accuracy. resolution. throughput · acs motion control is a global company providing ethercat®...
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Smarter Motion Control for Semiconductor Manufacturing Equipment
Accuracy.Resolution.Throughput.
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Unique Experience. Unique Capabilities.
Providing and Sustaining a Competitive Advantage
• Motion control solutions for Semiconductor equipment manufacturers that improve accuracy, throughput, and resolution.
• Reduced time to market with comprehensive setup, simulation, and diagnostics tools.
• Significant investment in application and support engineering, research and development, new products and technology.
• Partnerships with motion system providers reduce risk and development effort.
About ACSACS Motion Control is a global company providing EtherCAT® network based high performance machine control systems for motion centric applications.
Since 1985, ACS Motion Control has provided state of the art control solutions to world leading equipment manufacturers.
ACS has its international headquarters in Israel with sales and support centers in the USA, Germany, China and South Korea.
Easy Interface with a Variety of Hosts
PLCPC HMI
Up to 64 axes and thousands of I/Os
Programmable AutomationController
Ethernet TCP/IP & UDP / /
EtherCAT® is registered trademark and patented technology, licensed by beckhoff automation GmbH, germany
UNIVERSAL DRIVE MODULES: Outstanding Move & Settle, Nanometer Jitter, Smooth Velocity INTERFACES I/O Others
UDMLC UDMSD UDMNT UDMMC UDMCB UDMPA UDMPM UDMHP/BA UDMHV MC4UDC MP4U NPMPC NPMPM UDIHP/LT PDICL LCMV2 IOMNT IOMPS
DrivesI/Os
Sensors
Products supporting
CoE protocol
SOFT CONTROLLER: Use your PC to run the Most Powerful Motion Controller
MOTION CONTROLLER & ETHERCAT MASTER CONTROL MODULES: EtherCAT Motion Controller with Built-In Drives DRIVES -with ±10V Current Commutation Commands
SPiiPlusSC SPiiPlusES SPiiPlusEC SPiiPlusCMNT SPiiPlusCMHP/BA SPiiPlusCMHV MP4U MC4UNT NPAPC NPAPM NPARM
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Unique Architecture, Unique Products
• Powerful architecture designed to last and comply with Copy Exact requirements.
• Latest generation commercial off the shelf CPU, DSP, and FPGA processors.
• Universal multi-axis drive technology suitable for any electric motor enables best possible performance with any motor/actuator/stage.
• Highly flexible and scalable EtherCAT based open architecture.
Core Competencies
• RT system architectures.
• Servo algorithms.
• Servo amplifier and power electronic design.
• Motion and machine control development software.
• Application development and support.
• Motion Control training.
Application Experience
• Wafer and Mask Inspection: Macro & Micro; Optical & E-Beam.
• Wafer and Mask Metrology: CD, Film Thickness, Overlay, TSV, Bump Height.
• Lithography: Direct Write, Scanner, Stepper.
• EFEM / Wafer Handling: SCARA, Parallel and Serial Kinematic Robots.
• Others: Vapor Deposition, Scribing, Annealing, Marking, Probing…
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±10V ±10V
UNIVERSAL DRIVE MODULES: Outstanding Move & Settle, Nanometer Jitter, Smooth Velocity INTERFACES I/O Others
UDMLC UDMSD UDMNT UDMMC UDMCB UDMPA UDMPM UDMHP/BA UDMHV MC4UDC MP4U NPMPC NPMPM UDIHP/LT PDICL LCMV2 IOMNT IOMPS
DrivesI/Os
Sensors
Products supporting
CoE protocol
SOFT CONTROLLER: Use your PC to run the Most Powerful Motion Controller
MOTION CONTROLLER & ETHERCAT MASTER CONTROL MODULES: EtherCAT Motion Controller with Built-In Drives DRIVES -with ±10V Current Commutation Commands
SPiiPlusSC SPiiPlusES SPiiPlusEC SPiiPlusCMNT SPiiPlusCMHP/BA SPiiPlusCMHV MP4U MC4UNT NPAPC NPAPM NPARM
DR
MotionController
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Accuracy. Resolution. Throughput
Following Error Reduction Black = Velocity Profile (± 1m/s)Blue = Following Error with PIDFF Algorithm (±2.5um)Red = Following Error with ServoBoost Algorithm (±0.25um)
Resonance CompensationBlue = Frequency Response Amplitude with PIDFF Algorithm - Noticeable low frequency resonance & anti-resonanceRed = Frequency Response Amplitude with ServoBoost Algorithm - Low frequency resonance & anti-resonance are compensated
Cogging CompensationBlue = Commanded Velocity ProfileRed = Feedback Velocity with ServoBoost AlgorithmGreen = Feedback Velocity with PIDFF Algorithm
Settling Time Reduction Black = Velocity Profile (end of motion)Blue = Following Error with PIDFF Algorithm (150ms to settle to ±10nm), no settling to ±1nmRed = Following Error with ServoBoost Algorithm (0ms to settle to ±10nm, 30ms to settle to ±1nm)
Maximizing Resolution and Accuracy by Minimizing Standstill Servo Jitter
• The Challenge:
› In high resolution wafer inspection applications, motion of the wafer relative to the inspection head in any of the 6 degrees of motion degrades the quality and effective resolution of the measurement. Minimizing standstill servo jitter is critical for such applications.
