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La metrología óptica en criogenia: Nuevas técnicas de medida de superficies
LINES: Optical Activities
� Optical Engineering� Optical Metrology
Tomás Belenguer, René Restrepo, Gonzalo Ramos, Daniel Garranzo, Lola Sabau
06/07/2011 AstroMadrid Junio 2011 2
ORGANIZATION
AREA of PAYLOADS & SPACE INSTRUMENTATION
INSTRUMENTATION and SPACE OPTICS
LABORATORY
OPTOELECTRONICSLABORATORY
PAYLOADS ENGINEERING
DROP TOWER (µG)
OPTICAL ENGINEERING
for Space
R&DSPACE OPTIC
INTEGRATION /VERIFICATION /MEASUREMENT
OPTOELECTRONIC& ELECTRONIC
Technologiesfor Space
MAGNETICTechnologies
for Space
THERMAL-MECHANICTechnologies
for space
THERMAL-STRUCTRALAnalysis
R&D inmicro-Gravity
Drop Test Campaign
Area Secretary
Payloads & Test FacilitiesCoordination Unit
RADIATION Sensors& Radiation Effects
on Components
KNOWLEDGEMANAGEMENT
Aerospace & Defence
ENVIROMENTALTesting
06/07/2011 AstroMadrid Junio 2011 3
ORIGIN:
Created in 1994, it belongs to the Payloads Area, within the Space Programs and Space Sciences Department
OBJECTIVES:
LINES is the qualified laboratory at INTA specialized in optics for space applications.
The three main fields of activity are:
� Optical Engineering
� Research and development in space optics
� Testing and characterization of optical instrumentation (Thermo-vacuum tests)
LINES, Laboratorio de Instrumentación Espacial
LINES support the National industry in the optical design, testing and integration of optical systems
06/07/2011 AstroMadrid Junio 2011 4
Software� Optical design tool (CodeV, 7 licenses, ZEMAX, 2 li cense)
� Straylight tool (ASAP, 1 license)
� LabView (1 license)
� FRAMES, Holographic interferometry analysis tool
� WBASE, Ellipsometric measurements
� FilmStar ,Optical Coatings
2 Y
X
3 Y
X
5 Y
X
7 8
Y
X
9 YX
11 Y
X
15 16 Y
X
18
Y
X21
Y
X
24 25 Y
X
27
Y
X
VIM Scale: 0.20 TBD 05-Jul-06
125.00 MM
1
2
3
4
5
MTS 3 mirror anastigmat Scale: 0.39 TBD 05-Jul-06
64.10 MM
RESOURCES
1
2 3
4 5 6 7 8
9 10 11 12 13 14 15
16
Cinclus Scale: 0.61 ANA 23-Sep-09
40.98 MM
0 1 2 3 4 5 6
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8 9 10 11 12 13 14
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16 17 18 19 20 21
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23 24 25
26 27
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lambda=400 FULL SCALEPositions: 1-9
TBD 23-May-08
25.00 MM
+Z +X
+Y
06/07/2011 AstroMadrid Junio 2011 5
Facilities
� Class 10.000 clean room Lab with humidity, temperature and contamination control (75 m2)
� Mobile area class 100, Laminar air flow cabinet 100 class
• Four specialized laboratories :
� Optical characterization of materials
� Speckel and Holography
� Fibre optics sensors
� Chemistry Lab
• Basic optical shop
� Automatic polishing machine for flat surfaces
� Manual polishing machine,
� Lathe&Milling machine
RESOURCES
06/07/2011 AstroMadrid Junio 2011 6
Equipment
� MTF test benches (visible, IR 3-5 and IR 8-12 microns)
� High vacuum thermal chamber with high quality optical window
� GPI-XP Zygo Interferometer (100 mm aperture, λ/100 resolution)
� Integrating sphere (Labsphere, 3 inches aperture)
� He-Ne 35 mW and Argon 25 W lasers, Nd:YAG pulsed laser for holography setups. 40W (3 frequencies), high power lamps (Xenon, quartz-tungsten and Globar lamps).
� Alignment telescopes (theodolites and autocollimators)
� Technology for fibre optics setups: monomode, multimode, plastics, etc.
� Abbe refractometer (indexes range from 1.35 to 1.85)
� Spectroradiometer – spectral range 350 to 1700 nm. Res. 0.1 to 5 nm.
� Spectrophotometer – spectral range 190 to 950 nm. Resolution 0.08 nm
� Confocal microscope
� Spectroscopic ellipsometer with variable angle – spectral range 193 to 2200 nm.
