bits 2008 archive · pdf filebits 2008 complete zo=50 ohm ... fixed or floating alignment...
TRANSCRIPT
![Page 1: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/1.jpg)
BiTS Workshop 2008 Archive
���������� Poster Session 1
ARCHIVE 2008
“Complete Zo=50 Ohm Coaxial Spring Probe IC Socket”
Tatsumi Watabe S.E.R. Corporation
“High Frequency Wafer Level Test Approach With Coaxial Socket”
Takuto Yoshida, Craig Hudson, Takahiro Nagata, Atushi Sato, Satoshi Kakegawa
Yokowo Co., Ltd.
“Signal and Power Integrity Analysis of ATE Loadboard, Socket, and Package”
James Zhou, Hongjun Yao Antares Advanced Test Technologies
Wei Wang Sigrity, Inc.
“Fine Pitch Socket Solution” Shunji Abe
Yamaichi Electronics
COPYRIGHT NOTICE
The papers in this publication comprise the proceedings of the 2008 BiTS Workshop. They reflect the authors’ opinions and are reproduced as presented , without change. Their inclusion in this publication does not constitute an endorsement by the BiTS Workshop, the sponsors, BiTS Workshop LLC, or the
authors.
There is NO copyright protection claimed by this publication or the authors. However, each presentation is the work of the authors and their respective companies: as such, it is strongly suggested that any use
reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author/s or their companies.
All photographs in this archive are copyrighted by BiTS Workshop LLC. The BiTS logo and ‘Burn-in & Test Socket Workshop’ are trademarks of BiTS Workshop LLC.
![Page 2: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/2.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #1
1
3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 1
BiTS 2008
Complete Zo=50 ohmCoaxial Spring Probe IC Socket
Tatsumi Watabe S.E.R. Corporation : Managing Director
1. OverviewIC Test Socket for SHF best performance, SER has realized
Complete 50 ohm Characteristic Impedance Coaxial Probe to use for FBGA and CSP Testing. Complete Zo Coaxial Probe, the concept is to do careful design for every portion detail on plungers, barrel, dielectric in coaxial to fit Zo=50 ohm and consider keeping totally stable GND design for PCB, IC and Socket GND. The Complete Zo Coaxial Probe has been confirmed the frequencyperformance exceeded 20GHz on S21 Transmission Performance. The socket is available for 1.0, 0.8 and 0.5mm pitch.
Photo. 1 Complete Zo=50 ohm Coaxial Spring probe IC Socket (0.5mm pitch)
(1) Complete Zo=50 ohm Coaxial Spring Probe Contacts.
(2) Socket GND organize block.
(3) Regular composed Spring Probe block.
Best performance was brought from a combination of combining (1) and (2). It was confirmed by S parameter loop measurement by specialized board and Network Analyzer using like Fig. 3. And total cost saving comes from composing of (3).
The base socket is composed of 3 featured concept. (Photo.1)
(1)(2)
(3)
![Page 3: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/3.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #1
2
3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 2
Zo=log(D/d) *138 / √ε (Epsilon) (ohm)
Fig. 1 Coaxial probe
Fig 2. Coaxial core probe.
Photo 2. Socket GND organize
2. Complete Zo Coaxial Probe (1).Because Characteristic impedance is decided by the equation.
All Coaxial probe portion from PCB side (bottom) to IC terminal side (top) is designed to fit in Zo=50 ohm by choosing and adjust Dielectric(Epsilon) and diameter of plunger and barrel.
This example : Coaxial GND diameteris 0.9mm for 1.0mm matrix pitch and 0.41mm for 0.5mm matrix pitch.
3. Core probe for coaxial probe(1).
1.0mm pitch (MD102-00) : diameters
Barrel 0.40mm Plunger 0.20mm,
0.5mm pitch (MD138-00) : diameters
Barrel 0.18mm, Plunger 0.09mm
are used (Fig.2). And deferent dielectric are used for plunger portion and barrel portion individually.
It is distinguished high frequency GND (analog GND on this IC socket) to other GND. Metal base is used for the Coaxial GND partially as Socket GND organized to PCB GND . Then IC GND was equalized to PCB GND by this composing.
4. Coaxial GND is equate PCB GND(2).
Complete ZoCoaxial
Standard Coaxial
MD102-00
MD138-00
GND
Dielectric
![Page 4: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/4.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #1
3
3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 3
通過特性
-30
-25
-20
-15
-10
-5
0
0 5 10 15 20
GHz
dB
M D0102-00 通過特性
-30
-25
-20
-15
-10
-5
0
0 5 10 15 20
GHz
dB
Fig 3. Measurement condition
Fig 4. Probe performance restriction
Fig 5. Complete Coaxial Probe Performance
5. Measurement Condition.High frequency signal source
through a Pico Probe touching to the specialized board ( characterized to Zo=50 ohm ) holding Probe or Coaxial Probe be assembled as same condition of IC base socket. And the signal return to Network Analyzer by loop test condition. (Fig 3.)
