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Page 1: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

1

37

Page 2: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

2Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Earlier Lecture• Heat in leak is minimized by having vacuum

between two surfaces of different temperatures.

• λ is defined as the average distance travelled by the molecules between the subsequent collisions.

• Based on Knudsen Number (NKn), we have Continuum Flow (NKn<0.01), Mixed Flow (0.01<NKn<0.3), Free Molecular Flow (NKn>0.3).

• ConductanceSeries : Parallel :

1 1io iC C

=∑ o ii

C C=∑

Page 3: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

Topic : Vacuum Technology

• Conductance (contd..)

• Pumping Speed and Pump Down Time

• Tutorials

3Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Outline of the Lecture

Page 4: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

4Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Introduction• In the earlier lecture, we have seen the importance

of vacuum in Cryogenics.

• The mean free path (λ) and the degree of vacuum decide the fluid flow regime.

• The conductance for a circular pipe for Continuum, Mixed and Free Molecular flow regimes, respectively, were derived as shown below.

4

128D pC

µ=

0.54 81128 2

D p TCL pD M

π µ πµ

ℜ = +

0.53

18D TCL M

πℜ =

Page 5: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

Conductance in Vacuum

5Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

• As mentioned in the earlier lecture, vacuum systems involve complex piping arrangements.

• These piping arrangements may involve circular straight tubes, rectangular straight tubes, 90o

elbow joints etc.

• The table on the next slide gives the conductance equations for some commonly used pipes and pipe joints.

Page 6: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

Conductance in Vacuum

6Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Element Flow RegimeLong Tube (L/D>30)L–Length

D–Diameter

Continuum

Free Molecular

4

128D pC

µ=

3

18D TCL M

πℜ =

LD

Page 7: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

Conductance in Vacuum

7Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Element Flow RegimeLong Tube (L/D>30)L–Length

D–Diameter

Continuum

Free Molecular

Short Tube (L/D<30)D1–Large

Dia.D2–Small

Dia.

Continuum

Free Molecular

4

128D pC

µ=

3

18D TCL M

πℜ =

4

1128 22

D p mCL L

πµ µ

= +

( )( ) ( )( )2

22 1

18

4 3 1

D T MC

L D D D

πℜ=

+ −

LD

Page 8: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

Conductance in Vacuum

8Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Element Flow Regime90o Elbowr-Radius of curvature

D–Diameter

Continuum

Free Molecular

3

128KD pC π

µ=

3 29

D TCr Mπ

ℜ =

K valuesr/D K r/D K r/D K0 0.017 4 0.073 10 0.0341 0.05 6 0.056 12 0.0292 0.083 8 0.042 14 0.026

rD

Page 9: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

9Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• Consider a closed cavity – vacuum pump system as shown in the figure.

• For the above system, let us assume the following parameters.• pi – Pressure at the inlet to vacuum pump• p – Pressure in the cavity• Q – Throughput of the pump• Co – Overall conductance of piping

ippoC

Q

Vacuum Pump

Page 10: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

10Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• In order to analyze the above system, the following quantities are defined.

• The capacity of a vacuum pump is denoted in terms of Pump Speed (Sp). It is the ratio of throughput (Q) to pressure at the inlet to vacuum pump (pi).

• Mathematically, we have

ippoC

Q

pi

QSp

= 3

secm

Vacuum Pump

Page 11: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

11Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• On the similar lines, System Pumping Speed (Ss) is defined as the ratio of throughput (Q) to pressure in the cavity or the vacuumed space (p).

• Mathematically, we have

• Also, conductance (Co) is

ippoC

Q

sQSp

=

( )oi

QCp p

=−

3

secm

3

secm

Vacuum Pump

Page 12: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

12Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• Eliminating the pressures (pi and p) from the above equations, we get

ippoC

Q

sQSp

= ( )oi

QCp p

=−p

i

QSp

=

1 1 1

s p oS S C= +

s

QpS

= io

Qp pC

− =ip

QpS

=

s p o

Q Q QS S C

= +

Vacuum Pump

Page 13: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

13Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• From the above equation, it is clear that, Ss is lower than the minimum of Sp and Co.

• Sp depends on vacuum pump and therefore, in order to maximize Ss, Co should be maximum.

• In principle, Ss can be maximum when Co is infinite.

1 1 1

s p oS S C= +

Page 14: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

14Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pumping Speed

• That is, if Co = ∞, then we have Ss = Sp.

• For a given connecting pipe, conductance increases with decrease in length and increase in diameter.

• Similarly, if Co = Sp, then we have Ss = Sp/2.

1 1 1

s p oS S C= +

Page 15: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

15Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time• Consider a closed system as shown

in the figure.

