bits 2008 archive · pdf filebits 2008 complete zo=50 ohm ... fixed or floating alignment...

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BiTS Workshop 2008 Archive Poster Session 1 ARCHIVE 2008 “Complete Zo=50 Ohm Coaxial Spring Probe IC Socket” Tatsumi Watabe S.E.R. Corporation “High Frequency Wafer Level Test Approach With Coaxial Socket” Takuto Yoshida, Craig Hudson, Takahiro Nagata, Atushi Sato, Satoshi Kakegawa Yokowo Co., Ltd. “Signal and Power Integrity Analysis of ATE Loadboard, Socket, and Package” James Zhou, Hongjun Yao Antares Advanced Test Technologies Wei Wang Sigrity, Inc. “Fine Pitch Socket Solution” Shunji Abe Yamaichi Electronics COPYRIGHT NOTICE The papers in this publication comprise the proceedings of the 2008 BiTS Workshop. They reflect the authors’ opinions and are reproduced as presented , without change. Their inclusion in this publication does not constitute an endorsement by the BiTS Workshop, the sponsors, BiTS Workshop LLC, or the authors. There is NO copyright protection claimed by this publication or the authors. However, each presentation is the work of the authors and their respective companies: as such, it is strongly suggested that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author/s or their companies. All photographs in this archive are copyrighted by BiTS Workshop LLC. The BiTS logo and ‘Burn-in & Test Socket Workshop’ are trademarks of BiTS Workshop LLC.

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Page 1: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

BiTS Workshop 2008 Archive

���������� Poster Session 1

ARCHIVE 2008

“Complete Zo=50 Ohm Coaxial Spring Probe IC Socket”

Tatsumi Watabe S.E.R. Corporation

“High Frequency Wafer Level Test Approach With Coaxial Socket”

Takuto Yoshida, Craig Hudson, Takahiro Nagata, Atushi Sato, Satoshi Kakegawa

Yokowo Co., Ltd.

“Signal and Power Integrity Analysis of ATE Loadboard, Socket, and Package”

James Zhou, Hongjun Yao Antares Advanced Test Technologies

Wei Wang Sigrity, Inc.

“Fine Pitch Socket Solution” Shunji Abe

Yamaichi Electronics

COPYRIGHT NOTICE

The papers in this publication comprise the proceedings of the 2008 BiTS Workshop. They reflect the authors’ opinions and are reproduced as presented , without change. Their inclusion in this publication does not constitute an endorsement by the BiTS Workshop, the sponsors, BiTS Workshop LLC, or the

authors.

There is NO copyright protection claimed by this publication or the authors. However, each presentation is the work of the authors and their respective companies: as such, it is strongly suggested that any use

reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author/s or their companies.

All photographs in this archive are copyrighted by BiTS Workshop LLC. The BiTS logo and ‘Burn-in & Test Socket Workshop’ are trademarks of BiTS Workshop LLC.

Page 2: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #1

1

3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 1

BiTS 2008

Complete Zo=50 ohmCoaxial Spring Probe IC Socket

Tatsumi Watabe S.E.R. Corporation : Managing Director

1. OverviewIC Test Socket for SHF best performance, SER has realized

Complete 50 ohm Characteristic Impedance Coaxial Probe to use for FBGA and CSP Testing. Complete Zo Coaxial Probe, the concept is to do careful design for every portion detail on plungers, barrel, dielectric in coaxial to fit Zo=50 ohm and consider keeping totally stable GND design for PCB, IC and Socket GND. The Complete Zo Coaxial Probe has been confirmed the frequencyperformance exceeded 20GHz on S21 Transmission Performance. The socket is available for 1.0, 0.8 and 0.5mm pitch.

Photo. 1 Complete Zo=50 ohm Coaxial Spring probe IC Socket (0.5mm pitch)

(1) Complete Zo=50 ohm Coaxial Spring Probe Contacts.

(2) Socket GND organize block.

(3) Regular composed Spring Probe block.

Best performance was brought from a combination of combining (1) and (2). It was confirmed by S parameter loop measurement by specialized board and Network Analyzer using like Fig. 3. And total cost saving comes from composing of (3).