• The Solutions:
› ServoBoostTM
• An advanced control algorithm based on modern control theory which outperforms the most sophisticated PIDFF control schemes, eliminating the need for machine specific tuning for most applications.
• Compensates and attenuates disturbances in real time such as cogging, resonances, changes in load, non-linear friction...
• Increases servo bandwidth and stability.
• Reduces system production and maintenance cost.
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• A revolutionary PWM drive technology providing unprecedented performance.
• 200,000:1 dynamic range enables reduced standstill servo jitter and improved constant velocity performance.
• Capable of replacing linear drives for most applications, reducing drive footprint and enabling more reliable operation.
NPMPM / NPAPM MP4U / NPARMNPMPC / NPAPC
Demonstrating Jitter at 1nm Steps Orange = Feedback Position (±0.4mm Jitter)Red = Command Position
Fine Current Control: ±4mA command with 40A peak driveOrange = Feedback CurrentRed = Command Current
Linear Drive Jitter ComparisonOrange = Linear Drive Jitter (± 1.8nm)Red = NanoPWM Jitter (±0.4nm)
Ultra-Fine Current Control: ±0.2mA command with 40A peak driveOrange = Feedback CurrentRed = Command Current
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Maximizing Throughput by Achieving Fastest Possible Move & Settle
• The Challenge:
› Inspection, metrology, and probing applications can involve many thousands of test/measurement points per wafer or reticle. In such applications, every millisecond that can be eliminated from motions is critical.
• The Solutions:
› True Gantry Control
• Control an entire gantry system from one multi-axis drive, eliminating the effect of network synchronization jitter.
• Independent/decoupled MIMO control of linear and yaw degrees of freedom prevents servo loops from ‘fighting’ each other.
• Dynamic cross axis position compensation ensures consistent performance over entire XY travel range.
• Suitable for dual feedback gantry systems (rotary/linear, optical/laser).
• Suitable for controlling both compliant and non-compliant yaw designs.
Comparison of ACS True Gantry Control architecture with independent drive gantry control
Accuracy. Resolution. Throughput
Non-compliant yaw design maintains high degree of mechanical stiffness and minimizes yaw travel range.Gantry stage image provided by PI.
Compliant yaw design maintains high degree of mechanical stiffness and provides large yaw travel range.Gantry stage image provided by ALIO Industries.
ACS Multi-Axis Drive True Gantry Control - Performance Optimized
Independent Drive Gantry Control - Performance Limited
Network synchronization jitter degrades achievable performance
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MotionController
Drive Drive Drive/ 3
SPiiPlusCMHP/BA
Motion Controller with Integrated Drives
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› MotionBoostTM
• Advanced motion profile that injects less energy to the mechanical stage.
• Reduces excitation of mounted structures such as inspection heads and focus sensors.
• Significantly reduces settling time for short moves.
› ServoBoostTM
• Enhanced servo bandwidth reduces settling time.
› Gain Scheduling
• Built-in or user defined.
• Linear and non-linear servo parameters.
› Custom Servo Algorithms
• Developed according to customer request.
• Ideal for unique mechanical designs and/or feedback sensors.
Servo Error and Settling Time Reduction – 2mm move in 55msOrange = Command Velocity with 3rd order profile Green = Command Velocity with MotionBoost profileRed = Following Error with 3rd order profile (±1um)Blue = Following Error with MotionBoost profile (±0.15um)
Servo Error and Settling Time Reduction – 0.5mm move in 15msOrange = Command Velocity with 3rd order profile Green = Command Velocity with MotionBoost profileRed = Following Error with 3rd order profile (±1.25um)Blue = Following Error with MotionBoost profile (±0.2um)
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Maximizing Resolution and Accuracy by Compensating for Manufacturing Tolerances
• The Challenge:
› In any application requiring micron to submicron accuracy and repeatability, the control system’s ability to compensate for manufacturing non-idealities will play a key role in whether or not the machine’s performance specifications can be met.
