additional references with titles - springer978-3-540-38514-1/1.pdf · additional references with...

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Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions, Springer Series in Chemical Physics, Vol. 17, (Springer, Berlin, Heidelberg, New York 1981) Chapter 3 1. A. van Veen: "Sputtering and scattering by interaction of low energy noble gas ions with monocrystalline metal surface", Thesis, Utrecht, 1979 2. J.Giber, J.Kazsoki, L.Koblinger : Collision cascades and the disturbed zone during sputtering processes (model computation). Acta Phys. Acad. Sci. Hung. 45, 275-279 (1978 3. B.Poelsema, A.L.Boers: A new method for the calculation of ion scattering from single crystals; method and potentialities. Radiat. Eft. 41, 229-237 (1979) 4. J.E.Adams, J.E.Doll: Dynamics of ion channeling at low energies: preliminary trajectory studies. J. Chem. Phys. 73, 2137--2144 (1980) 5. D.J.Martin: The influence of correlated atomic vibrations on low energy ion scattering. I. Quasi-triple scattering from a (t00) row of copper atoms. Surf. Sci. 97, 586--594 (1980) 6. N.Winograd, B.J.Garrison, D.E.Harrison, Jr. : Mechanisms of CO ejection from ion bombard- ed single crystal surfaces. J. Chem. Phys. 73, 3473-3479 (1980) 7. D.P.Jackson : The influence of surface trapping on low energy light ion reflection, Radiat. Eff. 49, 233-237 (1980) 8. Y.Yamamura, W, Takeuchi: Ion focusing effects on total reflection coefficient near the semichannel direction, Radiat. Eff. 49, 251-254 (1980) 9. A.S.Mosunov, L.B.Shelyakin, V.E.Yurasova, D.Ciri~, B.Perovi6, I.Terzi6: Computer simu- lation of ion scattering by polycrystals, Radiat. Eft. 52, 85-89 (1980) 10. D.P. Jackson : "The Theory of Sputtering", in Symposium on Sputtering, ed. by P.Varga, G. Betz, F.P.ViehbiSck (Institut far allgemeine Physik, Technische Universit~it Wien, 1980) pp. 2-35 11. D.E.Harrison, Jr. : "Full Lattice Simulation of Atomic Ejection Mechanisms and Sputtering", reference 10, pp. 36--61 12. M.Hou: "The Influence of Induced Surface Point Defects on Sputtering from Metals", reference 10, pp. 101-111 13. V.E. Yurasova, V.A. Eltekov : "Models of Single Crystal Sputtering", reference 10, pp. 134-202 14. V.A.Eltekov, L.P.Razvina, O.A.Popova, V.E.Yurasova: "Computer Simulation of Single Crystal Sputtering by Dynamic Models of Small Atom Blocks", reference 10, pp. 203-215 15. A. van Veen, A.G.J. de Wit, J.M.Fluit: "Surface Ejection of Random and Focussed Metal Recoils from Ion Bombarded Single Crystals", reference 10, pp. 226-235 16. J.J. Szafarz, M.V. Kuvakin, A.V. Lusnikov: "The Shape of Surface Potential Barrier for Cu and Ni", reference 10, pp. 327-336

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Page 1: Additional References with Titles - Springer978-3-540-38514-1/1.pdf · Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions,

Additional References with Titles

Chapter 1

1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions, Springer Series in Chemical Physics, Vol. 17, (Springer, Berlin, Heidelberg, New York 1981)

Chapter 3

1. A. van Veen: "Sputtering and scattering by interaction of low energy noble gas ions with monocrystalline metal surface", Thesis, Utrecht, 1979

2. J.Giber, J.Kazsoki, L.Koblinger : Collision cascades and the disturbed zone during sputtering processes (model computation). Acta Phys. Acad. Sci. Hung. 45, 275-279 (1978

3. B.Poelsema, A.L.Boers: A new method for the calculation of ion scattering from single crystals; method and potentialities. Radiat. Eft. 41, 229-237 (1979)

4. J.E.Adams, J.E.Doll: Dynamics of ion channeling at low energies: preliminary trajectory studies. J. Chem. Phys. 73, 2137--2144 (1980)

5. D.J.Martin: The influence of correlated atomic vibrations on low energy ion scattering. I. Quasi-triple scattering from a (t00) row of copper atoms. Surf. Sci. 97, 586--594 (1980)

6. N.Winograd, B.J.Garrison, D.E.Harrison, Jr. : Mechanisms of CO ejection from ion bombard- ed single crystal surfaces. J. Chem. Phys. 73, 3473-3479 (1980)

7. D.P.Jackson : The influence of surface trapping on low energy light ion reflection, Radiat. Eff. 49, 233-237 (1980)

8. Y.Yamamura, W, Takeuchi: Ion focusing effects on total reflection coefficient near the semichannel direction, Radiat. Eff. 49, 251-254 (1980)

9. A.S.Mosunov, L.B.Shelyakin, V.E.Yurasova, D.Ciri~, B.Perovi6, I.Terzi6: Computer simu- lation of ion scattering by polycrystals, Radiat. Eft. 52, 85-89 (1980)

10. D.P. Jackson : "The Theory of Sputtering", in Symposium on Sputtering, ed. by P.Varga, G. Betz, F.P.ViehbiSck (Institut far allgemeine Physik, Technische Universit~it Wien, 1980) pp. 2-35

11. D.E.Harrison, Jr. : "Full Lattice Simulation of Atomic Ejection Mechanisms and Sputtering", reference 10, pp. 36--61

12. M.Hou: "The Influence of Induced Surface Point Defects on Sputtering from Metals", reference 10, pp. 101-111

13. V.E. Yurasova, V.A. Eltekov : "Models of Single Crystal Sputtering", reference 10, pp. 134-202 14. V.A.Eltekov, L.P.Razvina, O.A.Popova, V.E.Yurasova: "Computer Simulation of Single

Crystal Sputtering by Dynamic Models of Small Atom Blocks", reference 10, pp. 203-215 15. A. van Veen, A.G.J. de Wit, J.M.Fluit: "Surface Ejection of Random and Focussed Metal

Recoils from Ion Bombarded Single Crystals", reference 10, pp. 226-235 16. J.J. Szafarz, M.V. Kuvakin, A.V. Lusnikov: "The Shape of Surface Potential Barrier for Cu and

Ni", reference 10, pp. 327-336

Page 2: Additional References with Titles - Springer978-3-540-38514-1/1.pdf · Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions,

258 Additional References with Titles

Chapter 4

1. C. Abatino, G.Luzzi, L.Pagagno: Sputtering yield coefficients of thin copper films bombarded by 3-15keV Ar + at an angle of incidence of 30 °. Thin Solid Films 56, 291 (1979)

2. H.H. Andersen, H.L.Bay: A survey of sputtering-yield data for plasma-wall-interaction calculations. J. Nucl. Mater. 93+94, 625 (1980)

3. O.Auciello, R.Kelly, R.Iricibar : New insight into the development of pyrimidal structures on bombarded copper surfaces. Radiat. Elf. 46, 105 (1980)

4. R.Behrisch, J.Roth, J.Bohdansky, A.P.Martinelli, B.Schweer, D.Rusbtildt, E.Hintz: Dependence of light-ion sputtering yields of iron on ion fluence and oxygen partial pressure. J. Nucl. Mater. 93+94, 645 (1980)

5. J.Bohdansky: Important Sputtering Yield Data for Tokamaks: a Comparison of Measurements and Estimates. J. Nucl. Mater. 93 +94, 44 (1980)

6. J.Bohdansky, J.Roth: Formation of various coatings and their behaviour under particle bombardment. J. Nucl. Mater. 85+86, 1145 (1979)

7. J.Bqrgesen, J.Schou, H.Sqrensen: Erosion of Thin Films of D, by keV Light Ions", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P.Viehb6ck (Institut fur allgemeine Physik, Teehnische Universit~it Wien, Wien 1980) p. 822

8. M.I.Current, D.N.Seidmann: Sputtering of tungsten: An atomic view of a near surface depleted zone created by a single 30keV 63Cu + projectile. Nucl. Instrum. Methods 170, 377 (1980)

9. A.Elbern, P.Mioduszewski: Measurements of the sputtering yield of Fe from an oxidized stainless steel target using a pulsed dye laser. J. Vac. Sci. Technol. 16, 2090 (1979)

10. D.Ghose: On the angular dependence of sputtering yields. J n. J. Appl. Physics 18, 1849 (1979) 11. W.H.Gries : "An Implantation Collector for Accurate Sputtering Measurements of Monolayer

Resolution", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P.Viehb~Sck (Institut fiir allgemeine Physik, Technische Universit~it Wien, Wien 1980) p. 842

12. L.G.Haggmark, J.P.Biersack : Monte Carlo calculations of light-ion-sputtering as a function of the angle of incidence. J. Nucl. Mater. 93 + 94, 664 (1980)

13. E.Hechtl, J.Bohdansky, J.Roth: "Sputtering Yield Dependence on Ion Mass at Low Energy for Ta and W", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P.Viehb6ck (Institut fiir allgemeine Physik, Technische Universit~it Wien, Wien 1980) p. 834

14. S.T.Kang, R.Shimizu, T.Okutani: Sputtering of Si with keV Ar+-ions. I. Measurement and Monte Carlo calculations of sputtering yield. Jn. J. Appl. Phys. 18, 1717 (1979)

15. G.Kiriakides, C.E.Christodoulides, G.Carter, J.S.Colligon : An RBS technique for measure- ment of the erosion rate of ion implanted films. Appl. Phys. 19, 191 (1979)

16. G.Kiriakides, J.S.Colligon, S.P.Chenakin: Secondary ion mass spectrometric study of self- sputtered copper. Radiat. Elf. 41, 119 (1979)

17. R.Kirscher, S.Hofman: Coverage of foreign atoms on surfaces as a function of adsorption, sputtering and diffusion rates. Surf. Sci. 83, 296 (1979)

18. S.K.Lam, M.Kaminsky: Sputtering of annealed aluminium and sintered aluminium powder (SAP 985) under D ÷ and 4He + bombardment: Study of microstructural effects. J. Nucl. Mater. 89, 205 (t980)

19. K.Libbrecht, J.E.Griffith, R.A.Weller, T.A.Tombrello: Energy dependence of the trapping of uranium atoms by aluminium oxide surfaces. Radiat. Eff. 49, 195 (1980)

20. N.Matsunami, Y.Yamamura, Y.Itikawa, N.Itoh, Y.Kazumata, S.Miyagawa, K.Morita, R. Shimizu : A semiempirical formula for the energy dependence of sputtering yield. Radiat. Eff. Lett. 57, 15 (1980)

21. K.L. Merkle, W. J~iger : Direct observation of spike effects in heavy-ion sputtering. Philos. Mag., in press (1981)

22. Y.Okayima : Estimation of sputtering rate by bombardment with argon gas ions. J. Appl. Phys. 51,715 (1980)

23. S.Okuda, H.Akimure: Surface erosion of metal molybdenum bombarded with energetic hydrogen and helium atoms. Jn. J. Appl. Phys. 18, 1335 (1979)

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Additional References with Titles 259

24. A.R.Oliva-Florio, E.V. Alonso, R.A.Boragiola, J.Ferron, M.M.Jakos : Energy dependence of the molecular effect in sputtering. Radiat. Elf. Lett. 50, 3 (1979)

25. L.Pagagno, G. Luzzi, M.Meuti: Sputtering yields of thin overlayer films by attennation of the substrate auger signal. Thin Solid Films 60, 307 (1979)

26. J.B.Roberto, R.A.Zubr, J.L.Moore, G.D.Alton: Low energy hydrogen sputtering of Au, Ni and stainless steel. J. Nucl. Mater. 85+86, 1073 (1979)

27. J.Roth: "Sputtering with Light Ions", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P. Viehb6ck (Institut fiir allgemeine Physik, Technische Universit~it Wien, Wien 1980) p. 773

28. J. Roth, J.Bohdansky, R.S.Blewer, W.Ottenberger: Sputtering of Be and BeO by light ions. J. Nucl. Mater. 85+86, 1077 (1979)

29. J. Roth, J. Bohdansky, A.P. Martinelli : Low energy light ion sputtering of metals and carbides. Radiat. Eff. 48, 213 (1980)

30. R.Sartwell: Thin film sputtering yields for Fe, Cr and an Fe-Cr alloy measured by proton- induced x-rays. J. Appl. Phys. 50, 7887 (1979)

31. D.J.Sharp, J.K.G.Panitz, D.M.Mattox: Applications of a Kaufmann ion source to low energy ion erosion studies. J. Vac. Sci. Technol. 16, 1897 (1979)

32. P.Sigmund, C.Claussen: "Sputtering from Elastic-Collision Spikes", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P.ViehbiSck (Institut fiir allgemeine Physik, Technische Universit~it Wien, Wien 1980) p. 113

33. J.N.Smith, Jr.: Surface cleaning and sputtered ion production. J. Nucl. Mater. 82, 179 (1979) 34. R.Smith, J.M.Walls: The development of surface topography during depth profiling in auger

electron spectroscopy. Surf. Sci. 80, 557 (1979) 35. Ch.Steinbrtichel, D.M.Gruen: Absolute measurement of sputtered ion fractions using matrix

isolation spectroscopy. Surf. Sci. 93, 299 (1980) 36. Ch.Steinbriichel, D.M.Gruen, J.Dawson: Application of matrix irradiation spectroscopy to

the measurements of sputtering yields. J. Vac. Sci. Technol. 16, 251 (1979) 37. M.Szymonoski: Sputtering of Cu and Zn atoms from elemental and alloy targets. Appl. Phys.

