chemical wet bench safety-cen

8/8/2019 Chemical Wet Bench Safety-CEN

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Chemical wet bench

safet

CEN- IISc


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Wet bench

Only safe place towork with chemicals inthe cleanroom

Wetbenches makesure that the

cleanroom stays pure:PreventContamination


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All wet bench users

While working on wet bench, it ismandatory to

Wear lab shoes

Wear Lab coat

Wear safety glasses/ face shield

Wear appropriate gloves

Switch on the exhaust hood


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Make sure to..Make sure to..Make sure to..Make sure to.. Leave the wet bench clean after you have

finished work Remove your contact lenses!!

c em ca

Label your chemical receptacles


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Use of gloves PVC

Are used in the P-line to protect wafers from particles generated

by humans No resistance to chemicals

NITRILLE Thin chemical resistant gloves : used in laboratories

Strong material : used for installation and maintenance of tools

TRIONIC (MAPA) Thick chemical resistant gloves : used for cleaning up leaks

Nevertheless dont put your hands in liquid chemicals!


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Heavy Duty Neoprene

TRIONIC (MAPA

PVC


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Splashes in the eyes

Always pour acid in water and never the other wayround

Never look in

1st danger : Chemicals in the eyes

recipients with reacting or boiling liquids Opening of bottles of liquids

Glass splinters by breaking of glass or explosions

Solids in the eyes are irritating too

Vapors or gasses can cause irritation


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1st danger : Chemicals in the eyes

ALWAYS WEAR SAFETY GLASSES

WITH SIDE SCREENS

Never rub in your eyes or face with your hands

or gloves.


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2nd danger : Chemicals on your skin

writing tools tables and table edges

Irritating chemicals have a harmful effect on the skin.

Possible ways of contamination

dirty handswounds

valvestowels

chairsdoor handlesfloorLoose hair

SOMEBODY WORKING AFTER YOU IN A LAB HAS TO TRUST EVERYTHING IS CLEAN!


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2nd danger : Chemicals on your skinNever touch chemicals with your bare skin!

Intake through small wounds is verydangerous Nevertheless if you come into contact with

chemicals :

immediately flush with a lot of water Cary the right gloves Cary safety shoes Cary lab coat (closed) or a chemical

resistant apron. A cleanroom suit lets vapors and liquidspass through.


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2nd danger : Chemicals on your skinWorking safely = working cleanly

PURITY = SAFETY Keep working table clean and pure

Wash your hands as soon as they are dirty

The gloves you carry must always be clean! Avoid wearing dirty protection clothing

Dont clean your hands on your lab coat

Decontaminate all used glassware, measuring equipment, working

tables,

Eg. Clean up carefully every Friday afternoon

Always wash used recipients


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3rd danger : Breathing in of vapors

Gasses

Liquids

The intake of toxic and biting vapors and gasses through the respiration

system.

Gasses can escape when liquids evaporate When some chemicals are mixed, dissolved gasses can

escape

Solvents evaporate very easily (low boiling point and high

vapor pressure)

Solids Powdery solids can create fine up whirling dust, that can be

inert, irritating, harmful or toxic.


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Classification of chemicalsBy properties :

organic - inorganic

acids and bases

strong electrolytes - weak electrolytes

Oxidizing and reducing products

State of aggregation :solid - liquid - gas - glass - plasma -

metal - non-metal

oxides (acid forming, base forming, amphoteric)


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Classification of chemicalsAccording to health risks :

Toxic

Combustible

Irritating

Corrosive

Carcinogenic Mutagene

Teratogenic


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MSDS Material safety data sheet


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Properties of Chloric acidFormula: HClName: Chloric acid

Origin: Gas dissolved in water

Nature: Colorless fuming acid with a biting smell

Hazard: Strong acid Corrosive

R-sentences: 34-37

S-sentences: (1/2)-26-45TLV-Value: 5 ppm

Rel.density: 1.2

Hazard symbols :

Corrosive


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Properties of AmmoniaNH3Ammonia

Gas dissolved in water

Colorless liquid with a biting smell

Weak base ( undangerous)

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Contaminant for lithography processes34-50

(1/2)-26-36/37/39-45-61

20 ppm

0.9

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of Sulfuric acidH2SO4Sulfuricacid

Synthesis

Colorless oily hygroscopic liquid

Very strong acid, very concentrated (100%)

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Produces a lot of heat when mixed with water35

(1/2)-26-30-45

1 ppm

1.83

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of - BleachNaOClSodiumhypochloryt

Syntheses

Clear yellow green solution with a typical smell

strong oxidant and strong base

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Decomposes with formation of chlorine gas31-34

(1/2)-28-45-50

Unknown

1.2

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of Fluoric acidHFFluoric acid



weak acid ( undangerous)

Corrosive en toxic

Formula :

Name :

Origin :

Nature :

Hazard :

Evaporates very easily and dissolves the lungs.Passes through skin and affects bones.

