allwin21 presentation en 12282011
DESCRIPTION
Allwin21 is the exclusive licensed manufacturer of AG Heatpulse 610 Rapid Thermal Processor. Allwin21 is manufacturing the AccuThermo AW 410,AccuThermo AW 610,AccuThermo AW 810,AccuTherm AW 820 AtmosPress Rapid Thermal Processors and AccuThermo AW 610V,AccuThermo AW 820V vacuum Rapid Thermo Processors.Compared with traditional RTP system, Allwin21"s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies. Allwin21 is remanufacturing PE 4450 Sputtering Systems,originally Perkin Elmer 4450 sputter systems,with innovative software with advanced controll technologies and new design for much better performance and maintenance. Allwin21 Corp also professionally supplies the following refurbished semiconductor equipment. ■ Rapid Thermal Processing System: AccuThermo AW 410,AccuThermo AW 610,AccuThermo AW 810,AccuTherm AW 820 AtmosPress Rapid Thermal Processors and AccuThermo AW 610V,AccuThermo AW 820V vacuum Rapid Thermo Processors;Refurbished AG Heatpulse 210/410/610/2101/2106/2148; ■ Plasma Asher Stripper Descum:Refurbished Matrix 105;Refurbished Matrix 10;Refurbished Gasonics Aura 1000;Refurbished Gasonics Aura 3010;Refurbished Gasonics L3510;Refurbished Branson IPC 3000;Refurbished Branson IPC L3200; ■ Plasma Etch:Gasonics AE 2001;Matrix 303 Plasma Etcher;TOK TSE-306W PLASMA ETCHER ■ Reactive ion etching (RIE):STS 320 RIE;Plasma Therm VII 70 Series ■ PECVD:STS 310 PECVD ■ Inductively coupled plasma (ICP):STS Cluster 2 ASE,AOE;STS Multiplex ICP ■ Electrical Tester: HP 4062UX Semiconductor Process Control System / HP4145A/Hp4145B; ■ Wafer Probers: Refurbished Refurbished EG 1034;Refurbished EG 2001;Refurbished EG 2010;Refurbished EG 2080;RefurbRefurbished MP 2020;Refurbished EG 4085X;LC-361C High Voltage Probe ■ Metrology Instrument: Refurbished HitachiCD-SEM Hitachi CD-SEM S-8820; Hitachi CD-SEM S-8840; FE-SEM Hitachi FE-SEM model S-4700;Hitachi S-4500 SEM Cold Field Emission SEM System; Hitachi Tabletop Microscope TM-1000; HITACHI Field Emission SEM S-5200;,KLA-Tencor/Tencor Tencor/ KLA-Tencor M-Gage 300; KLA-Tencor Surfscan 6200; Tencor Auto OmniMap RS55 / tc ; ■ Backside Equipment:Waferdemount AW750;Plasam AsherTRANSCRIPT
Confidential & Privileged
Allwin21 Corp.
3521 Leonard CourtSanta Clara, California 95054
www.allwin21.comApril 2011
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About Allwin21 Corporation
• Allwin21 is the exclusive licenced manufacture for AG Heatpulse 610 from Mentron,an Applied Materialscompany.
• Founded in 2000 in Silicon Valley to provide quality products, services and spare parts to worldwide customers in semiconductor and solar industry.
• Strong global presence for proximity to active customers.
• Worldwide installed base has reached > 300 systems so far which has expanded to first tier major semi manufacturers.
• Commitment to technology innovation, process engineering and long term relationships with customers and suppliers.
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Allwin21 Mission Statement
• To deliver unique, high value-added solutions to our customers, using Allwin21's proven products that are leveraged by our innovative technologies.
• We are dedicated to providing unique solutions that enable new processes, improve yield, increase uptime, reduce maintenance costs, and extend life of capital equipment.
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Company Distribution
Allwin21 CorpBeijing.