6. Probe S21 performance.
A probe is designed with flung or resistive belting on its surface has a transmission performance 5 through 7 GHz only (Fig 4.). It is not restricted by probe length like Fig 4. For achieving max. frequency performance, a core probe for coaxial must be more efficient design for SHF performance.
7. Complete Zo=50 ohm Coaxial probe performance.
20 GHz transmission performance was measured. A conditioning of complete Zo coaxial technique with, Socket GND equate technique brought this achievement for both of 1.0 mm and 0.5 mm coaxial probe socket by using MD102-00 and MD138-00 core probe. (Fig 5.)
Best design concept for IC Socket’s Probe and GND location is required to be best fitting to IC contact terminal matrix. I think It will be needed more cooperated relationship enhancement between ‘socket makers’ and user ‘IC users’ together.
MD138-00 & MD102-00
Complete Zo=50 ohm Coaxial
![Page 5: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/5.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #2
1
BiTS 2008
High Frequency Wafer Level Test Approach with Coaxial Socket
By: Takuto Yoshida1), Craig Hudson2), Takahiro Nagata3), Atsushi Sato3), Satoshi Kakegawa3)
1): Yokowo CTC Business Division, 2): Yokowo America, 3): Yokowo CTC Technical Division
Prober equipment enables coaxial BGA test socket to become a probe card for 0.3mm, 0.4mm & 0.5mm pitch WLCSP devices…flexibility and yield improvement at
minimum cost.
• Multisite throughput on prober or pick-and-place handler• Same socket for bench, handler and or prober
• >250 microns of mechanical compliance• Outstanding Signal Integrity (6 GHz for 0.3mm pitch)
• High spring force for Pb Free solder or pad
0.3mm pitch WLCSPTest Socket
0.4mm pitch Test Socket with Alignment Plate
0.4mm pitch WLCSP Test Socket on DUT Board
![Page 6: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/6.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #2
2
3/2008 High Frequency Wafer Level Test Approach with Coaxial Socket 2
Same Socket CrossoverFlexibility
Characterization (Hand Test)Characterization of diced WLCSP devices is accomplished on bench
using traditional test socket set-up comprised of socket body,fixed or floating alignment plate, and lid. (0.3mm to 0.5mm pitch)
Limited volume production testing of WLCSP products can be implemented using a Pick & Place handler can be used for
small preproduction runs. (0.3mm to 0.5mm pitch)
Pick & Place Handler Test
Mass volume production testing of WLCSP products can be implemented using a prober. Multi-site testing is possible, such
as 4, 8 and 16 site configurations. (0.3mm to 0.5mm pitch)
Prober Test
Hand Socket Lid
Socket with Alignment Plate
Socket without Alignment Plate
Socket with Alignment Plate
![Page 7: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/7.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #2
3
3/2008 High Frequency Wafer Level Test Approach with Coaxial Socket 3
Coaxial Socket Structure
-5
-4
-3
-2
-1
0
0 5 10 15 20Frequency (GHz)
Inse
rtion
Los
s (d
B)
-60
-50
-40
-30
-20
-10
0
0 5 10 15 20Frequency (GHz)
Ret
urn
Loss
(dB)
S11S22
-60
-50
-40
-30
-20
-10
0
0 5 10 15 20Frequency (GHz)
Cro
ssta
lk (d
B)
S31S42S32S41
0.3mm pitch RF Performances
0
100
200
300
400
500
600
Initia
l 1k 2k 5k10
k20
k30
k40
k50
k60
k70
k80
k90
k100
k11
0k12
0k130
k14
0k15
0k160
k170
k18
0k190
k200
k
Cycle Time
Cre
s [m
Ohm
]
MAX AVR
Crown Tip Shape of0.3mm Pitch Probe
Probe Mechanical Performances
Return Loss CrosstalkInsertion Loss
Probe Cres Life Cycle
Rc-s/P-sProbe Tip Planarity
0.35
0.40
0.45
0.50
(mm
)
Coaxial Socket Structure
![Page 8: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/8.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #3
1
Company Logo(s)
BiTS 2008Signal and Power Integrity Analysis of ATE Loadboard,
Socket and PackageJames Zhou1, Hongjun Yao1, Wei Wang2
1Antares Advanced Test Technologies, 2Sigrity Inc.
