rapid and energy-efficient molecular sensing using dual mm
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17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 1 of 38
Rapid and Energy-Efficient Molecular Sensing
Using Dual mm-Wave Combs in 65nm CMOS:
Cheng Wang and Ruonan Han
Massachusetts Institute of Technology
Cambridge, MA, USA
A 220-to-320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 2 of 38
Outline
• Background
• Dual-Frequency-Comb Spectroscopy
• Architecture and Circuit Design
• Measurement Results
• Conclusions
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 3 of 38
mm-Wave/THz Rotational Spectroscopy
• Rotation of polar molecules leads to absorption spectrum‒ Maximum absorption in mmW/lower-THz range
‒ Sub-MHz Doppler-limited linewidth high selectivity
Gas SampleTx Rx
IF signal
detection
IF
Rotational spectrum
0 0.3 0.6 0.9 1.2
40
60
80
100
Tra
ns
mit
tan
ce
(%
)
16O
12C
32S
Frequency (THz)
J=1
J=40
Detection of rotational
spectral lines using EM wave
Peak absorption intensity at
mmW/sub-THz band
J - quantum number
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 4 of 38
Portable Molecular Sensor: Applications
[tabletopwhale.com]
• Human breath analyzer for
biomedical diagnosis
• Environment monitoring
for toxic gas leakage‒ Sensor network
‒ UAV platform
[www.dji.com]75% N2
13% O2
6% H2O 5% CO2
1% volatile organic compounds
3500 chemical species
Concentration: ppm-to-ppt level
Bio-makers for diseases or
metabolic disorders
(e.g. acetone glucose
Type 1 diabetes)
1% VOC
Hu
ma
n e
xh
ale
d g
ases
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 5 of 38
Challenges of Chip-Scale Spectrometer
MoleculeFrequency
(GHz)Toxic?
Flammable
?
Carbon Monoxide (CO) 230.538001 Y Y
Sulfur Dioxide (SO2) 251.199668
Hydrogen Cyanide (HCN) 265.886441 Y
Hydrogen Sulfide (H2S) 300.511959 Y
Nitric Oxide (NO) 250.436966 Y
Nitrogen Dioxide (NO2) 292.987169 Y
Nitric Acid (HNO3) 256.657731 Y
Ammonia (NH3) 208.145904 Y
Carbonyl Sulfide (OCS) 231.060989 Y Y
Ethylene Oxide (C2H4O) 263.292515 Y
Acrolein (C3H4O) 267.279359 Y
Methyl Mercaptan
(CH3SH)227.564672 Y
Methyl Isocyanate
(CH3NCO)269.788609 Y
Methyl Chloride (CH3Cl) 239.187523 Y Y
Methanol (CH3OH) 250.507156 Y Y
Acetone (CH3COCH3) 259.6184 Y Y
Acrylonitrile (C2H3CN) 265.935603 Y Y
[Source: HITRAN.org]
• High selectivity– Wideband(100GHz), high resolution(10kHz) spectrometer
• High sensitivity, fast scanning– High radiated power (below saturation), low noise detection
• High energy efficiency
[C. F. Neese, IEEE Sensors Journal, 2012]
periodic
Spectrum: 210-270GHz
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 6 of 38
Outline
• Background
• Dual-Frequency-Comb Spectroscopy
• Architecture and Circuit Design
• Measurement Results
• Conclusions
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 7 of 38
Dual-Frequency-Comb Spectroscopy
Conventional single-tone spectroscopy
Dual-frequency-comb spectroscopy
• Simultaneous scanning using 20 comb lines
(8 minutes for 100GHz bandwidth, τint=1ms)
• Single frequency sweep (e.g. ~3 hours for 100GHz bandwidth, τint=1ms)
IF
f0 Gas Sample
320f (GHz)220 320f (GHz)220
f0 f0-IF
f0 TX RX
fref - fIF/6
IF1,2, ,n
fD: 10GHz
fref
Gas Sample
IF1,2, ,n
Comb A Comb BfD
Spectrum of Comb A Spectrum of Comb B
320f (GHz)220
fD
320f (GHz)220
fIF
TX+RX TX+RX
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 8 of 38
Energy Efficiency Improvement
• Dual frequency combs (DFC) scheme breaks the conventional
efficiency-bandwidth tradeoff using parallelism
• Linear scalability between bandwidth and energy consumption
Radiated power of silicon-
based sources above 200GHz
Total energy consumption for
full-band scanning
This work
TST
2016
On-wafer measured with an
assumed 50% radiation efficiency Radiated
RFIC
2016
RFIC
2015
ISSCC
2015
ISSCC
20161
PBW
JSSC
2013
TST
2015MTT
2012
CSICS
2012 ISSCC
2016
ISSCC
2015
3 4 8 16 24 40
Bandwidth (%)
102
104
106
Co
ns
um
ed
en
erg
y (a
.u.)
