absolute specular reflectance measurements at angles · pdf filethe detector has a pure ......
TRANSCRIPT
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Absolute Specular Reflectance
Measurements at Angles and
Beyond
1
MARK FISHER APPLICATIONS ENGINEER
AGILENT TECHNOLOGIES
20 APRIL 2017
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– What We Will be Going Over –
What are My Choices in Accessories ?
Are there Advantages/Disadvantages I Need to Know ?
What Kind of Measurements Can I Make?
Are there any Limitations ?
How Can I Make Absolute Specular Reflectance Measurements at the
Angle of My Choosing?
Examples of Sample Measurements
Wrap Up and Question Time
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Thank the People That Got Us Here
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– Specular Reflectance –
How has it Been Done in the Past?
Fixed Angle
Relative Reflectance
Absolute V-N V-W
Variable Angle
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Cary 100
UV-Vis NIR Spectroscopy Solutions
The Agilent Cary Family
Cary 300
Cary 4000
8454
Cary 5000/6000i/7000
Cary 60
Cary
Eclipse
Perf
orm
ance
Routine to Research
“A word from our sponsors”
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Measurement Modes
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Relative Reflectance Measurement
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Reference Measurement
Sample Measurement
Results in
Reflectance
Measurement
Relative to the
Reference used
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Various Specular Reflectance Accessories
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Variable Angle Specular Reflectance Accessory
VASRA Fixed Angle Accessory
Absolute Specular Reflectance
Accessory (V-W design)
Near Normal
15 degrees
30 degrees
45 degrees
20-70 deg (0.5 deg steps)
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Cary 7000 UMS and UMA
Universal
Measurement
Accessory
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Cary 7000 UMS and UMA
Cary 7000
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Cary 7000 UMS and UMA
Cary 7000 Universal Measurement Spectrophotometer
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Cary 7000 UMS (G6873AA)
Application Focus (Solids)
• Photonics/Optics/Thin Films
• Material research
• Semiconductor
• Military/Defense
• Chemical/Industrial
Overview
A turn-key, automated, UV-Vis-NIR spectrophotometer with Universal
Measurement Accessory provides exceptional value, ease of use and
performance – unmatched individually, unbeatable in a package.
175 nm 2500 nm 3300 nm
UMA
Cary 7000
250 nm
UMA
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UV-Vis-NIR Spectrophotometry
%T and %R
Angular Control
Flexibility
Cost per analysis
Automation
Productivity
Consistency (%T and %R)
Accuracy
Performance
Easy of Use
Accessible
Reliability
Research QA/QC Testing Trouble Shooting
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Cary UMS Schematic
Performance
Absolute reflection and
transmission by definition –
the only difference between
baseline and measurement
is the sample itself.
Incident light is fixed in
shape, and position, at the
sample ensuring %T and
%R are collected from the
same point on the
sample.
The detector has a pure
line of sight of the sample.
This unique Direct View
provides the highest signal-
to-noise improving
accuracy, reproducibility
and productivity
Productivity
Automated independent
control of polarization (s or
p) detector (D) position and
sample rotation.
One baseline is needed for
all %R and %T
measurements, at all angles
for a given polarization –
dramatically reducing total
collect time.
Perform all %R, %T
measurements on a single
system eliminating
accessory change over, or
reconfiguration time.
D
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Sandwich Detector
Feature Advantage Benefit
Si/InGaAs Sandwich
Detector
Combined UV-Vis and NIR detector.
No moving parts, ie. no beam shift
at detector changeover.
Consistent data.
Large wavelength range.
(UV-Vis-NIR)
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Direct Detector Illumination
Feature Advantage Benefit
Direct Detector
Illumination
All reflective, high efficiency, aluminum optics
maintain high signal level and signal quality
from source to detector
Alternative is using small DRAs and/or fiber
optic/light pipes.
Productivity – saves time
Loss in sensitivity, worse spectra
quality or longer acquisition
times.
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Unique Wire Grid Polarizers
The Agilent Cary UV-Vis-NIR automated polarizer provides the next-generation of
polarization control: A nano-wire grid which is lithographically laid onto a highly
transmissive quartz substrate.
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Wire Grid Polarizer
Feature Advantage Benefit
High contrast ratio High quality and control of
S and P polarized light.
better throughput
Superior Data Quality
Wide acceptance
angle
Polarization of full
spectrophotometer beam
without compromise
Improving throughput
leading to improved system
sensitivity.
Very thin only 3 mm Is smaller and more
compact than Glan-
Taylor/Thompson
extra room in the sample
compartment to improve
ease of analysis.
Wide wavelength
range
250 nm – 2500 nm No wavelength limitation
during measurements
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Measure with 0.02° angular precision
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Unique High Resolution
Optical Encoder
Feature Advantage Benefit
High Resolution Optical
Encoder
Fine angular control of sample
rotation and detector position to
0.02 deg.
Robustness/Reliability - system
never misses a step and permits
precise sample characterization
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Confidentiality Label
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P/N: G6874A, UMA Options
Edge Mount Sample Holder
Adjustable Samples Sizes: From approx 1" (25.4
mm) to 6" (150 mm) in diameter.
Thicknness: Approx 200 mm to 5 mm thick.
Non contact with front/back face of sample.
Max angular range is slightly limited due to “U”
shaped frame around sample (sample
diameter dependent).
Please note this picture is
not anodized black yet.
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P/N: G6874A, UMA Options
Round Sample Holder
Sample Sizes:
1” and 2” round
(2 mm selvage area)
Dedicated, simple, easy to use. Avoids contact with
center of sample.