26/27/28-35

(1/2)-7/9-26-36/37-45

3 ppm1.2

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive Toxic


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Symptoms HF injury:

diluted HF solution < 20% sometimes it can take up to 24 hours before

symptoms appear (pain, rash) results in deeper penetration and more painful

burn (especially at hands and finger tips ) the surface s m toms are minimal and ma be

absent sometimes white discoloration skin seldom blistersforming

HF solution >20%


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Symptoms HF injury:

HF 49% almost immediate deep throbbing pain,

burning feeling,(especially at hands andfinger tips)

red discoloration with whitish blister

forming tissue under skin starts dying offbone de-mineralisation

Systematic fluoride intoxication

painful treatment in hospital (plasticsurgery possible)


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Hydrofluoric acid (HF) injuries


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First aid of HF burns emergency shower: immediately rinse

copiously with water (15 minutes) remove contaminated clothing

a rst-a e per nee s to treat t e wounwith calcium gluconate gel and cover theburn with plastic foil.


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Properties of Acetic acidCH3COOH, HAcAcetic acid

liquid dissolved in water


weak acid ( undangerous), very concentrated (100%)

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Is nearly as acid as Sulfuric acidAlways pour Acetic acid in water when diluting

10-35

(1/2)-23-26-45

10 ppm1.0

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of Nitric acidHNO3Nitric acid

Synthesis

Colorless to yellow brown liquid with a biting smell

strong acid, oxidyzing acid

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

reacts with all organic materialsWhen diluting always pour nitric acid in water

35

(1/2)-23-26-36-45

2 ppm1.4

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of HNO3/HF mixtureHNO3/ HFNitric acid / Fluoric acid mixture

IMEC

Colorless solution with a biting smell

strong acid, oxidizing acid

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Application :

Oxidises Si and Ge till SiO2 and GeO2Afterwards Si and Ge are dissolved by the F ions

HF gas escapes from the

solution ! ! !Hazard symbols :

Corrosive Toxic


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Properties of IodineI2Iodine

Solid

Dark purple cristals of gray black flakes

with a biting smell, oxidiser

Harmful

Formula :

Name :

Origin :

Nature :

Hazard :

Properties comparable to those of chlorine

Sublimates : transition from solid to gas

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(2)-23-25

0.1 ppm4.93

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Harmful


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Properties of Colloidal SiO2SiO2Colloidal Siliciumdioxide

CMP Slurry (Polisher)

Milky aqueaous solution

Used in suspension with NH3

Irritating

Formula :

Name :

Origin :

Nature :

Hazard :

Can dry up easily and create particles

Cancerogenic when inhaled

20/21-45

(1/2)-24/25

10 ppm1.1

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Irritating


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Properties of Hydrogen peroxideH2O2Hydrogen peroxide

Synthesis

Colorless liquid

strong oxidiser

Corrosive

Formula :

Name :

Origin :

Nature :

Hazard :

Can react vigorously in an alkaline environment

reacts with all organic materials

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(1/2)-3-28-36/39-45

1 ppm1.1

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Corrosive


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Properties of Hydrocyanic acidHCNPrussic acid Hydrogen cyanide


Very toxic colorless liquid with a typical smell

Metal baths in alkaline environment used for plating

Highly flammable

Formula :

Name :

Origin :

Nature :

Hazard :

Formation of HCN-gas in acid environments

Complexes Fe in blood ( CO-toxification)

Antidote : oxygen (Pneupac Toren 6)

12-26/27/28-50/53

(1/2)-7/9-16-36/37-38-45-60-6110 ppm

1.1

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Highly flammable Toxic


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Properties of IsopropylalcoholCH3CHOHCH3Isopropylalcohol (IPA)

Synthesis

colorless liquid with a typical biting smell

Organic solvent

Highly flammable and irritating

Formula :

Name :

Origin :

Nature :

Hazard :

Flammable till explosive when mixed oxidising

products (O2, HNO3, H2O2, I2, )

11

(2)-7-16

250 ppm0.8

R-sentences :

S-sentences :

TLV-Value :

Rel. density :

Hazard symbols :

Highly flammableIrritating


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