23, 89 (1980) 38. E.Taglauer, W.Heiland : Mass and energy dependence of the equilibrium surface composition

of sputtered tantalum oxide. Appl. Phys. Lett. 33, 950 (1978) 39. E.Taglauer, W.Heiland : "Changes of the Surface Composition of Compounds due to Light Ion

Bombardment", in Symposium on Sputtering, ed. by P. Varga, G. Betz, F.P.Viehb6ck (Institut fi.ir allgemeine Physik, Technische Universit~,t Wien, Wien 1980) p. 423

40. E.Taglauer, W.Heiland, U.Beitat: The influence of adsorption energies on ion impact desorption of surface layers. Surf. Sci. 89, 710 (1979)

41. E.Taglauer, W.Heiland, R.J.MacDonald: The study of sputtering effects in oxides and metal- adsorbed-gas systems using combined analytical techniques. Surf. Sci. 90, 661 (1979)

42. D.A.Thompson: "Non-Linear Effects in Sputtering", in Symposium on Sputtering, ed. by P.Varga, G.Betz, F.P.Viehbtick (Institut ftir allgemeine Physik, Technische Universit~it Wien, Wien 1980) p. 62

43. D.A.Thompson: Sputtering of Ag, An and Pt by heavy atomic and molecular ion bombard- ment. J. Appl. Phys. 52, (1981) (in press)

44. P.F.Tortorelli, C.J.Altstetter: The sputtering yield of polycrystalline materials. Radiat. Eff. 51, 241 (1980)

45. P.F.Tortorelli, C.D.Altstetter: Sputtering of two-Phase polycrystalline metals. J. Vac. Sci. Technol. 16, 804 (1979)

46. H.Uecker, A.Riccator, G.R.Thacker, J.Ney, J.P.Biersack: Experiments on sputtering of niobium by 14-16MeV protons and Monte Carlo calculations for proton and neutron sputtering. J. Nucl. Mater. 93+94, 670 (1980)

47. P.Williams: Anomalous sputter yields due to cascade mixing. Appl. Phys. Lett. 36, 758 (1980) 48. K.Wittmaack : On the mechanism of cluster emission in sputtering. Phys. Lett. 69A, 322 (1979) 49. K.Wittmaack, P.Blank, W.Wach: High fluence retention of noble gases implanted in silicon.

Radiat. Eft. 39, 81 (1978) 50. G. van Wyk: The dependence of ion bombardment induced preferential orientation on the

direction of the ion beam. Radiat. Eft. Lett. 57, 45 (1980)

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260 Additional References with Titles

51. G. van Wyk: The influence of ion species on ion bombardment induced preferential orientation. Radiat. Eft. Lett. 57, 165 (1981)

52. G.N. von Wyk, H.J.Smith : Crystalline reorientation due to ion bombardment. Nucl. Instrum. Methods 170, 433 (1980)

53. R. Yamada, K. Nakamura, K.Sone, M.Saidoh: Measurement of chemical sputtering yields of various types of carbon. J. Nucl. Mat. 95, 278 (1980)

54. R.Yamada, M.Saidoh, K.Sone, H.Ohtsuka: Dose and microstructural effects on surface topography change and sputtering yield in polycrystalline molybdenum bombardment with 2keV Ne+-ions. J. Nucl. Mater. 82, 155 (1979)

55. R.Yamada, K.Sone, M.Saidoh: Surface microstructural effects on angular distribution of molybdenum particles sputtered with low energy Ne÷-ions. J. Nucl. Mater. 84, 101 (1979)

56. A. Zabkar, P.Panjau, B.Navin~ek : "Sputtering Yield Measurements of Nickel U sing a Quartz Oscillator Microbatance", in Contributed Papers of SPIG 80, ed. by B.Cobi6 (Boris Kidri6 Institute of Nuclear Sciences, Beograd 1980) p. 132

Chapter 5

1. V.S. Chernysh, A. Johannsen, L. Sarholt-Kristensen: "Sputtering yield measurements on hcp and fcc cobalt" Rad. effects Letters 5% 119 (1980)

Page 5: Additional References with Titles - Springer978-3-540-38514-1/1.pdf · Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions,

List o f S y m b o l s

A

//,C

aBM, CBM

aMO, CMO

ai

ao

a12, a

0~

ci

C,,

Zm

Z ...... X(tp, E)

Mass ratio target atom to projectile; A =M2/Mt Cell edges in hexagonal crystals Born-Mayer potential parameters Morse Potential Pa- rameters Area per adsorbed gas species i Bohr radius; a o = 0.529 ,~ Screening length for atomic potentials; a12 =0.885 ao(Z213 + Z2/3)- 1/2

(Thomas-Fermi, Lind- hard) a12 = 0.885 ao(Z]/2 + z~,/~)- 2/3 (Firsov) Dimensionless function of the mass ratio M2/M1, the angle of incidence 0 and the ion energy E in the sputtering yield Atomic concentration of atoms i Cross section constant for power potentials Minimum yield in a channeling experiment Relative dechanneling yield, or non channeled fraction of an ion beam in a crystal

dhkl

da(E, T)

E E b, W

Ed

Ev

Er Er

Eth

Eo

E1

e

~F rl(uvw)

~?(E)

Unit translation per- pendicular to planes Differential cross sec- tion for transferring an energy (T, dT) to a target a tom Energy of a projectile Binding energy of an atom to its lattice site Threshold energy for producing stable atomic displacements Thomas-Fermi energy unit E/v Focusing energy Relative energy; Er= A E/(1 +A) Threshold energy for sputtering Energy of a moving tar- get atom For E> E 1 Coulomb scattering dominates Elementary charge; e 2 = •4.39 eVA Lindhard's reduced energy, e = EaM2/ Z1Z2eZ(M~ + M2) Energy of an excited state Fermi level Fitting parameter in single crystal sputter- ing yields Average amount of energy ending up in

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262 List of Symbols

electronic excitation during the entire slow- ing down process of energetic particles in a solid

FD(E, I2, r) Spatial distribution of the density of deposit- ed energy in (r, d3r) for an ion starting at r = 0 with energy E and di- rection g2

FD(E,O,x) depth distribution of deposited energy

F(E, Eo)dE o Recoil density = mean number of atoms recoil- ing into an energy inter- val (E0, dE0); F(E, Eo) = d[n(E, Eo)]/dE 0

Fp(E, f2, r) Mean momentum de- posited in (r, d3r) by an incoming ion of initial energy E and direction f2

.[(r,v,t)d3rd3v Distribution function, statistical average over the number of atoms in a volume element (rd3r) with velocities (v,d3/.~) at time t

FR(x,E,O) Penetration profile G(E,Eo)dEo Mean number of atoms

moving at any time with energy (Eo,dEo) ifa source supplies ~p par- ticles per unit time; G(E,Eo)dE 0 = tp n(E,Eo)dt 0

F Flux of residual gas atoms to a surface

/'m, )lm Dimensionless func- tions of m for power potentials.

7 Energy transfer factor; T=4M, Mz(M 1 +M2) -2 .

Also used for Axial ratio ? = c/a in hcp crystals

7i Trapping coefficient 7;,,~ Sticking probability of

a species i on a surtaces ~ t Distance from a surface

over which the level width dicreases to 1/2.781 of'its bulk value

7(0) Energy reflection coef- ficient, sputtering elfi- ciency

(hkl) Normal to a crystal plane h Planck constant;

h = 1.05459.10- 34 Js Projectile flux Parameter in electronic stopping function

K(v,vl; v ' , v " ) d 3 v ' d 3 v " Differential cross section for scat- tering a projectile from v to v'd3v ' and the target atom from vl to r"d3v ''

~: Number of atoms in the elementary interval along a row

A Material constant en- tering into the sputter- ing yield

A(9) Focusing parameter in collision sequences

M~ Incident ion mass ME Target mass m Atom potential param-

eter for power poten- tials.

/~ cos~ N Density of atoms No Avogadros number;

No =6.022 1023 atoms per mol

n(E,Eo) Mean number of atoms set in motion with an initial energy greater than Eo in a cascade

I k

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n i

v(~)

12 O(E)

P(Eo, 0o)

P a

P

Pc

Pm

d~

,, 4/'

1/)l~ I/32

initiated by a primary atom with energy E Number of bombarding projectile atoms Average amount of en- ergy transferred to atomic nuclei during the entire slowing down process of energetic par- ticles starting with en- ergy E in a solid; r/(E) + ?(E) = E Directional vector Cascade volume Probability for an atom with energy E0 moving at an angle 0o to escape from the surface Probability for an excit- ed state a Impact parameter

Critical approach dis- tance at which indivi- dual atomic rows may be isolated Minimum impact pa- rameter for ions in re- spect to a lattice row in channeling Evaporation rate Laboratory scattering angle for an ion in a binary collision with a target atom in Chap. 2 (0 in Chap. 3) Laboratory scattering angle of recoil target atom Angle of an ion trajec- tory relative to a close packed lattice row Critical angle for chan- neling at high and low energies

R

Rr

Ro

R(E)

Rp(E)

r

r

Q

~UVW

So

Sn

s°(~)

(r

r T tuvw

"C

List of Symbols 263

Angular half width for channeling Limiting angle for chan- neling in the transpa- rency model Apsis of a collision (in Chap. 2 also used for distance of colliding atoms) Range of a focusing col- lision sequence Ion reflection coeffi- cient (Also used for Ap- sis of a head on colli- sion in Chap. 3) Total path length for energetic ions in a solid Projected range for en- ergetic ions in a solid Distance of colliding atoms Vector distance of an ion in a solid from the entering point Spike radius

Density of atomic rows in a plane perpendicu- lar to the rows Electronic stopping cross section Nuclear stopping cross section Reduced nuclear stop- ping cross section

Cross section Temperature Transferred energy Unit translation along an axis Time integral for a bi- nary collision. (also used as time constant for a spike in Chap. 2)

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264

0,0

0

0

Uo

U~ u,,~w(x)

[uvw]

List of Symbols

Angle of incidence rel- ative to the surface nor- mal (0 is also used for the laboratory scatter- ing angle of an ion in a binary collision in Chap. 3) Barycentric scattering angle Average energy per atom in a spike Cohensive energy (~-latent heat of subli- mation corrected to ab- solute zero) mostly tak- en as the average bind- ing energy of surface atoms for structureless matter Surface binding energy Average potential of a row or plane Direction of an axis

V(R), V(r)

x

u~ Mean square amplitude of one dimensional thermal vibrations Velocity of a moving atom Two body interaction potential Length, thickness, di- stance from a row or from a plane

Y Sputtering yield for amorphous and poly- crystalline material

Y~.~w) Sputtering yield for single crystalline mate- rial

Y~ Partial sputtering yield for multicomponent materials

3 Y /O E1, ~32 Y /02 C~ I Differential sput- tering yields Charge numbers of in- cident and target atoms

Z1, Z2

Page 9: Additional References with Titles - Springer978-3-540-38514-1/1.pdf · Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions,

Author Index

In this index the numbers in brackets refer to the relevant references

Abe, T, 152, 181 [ 4 . 6 6 ] Appleton, B.R. 76 [3.29] 4.70, 4.71, 4.72, 4.73, 4.187, Adams, C.T. 158 [4.195] Arifov, U.A. 185 [4.362] 4.206, 4.220, 4.305, 4.325, Adams, D. 76 [3.25] Ariyasu, R.G. 124, 125, 132 4.337, 4.339, 4.361, 4.374, Agranovieh, V.M. 105, 109, [3.199] 4.391]

115, 116, 118, 128, 161 Arminen, E. 152, 174, 175, Beeler, J.R., Jr. 115, 116, [3.120, 3.150, 4.245] 183 [4.46, 4.47, 4.48] 119, 126-128 [3.146, 3.160,

Aizentson, A.I. 152, 160 Ashton, D.H. 116, 117, 125, 3.161, 3.207, 3.208, 3.209, [4.64] 132 [3.165] 3.210, 3.211, 3.212]

Akaishi, K. 152, 176, 180 , Askerov, O.Sh. 175, 176, Beeler, M.F. 116, 119, 126, 201 [4.63, 4.349] 180, 184, 185, 196 [4.340] 128 [3.160, 3.161]

Akimune, H. 155 [4.113] Ato, Y. 164 [4.302] Behrisch, R. 1-7, 10-12, 18, Allan, G. 80 [3.52] Augustyniak, W.M. 18, 153, 37, 43, 49, 51, 52, 57, 58, 65, Alldred, J.C. 200 [4.388] 169, 175, 186, 188 [2.55, 74, 127, 145-147, 149, 150, Alm6n, O. 2, 4, 13, 15, 34, 4.86] 152, 153, 156, 160, 165, 176,