DFC spectrometer
Conventional
single-tone
spectrometer
100×
10×
3E BW
2E BW
E BW
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 9 of 38
Outline
• Background
• Dual-Frequency-Comb Spectroscopy
• Architecture and Circuit Design
• Measurement Results
• Conclusions
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 10 of 38
Architecture of A 220-to-320GHz Comb
• Tunable transceiver: 10 active molecular probes (AMP)‒ Seamless coverage of 100GHz bandwidth
‒ Simultaneous transmit and receive ~2x higher efficiency
fref : 45~46.67GHz fD/2: 5GHz
Tripler
BufferDown-Mixer
Up-Mixer
IF-1 IF-2 IF-3 IF-4 IF-5
IF0 IF1 IF2 IF3 IF4
2f0
f0=3fref Up-Conv.
Chain
Down-Conv.
Chain
2f0+fD 2f0+2fD 2f0+3fD 2f0+4fD
2f0-fD
2f0-2fD 2f0-3fD 2f0-4fD 2f0-5fD
Active Molecular
Probe (AMP)
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 11 of 38
Distributed Comb-Spectral Radiation
Hemispheric
silicon lens
CMOS chip
• On-chip backside radiation through 10 radiators‒ Improved antenna efficiency by narrowband operation
• High-resistivity hemispheric silicon lens is used‒ Lower sensitivity to the radiator offset from the center
(compared to hyper-hemispheric lens)
‒ No additional beam collimation
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 12 of 38
Active Molecular Probe (AMP)
• Multi-functional module simultaneously performs ‒ Highly-efficient frequency doubling
‒ Low-noise heterodyne sub-harmonic down mixing
‒ Efficient antenna for input/output radiation waves
Input +
@ f0
VG
VD & Mixer Output @ fIF
Input -
@ f0
fIF
f0
TX: 2f0
RX: 2f0+fIF
X2
+
-
Balun
Buffer
Core of AMP
Core
Slot balun
Output -Input
Output +
f 0
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 13 of 38
AMP TX Mode: Frequency Doubling
f 0
Input +
@ f0
VG
RF
Choke
@ 2f0
VD & Mixer Output @ fIF
Input -
@ f0
TX: 2f0
RX: 2f0+fIF
• Conditions for high conversion efficiency‒ Maximum device power gain at fundamental frequency (f0)
‒ Minimum loss at 2f0 (e.g. harmonic feedback to the lossy gates)
‒ Instantaneous signal radiation at 2f0
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 14 of 38
Maximum Device Power Gain Gmax
• Upper limit of matched power gain Gmax depends on
the unilateral gain U
Gms/GmaUnilateral gain U
Gmax, ~4U
fmax
U = 4
Gmax = 3.5U
Simulation using 65nm bulk
CMOS process
[R. Spence, Linear Active Networks 1968]
[O. Momeni, ISSCC 2013]
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 15 of 38
Conventional YZ Embedding for Gmax
[R. Spence, Linear Active Networks 1968]
• Issues of YZ embedding with lumped elements‒ Loss from DC feed to bypass source current
‒ Loss from parasitic resistor associated with the source
‒ Impractical large inductor for Y element due to distributed
effect in high frequency
Y element for
shunt feedback
Z element for
series feedback
IN
OUT
DC
feed
Rsb
Csb
N+ N+
P type substrate
GateSource DrainBulk
Z element
Rsb
Y elementDC
feed
IN OUT
Csb
P+
Equivalent circuit Transistor structure
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 16 of 38
Dual-transmission-line (DTL) Feedback
Gmax, K=1
Original power gain
5 dB gain