• Let the initial pressure in the system be pi.

• After vacuuming, let the final pressure in the system be pf.

• The amount of time taken by a vacuum pump to reduce the pressure from pi to pf is called as Pump Down Time.

High Pressure - pi

Low Pressure - pf

Page 16: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

16Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time• The application decides the degree of

vacuum.

• Depending upon the application, the required pump down time is determined.

• Pump down time helps in selection of vacuum pump.

• Hence, there is a need to study the pump down time of vacuum system.

Page 17: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

17Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Gas Leaks• Apart from heat in leak, gas in leak and out gassing

are the major problems posed by a Cryogenic system.

• These leakage paths have to be considered for calculation of pump down time and selection of pump.

• The leakage paths increase the pump down time.

Page 18: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

18Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Gas Leaks• Gas enters the system due to

• Actual leak through the vessel walls, joints.• Trapped gas released from the pockets within the

system, also called as Virtual leaks.• Out gassing of the metal walls or seals.

• Out gassing is the release of adsorbed gases either from surface or interior or both, when exposed to vacuum.

• The major contribution to mass in leak is the out gassing of the metal walls.

Page 19: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

19Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time

• Consider a closed cavity – vacuum pump system as shown above.

• Let the mass flow rate, leaving the system be mout.

• Mathematically,

• Where, ρ and Ss are the density and system pumping speed respectively.

ipoC

Q

out sm Sρ=

outm Vacuum Pump

Page 20: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

20Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time

• Let the total inflow due to gas leak and out gassing be mi. It can also be written as

• Applying mass conservation to this system, we have

• From the definition of density, we have

ipoC

Q

i outdmm mdt

− =

im

m Vρ=i out

dm m Vdtρ

− =

ii

QmRT

=

outm Vacuum Pump

Page 21: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

21Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time

• Using the ideal gas law, we have

• Combining the following equations, we have

ipoC

Q1m

i outdm m Vdtρ

− =

pRT

ρ =

i outV dpm mRT dt

− =

i sQ S pdpdt V V

= −ii

QmRT

= out sm Sρ=

i sQ pS V dpRT RT RT dt

− =

outm Vacuum Pump

Page 22: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

22Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time

• This equation is valid for any vacuum system in general.

• It is important to note that both Qi and Ss are time dependent functions, that is, Qi = f1(t), Ss = f2(t).

• The equation can be integrated, analytically or numerically, if the transient variation of Qi and Ssare known.

i sQ S pdpdt V V

= −

Page 23: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

23Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time

• At steady state or after a long time, the changes in pressure with time are negligibly small.

• Mathematically, we have dp/dt=0.

• The pressure at steady state is called as Ultimate Pressure (pu). It is the minimum possible pressure that can be achieved using a certain pump.

• Therefore, we get

i sQ S pdpdt V V

= −

iu

s

Qp S=up p=

Page 24: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

24Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time• It is important to note that, for

most of the pumps, Sp is constant in its operating pressure range.

• Also, in a free molecular region, conductance (C) is independent of pressure.

• With Sp and Co being constants, from the above equation, it is clear that Ss is also a constant or it is independent of pressure.

1 1 1

s p oS S C= +

Page 25: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

25Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Pump Down Time• Therefore, for a constant Ss, the equation can be

integrated with the following limits.

i sQ S pdpdt V V

= −Limits

t=0 p=p1t=tp p=p2

2

1 0

ptp

i sp

Vdp dtQ S p

=−∫ ∫

( )2

1

0ln p

pt

i ss p

V Q S p tS

− − = 1

2

ln up

s u

p pVtS p p

−= −

iu

s

QpS

=

Page 26: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

26Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 1

• Calculate the overall conductance of the pipe assembly shown above. The pressure on the right end of the 40 mm tube is 150 mPa, while the pressure on the left end of 30mm pipe is 10 mPa. The ambient temperature is 300 K. The molecular weight and viscosity of air are 28.95 g/mol and 18.47 µPa-s.

40mm 30mm

400mm400mm

Pipe 1 Pipe 2

Page 27: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

27Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

CalculateOverall Conductance (Co)

GivenApparatus : Series Combination of pipesWorking Fluid : Air (mol. wt. 28.95 g/mol)Temperature : 300 KDimensions Pipe 1 – 40mm dia., 400mm Length

Pipe 2 – 30mm dia., 400mm Length

Tutorial – 1

Page 28: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

28Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 1

Calculation of Flow Regime• NKn for pipe 1: D=0.04m, L=0.4m, T=300 K,

R=8314/28.95, µ=18.47 µPa-s, p=0.15Pa.