PCB Design: Allegro SPB
System SIPI: Speed 2000
Socket Design: ProE, Solidworks
Socket SIPI: HFSS
Package Model: Allegro APD
BroadbandSPICE
IC IBIS Model
System analysis results:(*) Time domain: timing, eye-diagrams(*) Freq domain: IL,RL,XT,bandwidth(*) Impedance, inductance
AntaresCapabilities
Ansoftlinks
ADS
Antares SIPI Flow and Tools
Signal Integrity Power Integrity (SIPI) ToolsPlaner EM: Speed2000: Analyze very large problems of entire package and loadboard; Include RLC circuits (i.e. bypass caps) in hybrid engine with FDTD planar EM3D EM: HFSS/CST:captures full-wave electromagnetic interactions in the structure and its surrounding environments, valid up to very high frequencies of multi- 10s of GHz
Suitable for general 3D structures which cannot be analyzed by planar EM tools: such as sockets, contactor arrays, via arrays of boards and other interconnects
•Circuit: ADS, Broadband SPICE (Sigrity): RLC(or broadband) model extraction by optimization
•CAD converters: Ansoftlinks, Sigrity PCB converters, ADS layout extractor for Allegro
![Page 9: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/9.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #3
2
3/2008 Signal and Power Integrity Analysis of ATE Loadboard, Socket and Package 2
Test Boards and Interposers•Interfaces between embedded interposers and test sockets are highly discontinuous even when blind vias are used
•Analyzing these structures at mechanical boundaries of socket and board is not the best choice for 3D analysis; in many cases mechanical boundary locations are among the worst choices for ports
•By incorporating the entire structure in one integrated model, the discontinuities between sockets and boards are truly represented in the model and, their fullwave electromagnetic effects are accurately simulated
•Fullwave EM analysis is the best way to fully characterize these highly complex 3D structures at high frequencies
•What-if analysis of socket/interposer structure provide engineering guidelines at early stage to avoid costly mistakes
•Quantitative data enables objective PCB layout strategy decisions and identify potential PCB layout issues
•Enable data-driven decision making for project managers
•Simulated data can be generated at much lower cost within short time frame comparing to lab measurement
Sockets and Contactors•3D EM fullwave analysis using HFSS or CST
•Simulate LGA, BGA, PGA, QFN and all types of socket contactors with accuracy and speed
•Fullwave analysis takes into account electromagnetic interactions in the structure and its surrounding environments
•Unlike quasi-static methods which are inherently inaccurate at high frequencies, fullwave analysis maintains its accuracy at all frequencies for general 3D structures, valid up to very high frequencies of 10s of GHz
•Absorbing boundary conditions simulate wave propagation along horizontal directions where socket structure extends
![Page 10: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/10.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #3
3
3/2008 Signal and Power Integrity Analysis of ATE Loadboard, Socket and Package 3
Power Integrity : Simulation •Sigrity Speed2000 FDTD (Finite Difference Time Domain)
•Import entire loadboard model into Speed2000
•Simulated with and without caps
•Gaussian pulse excitation
•Selected one pair of VDD/VSS for comparison with measurement
•Results converted from time domain waveforms to frequency domain impedance
Power Integrity : Measurement•Agilent PNA 8363E 40GHz Vector Network Analyzer
•Cascade ACP40 probes
•Measured both short and open VDD-VSS at power connector
•Power integrity can only be analyzed using the entire structure of interest; a divide-and-conquer approach cannot work for power analysis
•Resonant modes exist in power/ground planes and propagate to the entire board in all directions
•Resonant modes starts at as low as 10MHz
Bare Board Power Impedance Profile Simulation vs Measurement
0.01
0.1
1
10
1.00E+06 1.00E+07 1.00E+08 1.00E+09 1.00E+10
Frequency (Hz)
Impe
danc
e (o
hm)
simulationmeasurement
Package SI Analysis•Package substrates usually made of 4~8 layers of organic material
•Comparing to PCB structures, package substrates contains bond wires and solder balls
•Sigrity Speed2000 can directly import package layout models
•Power impedance analysis including lumped element models
![Page 11: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/11.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #4
1
3/2008 Fine Pitch Socket Solution 1
Fine Pitch Socket SolutionThe evolution of IC manufacturing technology has led to a decrease in package sizes. This necessitated a simultaneous decrease in the distance of the individual contact pads (pitch), decreasing from a moderate 0.5mm to the current CSP 0.4mm, and below 0.2mm in the near future.
The current solutions are the use of spring probes and other basic technology. However, it is very difficult to control contact force, cost effectiveness, and manufacturability.
“Fiber Pitch” solution for Test and Burn-In sockets to utilize current stamping and etched contacts to achieve cost effectiveness and manufacturability.
Author:Shunji Abe
BiTS 2008
![Page 12: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/12.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #4
2
3/2008 Fine Pitch Socket Solution 2
-Contact Shape: Buckling Beam-Applicable Pitches: 80-100um (50um minimum)-Contact Positional Tolerance X,Y: <+/-10um Target(Component Tolerance +/-5um, Mounting Tolerance +/-5um)
-Other Features;Wide Freedom on PWB Lay OutModule (Block) Form MountingLow Cost Contact Pin UsedOptimum Wiping Distance Achievable
High Accuracy Contact Module Spec
Fiber Pitch Contact
Glass Substrate
Printed Circuit
![Page 13: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,](https://reader037.vdocuments.net/reader037/viewer/2022110222/5aad7ac17f8b9a2b4c8e8e9e/html5/thumbnails/13.jpg)
20082008 Poster Session 1
March 9 - 12, 2008
Poster #4
3
3/2008 Fine Pitch Socket Solution 3
100um
Actual Product (Example)
Actual Contact Mark (Example)
-Contact Manufacturing Method: Etching-Base Material: BeCu-Plating: Ni-Au-Pitch: 100um-Contact Thickness: 50um
-Contact Pin Displacement: 100um-Material: Si Wafer + Al Pad-Al Pad Thickness: 0.8-1.0um-Contact Force: 0.05N (5gf)
High Accuracy Contact Module Model