Allwin21 CorpUSA
Japan
Korea
HeadquarterSubcompany or officeAgents
Allwin21 CorpNanjing
Taiwan
Britain France Germany
Israel IndiaVietnam
Brazil
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Allwin21 Main Customers
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Innovative Technologies • Process development and enhancement
– Combined 20 years of process experience
• System control on board/component level– Superior customer support
• Advanced AW Software for each equipment– User-friendly with excellent customer reception– Enhanced automated system diagnostics for better
serviceability– Integrated process control system – Real time graphics display – Real time process data acquisition, display, and analysis – Programmed comprehensive calibration and diagnostic
functions – Better performance and maintenance than the original
systems
• Precise Temperature Control Technology– Much better uniformity– Much better repeatability
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Products and Services
• Processing and testing systems
– Rapid Thermal Process– Plasma Asher Stripper Descum– Plasma Etch– Reactive ion etching (RIE)– PECVD– Inductively coupled plasma (ICP)– Metrology & Inspection– Electrical Test and PCM Software– Wafer Probers– Sputtering and Evaporator System
• Services– Refurbishment– Upgrade (process enhancement, control system and ALLWIN21 software)– PCM testing module design– Installation /On-site training
• Spare parts
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Main Product List
Hitachi CD-SEMMRC 900Lam 9600Branson IPC 3000Refurbished AG 610
Hitachi FE-SEMMRC 6XXLam 9400Branson IPC L3200Refurbished AG 410
New AW-PCMPerkin Elmer 44XXLam 4420/4520/4620Matrix 10Refurbished AG 210
HP 4062Perkin Elmer 2400Lam 490/590/690Matrix 205AccuThermo AW 820V
HP 4145BRefurbishedSputteringTegal 903eMatrix 105AccuThermo AW 610V
KLA MetrologyTegal 901eGasonics L3510/PEP3510AccuThermo AW 820M
MP 2020STS RIEGasonics AE 2001Gasonics Aura 3010AccuThermo AW 410
EG 2010/4085STS ICP(ASE,AOE)Matrix 303Gasonics Aura 2000AccuThermo AW 610
EG 1034/2001STS PECVDMatrix 403Gasonics Aura 1000AccuThermo AW 810M
RefurbishedProbe/Tester
RefurbishedRIE/PECVD/ICP
RefurbishedPlasma Etch
RefurbishedAsher/Stripper/DescumRapid Thermal Process
Allwin21 is the exclusive licensed manufacturer of AG Heatpulse 610 Rapid Thermal Processor. Allwin21 is manufacturing the AccuThermo AW 410,AccuThermo AW 610,AccuThermo AW 810,AccuTherm AW 820AtmosPress Rapid Thermal Processors and AccuThermo AW 610V,AccuThermo AW 820V vacuum Rapid Thermo Processors.
Allwin21 Corp. was formed in 2000 to provide Rapid Thermal Process, Plasma Asher Stripper Descum, Plasma Etch, Reactive ion etching (RIE), PECVD, Inductively coupled plasma (ICP), Metrology & Inspection, Electrical Test and PCM Software, Wafer Probers, Sputtering and Evaporator System high-tech equipment, services and technical support in Semiconductor industry,MEMS, Biomedical, Nanotechnology,Solar,LEDs etc.
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Products Typical Application Area Chip Maufacture Compound Industry：GaAs, GaN, GaP, GaInP,InP and SiC Optronics：Planar optical waveguides,LASERs,LEDs and VCSELs Biomedical MEMS Nanotechnology Solar Cell
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AccuThermo AW 410/610/810 RTA RTP
Ion implant activationPloysilicon annealingOxide reflowSilicide formation
Key Features:
Typical Applications
Contact alloyingGaAs processingOxidation and NitridationOther heat treatment process
Advanced AW 900 Software
Precise and Repeatable Temp. Control Easy Pyrometer Calibration
Use ERP,Not Single Pyrometer
Small footprint and energy efficiency X .
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AccuThermo AW 410/610/810 RTA RTPLEDs Solar Cell
Semiconductor New Technology Process
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AccuThermo AW 610V/820M/820V RTA RTPAccuThermo AW 610V AccuThermo AW 820V
AccuThermo AW 820M
•Vacuum RTP
•Long time process RTP
•Wafer Size: 2 to 8 inch capacity
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Plasma Asher Descum Systems
Matrix 105 Standard Matrix 105R TTW
Branson IPC 3000
Gasonics Aura 1000 Gasoncis Aura 3010Gasonics L3510
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Refurbished Plasma Etcher Systems
Matrix 303 Standard Matrix 303R TTW
Lam 490/590/690/790 Lam 4420/4520/4620/4720
Tegal 901e/903e Standard
Tegal 901e/903e TTW
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RIE PECVD ICP Systems
STS Multiplex Cluster
Plasmafab PF310
STS Multiplex 320
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E-Tester Wafer Probe and PCM
EG 2001X HP 4062UX
EG 1034X
EG 4085X
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Metrology FE-SEM CD-SEM M-Gauge Systems
Hitachi S4500 FE-SEM
Hitachi S4700 FE-SEM
Hitachi S8820 CD-SEM
Hitachi S8840 CD-SEM
KLA-Tencor M-Gauge
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Sputtering Systems
Perkin Elmer 2400 Perkin Elmer 4400/4410/4450
MRC 602/603/643 MRC 902/903/943
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Spin Tracks
Fully-automated Spin Tracks for normal production fabrication areas
Semi-automated Spin Tracks for R & D and Pilot Production
MBO Manual Bake Ovens for R & D and Pilot Production
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Contact Us
Address:3521 Leonard Court ,Santa Clara,CA95054,USA
Telephone:1-408-988-5188
Fax:1-408-904-7168
E-mail: [email protected]
Website: www.allwin21.com
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