Ensure sample is not “offset” by a thick frame around
optic, or that the frame increases the actual diameter of
the sample. Samples sit in recessed rim of holder.
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Cube Beam Splitter Holder
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Solids Autosampler
8” Wafer/Large
Sample Holder
Rotatable and translatable (x-phi) sample holder
that mounts on the UMA rotational stage
Allows rotation and translation of sample(s) for both
T and R measurements at angle – multi-sample or
“mapping”
Spatial resolution dictated by beam patch size at
sample; 5x5 mm to 2x2 mm
Potential 300% productivity increase!
24/32 Multi Sample
Holder
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Reflectance Measurement on UMA
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Transmission Measurement on UMA
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Absorptance Measurement on UMA
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Advanced Measurement Capabilities
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Absolute Specular Reflection
Summary
Measurement of absolute specular reflectance of a SRM traceable to a NIST standard.
Results
In this figure the measured and
certified spectra have been are
overlaid
Comparisons between measured
value and certified value can be
seen to correspond very closely
across the wavelength range 250
nm – 2500 nm. Data collect was
collected in ~2 min scan.
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Absolute Specular Reflection
Application
Coating characterization and design validation. Comprehensive angular, and wavelength range, analysis of a coated silicon substrate, 200 mm diameter, 800 mm thickness.
Challenge
Efficient and accurate thin film design measurement by multi-angle, UV-Vis-NR spectroscopy and 2D contour plot visualization tools.
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Thin Film/Coatings, Specular Reflectance
Absolute specular reflectance measured of a coated silicon substrate in the UV-Vis-NIR from near normal
angles of incidence (AOI) to high grazing angles. Spectra with AOI from 6 deg to 86 deg in 1 deg increments
are shown for p-polarized light. The entire spectral collect was executed in a single unattended operation.
Results
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Thin Film/Coatings, Specular Reflectance
A 2D contour plot of the previous slide helps visualize the coating dependence with AOI and wavelength
and aids with locating reflection minima and maxima, e.g., minimum reflection can easily identified at
1500 nm with 70 deg AOI.
Results
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Example of ar Sample
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ar Coating Near Normal Expanded
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Optics – Cube Beamsplitters
Application Example
Polarizing CBS use in interferometer of nano-
positioning system. Designed for HeNe laser @
632.8 nm. Proprietary beamsplitter & anti-reflection
coating made from TiO2 & SiO2. The two prisms
are bonded with optical adhesive.
The Challenge
Measure T and R for s- and
p-polarized incident without
moving sample and therefore
light incident on the sample.
On the UMS this is easy….
AND FAST!
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Optics – Cube Beamsplitters
Results
S-polarized spectra (left)
desire High Rs and Low
Ts.
P-polarized spectra
(right) desire High Tp
and Low Rp.
Performance is easily
determined. Results can
be fed back into CBS
design.
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RGB Cube Prism
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RGB Cube Prism
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RGB Cube Prism
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RGB Cube Prism
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RGB Cube Prism Overlay of Data
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RGB Cube Prism Effect of Polarization
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Measuring Grating Efficiency
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Orientation of Sample
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GRATING RESULTS
Samples Run :
300 lines per mm
1200 lines per mm
1800 lines per mm
3600 lines per mm
Data Collected at a Data Interval of 1 nm and 10 nm
Data Collected with SBW of 2 nm and 5 nm
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Grating Sample on Cube Sample Holder
300 line per mm Grating on Sample Holder
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Grating Sample in UMA
Detector Held at 10 degrees
Sample Stage Rotated to Calculated Angles for Grating and
Wavelength which have been read from a csv file
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1200 lines per mm Sample Data Interval 1 nm SBW 2 nm
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1200 lines per mm Grating
Data Interval 1 nm SBW 2 nm
P-Polarization
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1200 lines per mm Grating
Data Interval 1 nm SBW 2 nm
S-Polarization
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1200 lines per mm Grating
Overlay of S&P Polarization
Data Interval 1 nm SBW 2 nm
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1200 lines per mm Grating
Overlay of S, P, and Average Polarization
Data Interval 1 nm SBW 2 nm
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Elapsed Time for Data Collection for 1200 lines per mm
Sample
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1200 lines per mm P-Polarization
Start Time 5:46:57 PM
End Time 7:56:59 PM
Elapsed Time = 2 hrs 10 min 02 sec
1200 lines per mm S-Polarization
Start Time 10:44:27 PM
End Time 12:55:53 AM
Elapsed Time = 2 hrs 11 min 28 sec
Total Elapsed Time = 4 hrs 21 min 30 sec
Number of data points per scan = 1251
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Comparison of Data Interval of 1 nm and 10 nm Sample 1200 lines per mm
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1200 lines per mm Grating
Overlay of P-Polarization Data Interval of 1 nm and 10 nm
Red data interval = 1 nm Black data interval = 10 nm
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1200 lines per mm Grating
Overlay of S-Polarization Data Interval of 1 nm and 10 nm
Red data interval = 1 nm Black data interval = 10 nm
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Scattered Reflection
Lambertian - PTFE
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UMA vs DRA
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D
DRA detects
scattered light
in all directions
UMA detects
scattered light
at one
position with
a cone angle
of 5o
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Diffuse Colour Standards
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BLUE PTFE COLOUR STANDARD
UMA, Internal DRA, External DRA
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All Accessories:
• Double Beam Auto Select
• UV/Vis
o Data Interval = 1 nm
o SBW = 4 nm
• NIR
o Data Interval = 1 nm
o Energy = 3
UMA:
• SAT = 0.5 s
Internal DRA
• SAT = 0.1 s
External DRA
• SAT = 0.1 s
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