a pdms diffusion pump for on-chip fluid handling in microfluidic devices

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A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES Mark A. Eddings and Bruce K. Gale epartment of Bioengineering, University of Utah, Salt Lake City, UT rtment of Mechanical Engineering, University of Utah, Salt Lake City MicroTAS 2006, pp. 44-46 陳陳陳

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A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES. Mark A. Eddings and Bruce K. Gale. Department of Bioengineering, University of Utah, Salt Lake City, UT. Department of Mechanical Engineering, University of Utah, Salt Lake City, UT. MicroTAS 2006, pp. 44-46. 陳睿鈞. - PowerPoint PPT Presentation

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Page 1: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN

MICROFLUIDIC DEVICES

Mark A. Eddings and Bruce K. Gale

Department of Bioengineering, University of Utah, Salt Lake City, UT

Department of Mechanical Engineering, University of Utah, Salt Lake City, UT

MicroTAS 2006, pp. 44-46

陳睿鈞

Page 2: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Outline

Introduction Fabrication Results and Discussion Conclusion References

Page 3: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Introduction Fabrication Results and Discussion Conclusion References

Page 4: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

PDMS-Based Micropump

generate flowRapid off-chip valving Deflecting thin PDMS membranes

generate flowGas permeabilityAdditional preparation timeone-time use applications

K. Hosokawa, 2004

Marc A. Unger, 2000

Power-free pump

Membrane pump

Page 5: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Diffusion-Based Membrane Pump

atmp

T

t

ppPA

dt

dV 76

273

)( 12

p2 : feed pressureP1 : permeate pressureP : permeability coefficientA : diffusion areaT : absolute temperatureP atm : atmospheric pressuret : thickness of the membrane

Flow rateApplied pressure

Applied vacuum

Diffusion-based membrane pumping method

Theoretical equation

Page 6: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Introduction Fabrication Results and Discussion Conclusion References

Page 7: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Fabrication

1.Lithography 2.Xurography(razor and writing)

SU-8Silicon wafer

vinylPMMA wafer

65°C 45min

65°C overnight

master mold cast

bonding

D. Duffy, 1998

Daniel A. 2005

Page 8: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Microfluidic Device

Measuring flow rates Demonstrating dead-end chamber filling

fluid channel layer

diffusion membrane

vacuum source layer

Green : pressure/vacuum inletRed : fluid wells

Page 9: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Introduction Fabrication Results and Discussion Conclusion References

Page 10: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Flow Rate Characterization

atmp

T

t

ppPA

dt

dV 76

273

)( 12

device

Variables : p2 : feed pressure

A : diffusion area

equation :

with a CCD camera

t : thickness of the membrane

Page 11: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Comparing Theoretical Data With Experimental Data

Low aspect ratios and high aspect ratios. Diffusion area was changed by membrane elongation and

contact to the channel ceiling.

FEA results for membrane deflection in microchannels of aspect ratios 2 and 10

low high

Page 12: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Fluid Handling Fluid was easily manipulated through turns in cross

intersections and filling dead-end channels and chambers.

1

2

3

4

5

6

device

Three different fluids, red, green and blue, filling dead-end chambers.

Page 13: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

Conclusion

The gas permeation pump provides a novel and convenient method for manipulating fluids within microfluidic devices.

Rapid dead-end channel filling and flow rates in the 200 nl·min-1 range have been demonstrated.

No need high frequency valve operation and significantly higher total chip areas.

Pumping and valving can be performed using one control line for pressure and one for the vacuum.

one control line

Marc A. Unger, 2000

three control lines

Page 14: A PDMS DIFFUSION PUMP FOR ON-CHIP FLUID HANDLING IN MICROFLUIDIC DEVICES

References Mark A Eddings and Bruce K Gale, “A PDMS-based gas permeation pump for

on-chip fluid handling in microfluidic devices”, J. Micromech. Microeng. 16 (2006) 2396–2402.

Marc A. Unger, Hou-Pu Chou, Todd Thorsen, Axel Scherer, Stephen R. Quake, “Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography”, SCIENCE VOL 288 7 APRIL 2000, 113-116.

D. Duffy, J. McDonald, O. Schueller, G. Whitesides, “Rapid Prototyping of Microfluidic Systems in Polydimethylsiloxane”, Anal. Chem. 70, pp. 4974-4984.

K. Hosokawa, K. Sato, N. Ichikawa, M. Maeda, “Power-free PDMS microfluidic devices for gold nanoparticle-based DNA analysis”, Lab chip 2004, Vol. 4, pp.181–185.

Daniel A. Bartholomeusz, Ronald W. Boutté, and Joseph D. Andrade, “Xurography: Rapid Prototyping of Microstructures Using a Cutting Plotter”, 2005 J. Microelectromech. Syst. 14 1364–74.