ce VCSEL at 2

d at 3.0 mA h are not rel

ce frequency current for th25°C and 85°

for the singlevant for the

as a he multi-°C.

le-mode VCe application

CSEL n due

to excesssaturate a

Plotting tfactor as found to b

Fig. 22: DresonanceVCSEL.

ive current dat about 16 G

the damping given in γ =

be the same

Damping facte frequency f

densities. FoGHz at 8.0 m

factor γ aga

02 γ+⋅= rfK

0.3 ns at bo

tor against sqfor the single

or the multi-mmA.

ainst the squa. For both sith temperatu

quare e-mode

mode VCSE

are resonancingle-mode aures of 25°C

Fig. 2resonVCSE

EL, the reson

ce frequencyand multi-m

C and 85°C.

23: Dampingnance frequenEL.

nance frequen

y allows for emode VCSEL

g factor againncy for the m

ncy is startin

extracting thL the K-facto

nst square multi-mode

ng to

he K-or is

The 3 dBB small signaal modulationn bandwidthh (S21-parammeter) for thee single- andd multi-modee VCSEL iis plotted in Fig. 24 and Fig. 25, resppectively.

For the siingle-mode VVCSEL the 3dB bandwiidth is foundd to be 20 GHHz for both ttemperatures of 25°C andd 85°C. The 3dB bandwiidth of the mmulti-mode VVCSEL is alsso 20 GHz aat 25°C, but iis slightly reduced to 166 GHz at 85°°C. Both chaaracteristics indicate thatt these VCSELs should be well suiteed for at leasst 25 Gbps ddata transmisssion.

Proc. of SPIE Vol. 8639 86390J-9

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3

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Proc. of SPIE Vol. 8639 86390J-10

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Conclusion We have investigated different design options for a 25 Gbps VCSEL operating at 850 nm. Compared to InGaAs quantum wells, GaAs quantum wells are still well suited to provide sufficient performance at these datarates. Re-use of well established material compositions implemented in commercial 10 Gbps and 14 Gbps VCSEL platforms may reduce risks in product qualification and allow for a faster time-to-market. In addition we have compared single- and multi-mode VCSELs for the use at 25 Gbps. Although the higher series resistance of single-mode VCSELs of about 250 Ohms is not advantageous and can only partially be compensated by the reduced oxide capacitance of only 150 fF, the modulation characteristics, especially at high temperatures up to 85°C ambient (20 GHz 3dB bandwidth and very open eye diagram) show promising performance in small as well as high signal measurements. It is worth considering single-mode VCSELs for extremely low power, high speed optical links. In addition the small spectral width of single-mode VCSEL may enable extended data transmission over standard multi-mode fibers, as it is required for the increasing size of data centers. The use of single-mode VCSELs in consumer applications like computer mice9 has proven their manufacturability in huge numbers and is an excellent basis to investigate the suitability for datacom applications.

References [1] D. M. Kuchta et al., “A 55Gb/s Directly Modulated 850nm VCSEL-Based Optical Link”,

IEEE Photonics Conference 2012 (IPC 2012) Post Deadline Paper PD 1.5 (2012). [2] W. H. Hofmann et al., “980-nm VCSELs for optical interconnects at bandwidths beyond 40

Gb/s”, Proc. SPIE 8276, pp. 05-1 to 05-9 (2012).

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[3] P. Westbergh et al., “High-speed 850 nm VCSELs with 28 GHz modulation bandwidth operating error-free up to 44 Gbit/s”, Electronics Letters 48 (18), pp. 1145-1147 (2012).

[4] S.A. Blokhin et al., “850 nm VCSELs operating at bit rates up to 40 Gbit/s“, Electronics Letters 45, pp. 501-503 (2009).

[5] Toshihito Suzuki et al., “Reliability study of 1060 nm 25 Gbps VCSEL in terms of high speed modulation”, Proc. SPIE 8276, pp. 04-01 to 04-8 (2012).

[6] AVAGO Technologies, http://www.avagotech.com/pages/video_ofc2011_25g_vcsel (2011). [7] Neinyi Li et al., “Emcore’s 1 Gb/s to 25 Gb/s VCSELs”, Proc. SPIE vol. 8276, pp. 03-1 to

03-10 (2012). [8] N. Ledentsov et al., “Progress on single-mode VCSELs for data- and tele-communications”,

Proc. SPIE vol. 8276, pp. 0K-1 to 0K-11 (2012). [9] D. Wiedenmann et al., “High volume production of single-mode VCSELs”, Proc. SPIE 6132,

pp. 02-1 to 02-12 (2006).

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