particle measurement part2 - rion particle counters

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.

2µm 3µm 4µm

Num

ber

of S

igna

l Pul

ses

coun

ted

Particle Size = Signal Thresholds with Size Calibration

Instrument response to2µm PSL spheres

Instrument response to3µm PSL spheres

1µm

Sensitivity Criteria

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1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

0.1 1 10

Particle diameter (µm)

Rel

ativ

e sc

atte

red

light

inte

nsity

:Experimental

Theoretical

0.312µm

2.001µm

0.700µm 1.020µm

0.506µm

Calibration Curve

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Calibration Curve

Size Sensitivity Depend on a Material of Particle/Medium.

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

0.1 1 10

Particle diameter (µm)

Rel

ativ

e sc

atte

red

light

inte

nsity

m=1.33

m=1.46

m=1.60

m=1.78

m: Refractive index of particlesWavelength=0.633µm

(refractive index of medium=1)

(m: Refractive indexof Particles)

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Microscope

Standard Particle Sensor

Particle Counter(Products)

Standard Particles

Reference Particle Counter

Counting Accuracy

Standard Particles

Standard Particles

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Flow Cell

Light Intensity Distribution

Laser Lens

Sample Laser Beam

Time

Vol

tage

Signal

Resolution

Same Particle Size

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Particle Size

Cou

nted

Rat

e

PSL Size Distribution

Measured Size Distribution

High Resolution Low Resolution

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Concentration Limit

Flow Cell

Laser BeamParticles

Laser

Amp.

Lens Photo Detector

Vol

tage

TimeSignal

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10

100

1000

10000

100000

1000000

10 100 1000 10000 100000 1000000

Ideal

Experimental

Calculated

Count Loss (5%)

Count Loss (10%)

Particle Concentration of Sample

Mea

sure

d P

artic

le C

once

ntra

tion

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Flow RateFlow Rate is important for Calibration and Measurement.

Particle Counter

Precision film type flow-meter

Airborne Particle Counter

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Flow Rate Check for

Liquid borne Particle Counter

Particle Counter

+ Stop watchDrain

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Particle Counter (Products)

Measuring Instruments

RION Standard

Official Standard

Trace-ability for physical value

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Traceability for Particle Counter

ElectrotechanicalLaboratory

JSR

BIPMCommunicationsResearchLaboratory

BIPM

Particle Counter (Products)

StandardParticles

Weigh Pulse Generator

Particle Size Mass Time

PTB

Frequency Counter

YHP

JEMIC

Volt Meter

Pulse HeightAnalyzer

Fluke Sartorius

StandardWeight

NRLM

JQA JQA

Voltage

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A Point of Notice for Particle Measurementusing

Airborne Particle Counter

• Check a Flow Rate• Tube Material• Tube Length• Pressure Drop of Sampling System• Zero Count Check• Calibration within a year

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Sampling Tube Material

Do not use a materials that cause staticelectricity such as Teflon, Silicon etc. because particles will deposit on the wall of tube.

We recommend nylon.

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Sampling Tube Length

Long tube will cause deposit particleson the wall of tube.It’s depend on a 1. inner diameter of tube2. particle size3. flow rate

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Pressure Drop of Sampling System

Particle Counter

Manometer

Sample

An over reduction of pressure of the inlet will cause low counting efficiency, erroneous countand will dirty an optical system.

Inlet

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A Point of Notice for Particle Measurementusing

Liquid-borne Particle Counter

• Check a chemicals• Flashing• Babble • Residual Sample (Change a Chemicals)• Sample Pressure• Calibration within a year

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Check a wet materials of particle counter

Hydrogen Fluoride (HF) will dissolve glasses and quartz.

Wet material should be Sapphire. In case of sampling HF.

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Flashing a sampling line is a basic

Accurate particle measurement is requiringflash a sampling line for remove a depositedparticles.

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Bubble

Particle Counters count bubbles same asparticles.

Residual Sample

According to circumstances particles willgenerate particles by chemical reaction.

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Conclusions

• Particle Counters are useful for many field.

• There are many standards for cleanliness.

• Some standards described for calibration,sampling and measurement.

• Operating Procedure is important for accuratelymeasurement.