잼벡스&카엘

We provide the high technology & environmentThe leading company in business of contamination control

HIGH TECH & NATUREHIGH TECH & NATUREWe provide the high technology & environment

HIGH TECH & NATUREWe provide the high technology & environment

World

VISION“The leading company in business of contamination control ”

+ ET

+ IT+ BT

Professional corporation to purify semi-conductor manufacturing process, display manufacturing process and atmosphere environment

Gemvax & kael information ··········· ············································· 04

Product Information - Coating Resin ············ ··········································· 08

Product Information - Chemical Filter ············ ·········································· 10

Product Information - PLEATED Type ·· ················································· 14

Product Information - V-BANK Type, SEPARATED V-BED Type, TRAY Type, V-BED Type··· ············· 16

Product Information - ROUND Type ············ ··········································· 18

Chemical Filter Installation - FFU, Return Hall················································ 20

Chemical Filter Installation - OAC, Equipment············ ··································· 22

Chemical Filter Installation - LCD/ PDP, Semiconductor············ ···························· 24

Environment System Field ············ ·················································· 26

Table of Contents

R&D Institute

Awards and Recognitions ·OHSAS 18001 Certificate·High technology company designation (Korea Ministry of Science and High Tech) ·ISO 14001:2004 Certificate·Listed in KOSDAQ ·National Tax Service Commissioner Award for Excellent Taxpayer ·Selected as a technically innovated business (INNO-BIZ) ·Technical Innovation Golden Award (Prime Minister Award) ·ISO 9001:2000 Certificate

·Company Name : GemVax & KAEL Co.,Ltd.·Establishment : Mar, 10, 1998·Representative : Lee Ike Woo·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea

Semi/Display Field ·Chemical Filter [CA Filter]·CY+1000,2000,3000,5000,6000 Series AL+1000,2000,3000,5000 Series·Gas Scrubber [Resin]·WFVOC(Water Fab Volatile Organic Compounds)

Environment System Field ·Bad smell / VOC removal system·Filter for special air cleaner·Removal of radioactive substance·Military impregnated active carbon

Global Clean Air Company

Semi/Display Field Ma

terial

Fiel

d : Co

ating Resin, Catalyst

Core material

Business Area

Corporation Profile

Main office/factory

GemVax & KAEL Group

GemVax & KAEL Daejeon, Korea

GemVax Oslo, Norway

Korea Stem Cell Bank Seoul, Korea

VaxOncoSeongnam, Korea

EpimmuneSan Diego, USA

KSCBYangsan, Gyeongnam

www.kael.co.kr 04 I 05

KAEL - GemVax Seongnam, Korea

GemVax & KAEL Main office Supplier facility

GemVax & KAEL R&D Institute

06 I GemVax & KAEL

…to a wide range of customers

www.kael.co.kr I 07

Sales & Distribution

Semiconductor(Domestic)

Display(Domestic)

Overseas

The others

30% 38%

31%

1%

Global Network

ASML Infineon Samsung C&TSAS

Micron

Netherlands Germany China Japan

Taiwan

MalaysiaSingaporeVietnam

U.S.A

Hynix-ChinaSESS

TS-LEDSMIC

TKL(TEL)CanonToshibaELPIDA

SOKUDO

TSMC / UMCPromos

Powerchip Rexchip

PSC / AUO

Camfil1' SiliconSilterraInfineon

* Global Clean Air Company

TECHSSMC

CharteredAFPD

Numonyx

SEIKO

Chemical Filter : Raw Materials

08 I GemVax & KAEL

Coating ResinCoating Resin

A/C(Impregnation)A/C(Impregnation)A/C(Impregnation)A/C(Impregnation)

A/C(Impregnation)A/C(Impregnation)

ClCl22 Inorganic adsorbent Inorganic adsorbent

A/C(Impregnation)A/C(Impregnation)A/C(Impregnation)A/C(Impregnation)

Alumina & KMnO4Alumina & KMnO4

HCl Inorganic adsorbentHCl Inorganic adsorbent

Cation Exchange ResinCation Exchange Resin

Ion Exchange FiberIon Exchange Fiber

Make

Everything

PFC Resolution & catalystPFC Resolution & catalyst

Anion Exchange ResinAnion Exchange Resin

Product Information I Coating Resin

Fundamental products

www.kael.co.kr I 09

Features

Features

Features

Features

Features

Features

Application Field

Application Field

Coating Resin(Impregnated Active Carbon)

Application field GAS type

Coating Resin(inorganic Adsorbent)

It is an active carbon that maximizes chemical active by adding specific chemical substances to the general active carbon and selectively absorbs and removes harmful substances or toxic substances.

