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Basic Nanotechnology EHS Awareness Basic Nanotechnology EHS Awareness Basics of Chemical and Material Properties— Basics of Chemical and Material Properties— Role of Scale Role of Scale Chemical and Materials Handling, Storage, and Chemical and Materials Handling, Storage, and Disposal Disposal Nanotechnology Health, Safety, and Nanotechnology Health, Safety, and Environmental issues Environmental issues Nanotechnology Equipment and Processing Foundation Nanotechnology Equipment and Processing Foundation Skills Skills Chemical Hoods and Glove Boxes: Use and Chemical Hoods and Glove Boxes: Use and Maintenance Maintenance Cleanrooms: Use and Maintenance Cleanrooms: Use and Maintenance Pumps, Flow Control Systems, Scrubbers, Pumps, Flow Control Systems, Scrubbers, Sensors: Use Sensors: Use and Maintenance and Maintenance Vacuum Systems: Use and Maintenance Vacuum Systems: Use and Maintenance Plasma Generating Systems: Use and Maintenance Plasma Generating Systems: Use and Maintenance Furnaces, Ovens, and Rapid Thermal Annealing Furnaces, Ovens, and Rapid Thermal Annealing Equipment: Use and Maintenance Equipment: Use and Maintenance Chemical Facilities and Maintenance Chemical Facilities and Maintenance Contamination Control Contamination Control Process Integration Process Integration Introduction to Statistical Process Control Introduction to Statistical Process Control Nanotechnology Nanotechnology Patterning Patterning Optical, e-beam, and Ion Beam Lithography Optical, e-beam, and Ion Beam Lithography Stamping and Imprinting Lithography Stamping and Imprinting Lithography Chemical Chemical techniques; e.g., Block co-polymers techniques; e.g., Block co-polymers and SAMs and SAMs Nanotechnology Fabrication Nanotechnology Fabrication Top-down Fabrication Top-down Fabrication Reactive Ion, Sputter, and Wet Etching Reactive Ion, Sputter, and Wet Etching Chemical Vapor and Physical Vapor Deposition Chemical Vapor and Physical Vapor Deposition Systems Systems Ion Beam, Plasma, and Chemical Materials Ion Beam, Plasma, and Chemical Materials Modification Modification Nanotechnology Characterization Nanotechnology Characterization Optical Microscopy Optical Microscopy Scanning Probe Microscopy Scanning Probe Microscopy Atomic Force Microscopy Atomic Force Microscopy Electron Microscopy Electron Microscopy Scanning Electron Microscopy (SEM and Scanning Electron Microscopy (SEM and FE-SEM) FE-SEM) Transmission Electron Microscopy (TEM Transmission Electron Microscopy (TEM and FE-TEM) and FE-TEM) Chemical Characterization Chemical Characterization X-ray (EDS) X-ray (EDS) Secondary Ion Mass Spectroscopy Secondary Ion Mass Spectroscopy Auger Electron Spectroscopy Auger Electron Spectroscopy Fourier Transform Infrared Spectroscopy Fourier Transform Infrared Spectroscopy Electrical Characterization Electrical Characterization Current-Voltage Measurements Current-Voltage Measurements Capacitance Measurements Capacitance Measurements Opto-electronic Device Measurements Opto-electronic Device Measurements Physical Characterization Physical Characterization Spectrophotometer Spectrophotometer Profilometer Profilometer X-ray Diffraction X-ray Diffraction Nanotechnology Professional Skills Nanotechnology Professional Skills Team Building Team Building Problem Solving Problem Solving Project Organization and Planning Project Organization and Planning Research Skills Research Skills Assessing Cost of Ownership Assessing Cost of Ownership Presentation Skills Presentation Skills Technical Reporting and Documentation Technical Reporting and Documentation Handling and Generating Intellectual Handling and Generating Intellectual Property Property NACK Nano-Technician Skills

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Page 1: Basic Nanotechnology EHS Awareness Basics of Chemical and Material Properties—Role of Scale Basics of Chemical and Material Properties—Role of Scale Chemical

Basic Nanotechnology EHS AwarenessBasic Nanotechnology EHS Awareness Basics of Chemical and Material Properties—Role of ScaleBasics of Chemical and Material Properties—Role of Scale Chemical and Materials Handling, Storage, and DisposalChemical and Materials Handling, Storage, and Disposal Nanotechnology Health, Safety, and Environmental issuesNanotechnology Health, Safety, and Environmental issues