boost
fmax
where
• Adopt distributed feedback elements
• Ground the source of transistor
• Achieve Gmax accurately
Equations for feedback
parameter calculation:
Simulation using 65nm CMOS processTL1 (Z1,θ1)
Slot2 (Z2,θ2)
IN
OUT
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 17 of 38
DTL Feedback Based on Slot Line @f0
Quasi-TEM Wave (Differential Mode)
Supported
E-field distribution @ f0
K=0.9, w/o
feedback
K 1, with DTL
feedbck
K
TM Wave(Common Mode)
Rejected
Simulated stability factor, K
Feedback through Slot 2
Electrical field Current
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 18 of 38
Loss Minimization and Radiation @2f0
Quasi-TEM Wave (Differential Mode)
Supported
TM Wave(Common Mode)
Rejected
E-field distribution @ 2f0Folded-slot antenna
Harmonic signal isolation
Electrical field Current
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 19 of 38
Simulation Results for Doubler at 275GHz
• 65nm bulk CMOS
• NMOS W/L=24μm/60nm
• Output power: 1.6mW
• Doubler efficiency: 43%
• Antenna efficiency: 45%
Doubler efficiency η (%) Antenna directivity
η=18%, w/o
feedback
η=43%, with DTL
feedback
η (%)
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 20 of 38
AMP RX Mode: Heterodyne Mixing
• Mixer LO signal is the same as the doubler input signal @f0
• Further noise reduction: zero drain bias current
varistor mode mixing with reduced channel noise
Simulated SSB noise figure
Electrical field Current
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 21 of 38
Slot Balun with Orthogonal Mode Filtering
• Amplitude and phase imbalance
in conventional baluns causes‒ Lower doubler efficiency
‒ Higher LO signal radiation at f0
• Proposed slot balun‒ Orthogonal mode filtering
‒ Symmetric output coupling
Active Molecular Probe (AMP)
Slot: λ/4 Resonator
Output -Input
Output +
Differential mode
(support)
Common mode
(reject)
In
Out
In
fIF
f0
RX: 2f0+fIF
X2
+
-
Balun
Buffer Core
Electrical field
Open Open
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 22 of 38
Slot Balun with Orthogonal Mode Filtering
Simulated S-parameterSimulated amp. and phase error
• Nearly perfect single-ended signal to differential
signal conversion without errors
• Minimum insertion loss: 0.9 dB
• -10dB return loss bandwidth: 30%
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 23 of 38
Up/Down-Conversion Mixer
• SSB mixers configured for up/down conversion chains
fref :
45~46.67GHz
f0
Up-conversion
Chain
Down-conversion
Chain
fD/2: 5GHz
f0+5GHz f0+10GHz f0+15GHz f0+20GHz
f0-5GHz f0-10GHz f0-15GHz f0-20GHz f0-25GHz
VGG VGG
Lange Coupler
f0 , 180
f0 , 0
f0 , 270
f0 , 90
VB
RF: f0+5GHz
VDD
VA
VC
VD
Static Frequency
Divider
LO: f0
fD: 10GHz
VA VB VC VD
5GHz IF IQ signals
0
90
270
180
fD: 10GHz
fD/2: 5GHz
DQ
Q CLK
DQ
QCLK
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 24 of 38
Up/Down-Conversion Mixer
• IF phase configuration up or down sideband selection
• Low conversion loss: 2.3 dB
• Rejection of image, LO and inter-modulation signals: >30dB
f0
31dB
30.8dBf0
Phase(VA,VB,VC,VD)=(0°,180°,90°,270°)
Down sideband conv.