It is an active carbon that maximizes chemical active by adding chemical substances to inorganic adsorbent such as Alumina, Zeolite

· Removal of harmful gas such as acid, chloride, neutral and radioactive gas · Water purifier to sterilize microbes · Catalysis for promoting chemical reaction

· Removal of toxic gas · Oxidation of catalysis · Selectively remove harmful substances or toxic substances in specific process

• The others : TEOS, SiH4, DCS, PH3, NF3, BCl3, Cl2 removable

Coating ResinTarget Gases

NH3 CL2 HF O3 H2S NOX SOX VOCS CH3I

Active Carbon

KIAC-01

KIAC-04

KIAC-05

KIAC-07

KIAC-14

MixedCoating Resin

Alumina

10 I GemVax & KAEL

Product information I Chemical Filter

Pleat Type

V-Bank Type V-BED Type (OPF)Tray Type

V-BED Type Round Type

Features - Have superior adsorbent efficiency for low-concentrated gas, and have an extended life. - Electric power expenses are reduced due to reduction of pressure loss. - Have superior endurance level and there is no concern that particles scatter during operation. - Loss of process may be reduced due to rapid delivery and A/S.- Various types of manufacturing are allowed upon customer request.

www.kael.co.kr I 11

Ga sParticulate

MediumParticulate

Hazardou sgase s

HEPA-siz eparticulat e

Application field/Purpose

Field Test Result

Filter for removing chemical pollution substances such as NH3, O3, SOx, NOx, TOC and harmful gas in semi-conductor and LCD/PDP manufacturing process.

FIG.1 NH3 in Field Test Result (Stepper-ASML) FIG.2 NH3 in Field Test Result (Track)

0

10

20

30

40

50

0 20 40 60 80 100 120 140 160Period (day )

Co

nc

.(pp

b)

0

10

20

30

40

50

0 20 40 60 80 100 120 140 160Period (day )

Co

nc

.(pp

b)

0

10

20

30

40

50

0 20 40 60 80 100 120 140 160Period (day )

Co

nc

.(pp

b)

0

10

20

30

40

50

0 20 40 60 80 100 120 140 160Period (day )

Co

nc

.(pp

b)

output(ppb)

input(ppb)

output(ppb)

input(ppb)

KAEL Filter change

Other companies

Device precision, minuteness

Particle, Molecule Gas / Chemical Contaminant → Haze Phenomenon on the Wafer

Gate Oxide Layer Isolation, Corrosion..., → Badness of Layer Pattern on the Wafer

Productivity Rises

CA Filter(Chemical filter) HEPA FilterMedium Filter

Untreated airTreated air(Clean air)

12 I GemVax & KAEL

Product Information I Chemical Filter

Chemical contaminants and effects in clean room

Impurity Effects

Condensable organicMW.120↑, BP.150℃↑ Organic

Compounds- Adsorption on Lens / Reticle- Pollution of Reticle backside

RefractorySiloxane, HMDS Silano

Organophosphate, Organosulfate- Pollution of Non-cleanable Lens / Reticle- Oxidation with DUV on Lens / Reticle Surface

Acids SO2, HCl, Cl2, HF, H2S- Adsorption of salt type- Corrosion

Bases NH3, Amines, NMP - Bad PR Performance

Aromatic hydrocarbon Toluene, Xylene - Pellicle polymer attack

Ozone O3 - Pellicle polymer attack

Chemical Filter & Target Gases

• MA : Molecular Acids(SOx, NOx, HCl, Cl2, HF, H2S..,) • MB : Molecular Bases(NH3, Amine, NMP..,)• MC : Molecular Condensable(MW.120, BP.150℃Organic material • MD : Dopants(Arsine, Boric Acid, Phosphorus..,)• Ozone : O3 • VOCs : Volatile organic compounds

