MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS

Apple uses an accelerometer to reorient the iPhone's screen

also used inalso used in notebook, CE

ink-jet head

MEMS in phones:3-axis MEMS accelerometer motion sensors in phones include power management and shake modes for control f k i i h dof tracks in music phones, context awareness and

pedometers. Others: microphones, BAW duplexers and filters, MEMS autofocus actuators, pressure sensors, pico-projectors and gyroscopes

MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS

MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS

http://www.europhysicsnews.com/full/19/article1/article1.html

laterallateral

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Google (DLP Chip)

3*DLP chips

3*DLP chips

MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS

Accelerometer

17 June 2006 http://www.planetanalog.com/showArticle.jhtml?articleID=189400178HDD camcorder teardown: MEMS, gyros keep things steady

MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS

Self-assembly of orthogonal three-axis sensorsJ. H. Cho, S. Hu, and D. H. Gracias

APPLIED PHYSICS LETTERS 93, 043505 (2008)

state-of-the-art: 2011ADIS16407: TEN DEGREES OF FREEDOM INERTIAL SENSOR

23 mm × 23 mm × 23 mm module$444 per 1k units

Applications:Emergency first responders, unmanned vehicles, and precision autonomous instruments often require the merging of multiple sensors to accurately track location in office buildings, warehouses, tunnels, caves, mines, ‘urban canyons’ and other GPS-denied environments., , y

Recommended: http://www.analog.com/en/mems-sensors/products/index.html