• The Solutions:
› Mechanical Accuracy Compensation
Accuracy. Resolution. Throughput
› Sin Cos Encoder Compensation
Easily compensate for imperfect encoder alignment or calibration (Eliminate Gain, Phase, and Offset Errors)
Eliminate repeatable mechanical errors (straightness, flatness, orthogonality...) with 1D/2D/3D mapping
› Electromechanical Signature Analysis and Design
Identify differences in behavior from stage to stage, optimize control algorithm performance
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Maximizing Throughput by Optimizing Coordinated Motion Paths
• The Challenge:
› Many semiconductor processing applications require coordinated multi-axis motion profiles such as scribing and metrology (raster scanning), as well as probing and wafer handling (multi-axis point to point). Optimizing the motion smoothness and minimizing the motion time are key to improving machine throughput.
• The Solutions:
› Motion Blending
Maximize throughput by reducing path distance, allowing for increased velocitiesBlue = Original commanded position in XY plane Red = Blended commanded position in XY plane (corners)
› Advanced Look-Ahead
Example XY Coordinated Motion PathRed = Commanded Position in XY plane
Velocity Profile (Vs. Time)Green = X Axis command VelocityBlue = Y Axis command Velocity
Velocity Profile (Vs. Time)Green = X Axis command VelocityBlue = Y Axis command Velocity
Jerk Profile - High Magnitudes Result in Poor Accuracy
Jerk Profile - Low Magnitudes Result in Improved Accuracy
ACS Advanced Lookahead Algorithm
Standard Lookahead Algorithm
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Optimizing Performance and Minimizing Time to Market with Customizable Features and Advanced Tools
• The Challenge:
› The vast complexity of Semiconductor Manufacturing Equipment emphasizes the value of the control supplier’s capability to address known and unknown engineering challenges. Minimizing the effort to release next generation machine features to address more demanding applications is of crucial importance.
• The Solutions:
› Autofocus Control
Better Tools. Better Performance.
› Position Event Generation (PEG) › On the Fly Encoder Switching
High frequency outputs synchronized to position for triggering inspection optics, data acquisition, etc.
Dynamically maintain focus of inspection/metrology devices - flexible to support any type of sensor
Smooth transitions between low and high resolution feedback devices - ideal for XY stages with encoders plus lasers/interferometers
Standard or User Defined Servo Algorithm
Standard Servo Algorithm Drive Motor
Encoder
Height Sensor
Height Command
Desired Position
FOC_SW
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Host programming libraries integrate seamlessly with SPiiPlus Controller or SPiiPlus Controller Simulator
Easily develop and debug sophisticated applications
› SPiiPlus ADK Suite – A Comprehensive Set of Tools and Resources for Application Development.
• MMI Application Studio enables efficient motion control application development: setup & configuration, axis tuning and optimization including ‘one parameter tuning’, code development and management, motion analysis, and more.
• SPiiPlus Simulator allows user to develop and debug motion controller and host application code without consuming tool time.
TCP/IP
SPiiPlus COM Library
SPiiPlus C Library
SPiiPlus User Mode Driver
SPiiPlus Motion Controller
SPiiPlus Motion Contriller Simulator
C/C++ Host Application(s)
COM Host Application(s)
.NET Host Application(s)SPiiPlus .NET Library
Host PC
TCP/IP
www.acsmotioncontrol.com
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International Headquarters
ACS Motion Control Ltd.
HaTnufa St. 5
Yokne’am Illit, 2066717, Israel
Phone: +972-4-6546440
Fax: +972-4-6546443
North American Office
ACS Motion Control
7300 Metro Blvd. Suite 590
Edina, MN 55439, USA
Phone: +763-559-7669
ACS Motion Control Europe
Auf der Roemerstrasse 1,
76228 Karlsruhe, Germany
Phone: +49 721 941846-02
Fax: +49 721 941846-04
ACS Motion Control Korea
Digital Empire Building II, 101-1404
88 Sinwon Rd., Yeongtong-gu, Suwon-si
Gyeonggi-do, South Korea, 443-734
Phone: +82-70-7167-8608
Fax: +82-70-7016-2628
ACS Motion Control China
Room 301, No.798, Zhaojiabang Rd,
Shanghai, 200030, China
Phone: +86-21-54830819
Fax: +86-21-64453191
Cell: +86-13601639842