PowerPoint Presentation

FIB USES:

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FIB induced depositionHR-TEM picture, 200kV, elasticallyfiltered taken by TU Chemnitz,showing the interface of a 200 nmamorphous DLC film deposited on aSi wafer at the OPT application lab

Without post processingWith post processing12

Fib cut through the SiO2 dielectric exposing the buried metal.

REFERENCEShttp://en.wikipedia.org/wiki/Focused_ion_beamhttp://www.psrd.hawaii.edu/Feb06/PSRD-ion_microprobe.htmlhttp://www.eaglabs.com/training/tutorials/sims_theory_tutorial/isoratio.phphttp://geology.cr.usgs.gov/capabilities/chema/microinst/iprobe/tech.htmlhttp://www.fibics.com/fib/tutorials/fib-induced-deposition/10/http://www.s3.infm.it/fib_index.htmlhttp://en.wikipedia.org/wiki/Ion_beam_induced_deposition#Ion_Beam_Induced_Depositionhttp://www.design-reuse.com/articles/18531/design-for-analysis-ic-layout.htmlhttp://www.oxford-instruments.com/products/etching-deposition-growth/processes/deposition-processes/Pages/dlc.aspxhttp://www.diamonex.com/products/deposition-systems/ion-beam/http://www.google.co.in/url?sa=t&rct=j&q=fib%20application%20in%20refrective%20index&source=web&cd=8&ved=0CFMQFjAH&url=http%3A%2F%2Fdspace.mit.edu%2Fbitstream%2Fhandle%2F1721.1%2F3904%2FIMST008.pdf%3Fsequence%3D2&ei=iR7NTsT9I8usrAfaqbjXDA&usg=AFQjCNEmP1RW2x9ReKf9RXIM-vbguTPbnA&cad=rjahttp://avspublications.org/jvstb/resource/1/jvtbd9/v15/i6/p2346_s1http://www.fibics.com/fib/application/steps-in-tem-specimens-preparation-by-lift-out-method-/24/https://docs.google.com/viewer?a=v&q=cache:8NLIW9JpBAsJ:www.imec.be/efug/EFUG2003_Gazzadi.pdf+fib+afm+tip&hl=en&gl=in&pid=bl&srcid=ADGEESj8fuqv9Yjn-d1fBnBI9DR5c5BIX4kkuwjP7PI-BYLmU0XpaIpCndeWMANiXqlVMkoWXTLaCUrRuaeXsQcezIVsJTeQYPALkP7OFD51k02Bbq8dNhSS-pd3aOnP_D6vH_Aw3-lQ&sig=AHIEtbSBoz9Xg3NP81m0CYb9zTzlTC2WGAhttp://www.chm.bris.ac.uk/~paulmay/misc/msc/msc1.htm