Application Area Model TypeTarget Gases

MA MB MC MD Ozone VOCs

FFU(Fan Filter Unit) 1000 Series Pleat / Round / V-Bank

Return Hall 2000 Series Pleat

OAC(Out Air Controller) 3000 Series Pleat / Tray / V-Bank

Equipment 5000 Series Pleat / V-Bed

Display Air Controller 6000 Series Tray

The others 9000 Series Customization

Target gas code

Code· AL : ALPLUS Series· CY : CYPLUS Series

Application

Type

Target gas

ALCODE Target gases

10 NH3

11 NH3 + ACID

12 NH3 + Organic

13 NH3 + Acid + O3

14 NH3 + NMP

20 O3

21 O3 + Organic

22 O3 + NOx

23 O3 + NOx + SOx

24 O3 + Acid + Organic

30 NH3+SOx+NOx+Amine+NMP

31 MA+MB+MC

32 NH3+Amine+NMP

33 ACID

40 Organic

41 Organic + ACID

42 Organic + ACID + O3

90 The others

Application code Type code

CODE Type

0 Round

100 Pleat

200 Tray

300 V-Bed

400 Mix

500 Form-Bed

600 V -Bank(A line)

700 V -Bank (Foam)

900 The others

CODE Application

1000 FFU (Fan Filter Unit)

2000 Return Hall

3000 OAC (Out Air Controller)

5000 Equipment

6000 Display Air Controller

9000 The others

www.kael.co.kr I 13

Model designators

14 I GemVax & KAEL

Product Information I Chemical Filter - PLEATED TYPE

PLEATED type Equipment(Track / Scanner…)

General technical data

Filter type Tray type

Frame material SUS/Aluminum

Size[mm](Height x Width x Depth)

610 x 610 x 150/770 x 220 x 150(Customizable)

Typical air flow rate 0~3,000m3/H

Media Coating Resin / Ion-Exchange Resin


F.F.U(Fan Filter Unit) / ULPA

Filter type Pleated type

Frame material Aluminum


1167 x 534 x 801167 x 572 x 150(Customizable)



www.kael.co.kr I 15

OAC(Out Air Controller) / RETURN HALL



Frame material SUS/Aluminum


610 x 610 x 200 / 595 x 595 x 150(Customizable)



16 I GemVax & KAEL

Product Information I Chemical Filter - V-BANK TYPE, SEPARATED V-BED TYPE, TRAY TYPE, V-BED TYPE

V-BANK type

OAC (Out Air Controller) / Return Hall / FFU(Fan Filter Unit)


Filter type V-Bank type

Frame material Polystyrene


595 x 595 x 300(Customizable)



SEPARATED V-BED type OPF Filter for ASML, Canon, Nikon Scanner


Filter type Separated V-Bed type



960x485x250600x570x250 (Customizable)

Typical air flow rate 0 ~ 1700 m3/H(Variable Flow Rates Available)

Media Impregnated carbon

www.kael.co.kr I 17

Product Information I Chemical Filter - V-BANK TYPE, SEPARATED V-BED TYPE, TRAY TYPE, V-BED TYPE

TRAY type

OAC(Out Air Controller)



Frame material SUS


610 x 610 x 450 /610 x 305 x 450(Customizable)


Media Coating Resin

V-BED type Equipment [TRACK / SCANNER...]


Filter type V-Bed type



720 x 275 x 150555 x 430 x 185515 x 405 x 150(Customizable)

Typical air flow rate 0~600m3/H


18 I GemVax & KAEL

Product Information I Chemical Filter - ROUND TYPE

ROUND type

F.F.U(Fan Filter Unit) / ULPA


Filter type Round type


Size[mm](Diameter×Height)

Φ620 x 400(H)(Customizable)



WFVOC System; Removal Equipment as High Conc. VOCs

WFVOC System; Removal Efficiency for High conc. Orgarnic

www.kael.co.kr I 19

Product Information I Chemical Filter - ROUND TYPE

C/R Environment (Inlet)Total peak area count: 1,058,570,844= 1.5ppmV TVOCs in Toluene equivalents

WFVOC System (Outlet) Total peak area count: 25,236,084= <0.1ppmV TVOCs in Toluene equivalents

Water Spray(by Nozzle)

Dem

iste

rW

ashe

r Filt

er 1

Was

her F

ilter

2

Was

her F

ilter

3

Dem

iste

r

Med

ium

Filt

er 1

Med

ium

Filt

er 1

HEP

A F

ilter

Control Panel

Fan & MotorBaseDoor

Contam

inated AirC

ontaminated Air

Clean Air

Clean Air

20 I GemVax & KAEL

Chemical Filter Installation I FFU, Return Hall

FFU Chemical Filter Installation (FFU)

ItemsSpecification

NH3 Acid NH3 + Acid

Frame material 620(O.D)*400(H) 620(O.D)*400(H) 620(O.D)*400(H)

Air Flow (m/s) @ 0.4 @ 0.4 @ 0.4

Pressure Drop (Pa) 20↓(2mmAq) 20↓(2mmAq) 20↓(2mmAq)