The base socket is composed of 3 featured concept. (Photo.1)

(1)(2)

(3)

Page 3: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #1

2

3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 2

Zo=log(D/d) *138 / √ε (Epsilon) (ohm)

Fig. 1 Coaxial probe

Fig 2. Coaxial core probe.

Photo 2. Socket GND organize

2. Complete Zo Coaxial Probe (1).Because Characteristic impedance is decided by the equation.

All Coaxial probe portion from PCB side (bottom) to IC terminal side (top) is designed to fit in Zo=50 ohm by choosing and adjust Dielectric(Epsilon) and diameter of plunger and barrel.

This example : Coaxial GND diameteris 0.9mm for 1.0mm matrix pitch and 0.41mm for 0.5mm matrix pitch.

3. Core probe for coaxial probe(1).

1.0mm pitch (MD102-00) : diameters

Barrel 0.40mm Plunger 0.20mm,

0.5mm pitch (MD138-00) : diameters

Barrel 0.18mm, Plunger 0.09mm

are used (Fig.2). And deferent dielectric are used for plunger portion and barrel portion individually.

It is distinguished high frequency GND (analog GND on this IC socket) to other GND. Metal base is used for the Coaxial GND partially as Socket GND organized to PCB GND . Then IC GND was equalized to PCB GND by this composing.

4. Coaxial GND is equate PCB GND(2).

Complete ZoCoaxial

Standard Coaxial

MD102-00

MD138-00

GND

Dielectric

Page 4: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #1

3

3/2008 Complete Zo=50 ohm Coaxial Spring Probe IC Socket 3

通過特性

-30

-25

-20

-15

-10

-5

0

0 5 10 15 20

GHz

dB

M D0102-00 通過特性

-30

-25

-20

-15

-10

-5

0

0 5 10 15 20

GHz

dB

Fig 3. Measurement condition

Fig 4. Probe performance restriction

Fig 5. Complete Coaxial Probe Performance

5. Measurement Condition.High frequency signal source

through a Pico Probe touching to the specialized board ( characterized to Zo=50 ohm ) holding Probe or Coaxial Probe be assembled as same condition of IC base socket. And the signal return to Network Analyzer by loop test condition. (Fig 3.)

6. Probe S21 performance.

A probe is designed with flung or resistive belting on its surface has a transmission performance 5 through 7 GHz only (Fig 4.). It is not restricted by probe length like Fig 4. For achieving max. frequency performance, a core probe for coaxial must be more efficient design for SHF performance.

7. Complete Zo=50 ohm Coaxial probe performance.

20 GHz transmission performance was measured. A conditioning of complete Zo coaxial technique with, Socket GND equate technique brought this achievement for both of 1.0 mm and 0.5 mm coaxial probe socket by using MD102-00 and MD138-00 core probe. (Fig 5.)

Best design concept for IC Socket’s Probe and GND location is required to be best fitting to IC contact terminal matrix. I think It will be needed more cooperated relationship enhancement between ‘socket makers’ and user ‘IC users’ together.

MD138-00 & MD102-00

Complete Zo=50 ohm Coaxial

Page 5: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #2

1

BiTS 2008

High Frequency Wafer Level Test Approach with Coaxial Socket

By: Takuto Yoshida1), Craig Hudson2), Takahiro Nagata3), Atsushi Sato3), Satoshi Kakegawa3)

1): Yokowo CTC Business Division, 2): Yokowo America, 3): Yokowo CTC Technical Division

Prober equipment enables coaxial BGA test socket to become a probe card for 0.3mm, 0.4mm & 0.5mm pitch WLCSP devices…flexibility and yield improvement at

minimum cost.