Nanotechnology Equipment and Processing Foundation SkillsNanotechnology Equipment and Processing Foundation Skills Chemical Hoods and Glove Boxes: Use and MaintenanceChemical Hoods and Glove Boxes: Use and Maintenance Cleanrooms: Use and MaintenanceCleanrooms: Use and Maintenance Pumps, Flow Control Systems, Scrubbers, Sensors: Use Pumps, Flow Control Systems, Scrubbers, Sensors: Use

and Maintenanceand Maintenance Vacuum Systems: Use and MaintenanceVacuum Systems: Use and Maintenance Plasma Generating Systems: Use and MaintenancePlasma Generating Systems: Use and Maintenance Furnaces, Ovens, and Rapid Thermal Annealing Equipment: Furnaces, Ovens, and Rapid Thermal Annealing Equipment:

Use and MaintenanceUse and Maintenance Chemical Facilities and MaintenanceChemical Facilities and Maintenance Contamination ControlContamination Control Process IntegrationProcess Integration Introduction to Statistical Process ControlIntroduction to Statistical Process Control

NanotechnologyNanotechnology Patterning Patterning Optical, e-beam, and Ion Beam LithographyOptical, e-beam, and Ion Beam Lithography Stamping and Imprinting LithographyStamping and Imprinting Lithography ChemicalChemical techniques; e.g., Block co-polymers and SAMs techniques; e.g., Block co-polymers and SAMs

Nanotechnology Fabrication Nanotechnology Fabrication Top-down FabricationTop-down Fabrication

Reactive Ion, Sputter, and Wet EtchingReactive Ion, Sputter, and Wet Etching Chemical Vapor and Physical Vapor Deposition SystemsChemical Vapor and Physical Vapor Deposition Systems Ion Beam, Plasma, and Chemical Materials Modification Ion Beam, Plasma, and Chemical Materials Modification Nanoparticles: Etching and Grinding Approaches Nanoparticles: Etching and Grinding Approaches

Bottom-up FabricationBottom-up Fabrication Chemical, Physical, and Biological Self-AssemblyChemical, Physical, and Biological Self-Assembly Nanoparticles: Colloidal ChemistryNanoparticles: Colloidal Chemistry Nanoparticles: Plasma ApproachesNanoparticles: Plasma Approaches Nanoparticles: Chemical Vapor Deposition Approaches Nanoparticles: Chemical Vapor Deposition Approaches

Nanotechnology Characterization Nanotechnology Characterization Optical MicroscopyOptical Microscopy Scanning Probe MicroscopyScanning Probe Microscopy

Atomic Force MicroscopyAtomic Force Microscopy Electron Microscopy Electron Microscopy

Scanning Electron Microscopy (SEM and FE-SEM)Scanning Electron Microscopy (SEM and FE-SEM) Transmission Electron Microscopy (TEM and FE-TEM) Transmission Electron Microscopy (TEM and FE-TEM)

Chemical Characterization Chemical Characterization X-ray (EDS)X-ray (EDS) Secondary Ion Mass Spectroscopy Secondary Ion Mass Spectroscopy Auger Electron Spectroscopy Auger Electron Spectroscopy Fourier Transform Infrared SpectroscopyFourier Transform Infrared Spectroscopy

Electrical Characterization Electrical Characterization Current-Voltage MeasurementsCurrent-Voltage Measurements Capacitance MeasurementsCapacitance Measurements Opto-electronic Device MeasurementsOpto-electronic Device Measurements

Physical Characterization Physical Characterization SpectrophotometerSpectrophotometer ProfilometerProfilometer X-ray DiffractionX-ray Diffraction

Nanotechnology Professional SkillsNanotechnology Professional Skills Team BuildingTeam Building Problem SolvingProblem Solving Project Organization and PlanningProject Organization and Planning Research SkillsResearch Skills Assessing Cost of OwnershipAssessing Cost of Ownership Presentation SkillsPresentation Skills Technical Reporting and DocumentationTechnical Reporting and Documentation Handling and Generating Intellectual PropertyHandling and Generating Intellectual Property

NACK Nano-Technician Skills