5/7/2007 ts_clic_ab m.taborelli, ts-mme high precision machining and metrology for structures:...

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5/7/2007 TS_CLIC_AB M.Taborelli, TS-MME Tolerances: 5 m shape tolerance R.Leuxe

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5/7/2007 TS_CLIC_AB M.Taborelli, TS-MME High precision machining and metrology for structures: achievements and open questions M.Taborelli 5/7/2007 TS_CLIC_AB M.Taborelli, TS-MME Why +/- 1 micron precision? 0. Frequency matching (deviation of about 4MHz/m on cavity radius at 30 GHz) 1. Longitudinal alignment precision :