74, 75, 91, 92, I47, 149, 152, Austin, L.W. 12 [2.12] 180, 182, 194, 196, 205, 221, 164-168, 170-173, 175, 176, Averbaek, R.S. 49, 96, 205 247, 251 [1.5, 1.6, 1.19, 1.24, 179-186, 188, 189, 196, 200, [2.100, 3.103, 4.396] 1.30, 2.4, 2.7, 2.102, 2.104, 201,206, 219 [1.18, 2.26, Ayrault, G. 49, 96, 205 2.109, 3.1a, 3.221, 4.1a, 4.3, 3.8, 4.16, 4.33, 4.310, 4.405, [2.100, 3.103, 4.396, 4.397] 4.29, 4.36, 4.37, 4.50, 4.57a, 5.3] Ayukhanov, A.Kh. 185 4.58, 4.61, 4.84, 4.133, 4.221,

Anderman, A. 120 [3.192] [4.362] 4.378, 5.9] Andersen, C.A. 58 [2.131] Beitat, U. 148 [4.19] Andersen, H.H. 7, 15, 16,34, Bach, H, 155 [4.107, 4.108, Bellina, J.J. 77 [3.39]

35, 47, 49, 50, 54, 55, 57, 60, 4.109, 4.110] Benazeth-Colombie, N. 169, 63, 98, 105, 121, 128, 146, Bader, M. 245 [5.75] 232, 245, 246 [4.320, 5.56] 147, 149-151,153, 155-158, Baglin, J.E.E. 154 [4.102] Benes, E. 158 [4.183] 160, 161,163-165, 169, 176, Balarin, M. 94, 233 [3.92, Benninghoven, A. 7, 156, 182, 187, 188, 191-193, 203, 5.59] 157, 167, 182, 183, 188 204, 206-208 [1.33, 2.52, Ball, G.C. 14 [2.38] [1.35, 4.130, 4.155] 2.73, 2.96, 2.101, 2.143, Barrett, J.H. 76, 92, 95, 127, Berg, J. 165 [4.291] 2.150, 2.164, 3.108, 3.109, 129 [3.29, 3.90, 3.96, 3.229] Berliner, A. 12 [2,16] 3.122, 4.7, 4.12, 4.34, 4.35, Barnah, J.N. 152 [4.54] Bernas, H. 55 [2.115] 4.70, 4.71, 4.72, 4.73, 4.74, Bastings, L.C. 161 [4.240] Bernhardt, F. 158 [4.175] 4.79, 4.83, 4.88, 4.161, Basu, D. 239 [5.65] Besco, D.G. 127 [3.207, 4.193, 4.227, 4.270, 4.296, Bates, J. 161, 187, 188 3.208, 3.209, 3.210] 4.400, 4.403, 4.406, 4.407] [4.239] Besenbacher, F. 160 [4.227]

Andersen, N. 20, 39, 60-63 Bay, H.L. 15, 16, 35, 49-51, Bespalova, N.S. 119 [3.186] [2.77, 2.148] 54, 55, 57, 146, 147, 149- Bethe, H.A. 24 [2.61]

Anderson, G.S. 78, 112, 151, 153, 155, 158-160, 164-166, Bet.z, G. 7, 45, 63, 65 [1.36, 154, 156, 163, 232, 245, 246 169-171,173, 175, 176, 181, 2.88, 2.152] [3.45,3.46,4.41,4.93,4.273, 182, 185, 187, 188, 191-194, Bhattacharya, R.S. 63, 146, 4.274, 5.55, 5.77, 5.78, 5 .79] 196-199, 202-204 [2.52, 182, 188, 222, 239, 245

Andersson, S. 76 [3.27] 2.101, 2.105, 2.164, 4.7, [2.153, 4.11, 4.357, 5.43, Appelbaum, J.A. 80 [3.51] 4.12, 4.13, 4.34, 4.35, 4.62, 5.64, 5.65]

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266 Author Index

Biersack, J.P. 162, 190, 205 [4.257, 4.398, 4.399]

Blaekman, M. 129 [3.228] Blandin, A. 58 [2.129] Blank, P. 149, 152-154, 164,

165, 169 [4.25, 4.26, 4.27, 4.285]

Blechschmidt, E. 13 [2.20] Blewer, R.S. 155 [4.116] Blewitt, T.H. 95, 96, 108

[3.99, 3.100] Blum, P. 158 [4.182, 4.183,

4.184] Bogh, E. 30 [2.161] Boerbom, H.J.M. 157

[4.164] Boers, A.L. 125, 129 [3.202] Bottiger, J. 42, 152-154, 156,

194 [2.82, 4.44, 4.45, 4.50, 4.51, 4.52, 4.79, 4.91, 4.367]

Bogen, P. 158 [4.188] Bohdansky, J. 4, 51, 147,

151,152, 156, 159, 160, 163, 164, 166, 169, 170, 173, 175, 179, 181,184, 185, 187, 194, 196, 197-199, 202, 203 [1.19, 2.105, 4.13, 4.61, 4.62, 4.145, 4.206, 4.218, 4.301, 4.304, 4.305, 4.306, 4.330, 4.337, 4.339, 4.361, 4.374, 4.391]

Bohr, N. 14, 18, 19, 22, 23, 46, 47 [2.35, 2.95]

Boltzmann, L. 25 [2.64] Boothby, R.M. 156 [4.126] Borders, J.A. 164, 166, 173

[4.3001 Borg, R.J. 116, 117, 119

[3.162, 3.163] Born, M. 97 [3.105] Borovik, E.S. 173 [4.328] Borquin, R.D. 116, 117, 125,

132 [3.166] Bradford, J.N. 222, 239

[5.35, 5.61, 5.62, 5.63] Bradley, R.C. 58 [2.126] Brady, J.J. 161 [4.249] Bram, E. 156 [4.1281 Bramham, R.W. 187, 196

[4.364] Brandt, W. 14, 39 [2.39] Braun, M. 157, 159, 160,

165, 168, 176, 182, 188 [4.159, 4.237, 4.290, 4.354]

Breth, A. 156 [4.129]

Brice, D.K. 30, 160, 172 [2.70, 4.219]

Brodzinski, R.L. 160, 161, 180, 205 [4.221, 4.222, 4.223]

Brown, F. 14, 75, 221,225 [2.38, 3.14, 5.21]

Brown, W.L. 18, 65, 153, 156, 169, 175, 186, 188 [2.55, 2.159, 4.85, 4.86]

Bruee, G. 2,4, 13, 15,34,74, 75, 91, 92, 149, 152, 164- 168, 170-173, 175, 176, 179-186, 188, 189, 196, 200, 201,206, 219 [1.18, 2.26, 3.8, 4.33, 4.405, 5.3]

Bruckmiiller, R. 158 [4.182, 4.1841

Buchta, R. 157, 159, 168, 176, 182, 188 [4.159]

Bukhanov, V.M. 163 [4.262, 4.263]

Burger, R.M. 77 [3.37] Butler, J.W. 153 [4.82]

Cachard, A. 154 [4.96] Carlston, C.E. 83, 121, 123,

133, 168, 221-224, 230, 231, 237, 241,245 [3.70, 3.193, 3.196, 4.316, 5.14, 5.41]

Carter, G. 7, 57, 146, 152, 155, 165, 182, 185, 187 [1.26, 1.33, 2.118, 4.5, 4.53, 4.54, 4.121, 4.294]

Cassignol, C. 161 [4.241] Cecchi, J. 181, 194 [4.351] Chadderton, L.T. 116, 159

[3.153, 3.154, 3.155, 3.156, 4.210, 4.211]

Chapman, G.E. 57, 160 [2.122, 4.214]

Chaumont, J. 55 [2.115] Cheney, K.B. 176, 185, 200,

201 [4.345] Cherns, D. 82, 116, 117, 119,

120 [3.63, 3.187] Chernysh, U.S. 163 [4.282] Chernysh, V.S. 246, 248

[5.881 Chicherov, V.M. 74, 92,

200-202, 219, 220, 222-224, 232, 240-242 [3.9, 4.383, 5.2, 5.42]

Christensen, O. 146, 151 [4.4]

Chu, W.K. 63, 65, 156 [2.151, 4.134]

Chutjian, A. 78 [3.41] Cini~ M. 58 [2.128] Clausen, C. 53, 57 [2.165] ~obi6, B. 182 [4.356] Coburn, J.W. 158 [4.176,

4.177] Colligon, J.S. 7, 147, 154,

187, 196 [1.26, 4.14, 4.99, 4.3641

Colombie, N. 168, 174-176, 183 [4.314]

Comas, J. 158 [4.167] Comeaux, A. 168, 222, 241,

245 [4.316, 5.41] Compton, K.T. 13 [2.24] Conner, R.A. 154 [4.92] Cooper, C.B. 138, 152, 158,

160, 163, 176, 178, 196, 230 [3.242, 4.67, 4.167, 4.174, 4.217, 4.268, 4.341, 5.53]

Cramer, S.N. 164 [4.287] Crookes, W. 12 [2.10] Crowder, B.L. 154 [4.102] Cuderman, J.F. 161 [4.249] Cullins, A.G. 148 [4.22] Cuomo, J.J. 159, 164 [4.205,

4.288] Czanderna, A.W. 7 [1.32]

Daley, H. 168, 170 [4, 3t7] Daly, N.R. 180, 194, 202

[4.348] Das, S.K. 160, 180, 181,194,

205 [4.221, 4.225, 4.234, 4.235, 4.351]

Daschenko, A.I 159 [4.1991 Datz, S. 82, 92, 114 [3.65] Davidse, P.P. 163 [4.284] Davies, J.A. 14, 18, 42, 75,

78, 152, 194, 221,223, 225 [2.37, 2.38, 2.56, 2.82, 3.14, 3.44, 4.44, 4.45, 5.21, 5.44]

De Jong, M. 15, 74, 75, 83, 92, 219, 220, 222, 232 [2.54, 3.7, 5.1]

De Kluizenaar, E.E. 161 [4.240]

De Vries, A.E. 57, 58, 63, 157, 182, 188 [2.124, 2.125, 2.133, 2.153, 4.165, 4.357]

Dearnaley, G. 7, 146, 151 [1.21, 4.6, 4.40]

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Author Index 267

Dederichs, P.H. 14, 115, 116 [2.42, 3.145, 3.158, 3.159]

Delaplain, C.B. 119-122, 124 [3.181]

Desai, P.D. 79 [3.47] Devienne, F.M. 182, 183,

188 [4.355] Dimitrijevi6, T.S. 164, 188

[4.286] Doan, N.V. 116 [3.168] Dobrozemsky, R. 45, 156

[2.88, 4.129] Dodds, H.L. 51,202, 203

[2.108, 4.392] Dolgov, A.S. 53 [2.111] Domeij, B. 14 [2.38] Donnay, G. 85 [3.83] Donnay, J.D.H. 85 [3.83] Doran, D.G. 124, 125, 132

[3.199] Drentje, S.A. 162, 221-223,

237, 239 [4.261, 5.17] Drinkwine, M.J. 59 [2.1361 Dubinskii, V.E. 159 [4.207] Diisterh6ft, H. 206 [4.410] Dupin, J.P. 154 [4.96] Dupp, G. 176, 200, 201

[4.343, 4.387] Dushikov, I.I. 200-202

[4.383] Dusza, P. 181, 194 [4.351]

Ecker, K.H. 96, 155, 160, 204-206 [3.102, 4.124, 4.229]

Eckstein, W. 152, 153, 180 [4.50, 4.52, 4.58, 4.87]

Edwall, D.D. 156 [4.135] Edwards, D.R. 116 [3.152] Edwin, R.P. 151, 155, 200,

201 [4.42] EerNisse, E.P. 149, 153, 154,

160, 164, 172, 187, 188 [4.28, 4,31, 4.32, 4.75, 4.76, 4.77, 4.78, 4.103, 4.219]

Effron, H.M. 75, 81, 120- 123, 136 [3.20, 3.190, 5.30]

Efremenkova, V.M. 165 [4.292]

Ehrhart, P. 118 [3.172] Elbern, A, 158 [4.185,4.186] Elen, D.J. 222, 235, 239,

249-252 [-5.37] Elich, J.J.Ph. 83, 91, 92, 94,

163, 222, 223, 235, 236, 239,

241-244, 249-253 [3.79, 3.80, 4.276, 5.37, 5.38, 5.39, 5.70, 5.92]

Emmoth, B. 157, 160, 165, 168, 176, 182, 188 [4.159, 4.237, 4.290, 4.354]

Englert, A. 46, 104, 105, 116-119 [2.163, 3.1191

Erents, S.K. 152, 159 [4.55, 4.200, 4.201]

Erginsoy, C. 46, 82, 92, 104, 105, 114, 116-119, 132 [2.163, 3.65, 3.119, 3.151]

Eriksson, L. 78, 223 [3.44, 5.44]

Erlewein, J. 156, 164 [4.138] Estrup, P.J. 78 [3.42] Etzkorn, H.W. 154, 156

[4.951 Evans, C.A., Jr. 7, 156 [1.35,

4.130] Evdokimov, I.N. 200, 222,

240-242 [4.389, 4.390, 5.42] Evdokimov, S.A. I59 [4.199]

Fagot, B. 168, 174-176, 183 [4.314]

Farmery, B.W. 57, 159, 161 [2.122, 4.202, 4.247]

Farnsworth, H.E. 77, 78 [3.37, 3.38, 3.39]

Farren, J. 163 [4.275] Fert, C. 168, 174-176, 183

[4.314] Fetz, H. 155, 164, 174, 182,

186, 198-200 [4.118, 4.297] Feuerstein, A. 239 [5.66] Finfgeld, C.R. 174, 184, 185,