Filter Weight (Kg) 15↓ 13↓ 14↓

www.kael.co.kr I 21

Return Hall Chemical Filter Installation (Return Hall)

22 I GemVax & KAEL

Chemical Filter Installation I OAC, Equipment

OAC Chemical Filter Installation (OAC)

www.kael.co.kr I 23

Equipment Chemical Filter Installation (Equipment)

ASML Scanner NIKON Scanner

Clean Room

CA Filter

CA Filter

CA FilterCA Filter

R/P=SUBFAB R/P=SUBFAB

Clean Room

24 I GemVax & KAEL

Chemical Filter Installation I Display, Semiconductor

Display Chemical Filter Installation(LCD/PDP/FPD/OLED)

TFT ZONE

W.S.S

HEPA PRE+MEDIUM

OUT Air

W.S.S

HEPAPRE+MEDIUM

OUT Air

COLOR FILTER ZONE

PHOTO ZONE DIFFUSION/CVD ZONE

W.S.S

HEPA PRE+MEDIUM

OUT Air

W.S.S

HEPAPRE+MEDIUM

OUT Air

www.kael.co.kr I 25

Semiconductor Chemical Filter Installation (Semi conductor)

TFT ZONE

W.S.S

HEPA PRE+MEDIUM

OUT Air

W.S.S

HEPAPRE+MEDIUM

OUT Air

COLOR FILTER ZONE

PHOTO ZONE DIFFUSION/CVD ZONE

W.S.S

HEPA PRE+MEDIUM

OUT Air

W.S.S

HEPAPRE+MEDIUM

OUT Air

Equipment/Filter Business ·Special Air Cleaner·RI Filter Unit·Charcoal Filter·WFVOC

Special Business ·Coating Resin·Coating Resin removing toxic gas·Military Coating Resin

Environment System Field


26 I GemVax & KAEL

System Business ·Total Off-Gas Control System·Bad Smell Removal System·VOC Recovery System

Lotte MartLotte Mart

Giheung PrecisionGiheung Precision

Bukdaejeon TG

Donghwa Middle School

Baeul Elementary SchoolBaeul Elementary SchoolBaeul Elementary School

Cheongbyeoksan - MountainCheongbyeoksan - MountainCheongbyeoksan - Mountain

Intelligence Robot Commercialization CenterIntelligence Robot Commercialization CenterIntelligence Robot Commercialization Center

Unam Neomia APTUnam Neomia APTUnam Neomia APT

Samseong BendingSamseong Bending Sintanjin

Sintanjin TG

R&D InstituteR&D InstituteR&D Institute

High Tech Mentors of BiemHigh Tech Mentors of BiemHigh Tech Mentors of BiemHigh Tech Mentors of Biem

Hwain TechHwain Tech

Neopharm

IDISIDIS

Jiam MeditechJiam MeditechJiam Meditech

MeisterMeister

Main office/factoryMain office/factoryMain office/factory

Halla Climate Corp.Halla Climate Corp.

Yongsingyo BridgeYongsingyo BridgeYongsingyo Bridge

Singugyo BridgeSingugyo BridgeSingugyo BridgeSingugyo BridgeSingugyo Bridge

Hanbit BridgeHanbit BridgeHanbit BridgeHanbit Bridge

the Honam[Daejeon-Suncheon] Expressway

Gyeongb

u[Seoul-B

usan]E

xpressw

ay

Jump into the World

·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190

·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

www.kael.co.kr I 27

26 I 27 GemVax & KAEL

System Business ·Total Off-Gas Control System·Bed Smell Removal System·VOC Recovery System

Equipment/Filter Business ·Special Air Cleaner·RI Filter Unit·Charcoal Filter·WFVOC

Special Business ·Coating Resin·Coating Resin removing toxic gas·Military Coating Resin



Lotte Mart

Giheung Precision

Bukdaejeon TG

Donghwa Middle School

Baeul Elementary School

Cheongbyeoksan - Mountain

Intelligence Robot Commercialization Center

Unam Neomia APT

Samseong Bending Sintanjin

Sintanjin TG

R&D Institute

High Tech Mentors of Biem

Hwain Tech

Neopharm

IDIS

Jiam Meditech

Meister

Main office/factory

Halla Climate Corp.

Yongsingyo Bridge

Singugyo Bridge

Hanbit Bridge

the Honam[Daejeon-Suncheon] Expressway

Gyeongb

u[Seoul-B

usan] Exp

ressway

Map

·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190

·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

www.kael.co.kr

The leading company in business of contamination control

잼벡스&카엘

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