40mm 30mm

400mm400mm

Pipe 1 Pipe 2

KnNDλ

=0.5

2RT

Dpµ π =

( )( )( )

( )( ) 0.5618.47 10 287.14 3000.04 0.15 2KnN

π− =

1.132KnN =

Page 29: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

29Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 1

Similarly, calculating NKn for Pipe 2, we have• NKn for pipe 1: 1.132• NKn for pipe 2: 22.65

• The Knudsen numbers for both the pipes are greater than 0.3. Therefore, the flow is free molecular through out the series combination.

• The L/D ratios of each of these pipes being less than 30, these are classified as Short Pipes.

40mm 30mm

400mm400mm

Pipe 1 Pipe 2

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30Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 1

Conductance for pipe 1: D1=0.04m, D2=0.04m, L=0.4m, T=300 K, R=8314, M=28.95 gm/mol.

40mm 30mm

400mm400mm

Pipe 1 Pipe 2

( )( ) ( )( )2

11 2

1 1 2

18

4 3 1

D T MC

L D D D

πℜ=

+ −

( ) ( ) ( )( )( ) ( )( )

2

1 2

0.04 300 18 28.95

0.4 0.04 4 3 1 0.04 0.04C

πℜ=

+ −

31 0.0173 /C m s=

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31Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 1

Similarly, calculating conductance for Pipe 2, we have• Pipe 1 (C1) : 0.0173• Pipe 2 (C2) : 0.0079

• The Overall Conductance (Co) for a series combination is given by

40mm 30mm

400mm400mm

Pipe 1 Pipe 2

1 2

1 1 1

oC C C= +

1 1 10.0173 0.0079oC

= + 30.00542 /oC m s=

Page 32: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

32Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 2

• Consider a vacuum vessel of 1m3 with an initial pressure of 1 atm at 300 K. It is connected to a vacuum pump via a connecting pipe as shown above. The ultimate pressure of the system is 0.1 mPa. Determine the system pumping speed, if the required vacuum in the cavity is 1 kPa in 1 hour.

40mm

400mm

30mm400mm1m3

Vacuum Pump

Page 33: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

33Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

CalculateOverall Conductance (Co)

GivenApparatus Vacuum PumpWorking Fluid Air at 1 atmVacuum 1 kPaTemperature 300 KConnecting Pipe

Pipe 1 : 40mm (D), 400mm (L)Pipe 2 : 30mm (D), 400mm (L)

Time 1 HourVolume 1 m3

Ultimate Pr. 0.1 mPa

Tutorial – 2

CalculateSystem Pumping Speed (Sp)

Page 34: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

34Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 2

Calculation of Ss

• V=1m3, p1 = 1.013x105 Pa, p2 = 1000 Pa, pu = 0.1x10-3 Pa, tp = 3600 s.

40mm

400mm

30mm400mm1m3

1

2

ln us

p u

p pVSt p p

−= −

( )( )

3

3

101300 0.1 101 ln3600 1000 0.1 10sS

− = −

30.0012 /m s=

Vacuum Pump

Page 35: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

35Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 2

From the earlier tutorial, we have• NKn for pipe 1: 1.132, NKn for pipe 2: 22.65.

• NKn>0.3, the flow is free molecular flow.

• The conductance of these Short Pipes• Pipe 1 (C1) : 0.0173, Pipe 2 (C2) : 0.0079.

• The Overall Conductance (Co) is 0.00542 m3/s.

40mm

400mm

30mm400mm1m3

Vacuum Pump

Page 36: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

36Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Tutorial – 2

Calculation of Sp

• Co= 0.00542, Ss=0.0012.

40mm

400mm

30mm400mm1m3

1 1 1

s p oS S C= +

1 1 1

p s oS S C= −

1 1 10.0012 0.00542pS

= − 30.00154 /pS m s= 92.4 / minpS Lit=

Vacuum Pump

Page 37: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

37Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Summary• Correlations for conductance for some commonly

used pipes and pipe joints are given.

• Pump Speed : System Speed :

• Sp depends on vacuum pump and therefore, in order to maximize Ss, Co should be maximum.

• For a constant Ss, we have

pi

QSp

= sQSp

=

1 1 1

s p oS S C= +

1

2

ln up

s u

p pVtS p p

−= −

Page 38: 37 - NPTELnptel.ac.in/courses/112101004/downloads/(37-8-2) NPTEL - Vacuum... · 37. Prof. M D Atrey, Department of Mechanical Engineering, ... • This equation is valid for any vacuum

38Prof. M D Atrey, Department of Mechanical Engineering, IIT Bombay

Thank You!