187, 196 [4.334, 4.363] Fink, D. 162, 190 [4.257] Finney, N.M.A. 239 [5.61] Finnis, M.W. 76, 77, 82, 116,

117, 119 [3.33, 3.63] Firsov, O.B. 90,97, 127, 132,

133 [3.89, 3.225] Fluit, J.M. 13, 15, 74, 75, 83,

91, 92, 109, 152, 157, 163, 176, 200, 201,219-224, 232, 233, 237, 244 [2.28, 2.54, 3.7, 3.10, 3.69, 3.125, 4.59, 4.164, 4.277, 4.342, 5.1, 5.10, 5.12, 5.13, 5.72]

Folkmann, F. 154 [4.90] Fontell, A. 152, 174, 175,

183 [4.46, 4.47, 4.48]

Fotri6, T.S. 164, 188 [4.286] Fowler, R.H. 27 [2.66] Francken, L. 237 [5.60] Freeman, J.H. 7, 146, 147

[1.21, 4.6, 4.9] Freeman, N.J. 180, 194, 202

[4.348] Friedman, L. 157 [4.164] Friesen, J. 14 [2.37] Fritzsche, C.R. 154, 155

[4.94, 4.101] Fuller, D. 154 [4.99] Furr, A.K. 187, 196 [4.363]

Gambino, R.J. 159 [4.205] Garner, C.M. 156 [4.135] Garrison, B.J. 58, 82, 119-

121, 125 [2.135, 3.64, 3.182, 3.183, 3.184, 3.185]

Garrison, K.E. 116, 117, 125, 132 [3.164]

Garvin, H.L. 163 [4.280] Gassiot, J.P. 2, 9, 12 [1.10,

2.2] Gaudisio, S.L. 161 [4.238] Gay, W.L. 46, 48, 120-122,

130, 131 [2.91, 3.190, 3.236] Gear, C.W. 117 [3.169] Gehlen, F.C. 115 [3.146] Gemmel, D.S. 82, 92, 114,

127 [3.671 George, T.H. 77 [3.37] Georgieva, N.E. 163 [4.279] Gerhard, W. 58, 158 [2.132,

2.134, 4.178, 4.179] Gesang, W.R. 158, 202

[4.1711 Gibson, J.B. 46, 48, 75, 95,

98, 104, 106, 108, 116-119 [2.89, 3.191

Gilmer, G.H. 80, 81 [3.54] Girifalco, L.A. 76, 79, 82,

116, 120 [3.32] Gittings, R.P. 151 [4.40] Gjostein, N.A. 76 [3.30] Gleiser, M. 79 [3.47] Goddiksen, P. 160 [4.227] Goland, A.N. 46, 48, 75, 95,

98, 104, 106, 108, 116-119 [2.89, 3.19]

Goldman, D.T. 200 [4.385] Goldsmith, P. 152 [4.56] Goldstein, E. 2, 1211.12,2.8] Goldstein, H. 96, 129 [3.104,

3.230]

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268 Author index

Gombas, P. 97, 132 [3.107] Goodman, A.M. I56 [4.132] Gordon, M.K. 117 [3.170] Goretzki, H. 156 [4.136] Goto, K. 156, 176 [4.137,

4.140] Gotoh, T. 152, 176 [4.63] Grahmann, H. 239 [5.66] Granquist, G. 12 [2.11] Grant, W.A. 146, 152 [4.5,

4.53, 4.54] Gras-Marti, A. 60 [2.146] Green, J.B. 245 [5.76] Greenwood, L.R. 154 [4.92] Gregg, R. 162, 194 [4.258] Granlund, F. 182 [4.352] Grosser, J. 157 [4.165] Grove, W.R. 2, 9, 11, 145

[1.9, 2.1, 4.1] Gruen, D.M. 4, 158, 161,

187, 188 [1.20, 4.191, 4.238, 4.239]

Giintherschulze, A. 7 [1.22] Guinan, M.W. 116, 117, 119

[3.162, 3.163] Gurmin, B.M. 179, 181,185

[4.347] Gurvich, L.G. 119 [3.186] Gusev, V.M. 173 [4.329] Guseva, M.I. 173, 176, 182,

184 [4.329, 4.331, 4.344] Guthrie, J.W. 155 [4.116] Gvosdover, R.S. 165 [4.292]

Haak, J. 125 [3.2011 Haft, P.K. 57, 60, 63, 64

[2.119, 2.143, 2.154] Haggmark, L.G. 196 [4.379] Hagstrum, H.D. 76 [3.24] Hammer, D. 158 [4.183] Haneman, D. 149 [4.30] Haring, A. 157 [4.165] Harling, C.K. 160, 161,180,

205 [4.221, 4.222, 4.223] Harper, J.M.E. 159 [4.205] Harrington, W.L. 156

[4.1321 Harris, J.S., Jr. 156 [4.135] Harrison, D.E., Jr. 13, 46-

48, 58, 75, 81, 82, 119-125, 130, 131,136, 147, 168, 176, 184, 194, 195, 221,226, 229, 230, 239, 245 [2.32, 2.90, 2.91, 2.135, 3.20, 3.60, 3.64, 3.180, 3.181, 3.182, 3.183,

3.184, 3.185, 3.188, 3.189, 3.190, 3.196, 3.236, 4.17, 4.315, 4.377, 5.30, 5.32, 5.33, 5.47, 5.50]

Hart, R.G. 152, 163, 178 [4.67, 4.268]

Hasseltine, E.H. 160, 161, 245 [4.230, 5.74]

Hauffe, W. 165, 251,252 [4.293, 5.93]

Haughney, L.C. 94, 95, 121, 133, 223, 224, 227, 228 [3.94, 5.45]

Hawkins, D.T. 79 [3.47] Hayek, K. 77, 78 [3.38] Hayward, W.H. 153, 168,

172, 176, 182, 187 [4.69] Hechtl, F. 175, 196, 198, 199

[4.337, 4.339, 4.373] Heiland, W. 1, 7, 64, 65, 77,

78, 129, 148, 158 [1.3, 1.30, 1.34, 2.158, 3.40, 3.231, 3.233, 3.234, 4.18, 4.19, 4.197]

Heine, V. 76, 77 [3.33] Heinisch, H.L. 124, 125, 132

[3.2001 Heinrich, R.R. 154 [4.92] Heldt, L. 146, 161 [4.10] Helms, C.R. 60 [2.143] I-Ienschke, E.E. 82 [3.58] Hepworth, J.K. 173, 181,

185 [4.333] Hicks, C.M. 147, 187 [4.14] Hildebrandt, D. 206, 208

[4.408, 4.409, 4.410, 4.411] Hines, R.L. 154 [4.106] Hinthorne, J.R. 58 [2.131] Hintz, E. 4, 158, 173 [1.19,

4.186, 4.188, 4.330] Hirao, T. 148 [4.21] Hittorf, W. 12 [2.14] Ho, P.S. 63, 65 [2.151] Hoggild, P. 30 [2.161] Hofer, W.O. 39, 49, 50, 60,

112, 146, 150, 151, 153, 156-160, 163, 165, 170, 171, 175, 176, 188, 203, 204 [2.79, 2.101, 2.144, 2.164, 3.134, 4.7, 4.34, 4.35, 4.145, 4.156, 4.157, 4.206, 4.212, 4.220, 4.231, 4.232, 4.233, 4.283, 4.290, 4.325, 4.336]

Hoffmann, T.J. 51,202, 203 [2.108, 4.392]

Hofmann, S. 156, 16414.138] Holborn, L. 12 [2.12] Holcombe, H.T. 46, 47, 119-

124, 136, 221,239 [2.90, 3.180, 5.33]

Holloway, P.H. 156, 172, 173, 188 [4.139]

Holm6n, G. 147, 163, 166, 168, 173, 178,200, 201,232, 245, 246, 248 [4.15, 4.16, 4.310, 5.57]

Holmes, D.K. 51, 105, 106, 109, 125, 126, 202, 203 [2.108, 3.121, 3.204, 3.205, 4.392]

Homer, R. 153, 156, 169, 175, 186, 188 [4.85, 4.86]

Hone, D.W. 58 [2.129] Honig, R.E. 156, 158 [4.132,

4.166] Hoogendoorn, A. 173, 175,

•76, 181, 199 [4.327] Hoonhout, D. 146 [4.11] Horne, D. 185 [4.360] Hotston, E. 138, 196 [3.241,

4.372] Hou, M. 92, 106, 110, 127,

137, 138 [3.91, 3.123, 3.219, 3.220]

Howard, J.K. 156 [4.134] Hultgren, R. 79 [3.47] Hume-Rothery, W. 134

[3.117] Huntington, H.B. 118, 119

[3.171, 3.176] Hurlbut, F.C. 157, 245

[4.163, 5.74] Husinsky, W. 158 [4.182,

4.183, 4.184]

Imada, M. 43 [2.84] Irate, A.I. 159 [4.199] Inoue, K. 148 [4.21] Irene, E.A. 154 [4.102] Ishikawa, K. 156, 17614.137] Ishitani, T. 60, 158 [2.147,

4.190] Ismail, H. 166, 175, 176, 181,

184, 200, 201 [4.309]

Jackson, D.P. 37, 76, 77, 79, 80, 82, 115-117, 119-121, 124, 127, 129, 134, 229, 230 [2.76, 3.31, 3.49, 3.62, 3.147, 3.148, 3.223, 3.229, 5.49]

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Author Index 269

Jackson, K.A. 80, 81 [3.54] Jackson, R.O. 116 [3.152] Jaffee, R.I. 115 [3.146] Jeffries, D.K. 152 [4.56] Jenkins, L.H. 76, 160, 180,

205 [3.29, 4.221, 4.224] Jespen, D.W. 76 [3.22] Johansen, A. 159 [4.210,

4.211] Johar, S.S. 53, 55, 57, 155,

182, 186, 188, 191, 192 [2.113, 4.125, 4.358, 4.369]

Johnson, J.P. 75, 81, 120- 123, 136, 221 [3.20, 3.188, 5.301

Johnson, R.A. 76, 77, 80, 81, 115, 116 [3.34, 3.143, 3.144]

Jona, F. 76 [3.22, 3.28] Jung, P. 119 [3.177]

Kabeya, Z. 152, 176 [4.63] Kaczerowski, W. 205 [4.398] Kaeppeler, F. 153, 156 [4.81] Kalbitzer, S. 239 [5.66] Kaminsky, M. 7, 160, 180,

181, 194, 205 [1.25, 4.221, 4.225, 4.234, 4.235, 4.3511

Kapusta, O.I. 161 [4.245] Karmohapatro, S.B. 222,

239, 245 [5.43, 5.64, 5.65] Karpukhin, V.S. 152, I60

[4.64] Kasai, S. 165 [4.289] Kaspar, J.S. 85 [3.84] Katrich, N.P. 173 [4.328] Katzer, J.R. 176 [4.341] Kay, E. 158 [4.176, 4.177] Kelley, K.K. 79 [3.47/ Kelly, J.C. 160 [4.214] Kelly, P.W. 82, 119-12I

[3.641 Kelly, R. 57, 60, 63, 65, 148,

155, 156, 186 [2.120, 2.141, 2.149, 4.24, 4.114, 4.115, 4.122, 4.123]

KenKnight, C.E. 2, 156 [1.7, 4.1541

Kerdijk, C.B.W. 146 [4.11] Kersten, H.H. 222,235, 239,

249-252 [5.37] Keywell, F. 10, 13, 39, 189

[2.6, 2.31, 4.366] Khasanov, R.M. 185 [4.362] Kim, J.S. 156 [4.135] Kimura, H. 165 [4.289]

Kimura, T. 155 [4.113] Kinchin, G.H. 14, 27, 119

[2.34, 3.175] King, M.E. 64 [2.157] Kingdon, K.H. 13, 59 [2.21] Kirk, M.A. 95, 96, 108, 154

[3.99, 3.100, 4.92] Kirsanov, V.V. 105, 109,

115, 116, 118, 128 [3.120, 3.150]

Kirschner, J. 154, 156, 163 [4.95, 4.145]

Kistemaker, J. 13, 75, 81, 83, 91, 92, 157, 163, 176, 200, 201,221-224, 235, 237,239, 249-252 [2.28, 3.10, 3.56, 3.69, 4.164, 4.165, 4.277, 4.342, 5.11, 5.13, 5.37, 5.89]

Kitayoe, Y. 56, 57 [2.1171 Kittel, C. 130 [3.235] Kitzanann, J. 155 [4.110] Kiyahara, A. 152, 176 [4.63] Kneff, D.W. 161, 171, 181

[4.255] Knudsen, H. 153, 155, 156,

161 [4.79, 4.83] Knudsen, P. 174, 180, 181,

184, 186, 188, 189, 190 [4.335]

Kobayashi, J. 155 [4.1131 Koedam, M. 160, 173, 175,

176, 181, 182, 199 [4.213, 4.327]

Kohlsch/Jtter, V. 2, 7, 12 [1.13, 2.19]

Kominiak, G.J. 165 [4.291] Komiya, S. 152 [4.65] Komizo, M.K. 152, 176

[4.63] K6nnen, G.P. 58, 15712.133,

4.165] Koshikawa, T. 156, I76

[4.137, 4.140] Koshkin, V.K. 173, 180,

181, 185 [4.332] Kr/iutle, H. 154, 188 [4.100] Krassoklin, Y.L. 173 [4.329] Krauss, A.R. 158 [4.191] Krebs, K.H. 1, 167-170,

