aix broschüre aix r6 rz - aixtron · pdf fileaix r6 – 6 commitments to customer...

DEPOSITION SYSTEMS FOR COMPOUND SEMICONDUCTORS

AIX R6 Metal Organic Chemical Vapor Deposition

CHINA

AIXTRON China Ltd.Phone +86 (21) 6445 3226Fax +86 (21) 6445 3742E-Mail [email protected]

KOREA

AIXTRON Korea Co., Ltd.Phone +82 (31) 783 2220Fax +82 (31) 783 4497E-Mail [email protected]

UNITED KINGDOM

AIXTRON Ltd.Phone +44 (1223) 519 444Fax +44 (1223) 519 888E-Mail [email protected]

GERMANY

AIXTRON SEPhone +49 (2407) 9030-0Fax +49 (2407) 9030-40E-Mail [email protected]

SWEDEN

AIXTRON ABPhone +46 (46) 286 8980Fax +46 (46) 286 8989E-Mail [email protected]

USA

AIXTRON Inc.Phone +1 (408) 747 7140Fax +1 (408) 752 0173E-Mail [email protected]

www.aixtron.comJAPAN

AIXTRON K.K.Phone +81 (3) 5781 0931Fax +81 (3) 5781 0940E-Mail [email protected]

TAIWAN

AIXTRON Taiwan Co., Ltd.Phone +886 (3) 571 2678Fax +886 (3) 571 2738E-Mail [email protected]

AIX R6

AIX R6 Process Control

LayTec Inside TTC

Dynamic Topside Temperature Control (TTC)

Eliminates temperature variation for increased reproducibility and yield

Enables shorter cycle time

Fast calibration by LayTec AbsoluT

LayTec MiniR / MiniRC

MiniR: refl ectance at 405 nm and 635 nm

MiniRC: adds optional high resolution wafer curvature mapping

Pyro400: adds optional 400 nm pyrometry

Modular layout, high data rate

3 x MiniR4 x TTC

METAL ORGANIC CHEMICAL VAPOR DEPOSITION

AIX R6

AIX R6

Product Overview

Automated carrier load and unload at high temperature

Continuous runs without maintenance

LayTec process control

Fast temperature cycles

User friendly operator interface

AIX R6

New Features

The new Close Coupled Showerhead MOCVD system fulfi lls your requirements for LED mass manufacturing. Equipped with numerous technical innovations the system enhances your competitiveness.

AIX R6 – 6 commitments to customer performance

Framework for LED production

Systematically lowest Cost of Ownership

Large reactor capacity 121x2 inch, 31x4 inch and 12x6 inch

Maximized throughput- Automation- Continuous runs- Reliability and uptime

Intrinsic yield and uniformity

Focus on user friendliness

User interface

Operator interface

Unmatched precursor effi ciency Intrinsic uniformity Dynamic process chamber height adjustment Wide process window

AIX R6

Typical Showerhead Technology

Reactor module

Transfer module

AIX R6

Cost of Ownership

AIX R6 is your fast route to outperform the CoO benchmark

Labor cost / Wafer

Fab cost / Wafer

Capital cost / Wafer

Chemical cost / Wafer

Dominant factors addressed with AIX R6

Throughput increase

Chemical cost decrease

Consumable cost decrease

Contact our local offi ce to experience your CoO benefi t

Consumables cost / Wafer

DEPOSITION SYSTEMS FOR COMPOUND SEMICONDUCTORS

AIX R6 Metal Organic Chemical Vapor Deposition

CHINA

AIXTRON China Ltd.Phone +86 (21) 6445 3226Fax +86 (21) 6445 3742E-Mail [email protected]

KOREA

AIXTRON Korea Co., Ltd.Phone +82 (31) 783 2220Fax +82 (31) 783 4497E-Mail [email protected]

UNITED KINGDOM

AIXTRON Ltd.Phone +44 (1223) 519 444Fax +44 (1223) 519 888E-Mail [email protected]

GERMANY

AIXTRON SEPhone +49 (2407) 9030-0Fax +49 (2407) 9030-40E-Mail [email protected]

SWEDEN

AIXTRON ABPhone +46 (46) 286 8980Fax +46 (46) 286 8989E-Mail [email protected]

USA

AIXTRON Inc.Phone +1 (408) 747 7140Fax +1 (408) 752 0173E-Mail [email protected]

www.aixtron.comJAPAN

AIXTRON K.K.Phone +81 (3) 5781 0931Fax +81 (3) 5781 0940E-Mail [email protected]

TAIWAN

AIXTRON Taiwan Co., Ltd.Phone +886 (3) 571 2678Fax +886 (3) 571 2738E-Mail [email protected]

AIX R6

AIX R6 Process Control

LayTec Inside TTC

Dynamic Topside Temperature Control (TTC)

Eliminates temperature variation for increased reproducibility and yield

Enables shorter cycle time

Fast calibration by LayTec AbsoluT

LayTec MiniR / MiniRC

MiniR: refl ectance at 405 nm and 635 nm

MiniRC: adds optional high resolution wafer curvature mapping

Pyro400: adds optional 400 nm pyrometry

Modular layout, high data rate

3 x MiniR4 x TTC

aix broschüre aix r6 rz - aixtron · pdf fileaix r6 – 6 commitments to customer...

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