Phase(VA,VB,VC,VD)=(0°,180°,270°,90°)
Up sideband conv.
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 25 of 38
Outline
• Background
• Dual-Frequency-Comb Spectroscopy
• Architecture and Circuit Design
• Measurement Results
• Conclusions
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 26 of 38
Chip Micrograph and Packaging
Chip on PCB with Silicon Lens
• TSMC 65nm bulk CMOS process
• Chip area: 2mm×3mm
• DC power consumption: 1.7W
Chip bonded on PCB
with hemispheric
silicon lens
3 mm
2 m
m
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 27 of 38
Measurement Setup of TX Mode
Signal Source (13.7-20GHz)
Spectrum Analyzer
VDI WR-3.4 EHM
Diplexer
WR-3.4 Horn Antenna
Spectrum/Antenna Pattern Measurement
φ
θ
Sensor HeadmW
WR-3.4-10 Taper
Erikson PM4 Power Meter
Power Measurement
WR-10 Waveguide
PCB
IF
LO
LNA
Loss0.7dB
Distance, d = 10cm
fref
IF=280MHz
Signal Source (fDigital=10GHz)
Signal Source (fref=45-46.67GHz)
fdigital
• For power measurement, only one AMP is turned on
at each time
Power measurement
using VDI Erickson
PM-4 power meter
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 28 of 38
Measurement Results of TX Mode
Antenna pattern of a comb
line at 265GHz
Equivalent isotropic
radiated power (EIRP)
• Total radiated power of 10 comb lines: 5.2mW
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 29 of 38
Measurement Results of TX Mode
Phase noise of 10 comb
lines
• Average measured phase noise for 10 comb lines at
1MHz offset: -102dBc/Hz
Span=10kHz
RBW=10Hz
Spectrum of a comb line
at 265GHz
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 30 of 38
Measurement Setup of RX Mode
Signal Source
Horn Antenna
φ
θ
PCB
Distance = 15 cm
Signal Source
(fDigital=10GHz)
Signal Source
(fref=45-46.67GHz)
Spectrum
Analyzer
LNA IF=280MHz
IFiFrequency
Extender
Output: 220-320GHz
NF = IF noise floor (dBm/Hz) – (-174 (dBm/Hz)) – CG (dB)
Single-sideband noise figure (antenna loss incorporated)
Single-sideband conversion gain
CG =IF output power
Power received by RX antenna aperture
= IF output power (dBm) – (TX power (dBm) +TX antenna gain (dB)
– Path loss (dB) + RX antenna directivity (dB))
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 31 of 38
Measurement Results of RX Mode
• Measured SSB noise figure: 14.6~19.5dB
Single-sideband conversion gainSingle-sideband noise figure
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 32 of 38
1. 1 MHz frequency offset.
2. The Pradiated is estimated from the PA output power of 2.9 mW, and the antenna loss of 6 dB.
3. The NF of low noise amplifier in the receiver, excluding on-chip antenna loss.
4. The reported power in [3] is EIRP, not the total radiated power.
5. The overall NF (18.4~23.5 dB) =NFISO(13.9~19 dB, Isotropic Noise Figure)- (Antenna Loss (~4 dB) + Antenna
Gain (-1~2 dBi)) .