173-176, 178, 181, 184 [1.4, 4.311]

Krohn, V.E., Jr. 158 [4.194] Kriiger, W. 159, 160, 176

[4.204, 4.2151

Krutenat, R.C. 163, 183 [4.28] Kubec, F. 58 [2.127] Kuff, D.W. 161, 180 [4.256] Kugler, O. 147 [4.16] Kuptsis, J.D. 159 [4.205] Kurbatov, O.V. 170 [4.322] Kuvakin, M.V. 163,246, 248

[4.282, 5.881

L'ecuyer, J. 18 [2.56] Laegreid, N. 164, 168-176,

178-182, 184-187, 189, 190, 199 [4.298, 4.326]

Lagally, M.G. 77 [3.35] Lamar, E.S. 13 [2.24] Lang, N.D. 80 [3.53] Langberg, E. 82 [3.59] Langley, R.A. 164, 166, 173

[4.3001 Langmuir, I. 13, 59 [2.21] Lanzerotti, L.J. 18 [2.55] Laubert, R. 14, 39 [2.39] Laursen, T. 152 [4.51] Layton, J.K. 156, 166, 180,

182, 185 [4.147, 4.148, 4.149] Leamy, H.J. 80, 81 [3.54] Lebedev, S.Ya. 159, 16l

[4.207, 4.208, 4.245] Lehmann, C. 48, 75, 89, 98,

111, 114-116, 119, 126,221 [2.98, 3.17, 3.86, 3.87, 3.115, 3.145, 3.157, 3.158, 3.159, 5.28]

Leibfried, G. 14, 48, 82, 89, 92, 98, 102, 104, 114 [2.40, 3.65, 3,86, 3.87, 3.113, 3.114, 3.116]

Leighly, H.P., Jr. 116 [3.1521 Lenskjaer, T. 51, 114, 206

[2.107, 3.137, 4.403] Lerner, J.L. 161 [4.238] Lever, R.F. 156 [4.134] Levy, N.S. 75, 81, 120-123,

136 [3.20, 3.188, 5.30] Lewis, J.E. 63, 65 [2.151] Liau, Z.L. 65, 153, 156

[2.159, 4.85] Lichtman, D. 59 [2.136] LieN, H. 157, 158 [4.156] Lindhard, J. 14, 18, 20, 21,

23, 24, 28, 3I, 35, 60, 83, 88- 90, 92, 93, 97, 127, 137, 194, 221,225, 226, 239 [2.36, 2.41, 2.57, 2.63, 3.81, 3.82, 3.88, 3.226, 4.371, 5.25]

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270 AuthorIndex

Lindner, A. 161, 182 [4.242, 4.353]

Lindroos, V.K. 152 [4.47] Linker, G. 153, 156 [4.81] Littmark, U. 39, 41, 43-45,

60, 152, 163, 165, 194, 206 [2.79, 2.81, 2.86, 2.87, 2.144, 4.58, 4.283, 4.290, 4.370, 4.402]

Logan, C.M. 160, 180, 205 [4.221]

Lonsdale, K. 134 [3.117, 3.239]

Lucasson, P. 119 [3.178] Lundqvist, B.I. 58 [2.130] Lutz, H.O. 75, 82, 92, 114,

221,225 [3.15, 3.65, 5.20] Lysova, G.V. 159 [4.208]

MacDonald, R.J. 98, 112, 149, 159, 222, 239, 240, 245, 246 [3.111, 3.132, 4.30, 4.209, 5.34, 5.80, 5.81, 5.82, 5.83, 5.84]

Maderlechner, G. 41, 51, 127, 194, 196 [2.81, 2.104, 3.221, 4.370, 4.378]

Maeda, H. 165 [4.289] Magnuson, G.D. 82, 83,

121, 123, 133, 168, 195, 221-224, 229-231,237, 241,245 [3.60, 3.70, 3.193, 3.196, 4.316, 4.377, 5.14, 5.41.5.50]

Mahadevan, P. 168, 222, 241,245 [4.316, 5.41]

Maissel, L.T. 163 [4.284] Malewicki, R.L. 154 [4.92] Mann, F.M. 161, 171, 180,

181 [4.255, 4.256] Manns, R. 206, 208 [4.408,

4.409, 4.410, 4.4111 Marin, G. 148 [4.19] Martin, A.D. 156 [4.127] Martin, P.J. 157, 158, 160,

170, 171 [4.157, 4.220] Martinelli, A.P. 4, 173 [1.19,

4.330] Martynenko, T.P. 163, 166,

170, 179-181, 184, 185 [4.279, 4.307, 4.346, 4.347]

Martynenko, Yu.V. 83, 221, 237 [3.72, 5.16]

Marwick, A.D. 204 [4.393]

Mashkova, E.S. 1, 129, 169, 178, 200, 201,233, 245, 247 [1.1, 3.232, 4.321, 4.384, 5.58, 5.85, 5.86, 5.87]

Mathews, M.D. 82, 116, 117, 119 [3.63]

Matsunami, N. 18 [2.56] Matthies, M.T. 35 [2.75] Maul, J. 151, 155 [4.39] Mayer, J.E. 97 [3.105] Mayer, J.W. 65, 78, 153,

156, 223 [2.159, 3.44, 4.80, 5.44]

Mayer, W.N. 151 [4.41] MeBeth, R.L. 161 [4.238] McCargo, M. 75, 221,225

[3.14, 5.21] McCracken, G.M. 1, 51,

152, 159, 160 [1.2, 2.103, 4.55, 4.56, 4.57, 4.200, 4.201]

MeIntyre, J.D. 14 [2.37] McKeown, D. 153, 160, 196

[4.68] McRae, E.G. 76, 78 [3.24,

3.421 Medved, D.B. 154, 182, 200

[4.98] Meisenheimer, R. 160, 180,

205 [4.221] Merkle, K.L. 55, 155, 160,

188, 204-206 [2.116, 4.124, 4.226]

Mertens, P. 154, 158, 162, 175, 190, 204 [4.97, 4.192, 4.257]

Meyer, C.H., Jr. 156, 166, 180, 182, 184, 185 [4.147, 4.148, 4.149, 4.359]

Meyer, O. 153, 156 [4.81] Middleton, R. 158 [4.195] Milgram, M. 46, 48, 75, 95,

98, 104, 106, 108, 116-119 [2.89, 3.191

Miller, J.W. 76 [3.29] Minter, F.J. 120 [3.187] Mioduszewski, P. 158

[4.1861 Miremadi, B. 239 [5.61] Mirnov, S.U. 173 [4.329] Miyagawa, S. 164 [4.302] Mizuno, H. 152 [4.65] Meller Petersen, P. 153, 155,

161 [4.83]

Molchanov, V.A. 1, 13, 74, 92, 94, 129, 169, 178, 200- 202, 219, 220, 222-224, 232, 233, 240-242, 245, 247, 251 [1.1, 2.30, 3.9, 3.92, 3.232, 4.321, 4.382, 4.383, 4.384, 4.389, 4.390, 5.2, 5.42, 5.58, 5.59, 5.85, 5.86, 5.87, 5.91]

Moli~re, G. 97 [3.106] Moline, R.A. 60, 148 [2.139,

4.221 Montgomery, H. 109, 161,

244 [3.124, 4.252, 5.71] Moore, W.L., Jr. 46, 47,

119-124, 136, 146, 156, 161, 182, 239 [2.90, 3.180, 4.10, 4.152, 4.242, 4.353, 5.33]

Morgan, D.V. 82, 92, 114- 116, 127, 151 [3.66, 3.147, 3.153, 3.222, 3.223, 4.40]

Morita, Y. 164 [4.302] Morozov, V.G. 163 [4.262] Mfihlratzer, A. 156 [4.136] Mukherjee, D.K. 222, 245

[5.43] Mundkur, P.V. 120, 122

[3.191] Murti, D.K. 155 [4.122] Musket, R.G. 114, 163

[3.139, 3.141, 4.264, 4.266]

Nagami, M. 165 [4.289] Nakayama, K. 156 [4.141,

4.1461 Narasinham, M.A. 200

[4.3881 Narusawa, T. 152 [4.65] Navin~ek, B. 151, 155, 182,

185, 187 [4.43, 4.121] Nedospassov, A.V. 173

[4.329] Nelson, G.C. 156 [4.131] Nelson, R.S. 7, 15, 57, 60,

75, 104, 109, 114, 120, 146, 161, 163, 205, 221,225, 240, 241,244 I-1.21, 1.27, 2.49, 2.138, 3.16, 3.118, 3.124, 3.129, 3.140, 3.187, 4.6, 4.250, 4.251, 4.252, 4.253, 4.254, 4.278, 5.22, 5.67, 5.68, 5.69, 5.71]

Nenadovi6, T.M. 164, 188 [4.286]

Neok|eous, A.P. 147, 187 [4.14]

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Author Index 271

Neubert, R. 205 [4.399] Newson, P.A. 159, 161

[4.202] Ney, J. 205 [4.398, 4.399] Nghi, L.Q. 155 [4.115] Nicholas, J.F. 77, 85, 88

[3.36, 3.85] Nickl, J. 156 [4.136] Nielsen, O. 54, 146, 150, 153,

188, 204 [2.164, 4.7, 4.35] Nielsen, V. 14, 18, 20, 21, 27,

28, 65, 90, 97 [2.41, 2.57, 2.65, 3.88]

Nikolaev, G.T. 173 [4.328] Nizam, J. 169, 232, 245, 246

[4.320, 5.56] Nobes, M.J. 152, 165 [4.53,

4.294] Norskov, J.K. 58 [2.130] Noggle, T.S. 76, 160 [3.29,

4.2241 Normand, C.E. 168, 176,

184, 194, 226, 245 [4.315, 5.471

Norris, C.B. 154 [4.103] North, J.C. 60 [2.139] Nourtier, A. 58 [2.129] Nyholm, F. 51, 114 [2.107,

3.1371

O'Brian, C.D. 161, 182 [4.242, 4.353]

O'Connor, D.J. 98 [3.111] Oblow, E.M. 164 [4.287] Odajima, K. 165 [4.289] Odette, G.R. 124, 125, 132

[3.199] Odintsov, D.D. 83, 163,221,

222, 233, 237, 240-242 [3.71, 4.263, 5.15, 5.42, 5.58]

Oechsner, H. 7, 43, 58, 81, 123, 157, 158, 164, 168, 170, 174, 176, 179, 180-188, 196, 198, 199, 202 [1.31, 1.33, 2.85, 2.132, 3.57, 4.158, 4.168, 4.169, 4.170, 4.171, 4.172, 4.175, 4.178, 4.179, 4.180, 4.181, 4.297, 4.323, 4.350]

Oen, O.S. 75, 98, 109, 114, 116, 121,122, 126, 127, 129, 131 [3.12, 3.13, 3.114, 3.127, 3.135, 3.136, 3.194, 3.204, 3.205, 3.206, 3.216, 3.218, 5.18, 5.19]

Oetjen, G.H. 152 [4.61] Ogilvie, G.J. 95, 154, 230

[3.97, 4.105, 5.52] Ohasa, K. 165 [4.289] Ohashi, Y. 155, 173 [4.111,

4.1121 Ohtsuka, H. 152, 165, 181

[4.65, 4.66, 4.289] Okamoto, P.R. 156 [4.144] Okuda, S. 155 [4.113] Olin, H.J. 245 [5.77] Ollerhead, R. 18 [2.56] Ollerhead, R.W. 161, 171,

180, 181 [4.255, 4.256] Olson, N.T. 114, 133, 160,

161, 163, 245 [3.138, 4.230, 4.265, 5.73, 5.74, 5.76]

Olson, R.R. 64 [2.157] Onderdelinden, D. 83, 91-

94, 163, 221-227, 229, 230, 233, 235-237, 239, 241-244, 249-253 [3.74, 3.75, 3.76, 3.77, 3.78, 3.80, 4.269, 4.276, 5.23, 5.24, 5.29, 5.36, 5.37, 5.38, 5.39, 5.40, 5.60]

Ono, M. 156 [4.141, 4.146] Onsgaard, J. 148 [4.18] Ormond, D.W. 154 [4.102] Ottenberger, W. 160, 164,

166, 169, 170, 179, 184, 185, 194 [4.218, 4.301, 4.305]

Overeijnder, H. 63, 182, 188 [2.153, 4.357]

Pabst, H.J. 127 [3.224] Palenius, H.P. 182 [4.354] Panzera, C. 163, 183 [4.281] Parker, T.E. 155 [4.123] Patterson, A.L. 85 [3.84] Patterson, H. 161 [4.246] Pearmain, K. 151,152 [4.38] Pearson, G.L. 156 [4.135] Pease, R.S. 14, 27, 39, 119,

200 [2.33, 2.34, 3.175, 4.386] Peavey, J.H. 160 [4.235] Pedersen, S.D. 51, 114

[2.107, 3.137] Perel, J. 168, 170 [4.317] Perkins, J.Q. 60 [2.140] Perovi6, B. 112, 182 [3.133,

4.356] Petersen, N.B. 51, 114

[2.107, 3.137] Peterson, G.D. 149 [4.32] Phillips, D.L. 35 [2.75]

