ultrahigh-purity gas filters
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© 2003 Swagelok Company
Ultrahigh-Purity Gas FiltersSCF Series
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding • Faster moisture dry down• Low ΔP• Lower cost of ownership• Inline and surface mount
configurations
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency– 99.9999999% @ 0.003µm at
maximum rated flow• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership• In-line and surface mount
configurations
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding
– Non-shedding during constant, pulse flow, high pressure differential, and impact test
– Extremely low outgassing– Low reactivity– Meets SEMASPEC #93021511A-
STD
• Faster moisture dry down• Low ΔP• Lower cost of ownership
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down
– Dries faster– Holds less post purge moisture– Purges impurities faster
• Low ΔP• Withstands high differential
pressures • Lower cost of ownership
0.1
1
10
100
0 2 4 6 8 10 12 14 16
Hours
Moi
stur
e (p
pb)
3 ppb
CERAMIC
METALLIC
Moisture Dry-down
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding
Faster moisture dry down• Low ΔP
– Higher flow than much larger PTFE metallic filters.
– Has lower pressure drops than metallic and PTFE filters
• Lower cost of ownership• In-line and surface mount
configurations
0123456789
10
0 10 20 30 40 50 60 70 80 90 100
Nitrogen Flow in SLPM
Pres
sure
Dro
p in
PSI
D
1 bar2 bar
3 bar
© 2003 Swagelok Company
Performance Features
• High particle removal efficiency• Extremely low particle shedding• Faster moisture dry down• Low ΔP• Lower cost of ownership
– Reduce downtime– Reduce gas costs– Reduce maintenance– Reduce inventory– Competitive price
• In-line and surface mount configurations
© 2003 Swagelok Company
SCF Series FiltersProduct Line
© 2003 Swagelok Company
Product Line
Inline Filters– Max. flow rates:
• 30, 225, 600, 900 and 2700 std L/min.
– End connections• ¼, ½, ¾ inch integral male
VCR and ¼ inch female VCR face seal fittings
– Lengths:• 3.31, 5.00, 11.22 in. (84.1,
127,and 285 mm)
© 2003 Swagelok Company
Product Line
Modular surface mount filters– Max. Flow rates:
• 7, 30, 100 std L/min.
– Surface mount design• SEMI PR3.1 compliant• Gaskets: C-rings and
spring energized C-ring• Compatible with Swagelok
IGC™ll integrated gas system
© 2003 Swagelok Company
Ultrahigh-Purity FiltersSCF Series
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