33MNT Bulletin Vol.6/No.1 - 2005 Edited by IMT-Bucharest

AMICOM - NoE in FP6/IST

Advanced MEMS for RF and Millimeter Wave Communications

AMICOM Review Meeting, Helsinki 10-11 March 2005

The results of the first year of the project were analyzed togetherwith the project officer Alejandro Sánchez and the reviewers TomBrazil, Wolfgang Heirinch, and Martin Oppermann.

The AMICOM General Assembly has decided to introduce a newaction into the future network activities: the North Star Projects,aimed to enhance the cooperation between AMICOM partners byaddressing network research activities toward specific and challenging applications. After the definition of the objectives, internalcalls will be issued to submit proposals for the work to be contributed.In order to find suitable goals for North Star projects, a brainstorming workshop will be organized on May 23 – 24, in Munich.

An AMICOM Workshop on “Design and Modelling Methods for RFMEMS” will be organized on 31 May 2005, in conjunction with theDTIP conference in Montreux, Switzerland (http://www.tima.imag.fr/conferences/dtip/).After the success of the first AMICOM Summer School organized

in Analipsi, Greece in September 2004, a call to organize the secondAMICOM Summer School was launched. IMT Bucharest has proposed to organize this year AMICOM Summer School in Sinaia,Romania, in the last week of September 2005. The proposal wasaccepted.

Integrating RF MEMS activitiesScientists from IMT have participated in the frame of the AMICOMproject, to common technological experiments and measurements ofthe components circuits and integrated microsystems at LAAS andFORTH, ITC-irst and TUD.

Design/modeling and masks were provided by IMT.

Exploratory visits for future co-operations and joint use of resourceswere performed by IMT scientists at IMEC Leuven for technology,Uppsala Univ. Microwave Lab. and VTT Helsinki.

Master students from FORTH were trained in design techniques atIMT-Bucharest.

IMT Bucharest in AMICOM

Joint RF MEMS research activities

SiO2/Si3N4 membrane supported Yagi-Uda antennae

Common work of IMT, LAASEmitter front end and receiver for 45 GHz based on a membrane

supported Yagi-Uda antenna

Common work of IMT, LAAS, NKUAThree directors membrane

supported Yagi-Uda antenna

Backside SEM photoReturn losses vs frequency for a 3 director

membrane supported antenna structure

GaAs membrane supported Yagi-Uda antennae

Common work of IMT, FORTH, LAAS

Top (left) and bottom (right) photos of the fabricat-

ed 45 GHz Yagi-Uda antenna

Measured and

simulated return

losses vs frequency

for the 45 GHz (top)

and 60 GHz

(bottom) antenna

demonstrators

Photo of the manufactured emitter front-end

and receiver front end

Experimental emitter output power

as a function of the drive frequency

Details : the low pass filter and the

driver dipole region (left) and the

monolithic integrated Schottky region (right)

GaAs receiver Yagi-Uda antenna for 45

and 60 GHz

Common work of IMT, FORTH, LAAS

Activities to spread excellence in RF MEMSIMT has edited the volume “Applications of MEMS

technology for millimeter wave devices and circuits”

in the Romanian Academy Press, in the series “Micro

and Nanoengineering”. The editors of the volume

are: R. Plana (LAAS), D. Dascalu (IMT) and A.

Müller (IMT). The volume (photo right) was launched

at the MEMSWAVE workshop in Uppsala;

• IMT has participated with 4 papers at the MEMSWAVE workshop in

Uppsala, July 2004. Dr. A. Müller and Prof. D. Dascalu were in the

Steering Committee of the MEMSWAVE workshop;

• IMT has participated with common papers – in co-operation with

LAAS and FORTH in the frame of AMICOM project: 5 journal papers

as well as conference papers at the MTTS–RFIC 2004 conference

Forth-Worth, MME 04 Workshop Leuven, EDMO Conference 2004

Berg en Dal, CAS 2004 Conference Sinaia, MNT 04 Workshop

Montreaux;

Detail of a GaN

membrane

supported

F-BAR structure

GaN MEMS based

Common work of IMT, FORTH, TUD, LAAS

The quasi-optical mixer

structure mounted on a

printed circuit board

MEMS based quasi-optical mixer

Common work of IMT, FORTH, both parteners in

AMICOM and CNR M2T

Details of the structure manufactured on silicon (left)

and on GaAs (right)

Lumped elements filter structure for 3-5 GHz

Common work of IMT, ITC-irst, FORTH

The isotropic conversion losses of

upper sideband versus RF frequency

Details of the

switch structure

manufactured on

GaAs substrate

GaAs switches for submillimeter wave range (>100GHz)

Common work of IMT, FORTH, LAAS, NKUA

Generating innovative joint development projectsIMT has participated at meetings (Leuven, Rome) related to new FP6 project proposals to be

generated by the AMICOM Network in the topics road and air transport, ambient intelligence,

mobile and wireless systems beyond 3G.

IMT RF MEMS Group is involved as partner in 2 STREP proposals generated by AMICOM.

http://www.amicom.info