Picraux, S.T. 152 [4.51,4.52] Piercy, G.R. 75, 221,225

[3.14, 5.21] Pitkin, E.T. 176, 185, 200,

201 [4.345] Pivot, J. 154 [4.96] Pleshivtsev, N.V. 7 [1.28] Plficker, J. 2, I0, 12, 145

[1.11, 2.3, 4.2] Poate, J.M. 18, 65, 153, 169,

175, 186, 188 [2.55, 2.159, 4.86]

Poelsma, B. 125, 129 [3.202] Politiek, J. 81 [3.56] Poltoratskii, V.I. 185 [4.362] Pop, S.S. 159 [4.199] Poppa, H. 154, 182, 200

[4.98] Poschenrieder, W. 7, 166

[1.30, 4.304] Potter, D.I. 156 [4.144] Powell, R.A. 7, 156 [1.35,

4.130] Primak, W. 154 [4.104] Pronko, P.P. 160, 18814.226] Prophet, H. 195 [4.376] Pugacheva, T.S. 109 [3.126] Puluj, J. 12 [2.13]

Quinto, D.T. 156 [4.143]

Rahim, B.K.H. 205 [4.398] Ramer, C.E. 200 [4.388] Rang, G. 161 [4.241] Ranticelli, L.A. 160, 161

[4.222, 4.223] Reed, R.E. 160 [4.214] Rehn, L.E. 156 [4.144] Reichert, L. 158 [4.172] Reid, I. 159, 161 [4.209,

4.247] Reuther, E. 222, 239 [5.35,

5.62, 5.63] Reutlinger, G.W. 60 [2.139] Reynolds, H.K. 200 [4.388] Rhead, G.E. 76, 80 [3.26] Rhodin, T. 76 [3.25] Rhodin, T.N. 58 [2.126] Riccato, A. 205 [4.3981 Ridge, M.J. 154 [4.105] Rie, K.T. 181, 205 [4.3941 Riley, J.C. 163 [4.268] Robertson, W.D. 156 [4.143] Robinson, C.H. 161,204,

205 [4.243]

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272 Author index

Robinson, J.E. 146, 160, 161, 180, 205 [4.8, 4.221]

Robinson, M.T. 14, 47, 51, 75, 83, 91, 92, 94, 95, 98, 101,105-107, 109-112, 116, 121-123, 125-127, 129-131, 133-138, 169, 176, 178, 188, 196, 202, 203, 220-225, 230-232, 237, 239 [2.43, 2.92, 2.104, 2.108, 3.11, 3.12, 3.13, 3.68, 3.91, 3.93, 3.95, 3.110, 3.112, 3.115, 3.121, 3.123, 3.127, 3.130, 3.194, 3.195, 3.204, 3.205, 3.206, 3.213, 3.214, 3.215, 3.216, 3.218, 3.219, 3.220, 3.221, 3.227, 3.234, 3.237, 3.238, 4.319, 4.365, 4.378, 4.392, 5.7, 5.18, 5.19, 5.31, 5.51, 5.54]

R6delsperger, K. 159, 160, 176 [4.204, 4.215, 4.228]

R6ssler, K. 127 [3.215] Rogaschewski, R. 206, 208

[4.411] Rol, P.K. 2,5, 13, 15,74,75,

83, 91, 92, 152, 176, 200, 201,219-224, 232, 237, 251 [1.17, 2.28, 2.54, 3.7, 3.10, 3.69, 3.75, 4.59, 4.342, 5.1, 5.ll , 5.12, 5.36, 5.90]

Roosendaal, H.E. 48,83, 91, 92, 94, 163, 222, 223, 235, 236, 239, 241-244, 249-253 [2.97, 3.79, 3.80, 4.276, 5.37, 5.38, 5.39, 5.70, 5.89, 5.92]

Rosenberg, D. 2, 34, 136, 164, 166-176, 178-182, 184-190, 199 [1.7, 1.16, 2.74, 3.240, 4.299, 4.324]

Rosenblatt, G.M. 79 [3.48] Roth, J. 4, 51,147, 151,152,

156, 159, 160, 163, 164, 166, 169, 170, 173, 175, 179, 181, 184, 185, 187, 194, 196, 197 [1.19, 2.105, 4.13, 4.50, 4.52, 4.58, 4.61, 4.62, 4.145, 4.206, 4.218, 4.288, 4.301, 4.304, 4.306, 4.330, 4.361, 4.374]

Rothemund, W. 154, 155 [4.94, 4.101]

Roustan, A. 182, 183, 188 [4.355]

Ruault, M.O. 55 [2.115]

Rud, N. 152 [4.51] Riidenauer, F. 156 [4.129] Riihe, K. 158 [4.181] Rusbiildt, D. 4, 173 [1.19,

4.330] Ryzkov, Ya.A. 179, 181,185

[4.347]

Saeki, N. 64, 156 [2.155, 4.140]

Saidoh, M. 152, 181 [4.66] Saltmarsh, M.J. 160, 180,

205 [4.221, 4.224] Sanders, J.B. 14, 15, 29-31,

35, 43, 48, 54, 60, 63, 65, 109, 148, 221,244 [2.44, 2.46, 2.50, 2.97, 2.141, 3.125, 4.24, 5.29, 5.72]

Sanders, J.V. 95, 230 [3.97, 5.52]

Santner, E. 205 [4.399] Sarholt-Kristensen, L. 159

[4.210, 4.211] Saris, F.W. 92, 146, 222

[3.75, 4.11, 5.36] Satake, T. 152 [4.65] Scaife, W.J. 163 [4.275] Scharff, M. 14, 18, 20, 21,

23, 24, 28, 31, 35, 60, 90, 97, 127, 194 [2.36, 2.41, 2.57, 2.63, 3.88, 3.226, 4.371]

Scharmann, A. 159, 160, 176, 200, 201 [4.204, 4.215, 4.228, 4.343, 4.387]

Scherzer, B.M.U. 51, 127, 150-153, 156, 180, 194, 196 [2.104, 3.221, 4.36, 4.37, 4.50, 4.58, 4.87, 4.133, 4.378]

Schiffgens, J.O. 116, 117, 124, 125, 132 [3.164, 3.165, 3.166, 3.167, 3.199, 3.200]

Schilling, G. 152 [4.61] Schilling, W. 118 [3.1731 Schiott, H.E. 14, 20, 23, 31,

35, 60, 194 [2.36, 4.371] Schirwitz, H. 152, 166-168,

173, 175, 176, 181-186, 188, 189 [4.60]

Schlaug, R.N. 82, 124, 132, 133 [3.61]

Schlier, R.E. 77 [3.37] Schmidl, H. 150, 153 [4.37] Schober, H.R. 115 [3.145]

Scholz, A. 115, 116, 119, 126 [3.145, 3.157, 3.158, 3.159]

Schoof, H. 157, 158 [4.158] Schou, J. 206 [4.402] Schow, O.E. 76 [3.29] Schr6der, H. 155 [4.110] Schroeer, J.M. 58 [2.126] Schulz, F. 149, 151,152, 154,

155 [4.27, 4.39] Schumacher, H. 159 [4.210] Schwartz, D.M. 124, 125,

132 [3.199, 3.200] Schwarz, S.A. 60 [2.143] Schweer, B. 4, 158, 17311.19,

4.187, 4.330] Scott, H.G. 155 [4.119] Scott, T.L. 95, 96, 108 [3.99,

3.100] Seeliger, R. 13 [2.22] Seidman, D.N. 49, 96, 205

[2.100, 3.101, 3.103, 4.396, 4.397]

Seitz, F. 118, 119 [3.171, 3.174]

Semenov, L.P. 161 [4.245] Sena, L.A. 175, 176, 180,

184, 185, 196 [4.340] Sengoku, S. 165 [4.289] Septier, A. 166, 175, 176,

181, 184, 200, 201 [4.309] Shampine, L.F. 117 [3.170] Shelyakin, L.B. 163, 165,

246, 248 [4.282, 4.292, 5.88] Shen, Y.D. 156 [4.135] Shimizu, A. 116, 132 [3.151] Shimizu, H. 156 [4.146] Shimizu, R. 7, 60, 64, 156,

158, 176 [1.35, 2.147, 2.155, 4.130, 4.137, 4.140, 4.190]

Shimomura, Y. 165 [4.289] Shimotomai, M. 160, 180,

205 [4.221] Shustrov, V.A. 185 [4.362] Sidenius, G. 206 [4.403] Sigmund, P. 2, 6, 14, 15, 18,

20-22, 24, 25, 27-31, 33-36, 38, 39, 42-45, 47, 48, 51-57, 59-65, 67, 75, 81, 82, 98, 105, 111,114, 121,128, 135, 148, 152, 154, 157, 192-194, 200, 20l, 206, 229 [1.15, 2.46, 2.47, 2.48, 2.50, 2.51, 2.58, 2.59, 2.60, 2.62, 2.67, 2.69, 2.71, 2.73, 2.75, 2.77, 2.82, 2.83, 2.87, 2.93, 2.94,

Page 17: Additional References with Titles - Springer978-3-540-38514-1/1.pdf · Additional References with Titles Chapter 1 1. E.Taglauer, W.Heiland: Inelastic Particle-Surface Collisions,

Author Index 273

2.96, 2.98, 2.106, 2.112, 2.115, 2.137, 2.145, 2.146, 2.148, 2.165, 3.17, 3.50, 3.108, 3.109, 3.122, 4.20, 4.23, 4.45, 4.89, 4.401, 5.48]

Silsbee, R.H. 15, 47, 74, 100, 111,221 [2.53, 3.6, 5.26]

Simon, A. 200 [4.385] Sinha, M.K. 152, 160, 166,

170, 194 [4.58, 4.218, 4.304, 4.306]

Sizmann, R. 2, 75, 124, 221, 225 [1.8, 3.15, 3.197, 5.20]

Sletten, G. 174, 180, 181, 184, 186, 188-190 [4.335]

Smith, G.J. 160, 180, 205 [4.221, 4.2241

Smith, H.J. 152, 163, 167, 175, 183, 189 [4.49, 4.271, 4.272, 4.312]

Smith, H,P.,Jr. 83, 114, 133, 160, 161, 163, 245, [3.73, 3.138, 3.139, 3.141, 4.230, 4.264, 4.265, 4.266, 5.73, 5.74, 5.76]

Smith, J.N., Jr. 156, 166, 180, 182, 184, 185 [4.147, 4.148, 4.149, 4.359]

Smith, M.L. 13 [2.251 Smithells, C.J. 195 [4.375] Snoek, C. 163,221,223, 224

[4.277, 5.13] Snouse, T.W. 94, 95, 121,

133, 223, 224, 227, 228, 245 [3.94, 5.45, 5.75]

S~rensen, H. 206 [4.402, 4.403, 4.404]

Sommerfeldt, H. 169, 178, 245, 247 [4.321, 5.86, 5.87]

Sommermeyer, K. 13 [2.22] Somorjai, G.A. 76 [3.23] Sondheimer, E.H. 155, 162

[4.117] Sone, K. 152, 181 [4.65,4.66] Southern, A.L. 83, 91, 94,

95, 111, 112, 121, 133, 169, 176, 178, 188, 220-225, 230-232, 237 [3.68, 3.93, 3.95,4.319, 4.365, 5.7, 5.51, 5.54]

Southworth, H.N. 156 [4.126, 4.127, 4.128]

Spicer, W.E. 156 [4.135] Sporn, H. 158 [4.196} Sroubek, Z. 58 [2.1271

Staib, P. 7, 156 [1.30, 4.133] Stark, J. 2, 6, 10, 12, 74, 220

[1.14, 2.5, 2.17, 2.18, 3.1, 3.2, 3.3, 5.4, 5.5, 5.6]

Steenstrup, S. 159 [4.211] Stein, R.P. 157 [4.163] Stensgaard, I. 30 [2.161] Stepanov, U.N. 173 [4.329] Stephen, J. 7, 146 [1.21, 4.6] Stiegler, J.O. 65 [2.160] Storms, H.A. 7, 156 [1.35,

4.130] Stott, M.J. 115 [3.142] Stroud, P.T. 60 [2.140] Strozier, J,A., Jr. 76 [3.22] Stuart, R.N. 116, 117, 119

[3.162, 3.163] Stuart, R.V. 136, 158, 175,

176, 180, 184, 185, 195, 196 [3.240, 4.173, 4.338]

Stull, D.P. 195 [4.376] Stumpe, E. 157, 158 [4.158,

4.175, 4.180, 4.181] Summers, A.J. 180, 194, 202

[4.348] Sundaram, V.S. 156 [4.143] Suzuki, T. 155, 173 [4.111,

4.112] Switkowski, Z.E. 60, 63,

161, 171, 180, 181 [2.143, 2.154, 4.255, 4.256]

Szymonski, M. 57, 63, 182, 188 [2.124, 2.153, 4.357]

Taglauer, E. 1, 64, 65, 77, 78, 129, 148, 158 [1.3, 2.158, 3.40, 3.231, 3.233, 3.234, 4.18, 4.19, 4.177]

Takasu, Y. 156 [4.141] Takatsu, K. 160 [4.216] Takayanagi, S. 148 [4.21] Tanovi6, L. 165, 173 [4.295] Tardy, J. 154 [4.96] Tarng, M.L. 156, 15714.150,

