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©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 1

22 Bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 info@systemplus.fr www.systemplus.fr

Innoscience’s 650V GaN-on-Si Transistor

The first 100% Chinese GaN-on-Si power device found in Rock’s fast charger, manufactured on an 8-inch platform.

SP20563 - Power Semiconductor report by Taha AYARILaboratory Analysis by Peggy GALLOIS

July 2020 – Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 2

Table of Contents

Overview / Introduction 5

o Executive Summary

o Market

o Reverse Costing Methodology

Company Profile 13

o Innoscience

Physical Analysis 17

o Summary and overview

o Package

o Die Delayering

o Die Cross-Section

Manufacturing Process Flow 37

o Fab Units

o HEMT Process Flow

o Component Packaging

Cost Analysis 49

o Economic analysis & Yields

o GaN HEMT Cost

✓ HEMT Wafer Front-End Cost and Front-End Cost per process

step.

✓ HEMT Back-End 0 Cost: Die Probe Test, Thinning & Dicing

✓ HEMT Die Cost

o Packaging Cost

o Component Cost

✓ Back-End: Final Test Cost

✓ Component Cost

Selling Price 64

o Component price

Comparison 66

o Technology and cost comparison between Innoscience and Navitas

NV6115 GaN power devices.

Feedback 70

System Plus Consulting Services 72

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 3

Overview / Introductiono Executive Summaryo Marketo Reverse Costing

Methodology

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

The reverse costing analysis is conducted in 3 phases:

Teardown analysis

Package is analyzed and measuredThe dies are extracted in order to get overall data: dimensions, main blocks, pad number and pin out, die markingSetup of the manufacturing process

Costing analysis

Setup of the manufacturing environmentCost simulation of the process steps

Selling price analysis

Supply chain analysisAnalysis of the selling price

Reverse Costing Methodology

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 4

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

Summary of the Physical Analysis

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 5

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

Device Overview

Rock charger’s PCB©2020 by System Plus Consulting

GaN transistor in Rock charger©2020 by System Plus Consulting

The 650V transistor is found in the 65W ‘’T31 GaN Super FastCharger’’ from Rock.The GaN device has a DFN 8x8 package.Rock charger

©2020 by System Plus Consulting

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 6

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Die Delayering

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 7

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Cross-Section #2 – Epitaxy

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 8

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Cross-Section #2 – Source/Gate

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 9

Overview / Introduction

Company Profile

Physical Analysis o Summary and overviewo Packageo Die Delayeringo Die Cross-Section

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Cross-Section #2 – Gate/Field plate

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 10

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flowo Fab Unitso HEMT Process Flowo Component Packaging

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN Transistor - Process Flow (4/6)

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 11

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Economic Analysis & Yieldso GaN HEMT Costo Packaging Costo Component Cost

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Wafer Front-End Cost

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 12

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Economic Analysis & Yieldso GaN HEMT Costo Packaging Costo Component Cost

Selling Price

Comparison

Feedback

Related Reports

About System Plus

GaN HEMT Die Cost

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 13

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Economic Analysis & Yieldso GaN HEMT Costo Packaging Costo Component Cost

Selling Price

Comparison

Feedback

Related Reports

About System Plus

Component Cost

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 14

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparisono Innoscience vs Transphorm

Feedback

Related Reports

About System Plus

Package Comparison

Note:Detailed teardown of the NavitasNV6115 can be found in System PlusConsulting’s report “Navitas 650VGaNFast Power IC Family”.

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 15

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparisono Innoscience vs Transphorm

Feedback

Related Reports

About System Plus

GaN HEMT Die Comparison

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 16

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Plus

Related Reports

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

POWER ELECTRONICS & COMPOUND SEMICONDUCTOR• Compound Semiconductor Quarterly Market Monitor• Power GaN 2019: Epitaxy, Devices, Applications & Technology

Trends

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

POWER ELECTRONICS & COMPOUND SEMICONDUCTOR• Navitas 650V GaNFast Power IC Family• GaN-Based Wall Charger Comparison 2019• GaN-on-Silicon Transistor Comparison 2018• Nexperia’s AEC-Q101 qualified 650 V GaN based power

device• Transphorm GaN-on-Silicon HEMT TPH3206PS• GaN-on-Sapphire HEMT Power IC by Power Integrations

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 17

COMPANYSERVICES

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 18

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Pluso Company serviceso Contacto Legal

Business Models a Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

©2020 by System Plus Consulting | SP20563 - Innoscience’s 650 V GaN-on-Si Transistor | Sample 19

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price

Comparison

Feedback

Related Reports

About System Pluso Company serviceso Contacto Legal

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 16sales@systemplus.fr

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 82llevenez@systemplus.fr

www.systemplus.fr

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FRANKFURT/MAINEurope Sales Office

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Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 4887onozawa@yole.fr

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America Sales OfficeSteve LAFERRIEREWESTERN UST : +1 310 600 8267laferriere@yole.fr

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