div class=ts-pagebutton class=gotoPage data-page=1Page 1button div class=ts-imageimg data-url=981-in-order-to-characterize-each-selective-etch-recipe-step-etch-rate-of-all-materialshtmlpage=1 data-page=1 class=ts-thumb lazyload alt=Page 1: 981In order to characterize each selective etch recipe step etch rate of all materials at play and Co residues quantification full sheet wafers have been prepared The Co … loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAIAAAACCAQAAADYv8WvAAAAD0lEQVR42mP8X8AwAgiABKBAv+vAXklAAAAAElFTkSuQmCC data-src=https:reader033vdocumentsnetreader033viewer2022060715607bfa38a7bf574dbf6e88d3html5thumbnails1jpg width=140 height=200 divdiv