4.151, 4.152] Tel'Kovskii, V.G, 13, 74, 92,

94, 200-202, 219, 220, 223, 224, 232, 233,251 [2.30, 3.9, 3.92, 4.382, 4.383, 5.2, 5.59, 5.91]

Tenenbaum, A. 109, 116, 128 [3.127, 3.128, 3.1681

Teodosi6, V. 155 [4.t20] Thacker, G.R. 205 [4.3981 Thomas, G.E. 161 [4.240]

Thomas, M.T. 160, 161,180, 205 [4.221, 4.222, 4.223]

Thompson, D.A. 53, 55, 57, 146, 155, 160, 161,180, 182, 186, 188, 191, 192, 205 [2.113, 2.114, 4.8, 4.125, 4.221, 4.358, 4.369]

Thompson, M.W. 7, 13-15, 37, 49, 57, 75, 81, 104, 109, 123, 159, 161,205, 221,225, 241,244 [1.29, 1.33, 2.27, 2.45, 2.49, 2.99, 2.122, 3.16, 3.55, 3.118, 3.124, 4.202, 4.247, 4.248, 4.251, 4.252, 4.253, 4.395, 5.22, 5.27, 5.69, 5.71]

Thompson, P.V, 14, 28 [2.411

Thompson, A.A. 95, 230 [3.97, 5.52]

Tinsley, A.W. 152 [4.53] Tip, A. 58 [2.133] Tischenko, V.D. 161, 185

[4.244] Toda, T. 160 [4.216] Tolk, N.H. 7, 158 [1.34,

4.197, 4.198] Tombrello, T.A. 159, 161,

162, 171, 180, 18l, 194 [4.203, 4.255, 4.256, 4.258]

Tomlin, D.H. 16l [4.246] Tongson, L.L. 138, 160, 230

[3.242, 4.217, 5.53] Torrens, I.M. 98, 106, 116,

124, 127, 130, 133 [3.110, 3.153, 3.154, 3.155, 3.156, 3,198, 3.213, 3.214, 3.215, 3.237]

Treado, P.A. 153 [4.82] Tsong, I.S.T. 158 [4.198] Tsukakoshi, O. 152 [4.65] Tsunoyama, K. 155, 173

[4.111,4.112] Tsuruoka, K. 155, 173

[4.1111 Tu, K.N. 163 [4.270] Tully, J.C. 7, 158 [1.34,

4.197] Tykesson, P. 158 [4.193]

Uecker, H. 205 [4.3981 Unvala, B.A. 151,152 [4.38]

v. Hippel, A. 13 [-2.20] v.Jan, R. 109 [-3.129]

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274 Author Index

v.Seefeld, H. 150, 153 [4.37] Vajda, P. 39, 40, 119 [2.78,

3.179] van Chuong, Pharn 168,

174-176, 183 [4.314] van Kollenburg, W.J. 161

[4.240] van Oostrom, A. 156 [4.142] van Veen, A. 125 [3.201] van Vliet, D. 127 [3.222] van Wijngaarden, A. 222,

239 [5.35, 5.61, 5.63] van Wyk, G. 163 [4.271,

4.272~ Varelas, C. 124 [3.197] Varga, P. 7 [1.36] Varma, R. 161, 187, 188

[4.239] Vaulin, E.P. 163 [4.279] Vepfek, S. 4 [1.20] Verbeek, H. 7, 152, 153, 180

[1.30, 4.61, 4.87] Verhey, L.K. 125, 129

[3.202] Viehb6ck, F.P. 7, 15, 45, 74,

75, 83, 92, 156, 219, 220, 222, 232 [1.36, 2.54, 2.88, 3.7, 4.129, 5.1]

Vineyard, G.H. 46, 48, 104, 105, 116-119, 132 [2.89, 2.163, 3.119, 3.151]

Vinezard, G.H. 75, 95, 98, 104, 106, 108, 116-119 [3.19]

Vukani¢, J. 51 [2.106]

Waechter, F. 12 [2.15] Wagman, D.D. 79 [3.47] Walker, R.S. 55, 57 [2.114] Waller, R. 154 [4.106] Walls, J.M. 156 [4.126,

4.127, 4.128] Webber, J.C. 159 [4.205] Wehner, O.K. 2, 7, 13, 15,

34,64, 74,78, 111,112, 136, 151,156-158, 160, 166-176, 178-190, 195, 196, 199, 200, 221,245 [1.7, 1.16, 1.23, 2.23, 2.74, 2.156, 2.157, 3.4, 3.5, 3.45, 3.240, 4.41, 4.150, 4.151, 4.152, 4.154, 4.173, 4.236, 4.298, 4.299, 4.303,

4.308, 4.318, 4.324, 4.326, 4.338, 4.380, 4.381, 5.8, 5.77]

Weijsenfeld, C.H. 75, 78, 79, 81, 109, 111, 162, 163, 168, 173, 175, 176, 181, 187, 199 [3.18, 4.259, 4.260, 4.327]

Weiss, A. 146, 161 [4.10] Weissmann, R. 51,149, 153,

156, 176, 194, 196 [2.102, 4.29, 4.84]

Weizer, V.G. 76, 79, 82, 116, 120 [3.32]

Weller, M.R. 159 [4.203] Wendelken, J.F. 160, 180,

205 [4.2211 Wendt, G. 2, 6, 12, 74, 220

[1.14, 2.17, 3.1, 3.2, 5.4, 5.5] West, L.A. 156 [4.153] Westmoreland, J.E. 47 [2.93] White, C.W. 7, 158 [1.34,

4.197, 4.198] White, P.J. 76, 77, 80, 81,

115, 116 [3.34] Whitton, J.L. 7, 152, 165,

173 [1.33, 4.54, 4.290, 4.294, 4.295]

Wiedersich, H. 156 [4.144] Williams, J.S. 154, 165, 173

[4.99, 4.294, 4.295] Williams, M.M.R. 31, 43

[2.721 Williams, R. 156 [4.132] Willis, W.R. 83, 91, 95, 11 I,

121, 133, 169, 176, 178, 220-225, 237 [3.68, 4.319, 5.71

Wilson, I.H. 57 [2.122] Wilson, K.L. 164, 166, 173

[4.3001 Wilson, W.D. 196 [4.379] Windawi, H.M. 53, 157, 176

[2.110, 4.160, 4.341] Winograd, N. 58, 82, 119-

121,125 [2.135, 3.64, 3.182, 3.183, 3.184, 3.185]

Winterbon, K.B. 15, 20, 29, 30, 31, 35, 41, 42, 54, 60, 111, 152, 192-194, 207, 208 [2.50, 2.68, 2.80, 2.82, 2.142, 2.162, 3.131, 4.45, 4.367, 4.368]

Winters, H.F. 59, 64, 148, 157, 185 [2.137, 4.20, 4.360]

Wittmaack, K. 149, 151, 152, 154, 155, 157, 158, 165, 169 [4.26, 4.27, 4.39, 4.162, 4.189, 4.285]

Wolder Joergensen, H. 194 [4.367]

Wolicki, E.A. 153 [4.82] Wolsky, S.P. 95, 121,225,

229 [3.98, 5.46] Wolter, A.R. 153, 168, 172,

176, 182, 187 [4.69] Wood, E.A. 75, 87 [3.21] Woodyard, J.R. 158, 196

[4.174] Wozniak, D.G. 154 [4.92] Wright, A.W. 12 [2.9] Wright, R.B. 4 [1.20] Wynblatt, P. 76 [3.30]

Yaegashi, Y. 148 [4.21] Yamada, R. 152, 181 [4.66] Yamamoto, S. 165 [4.289] Yamamura, Y. 56, 57 [2.117] Yamashina, T. 156 [4.141] Yonts, O.C. 147, 168, 170,

176, 180, 181,184, 194,226, 245 [4.17, 4.313, 4.315, 5.47]

Yoshida, M. 126 [3.203] Yurasova, V.E. 7, 13, 115,

125, 132, 163, 165, 246, 248 [1.33, 2.29, 3.149, 4.262, 4.263, 4.267, 4.282, 4.292, 5.88]

Zalar, A. 156, 164 [4.138] Zaposochnyi, I.P. 159

[4.199] Zavadil, J. 58 [2.127] Zdansky, K. 58 [2.127] Zdanuk, E.J. 95, 121,225,

229 [3.98, 5.46] Zehner, D.M. 76, 78 [3.29,

3.43] Zeller, R. 115 [3.145] Ziegler, J.F. 153, 156, 163,

164 [4.80, 4.270, 4.288] Zommerfeldt, Kh. 245 [5.85] Zwangobani, E. 222, 239,

240, 245, 246 [5.34, 5.83, 5.841

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Subject Index

Adsorbed layer 59 Alloy formation 60 Alpha function 191-193 Amorphous solids 3, 47 Anisotropy correction 38, 43, 44 Anisotropy effects 45 Antibonding excited state 17 Applications of sputtering 7 Atomic collisions

cascades 10 conservation laws 19 elastic 14 theory 19

Atomic mixing ion beam induced 60

Atomic motion at low energies Auger-electron spectroscopy

46 65,156,160

Backscattering 1 by multiple collisions 43 ion reflection coefficient 42, 51

Backsputtering 32, 40, 49, 145, 172 Bethe regime 24 Binary collision approximation 12, 73, 106,

110, 126, 127, 129, 133 comp. with dynamical calculations 130, 132 comp. with stable dynamical model 132 validity 129

Binary collisions 13, 34 Binding energy 37, 39, 40 Binding forces 15 Blistering 12 Blocking 6 Boltzmann equation 6, 25, 66, 67

backward 65 collision term 26 forward 65

Boltzmann factor local temperature 58

Bulk binding energy 33, 39

Cascade mixing 65 Cathode heating 12

Cathode sputtering 2, 12 Channeling 6, 73, 82, 88, 89, 90, 137, 163,205,

220, 221,241,245, 253 aligned beam 84 axial 88, 92, 95, 243 critical angle 226, 243, 249 flux profile 229 minimum yield 92, 237 nonchanneled fraction 225 planar 88, 235, 237, 243 random beam 84 subsurface 124 theory 74

Chemical sputtering 10, 12, 18 Chunk emission 12, 160 Cohesive energy 73, 78, 79 Collective motion 46 Collision cascades 5, 40, 57, 67

alloys 61 binary collision approximation 126 classical dynamics 47 corrections to simple theory 39 dilute 26 displacement cascades 116 energy density 53, 54 generations of atoms 45 isotropy 14, 32, 37, 40, 43, 44, 51 linear 27, 31, 33, 50, 51 linear superposition 16 many-body effects 130 metastable dynamical model 121, 124 molecular dynamics 46 multicomponent materials 61 number of atoms 27 quasi-stable dynamical model 124, 125 random 204 recoil atoms 14, 52 simultaneous collisions 128 spatial extension 29, 49, 53, 55 spike 54 stable dynamical model 46, 119, 120, 124 subcascades 53, 55 theory 14, 27, 33, 51 truncation 40

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276 Subject Index

Collision sequence along isolated rows 99 assisted focusing 103, 104 contribution to sputtering 111,137 correlated 74 defocusing 124 focusing 95, 102, 118 in surface 124 interaction with surfaces 109, 110 linear 73, 95, 109, 110, 111, 117, 120, 128,

137 replacement 46, 95, 108, 118 silsbee 123 wehner spots 110, 111

Collisions apsis of a collision 97 binary 12, 13, 34, 47 conservation laws 19 distance of closest approach 48 elastic 12, 15, 18, 19, 22, 23, 29, 33-35, 47 in crystals 127 inelastic 33 quantum correction 47 relative kinetic energy 97 ,scattering integral 128 theory 19, 20 theory of sputtering 13 two-body 127

Computer simulation 6, 46, 48, 51, 73, 95 dynamical calc. on fully stable models 115 dynamical model 117 linear collision sequence 117 metastable dynamical model 121 methods 75, 115, 137 models 74, 115 monocrystal sputtering 114 of sputtering 138 radiation damage 115

Computer simulation codes ADDES 125, 126, 132 COMMENT 117, 125, 132 MARLOWE 106, 108, 127-129, 131-133,

137 Conduction electrons 15 Conservation laws 22 Controlled thermonuclear fusion 51 Correlations 47 Critical angle for channeling 89

axial 88, 90, 91 planar 91

Cross section atomic collisions 12, 13, 17, 18, 46, 48 constant 20 differential 18, 21, 26 nuclear stopping 21

power 20, 28 scattering 28, 34 stopping 18, 24, 52, 63 total 19

Crystal selvage 73 Crystal surface 79 Crystal transparency 73 Crystallographic notation 85 Curie point 246, 247 Current density of target atoms 32

Damage energy 28 Dechanneling 88, 89, 205, 229, 244, 253

radiation damage 240, 241 thermal 92, 94, 240, 241,244, 245 yield 93

Definition of sputtering 11 Density of atomic rows in HCP crystals 86

of deposited momentum 44 Depleted-layer thickness 65 Deposited energy 30, 38, 41

density 29, 35, 64 depth distribution 14, 17, 40, 42, 44, 50,

172, 194, 203, 206 per unit volume 17

Deposited momentum 44 Depth profile

composition 64, 65 ions 30, 60 measurement 7

Desorption 1, 11 adsorbed surface layers 58 collision-induced 59, 157, 159 electron-stimulated 59

Diffusion 30, 65 absorbing wall 40 coefficient 60 profile 40 radiation-enhanced 65

