AA6000 MINI DESKTOP SCANNING ELECTRON MICROSCOPE

Introductions

Angstrom-mini-SEM is a true desktop multi-purpose, multi-user Scanning Electron Microscope. It excels in versatility and flexibility by combining high performance in all SEM

modes & Particle counter with ease of operation in a multi-user materials research environment, and perfect balance

between stable configuration and excellent resolution.

Specifications

Resolution 7nm(Option: 5nm@20KV)

Acceleration Voltage

0.6KeV ~ 20KeV (Option: 30KV)

Visual Inpection Source

Electron induced Display (Tungsten Hair Pin Type)

Probe Current

nA ~pA for SEM, Max. ~ 3uA

Bean Control

Beam Shift : ±125um, Beam Rotation: 360°

SE Detector

High Sensitivity SE detector

Image Signal

process

5 Steps: Area(768X576),Search (960X720, 1280*960) Photo Mode

(1920X1440, 3840X2880)

Work-Piece Positioning

Tilted Holder 0°~60° (Max 90°)

5 Axis Stage

Movement Stroke

X/Y/Z/=-40/40/30mm Tilt: 0~60° Rotation=360° Option: Stage

Motorization (3 Axis-X/Y/R)

Vacuum system

Full Automation (or Manual Mode) Rotary Pump & Turbo Pump

Convection Gauge(Pirani + Penning Gauge)

Anti-Vibration

Air-Cylinder type anti-vibrator included in frame. Air or Any gas

supply such as N2 line required at Lab site

Control Rack

PC Environmental Operation Operating system : Windows Serial

communication: control data interface

Display System

22” LCD monitor

Port 3 Port (For EDX, WDX, Etc.). Port Sufficient for all detector & Up-

gradation

GUI& Tools BSE Mode Converter Switch(BSE, EDX, ETC.) Pixel averaging scan/

Photo Scan/ etc. Measurement (Angle, Area, Horizontal. Vertical, Width,

Cross, Box) Simple Measuring function by using Horizontal Line,

Vertical Line, Diagonal Lines, Boxes, Angle, Area, etc. Annotation (Symbol

Such Circle, Boxes, Line, Arrowed, Line), Image Shift & Image

Rotation(Raster Rotation) Image Compression / Compression Type :

BMP, JPEG, Data Including Magnification, Working Distance, KV

& Mark Bar. Thumbnail Image Display

Image Processor

Length/Min.dia/Max dia/Circularity/Eccentricity/Excel

Data/Graph Data export to Excel file with original Image Free Line

Measurement, Grain analysis Various User Define Filters Image Tiling

AOI(Area Of Interest) Particle Counter (Blob Analysis)

Automatic Control

Auto Brightness/ Contrast Multi Focus & Dynamic Focus Auto Focus/ Auto stigmator/ etc. Auto Emission Beam

Current Raster Rotation (Mouse Adjustment) Cathode Using Time

( Life Time)) Mouse Control(Dragging or Scroll Methodology)