RESOURCES
Metrología de alta precisión para las misiones científicas españolas
Optical Activities
� Optical Metrology�GAIA�SENTINEL�SPICA�Photogrammetry
�New Research:�Coded structured light�Speckle Interferometry�Spiral Interferometry
Optical team: Daniel Garranzo, Gonzalo Ramos, René Restrepo, Javier Vargas
06/07/2011 AstroMadrid Junio 2011 8
SENTINEL (SENER-JENOPTICA)
El FMD (Flip Mirror Device) fast moving mirror to connect two telescopes.
Range: ±9.4ºResolution: ±10 arcminStep: 0.14 arcmin.
Optical Metrology
The main requirements cover, flipping 4 times within a 602 msec period, with a switching period of 20ms and stabilizing period of 15 ms, flipping rotation of 18.8° (+/-9.4°), a small ~14 mm aperture mirror, and tight allocated volume.
06/07/2011 AstroMadrid Junio 2011 9
SENTINEL (SENER-JENOPTICA)
It is required to use a tool:
� Characterize the tooling required at vacuum conditions from -60 to +50 ºC
� Measure the movement at kHz
� All the measurements externally to the vacuum chamber
Optical Metrology
06/07/2011 AstroMadrid Junio 2011 10
Mechanical Tool:
� Aluminum� Commercial tip-tilt mount� Specially designed and manufactured paralell-plates and mirrors
SENTINEL (SENER-JENOPTICA)
Optical Metrology
06/07/2011 AstroMadrid Junio 2011 11
SENTINEL (SENER-JENOPTICA)
First Characterization at ROOM conditions
Optical Metrology
06/07/2011 AstroMadrid Junio 2011 12
SENTINEL (SENER-JENOPTICA)
Characterization at Vacuum conditions
Optical Metrology
06/07/2011 AstroMadrid Junio 2011 13
SENTINEL (SENER-JENOPTICA)
The Thermal Cycling of SENTINEL
Optical Metrology
06/07/2011 AstroMadrid Junio 2011 14
� GAIA (SENER-ASTRIUM) � 5 DoF of a Flat mirror measure at 100K
� lineal range 400 micras, resolution 1 µµµµm
� Angular range 2mrad, resolución 10 µµµµrad
Optical Metrology at Cryo
Fixed Reference
Movement Reference
·Y
Z
X
06/07/2011 AstroMadrid Junio 2011 15
� GAIA (SENER-ASTRIUM) � It was required the modification of our vacuum
chamber to adapt to the thermal environment
Optical Metrology at Cryo
06/07/2011 AstroMadrid Junio 2011 16
SENER-GAIA
� Very complex system to assure good thermal homogeneity
� Required thermal strap
� Specific Shroud
Optical Metrology at Cryo
06/07/2011 AstroMadrid Junio 2011 17
SENER-GAIA
� For QM
� A new optical tool was designed (2 invar cubes)
� A Getter was required to trap outgassing (home made)
Optical Metrology at Cryo
06/07/2011 AstroMadrid Junio 2011 18
RT1
BS
FM7
Final FP
FM10
M5
RT2
Pup3
M6
BC
iimg3
M7
Pup4FM8FM9
F/N 8.45
M8
F/N 20
Dichroic
INTERFEROMETER
CAMERA OPTICSF/N 8.45
141mm
324mm 324mm153mm 135mm
fM8=280mm fM7=131mm
from input optics
Optical Metrology at Cryo
SAFARI-SPICA
Very complex instrument, includes a FTS
06/07/2011 AstroMadrid Junio 2011 19
SAFARI FTS
� FTS of SAFARI � Focused beam is used.� On axis.� We can change the WFE on Exit Pupil� A spider-obscuration is included (not real)
Results
Optical Trombone
FM2
spider-obscuration
06/07/2011 AstroMadrid Junio 2011 20
SAFARI FTS (PUPIL IMAGES)
Results: Two wavelengths, on axis ∆λ∆λ∆λ∆λ=2 µµµµm
λλλλ=34 µm
∆∆∆∆x=0 m ∆∆∆∆x=10 mm
∆∆∆∆x=20 mm
∆∆∆∆x=-20 mm
x
06/07/2011 AstroMadrid Junio 2011 21
SAFARI-SPICA
Optical Metrology at Cryo
06/07/2011 AstroMadrid Junio 2011 22
Differential Interferometer
Differential Interferometer is, in principle a very compact interferometer that allows differential measurements between a specimen mirror (moving mirror) and a reference mirror (Local Measurements).