Diffusivity 152 Directional effects 33

transport 48 Distribution function 66, 67 Dynamic crowdion 108 Dynamical calculation 105, 121

model 73, 117

Electric conductivity 26 Electron affinities 58

emission 1 microprobe 154, 160 microscopy 30

Electronic excitation 17, 18, 127 stopping 24, 28, 29

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Subject Index 277

Energy loss 41, 43 collision sequence 105, 106, 108 specific 22 of the crystal 81 reflection coefficient dependence on angle of incidence 207. 208

on mass ratio 207 sputtering efficiency 206

Erosion mechanisms 9 rates 9

Evaporation 11, 12, 56

Faceting 221,251,252, 259 Faraday cup 149, 150 Fermi Level 58 Field-ion microscope 155 Fission fragments tracks 162 Focusing collision sequence 6, 47--49, 95, 102,

114, 118, 221,226, 231,241,244, 253 energy loss 107 long-range 204 replacement 251 theory 74, 75 Wehner spots 75, 114

Focusing energy 100, 102, 104, 105 parameter 99, 101,112

Focuson 48, 108 Forward sputtering 172

Half-space problem 31, 43 Heat of sublimation 34, 78 Historical overview 11 Homogeneous medium 64 Hot-spot model 12, 13, 15

Image source 40 Infinite medium 32, 40, 41, 50, 51 Instability volume 125 Integration limits 21 Interstitial atom 39, 118 Ion beams 13

accelerators 13 beam heating 149 canal rays 12 homogeneity 151 isotope separator 149 mass-separated 146 molecular ions 15, 16, 17, 55, 57, 191 slowing-down 16 space charge effects 146 very heavy ions 15 surface scattering(ISS) 65, 156

Ionization cascades 27 potentials 58 radiation 10 sputtering 25

Jellium model 58

Kinetic gas theory 26 Knockon sputtering 10, 15, 18, 25 Knudsen cosine law 13

Lattice vibrations residual agitation 122

LEED 77, 78 Lehmann Sigmund mechanism 112, 114, 123 Light emission 10, 18 Light-ion sputtering 36, 43 Linear cascade theory 33, 53

ionization cascade 17 transport equations 27

Local heating 13 Localized excitation 5

Macroscopic heating 11 Many-body effects 47 Material factor A 34, 56 Metallic deposit 11 Metastable dynamical model 122, 123 Microbalance 152 Molecular chaos 25 Momentum approximation 47

distribution 44, 45 Monocrystal sputtering 132

effects of temperature 138 Monte Carlo simulation 6, 45 Multicomponent target 25, 60

collision cascades 61 primary effects 61 secondary effects 61, 64

Multiple atomic collisions 13, 26 scattering theory 50

Neutron activation 161 penetration 26

, transport theory 13 Nonlinear effects 191,204 Nuclear-reaction analysis 154 Numerical crystallite 122

Occluded gas 12 Onderdelinden model 84, 88, 93, 94, 225, 226,

229, 237, 253 Open axes and planes

in BCC crystals 84 common crystal structures 85 diamond structures 85 FCC crystals 83 HCP crystals 86 simple cubic structures 84

Optical absorption measurements 160

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278 Subject Index

Partial sputtering yield 61 Particle bombardment

external, internal II Penetration 12

angle of incidence 23 deposited energy 30 parameters 23 path length 23 profile 10, 23, 30 projected range 23 theory 22, 47

Perturbation theory 47

Photon emission 1 Physical sputtering 10 Planar spacing 84--86 Point Particles 46 Potentials

atomic interaction 46, 91 Bohr 90 Born-Mayer 34, 97, 98, 101, 103, 105, 106,

109, 116, 121, 123 channeling 91 coulomb 19, 20 effective pair 80 hard core 98, 102 Lenz-Jensen 21 Moliere 97, 98, 101, 103, 105, 125 Morse 76, 77, 79, 82, 116 power 20, 34 screened coulomb 21 Thomas-Fermi 21, 23, 30, 90, 225 truncated power 98 weak screening 21

Preferential sputtering 62, 63, 65 Primary recoil motion 50 Principal surfaces 77 Probability concepts 13

distribution 19 Projections of crystals 87 Propagator function 65, 67 Proton sputtering 194 Pulverisation 1

Quasi-stable models 125

Radiation damage 251 disorder 11, 30 distribution 14 instability volume interstitial atom ionization 11 semiconductors

5, 6, 55, 77, 109, 239-241,

119 119

223

split or dumbell configuration 118 theory 27

Radioactive tracer methods 161 Random medium 22 Range

of ions 14, 26, 30, 39, 49, 50, 53, 60 Raspilenie 1 Recoil atoms 30

cascades 14, 52 density 16, 37 distribution 31 energy spectrum 38 flux 31 high-energy ejection 41 higher order 14 isotropy 14 motion of target atoms 13, 26 primary 14 scattering 24 slowing-down 24 spatial moments 29

Recoil implantation 60, 65, 148 Reduced energy ~ 19, 23, 55 Refraction effect 36 Relativistic regime 24 Relaxation 30, 77, 109

time 15 Resputtering of collected material 159 Retrapping of sputtered material 163 Rough surface 81 Rutherford backscattering 30, 153, 156

scattering 14, 19, 20

Scaling law 51, 197 properties 30

Scanning electron microscope 155 Scattering

angle 22 barycentric Scattering angle 96 classical theory 96 geometry 22, 25, 96 integrals 128 laboratory angles 97 time integral 96

Screening functions 21 Bohr 90 Firsov 90 length 19

Secondary electrons 18, 146, 149 ions 149

Segregation 65 Self-sputtering 2, 42, 191 Selvage 5, 75-77, 80, 109 Semi-infinite target 32, 40, 41

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Shock waves 56 SIMS 4, 157, 160 Simultaneous collisions 128 Solar wind 2, 51 Solubility 152 Spark discharges 12 Spike 3, 15, 22, 33, 43, 47, 53, 55, 192, 200

containment time 57 energy density 54, 56, 57

transport 56 in single crystals 241 ionisation 18 pressure 56 temperature 17, 56, 57, 64 time constant 54 volume 64

Sputter erosion 11 ion source 7

Sputtered particles 4 activation by neutrons 161 protons 161 angular distribution 13, 14, 36, 37, 42, 43,

73, 95, 113, 114, 221 charge state 57, 158 clusters 58 collection 159 deexcitation 58 depth of emergence 38, 40, 49, 51 electronic state 57 energy distribution 14, 15, 36, 37, 42, 43, 46,

49, 58, 138, 221 in spikes 57 excitation 57, 58, 158 fluorescence spectroscopy 158 flux 32 influence of bulk binding energy 39 lateral distribution 32 matrix isolation spectroscopy 161 measurements 157, 159 postionisation 158 radioactive tracers 161 refraction of trajectories 114 simultaneous ejection 58 single crystals 95 spot pattern 13, 15, 75 sputtered molecules 57, 58 sticking probability 159 stoichiometry 61 theory 113 Wehner spots 113

Sputtering by electronic processes 18, 59

heavy ions 13 light ions 13, 51, 193 linear collision sequences 111

Subject Index 279

molecular ions 191 photons 17

chemical 18 crystal structure effects 13, 15 linear cascade regime 15, 17, 37 low-energy electrons 17 of adsorbed layer 157, 159

alloys 3 amorphous material 9 compounds 3, 5, 38, 154 insulators 17, 151 metals 145 molecular species 121 nitrides 159 oxides 155, 159 polycrystalline material 3, 9, 145 single crystals 3, 73, 95, 219 thin films 153, 156

single-knockon regime 15, 16, 50, 51, 64 spike regime 15, 16, 50, 64 theory 111

efficiency energy reflection coefficient 206

events 10, 12-14 classification 15 identification 9

mechanisms 123 studies

binary collision approximation 132 by marlowe 134, 136 metastable dynamical model 121 stable dynamical model 119

yield 42, 45, 92 amorphous material 48 anisotropy 15

correction 45 channeling theory 74 characteristic depths 36 cluster yield 145 comparison with single crystal theory 236 definition 2, 4, 145 differential 4, 36, 49 fine structure for single crystal 249 fluctuations 155 for atomic ions 193

different ions relative yield 191 glancing incidence 35 light ions 193, 202 low-energy ions 196 molecular ions 191-193 protons 194

halfwidth of minima 240 influence of bulk binding energy 39 low energies 198 magnitude 14, 46

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280 Subject Index

near threshold theory 52 normalized 197 of adsorbed atoms 147

alloys 60 amorphous materials 162 backscattered ions 35, 41 BCC crystals 231 ferromagnetic crystals 246, 247 HCP crystals 230 honeycomb-shaped surface 164 micro-dendrite 164 multicomponent targets 69 polycrystalline materials 162 single crystals 73, 82, 93-95, 219, 239, 241 single crystals semiconductor 245 single crystals theory 225

partial yield 61, 145 ratio 63, 239 relation to surface structure 249 spike conditions 53, 55, 200 stoichiometry 60 surface corrections 200 theory 9, 73, 93, 237 transmission sputtering 49 universal curve 196, 197 validity of analytic theory 200

yield dependence angle of incidence 34, 35, 42, 43, 200, 201,

202 of incidence F. single cryst. 219, 232- 236, 238, 243, 247

crystallinity 162 energy 12 fluence 162, 165 ion energy 165, 182, 223, 228, 238

mass 165, 186, 198, 199, 235 mass of single crystal 234

ratio 34 phase 163 surface topography 163 target material 165, 183

properties 162 temperature 94,162, 163, 221,239, 240, 242,

245-248 yield formula 33, 34, 172, 176, 225

measurements analysis of surface compositions 156 angular divergence of ion beam 222 calorimeter 150 changes in electrical resistivity 155 collection of sputtered material 31, 162, 222 crater size 151 electr, resistivity of thin film 162 experimental conditions 31, 145, 146

faraday cup 149, 150 fission fragment tracks 162 interference colours 155 ion beam heating 149 irradiation fluence 149 mass-change measurements 151 matrix isolation spectroscopy 161 microscopic measurements on target 155 plasma discharges 11, 146 polished and unpolished crystals 222 quarz crystal oscillator 152, 160 Rutherford backscattering 160 self-supporting films 156 sputtered material 157 tallysurf stylus 151, 155 target condition 147 temperature dependence 222 thickness-change 153 tolansky interference 154 vacuum condition 146 weight loss 152, 220, 222 x-ray analysis 154

yields of AG 182

calculated 35 single crystal 231

AL 168 single crystal 231

AU 50, 154, 187, 188, 204 calculated 35 single crystal 231 single crystal calculated 135, 136

B 164 BE 164 BI 189 C 166 CD 183

single crystal 232 CO 174 CR 172 CU 167, 176, 177

calculated 35 single crystal 223, 224, 227, 228, 230, 232, 233, 235, 242, 249 single crystal calculated 121, 133

FE 173 GA 167 GE 178

single crystal 246, 248 IN 183 MG 167

single crystal 232 MN 167 MO 181 NB 180

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NI 175 single crystal 233, 246, 248

PB 189 PD 179 PT 186 SB 183 SC 167 SI 169

calculated 35 single crystal 247

SN 183 stainless steel 173 TA 184 TH 189 TI 170 TL 189 U 190 V 171 W 185 ZN 167

single crystal 233 ZR 179

single crystal 232 Stability of the numerical erystallite 116 Stable dynamical model 119

displacement cascades 116 Statistical distribution 23, 26 Stopping power 14, 29, 30, 36, 41, 61,225

electronic 23, 24 maximum 24 nuclear 14, 24 of a recoil atom 34

Surface clean 148 composition 52 crystallography 75 damage 77, 78, 80 electronic band structure 80 kink site 79 ledges 77 monoatomic steps 78 of real crystals 80 principal or singular 77 reconstruction 76, 78 relaxation 76 roughness 31, 38, 80, 109 semiconductors 78 steps 77 structure 52, 75, 77 tension 76 thermodynamics 75 vicinal 77

Subject Index 281

Surface binding 17, 38 energy 5,39,43,59,76,78,79,81,108,111,

120, 172, 197, 225, 226, 229, 246 forces 32 isotropic binding 82 planar potential 33, 36, 37, 56, 62, 63, 64,

80-82, 109, 114, 120, 122, 137 relaxation 80

Surface collision sequences 124 correction 31, 35, 38, 42, 45, 50, 51, 195 scattering 111, 120 structure 2 topography 2, 251

Texture 38, 163, 220 Thermal transport 56

vibrations 46, 77, 92, 94, 225, 241,244 lattice atoms 128

Thin films 7, 38, 60 sputter-deposited 12

Thomas-fermi energy unit 20 variables 21

Threshold energy 30 critical distance 39, 40 for sputtering 3, 120, 138, 195, 196, 225,

229, 230 sputtering theory 51, 52 lattice displacement 39, 40, 119, 125

Threshold fluence 11 Transition temperature 232, 239, 245 Transmission sputtering 31, 49, 119, 120, 145,

149, 203-206 Transmission-electron microscope 154 Transparency 75, 83, 84, 221,237, 253 Transport equations 51

theory 25, 26, 46, 52 of sputtering 14

Trapping of ions 1, 152

Unit translation 84-86 Universal sputtering curve 196

Vacant lattice sites 39, 118 Vicinal surfaces 77

Wehner spots 74, 75, 77, 111, 112, 124

Yield factor 197, 198

Zerst~ubung 1