• Multisite throughput on prober or pick-and-place handler• Same socket for bench, handler and or prober

• >250 microns of mechanical compliance• Outstanding Signal Integrity (6 GHz for 0.3mm pitch)

• High spring force for Pb Free solder or pad

0.3mm pitch WLCSPTest Socket

0.4mm pitch Test Socket with Alignment Plate

0.4mm pitch WLCSP Test Socket on DUT Board

Page 6: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #2

2

3/2008 High Frequency Wafer Level Test Approach with Coaxial Socket 2

Same Socket CrossoverFlexibility

Characterization (Hand Test)Characterization of diced WLCSP devices is accomplished on bench

using traditional test socket set-up comprised of socket body,fixed or floating alignment plate, and lid. (0.3mm to 0.5mm pitch)

Limited volume production testing of WLCSP products can be implemented using a Pick & Place handler can be used for

small preproduction runs. (0.3mm to 0.5mm pitch)

Pick & Place Handler Test

Mass volume production testing of WLCSP products can be implemented using a prober. Multi-site testing is possible, such

as 4, 8 and 16 site configurations. (0.3mm to 0.5mm pitch)

Prober Test

Hand Socket Lid

Socket with Alignment Plate

Socket without Alignment Plate

Socket with Alignment Plate

Page 7: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #2

3

3/2008 High Frequency Wafer Level Test Approach with Coaxial Socket 3

Coaxial Socket Structure

-5

-4

-3

-2

-1

0

0 5 10 15 20Frequency (GHz)

Inse

rtion

Los

s (d

B)

-60

-50

-40

-30

-20

-10

0

0 5 10 15 20Frequency (GHz)

Ret

urn

Loss

(dB)

S11S22

-60

-50

-40

-30

-20

-10

0

0 5 10 15 20Frequency (GHz)

Cro

ssta

lk (d

B)

S31S42S32S41

0.3mm pitch RF Performances

0

100

200

300

400

500

600

Initia

l 1k 2k 5k10

k20

k30

k40

k50

k60

k70

k80

k90

k100

k11

0k12

0k130

k14

0k15

0k160

k170

k18

0k190

k200

k

Cycle Time

Cre

s [m

Ohm

]

MAX AVR

Crown Tip Shape of0.3mm Pitch Probe

Probe Mechanical Performances

Return Loss CrosstalkInsertion Loss

Probe Cres Life Cycle

Rc-s/P-sProbe Tip Planarity

0.35

0.40

0.45

0.50

(mm

)

Coaxial Socket Structure

Page 8: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #3

1

Company Logo(s)

BiTS 2008Signal and Power Integrity Analysis of ATE Loadboard,

Socket and PackageJames Zhou1, Hongjun Yao1, Wei Wang2

1Antares Advanced Test Technologies, 2Sigrity Inc.

PCB Design: Allegro SPB

System SIPI: Speed 2000

Socket Design: ProE, Solidworks

Socket SIPI: HFSS

Package Model: Allegro APD

BroadbandSPICE

IC IBIS Model

System analysis results:(*) Time domain: timing, eye-diagrams(*) Freq domain: IL,RL,XT,bandwidth(*) Impedance, inductance

AntaresCapabilities

Ansoftlinks

ADS

Antares SIPI Flow and Tools

Signal Integrity Power Integrity (SIPI) ToolsPlaner EM: Speed2000: Analyze very large problems of entire package and loadboard; Include RLC circuits (i.e. bypass caps) in hybrid engine with FDTD planar EM3D EM: HFSS/CST:captures full-wave electromagnetic interactions in the structure and its surrounding environments, valid up to very high frequencies of multi- 10s of GHz

Suitable for general 3D structures which cannot be analyzed by planar EM tools: such as sockets, contactor arrays, via arrays of boards and other interconnects

•Circuit: ADS, Broadband SPICE (Sigrity): RLC(or broadband) model extraction by optimization

•CAD converters: Ansoftlinks, Sigrity PCB converters, ADS layout extractor for Allegro

Page 9: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #3

2

3/2008 Signal and Power Integrity Analysis of ATE Loadboard, Socket and Package 2

Test Boards and Interposers•Interfaces between embedded interposers and test sockets are highly discontinuous even when blind vias are used

•Analyzing these structures at mechanical boundaries of socket and board is not the best choice for 3D analysis; in many cases mechanical boundary locations are among the worst choices for ports

•By incorporating the entire structure in one integrated model, the discontinuities between sockets and boards are truly represented in the model and, their fullwave electromagnetic effects are accurately simulated

•Fullwave EM analysis is the best way to fully characterize these highly complex 3D structures at high frequencies

•What-if analysis of socket/interposer structure provide engineering guidelines at early stage to avoid costly mistakes

