application examples of triplex based pic modules & pix4life

Application examples of TriPleXbased PIC modules & Pix4life

silicon nitride open access ecosystem

Arne Leinse – Chief Commercial Officer LioniX International

2Our chips drive your business

Outline

Introduction LioniX international

Overview TriPleX™ nitride platform

User case examples

Open access in PiX4life Pilot Line


Our Mission

LioniX International is a leading global provider of customized microsystem solutions, in particular integrated photonics-based, in scalable production volumes

Why

Applying disruptive technologies

to solve major societal challenges


Who

Located in the Netherlands (Europe)

Established in 2001 (LioniX)

Merged with XiO Photonics & SatraX in 2016

>50 employees

>50% PhD


LioniX International

Providing customized solutionsfor OEM’s and System Integrators

From design to device by vertical integration in scalable production volumes

Seoul, South KoreaEnschede, The Netherlands Enschede, The Netherlands Enschede, The Netherlands


LioniX International PHIX

TriPleXTM waveguide concept

LPCVD SiO2

Low refractive index

Layer quality is excellent

Stress: Compressive

LPCVD Si3N4

High refractive index

Layer quality is excellent

Stress: Tensile

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Multilayer waveguide

Characteristics: • Applicable in between 405 nm and 2.35 μm• Single mode waveguides• Ultra low-loss

Our chips drive your business

TriPleXTM: some geometries... Adjustable polarization properties

(sensors telecom)

Low optical attenuation

Adaptable mode profile

Small bend radii (small footprint!)

Design by geometry

Silicon and glass compatible


Tapering: high low index waveguides

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Low index contrast

•Mode profiles from 1 µm to > 10 µm•Modefield conversion•Pitch conversion•Low loss coupling to almost any external component, including SM fiber, InP and Si (SOI)

High index contrast


“Low-loss, high-index-contrast Si3N4/SiO2 optical waveguides for optical delay lines in microwave

photonics signal processing”, L. Zhuang et all, Optics express, 19 (23), 2011

Low propagation losses

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"An Ultra-Low-Loss (<0.1 dB/m) Planar Silica Waveguide Platform," J. Bauters et all, IEEE Photonics Newsletter, December 2011


Application Examples of TriPleX PIC

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• Visible: power splitter, multi-color laser combiner

400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

TriPleX™

• NIR: ultra sensitive sensor arrays

• IR: microwave photonics, hybrid InP-TriPleX laser


Visible light application

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Power splitter for DNA sequencing (Pacific Biosciences)

400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

• Ultra high power density (per channel typically 100 mW)• Very high power uniformity over output channels


Visible light application

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Multi-color laser combiner

• Combining of four visible laser colors through TriPleX™: 405, 488, 532 and 640 nm

• Thermal actuation for on-chip power stabilization up to 10 mW

• PZT actuation for noise stabilization and modulation in the MHz range

• Flow cytometry, confocal microscopy

400 600 800 1000 1200 1400 1600 1800 2000 2200 2400


NIR application

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Ultra sensitive sensor arrays

400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

• Label-free refractive index sensing • Multiple MRR and/or MZI sensor arrays• Flip-chip assembly of VCSEL’s and detector arrays through grating couplers


NIR application

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• Driving and interrogation unit co-developed with supplier

• Software developed in-house• Up to 8 channels simultaneously• Variety of application fields

through choice of sensing layers:-Biochemical sensing-Gas sensing -……

Experimental resolution: • Δn = 10-6 to 10-7 RIU

Surface sensitivity • ~0.1 pm of protein layer


IR application

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400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

Microwave photonics (OBFN)

5G requires higher capacity and faster speed of data transmissionOptical signal processing at high radio frequency(28GHz) is required:

combine TriPleX and InP


IR application

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Major stepping stone: realization of on-chip, tunable, hybrid InP-TriPleX laser


IR application

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Latest result: extremely small bandwidth (290 Hz) with 13 mWpower in output fiber, >80 nm tunability

“290 Hz Intrinsic Linewidth from an Integrated Optical Chip-based Widely Tunable InP-Si3N4 Hybrid Laser”, Y. Fan et al, post deadline oral presentation, CLEO USA, San Jose, (CA) , 14-19 May 2017


Access to TriPleX technology

Technology accessible via Multi Project Wafer (MPW) runs

Photonic Design Kit (PDK) in PhoeniX software

Special offer to PhoeniX Software for first time MPW customers

PDK training in collaboration with PhoeniX Software

At fixed tape out deadline design submission

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12th run 13th run 14th run

Training February 2017 June 2017 December 2017

Tape out May 2017 October 2017 March 2018

Devices ready September 2017 February 2018 July 2018


Characterization Packaging

Characterization Packaging o To measure PIC without alignment setup

o Connection to fiber arrays and electronics

o Standardized design guidelines to improve assembly speed and lower assembly cost


PIX4life Silicon Nitride MPW platforms

TriPleX

LPCVD Si3N4

Single or Double stripe

405 to 700nm wavelength range

Propagation loss <0.3 dB/cm.

Min bend radius TE-100 µm

Actuation by thermo-optic effect

Cladding openings for interaction

Butt-coupling to an array of fibers.

Minimum feature size 0.8 µm.

Si3N4 MPW offer

o 1550 nm

o VIS (400-700nm)

BioPIX

PECVD Si3N4

300/150 nm waveguide height.

532 to 850 nm wavelength range

Minimum bending radius: 20 µm.

Propagation loss <1.5dB/cm.

Coupling by gratings: light output to

Compatible with CMOS sensor stack.

Cladding openings available.

Minimum feature size 150 nm.

Si3N4 MPW offer

o 532-850 nm


www.pix4life.eu

Si3N4 MPW @ Visible

The PIX4LIFE project, a project funded by the EU under the H2020 program (contract number: 688519)

The European PIX4life pilot line offers o open-access manufacturing platform for photonic integrated circuits

o specially targeting life-science applications at visible wavelength ranges (400-850 nm).

Flow Cytometery Multispectral light source

Gas/Bio Multi sensor

Optical Coherence Tomography


Pix4life user example


Silicon nitride MPW schedules

TriPleXo 1550 nm - Double Stripe. Start October 2017, Chips ready February 2018

o VIS – Single stripe. Summer 2018.

BioPIXo VIS - Winter 2017

PDKs and trainings are available


Q&A


application examples of triplex based pic modules & pix4life

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