Ref.Frequency
(GHz)BW
(GHz)Pradiated
(mW)Phase Noise1
(dBc/Hz)Noise Figure
(dB)
This work
Topology
Comb(Tx/Rx)
220~320 100 5.2 -102 14.6~19.5
Tx+Rx 245 14 4.0 -85 18
Rx 210~305 95 N/A N/A18.4~23.55
(NFISO=13.9~19)
Tx 317 N/A 3.3 -79 N/A
208~255 47Tx 0.14 -80 N/A
210 14 0.72 -81 11~123Tx+Rx
PDC (W)
1.7
1.5+0.6(Tx+Rx)
0.24+0.086(Tx+Rx)
1.4
N/A
0.61
Technology(fmax)
65nm CMOS(250GHz)
0.13μm SiGe(500GHz)
65nm CMOS(N/A)
0.13μm SiGe(280GHz)
32nm CMOS(320GHz)
65nm CMOS(N/A)
TST2016
ISSCC2016
JSSC2015
VLSI2016
JSSC2014
Performance Comparison Table
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 33 of 38
Spectroscopy Demonstration Setup
Spectroscopy setup at
MIT Terahertz Integrated
Electronics Lab
• Wavelength modulation (WM) is applied for reduced
impacts due to standing-wave formation‒ ∆f=240kHz, fm=50kHz, fIF=950MHz
Comb A Comb BGas Chamber
fIF
fm 2fm
LNABPFDetector
IFi
L=70 cm, Pressure =3 Pa
WM input
fref+Δf/6·sin(2πfmt)
Signal SourceSignal Source
Lock-in amplifier
fref – fIF/6
GPIB
GPIB
fm
Laptop
fm
Output
Spectral
line
Freq
Am
pli
tud
e
Time
Time
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 34 of 38
Spectrum of Acetonitrile (CH3CN)
Spectral line w/o WM
Spectral line with WM
Measured spectrum of CH3CN
• Measurement matches the JPL
molecular database
• Spectral linewidth of 380kHz is
obtained‒ Absolute specificity (Q=7×105)
[JPL Molecular Spectroscopy, spec.jpl.nasa.gov.]
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 35 of 38
Spectrometer Miniaturization
1st order derivative, SNR=54dB
2nd order derivative, SNR=44dB
3cm-long gas cell
• 54dB SNR has been achieved
with reduced gas cell size‒ Compact 3cm-long gas cell
‒ Sample: carbonyl sulfide (OCS),
1.21×10-21 cm integrated line
intensity (JPL) at 279.685GHz
‒ Integration time: 100ms
Comb A
Comb B
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 36 of 38
Outline
• Background
• Dual-Frequency-Comb Spectroscopy
• Architecture and Circuit Design
• Measurement Results
• Conclusions
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 37 of 38
Conclusions
• Architecture level: Dual-frequency-comb spectroscopy with
>2N× (N=10) faster frequency scanning and lower total
energy consumption
− Simultaneous bilateral transmit/receive
• Circuit level: multi-functional active molecule probe (AMP),
performing frequency doubler, sub-harmonic mixer and on-
chip antenna simultaneously
− Proposed dual-transmission-line (DTL) feedback accurately
achieves Gmax
• Prototype: 220-to-320GHz comb spectrometer with state-of-
the-art 5.2mW radiated power and 14.6-to-19.5dB NF
− Spectroscopy demonstration with 3-cm gas cell and a SNR
of 54dB
17.6: Rapid and Energy-Efficient Molecular Sensing Using Dual mm-Wave Combs in 65nm CMOS: A 220-to-
320GHz Spectrometer with 5.2mW Radiated Power and 14.6-to-19.5dB Noise Figure© 2017 IEEE International Solid-State Circuits Conference 38 of 38
Acknowledgement
• MIT Center for Integrated Circuits & Systems
• TSMC University Shuttle Program
• Dr. Richard Temkin (MIT Physics), Prof. Tomás Palacios (MIT
EECS), Prof. Ehsan Afshari (University of Michigan) and Prof.
Anantha Chandrakasan (MIT EECS) for the support of testing
instruments
• Dr. Stephen Coy, Prof. Keith Nelson, Prof. Robert Field (MIT
Chemistry), Tingting Shi (MIT and Fudan University) and Prof.
John S. Muenter (University of Rochester) for technical
discussions and assistance
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