•Quantitative data enables objective PCB layout strategy decisions and identify potential PCB layout issues

•Enable data-driven decision making for project managers

•Simulated data can be generated at much lower cost within short time frame comparing to lab measurement

Sockets and Contactors•3D EM fullwave analysis using HFSS or CST

•Simulate LGA, BGA, PGA, QFN and all types of socket contactors with accuracy and speed

•Fullwave analysis takes into account electromagnetic interactions in the structure and its surrounding environments

•Unlike quasi-static methods which are inherently inaccurate at high frequencies, fullwave analysis maintains its accuracy at all frequencies for general 3D structures, valid up to very high frequencies of 10s of GHz

•Absorbing boundary conditions simulate wave propagation along horizontal directions where socket structure extends

Page 10: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #3

3

3/2008 Signal and Power Integrity Analysis of ATE Loadboard, Socket and Package 3

Power Integrity : Simulation •Sigrity Speed2000 FDTD (Finite Difference Time Domain)

•Import entire loadboard model into Speed2000

•Simulated with and without caps

•Gaussian pulse excitation

•Selected one pair of VDD/VSS for comparison with measurement

•Results converted from time domain waveforms to frequency domain impedance

Power Integrity : Measurement•Agilent PNA 8363E 40GHz Vector Network Analyzer

•Cascade ACP40 probes

•Measured both short and open VDD-VSS at power connector

•Power integrity can only be analyzed using the entire structure of interest; a divide-and-conquer approach cannot work for power analysis

•Resonant modes exist in power/ground planes and propagate to the entire board in all directions

•Resonant modes starts at as low as 10MHz

Bare Board Power Impedance Profile Simulation vs Measurement

0.01

0.1

1

10

1.00E+06 1.00E+07 1.00E+08 1.00E+09 1.00E+10

Frequency (Hz)

Impe

danc

e (o

hm)

simulationmeasurement

Package SI Analysis•Package substrates usually made of 4~8 layers of organic material

•Comparing to PCB structures, package substrates contains bond wires and solder balls

•Sigrity Speed2000 can directly import package layout models

•Power impedance analysis including lumped element models

Page 11: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #4

1

3/2008 Fine Pitch Socket Solution 1

Fine Pitch Socket SolutionThe evolution of IC manufacturing technology has led to a decrease in package sizes. This necessitated a simultaneous decrease in the distance of the individual contact pads (pitch), decreasing from a moderate 0.5mm to the current CSP 0.4mm, and below 0.2mm in the near future.

The current solutions are the use of spring probes and other basic technology. However, it is very difficult to control contact force, cost effectiveness, and manufacturability.

“Fiber Pitch” solution for Test and Burn-In sockets to utilize current stamping and etched contacts to achieve cost effectiveness and manufacturability.

Author:Shunji Abe

BiTS 2008

Page 12: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #4

2

3/2008 Fine Pitch Socket Solution 2

-Contact Shape: Buckling Beam-Applicable Pitches: 80-100um (50um minimum)-Contact Positional Tolerance X,Y: <+/-10um Target(Component Tolerance +/-5um, Mounting Tolerance +/-5um)

-Other Features;Wide Freedom on PWB Lay OutModule (Block) Form MountingLow Cost Contact Pin UsedOptimum Wiping Distance Achievable

High Accuracy Contact Module Spec

Fiber Pitch Contact

Glass Substrate

Printed Circuit

Page 13: BiTS 2008 Archive · PDF fileBiTS 2008 Complete Zo=50 ohm ... fixed or floating alignment plate, and lid. ... ports •By incorporating the entire structure in one integrated model,

20082008 Poster Session 1

March 9 - 12, 2008

Poster #4

3

3/2008 Fine Pitch Socket Solution 3

100um

Actual Product (Example)

Actual Contact Mark (Example)

-Contact Manufacturing Method: Etching-Base Material: BeCu-Plating: Ni-Au-Pitch: 100um-Contact Thickness: 50um

-Contact Pin Displacement: 100um-Material: Si Wafer + Al Pad-Al Pad Thickness: 0.8-1.0um-Contact Force: 0.05N (5gf)

High Accuracy Contact Module Model