Optical Metrology at Cryo
The measurements performed on SENTINEL and GAIA are Local measurements (one point , two axis ) but the new challenge is toperform a global measurement (deformation of a surface, rotation of body, translation of a mechanism as a whole…)
06/07/2011 AstroMadrid Junio 2011 23
Optical Metrology :3D Techniques
06/07/2011 AstroMadrid Junio 2011 24
Photogrammetry (For measuring deformations of surfaces at vacuum conditions, Thermo-elastic behavior of antennas, 20 microns)
It is a special triangulation technique that using cooperative targets and “codeds” can measure the topography or deformation of surfaces.
Optical Metrology (Triangulation)
I-CAN 3
06/07/2011 AstroMadrid Junio 2011 25
Photogrammetry (For measuring deformations of surfaces at vacuum conditions, Thermo-elastic behavior of antennas, 20 microns)
Optical Metrology (Triangulation)
06/07/2011 AstroMadrid Junio 2011 26
Photogrammetry (Camera calibration at LINES)
Optical Metrology (Triangulation)
06/07/2011 AstroMadrid Junio 2011 27
Sistema formado por 2 cámaras, la información 3D se obtiene mediante triangulación
Inconvenientes:
•Correspondiencia entre píxeles en ambas cámaras es (complicado)
•Tiempo de procesado muy alto
•Mala precisión en profundidad
Optical Metrology (Stereo Vision)
06/07/2011 AstroMadrid Junio 2011 28
Una de la cámaras se reemplaza por un proyector (cámara inversa)
Optical Metrology (Stereo Vision, Luz Codificada)
El problema de la correspondencia se resuelve automáticamente y de forma robusta y rápida
06/07/2011 AstroMadrid Junio 2011 29
Patrón 1
Patrón 2
Patrón 3
Proyección en el tiempo
Ejemplo: Codificación de 3 bits
Se proyectan una serie de patrones de luz de codificación
Proyección de patrones Gray Code + Phase-Shifting
Optical Metrology (Stereo Vision)
Inconvenientes:Objetos estáticos Gran cantidad de patrones (~10)
Ventajas:Alta resolución:640x480 puntosAlta precisión en profundidad (1m2 ⇒⇒⇒⇒ 10 µµµµm )Robustez frente al color del objeto a medir.Se puede usar en objetos especulares.
06/07/2011 AstroMadrid Junio 2011 30
Inspection of an extended surface by an active 3D m ultiresolution technique
3D measurement of a portion of the antenna
Experimental Results: Antenna measurement
Optical Metrology (Stereo Vision)
Each color corresponds to a 3D measurement of a different antenna region
06/07/2011 AstroMadrid Junio 2011 31
In-plane Speckle arrangement
Optical Metrology (Speckle,ESPI)
We can measure CTE, Poisson’s ratio
Very high resolution technique (<1 micron)
06/07/2011 AstroMadrid Junio 2011 32
In-plane Speckle arrangement
Optical Metrology (Speckle,ESPI)
06/07/2011 AstroMadrid Junio 2011 33
Comparison of two techniques for measuring the CTE of the same material.
Aluminum (100 mmx25 mmx2 mm in thickness)
Composite material: carbon fiber 100 mmx25 mmx2 mm in thickness, with a layer sequence (45/-45)2s.
Optical Metrology (Speckle,ESPI)
Aluminum Composite material:
06/07/2011 AstroMadrid Junio 2011 34
Using Differential inteferometry
Optical Metrology (Speckle, ESPI)
The CTE measured with the differential interferometer was: 6.963Χ10−6 ± 4Χ10−6 K−1 (Composite)24.60Χ10−6 ±6Χ10−6 K−1 (Aluminum)
06/07/2011 AstroMadrid Junio 2011 35
Using In-plane Speckle measurement
Optical Metrology (Speckle, ESPI)
The CTE measured with the differential interferometer was: 4.69Χ10−6 ±3Χ10−6 K−1 (Composite)24.03Χ10−6 ±3Χ10−6 K−1 (Aluminum)
06/07/2011 AstroMadrid Junio 2011 36
Finite Elements Method (FEM) Results
Optical Metrology (Speckle, ESPI)
ESPI technique can be excellently correlated with FEM
06/07/2011 AstroMadrid Junio 2011 37
Vacuum chamber to characterization specimens using ESPI
Optical Metrology (Speckle, ESPI)
06/07/2011 AstroMadrid Junio 2011 38
Very interesting method based on elliptical phase-interferometry (using spatial Light Modulator)
Optical Metrology (Spiral Interferometry)
06/07/2011 AstroMadrid Junio 2011 39
Optical Metrology (Speckle, ESPI)
06/07/2011 AstroMadrid Junio 2011 40
Thanks….
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