chemicalfilters for clean environments

April 2008, AAF Taiwan

CHEMICALCHEMICAL FILTERSFILTERSfor

CLEAN ENVIRONMENTS


SAAF Chemical Filters

AAF’s innovative alternative to chemical filters.

Designed to control airborne molecular contaminations (AMCs)that can negatively affect semiconductor manufacturing processand lower pressure drop, long life and high removal efficiency.Includes chemical filter media. (adsorbents, sheets for pleating, and cells)

Key features and benefits include:

● Lower pressure drop decreases energy usage● Light weight enable easy handling and installation● Media can be shaped into multiple forms

(e.g. sheet, cell, etc)● Suitable for full fab., fan filter units (FFU), make up air unit (MAU),

tracks, tool-mount.● Superior flow reconstruction


Imreg.

(Conventional)

Vacuum Im

prg.(SA

AF)

Before Impreg. Progress Impreg. After Impreg. Characteristics

▪ Non-homogeneous Impreg.▪ Process Time : Over 12 hrs▪ Needed Drying Process▪ Difficult control of impregnated chemical content.

▪ Homogeneous Impreg.▪ Process Time : 3 hrs▪ Process with one-time drying▪ Easily control of impregnated chemical content

: Adsorbate (air, vocs) : Adsorbent (activated carbon or activated alumina, etc)

: Treated chemical

● Vacuum Impregnation Process

SAAF Media Production Technologies


0 10 20 30 40 50 60 70 80 90 10050

60

70

80

90

100

NO

x R

emov

al E

ffici

ency

, [%

]

T ime, [m in]

Non-Im pregnated AC Im pregnated AC , (Soaking) Im pregnated AC , (Vacuum )

Test Conditions

Specimen Size : Ø 50mm

Sample Vol. :20ml

NO2 Conc. : 45ppm

L.V. : 0.3 m/sec

Temp. : 20±2℃

Humidity : 40±5%RH

● Acceleration Test Results – NOx Removal Efficiency(Compare to Impregnation Methods)


● Combination Media Coating Technology

☞☞ TThe same kindhe same kind or or a different kinda different kind adsorbents hybrid coating is possibleadsorbents hybrid coating is possibleby by SAAFSAAF’’ss original technologyoriginal technology

CationExchange Resin

AnionExchange Resin



● Chemical Filter Preparation of Using Mini-Pleat Method

Air + Gases Air + Gases

Purified Air

1 time

2 times

3 times

Turbulence

Purified Air



Granularactivated carbon

Cationexchange resin

Anionexchange resin

Class

Equipment Filters,Tray FiltersCells (Panel)

Target Gases

Sheets (Pleating)

Adsorbents

Organics,Silane, Siloxane

Amine, AmmoniaAcid Gases

Pleated Filters

Tool-mount Filters

C300B100A62Applications

Chemical Filter Media

Classification of Chemical Filter Media


3D mesh media PU form media Mini-pleated media

Punched media Non-woven media(Cation)

Non-woven media(Anion)

Classification of Chemical Filter Media


Classification of Chemical Adsorbents Media

Φ4mm AC pellet Φ3mm AC pellet Φ2mm AC pellet

#4~8 mesh AC granular #20~40 mesh AC granular Φ3~4mm Activated Alumina bead


IER media

AC media Extremely lowLowExtremely lowDust emission

NoNoNo

FlexibleStd. 610*610*450T

and half sizeFlexible

Std. 610*1200*60TFlexibleAvailable size

NoYesNoExchangeable media

AluminumSTSAluminumFrame material

Yes beadYes beadYes beadIon exchange resin

Yes beadYes pellet/granularYes beadActivated carbon media

~ 35 PaDepends on media~ 35 PaPressure drop

~ 0.5 m/s~ 2.5 m/s~ 0.5 m/sRelated face velocity

Typically > 95%Typically > 95%Typically > 95%Initial efficiency

Tray Type for FFUTray type for MAUPanel TypeModels

SAAF Chemical Filter Classification


IER media

AC media Extremely lowLowExtremely lowDust emission

NoNoNo

FlexibleStd. 610*610*150T

Flexible

552*430*185T630*335*155T

FlexibleAvailable size

YesNoNoExchangeable media

AluminumAluminumAluminumFrame material

Yes beadYes beadYes beadIon exchange resin

Yes beadYes beadYes beadActivated carbon media

~ 35 Pa~120 Pa~ 50 PaPressure drop

~ 0.5 m/s~ 2.5 m/s~ 1 m/sRelated face velocity

Typically > 95%Typically > 95%Typically > 95%Initial efficiency

Box TypeTrays for MAU & RAUMini-Pleated TypeModels

SAAF Chemical Filter Classification


● Panel Type

Panel type filters have been developed for installation in or on a fan filter unit (FFU) and for stacking on ULPA filters.

NoIER media

Extremely lowAC mediaDust emission

Std. 610*1200*60TFlexible

Available size

NoExchangeable media

AluminumFrame material

Yes beadIon exchange resin

Yes beadActivated carbon media

~ 35 PaPressure drop

~ 0.5 m/sRelated face velocity

Typically > 95%Initial efficiency

Panel TypeModels


Multi-tray type filters are designed for installation in high air speed areas where the air speed is ~2.5m/sec, such as inside an make-up air unit (MAU)

NoIER media

LowAC mediaDust emission


Available size

YesExchangeable media

STSFrame material


Yes pellet/granularActivated carbon media

Depends on mediaPressure drop



Tray Type (MAU)Models

● Tray Type for MAU


Muti-tray type filter have been developed for incorporation into various types of semiconductor production equipment, and for stacking on FFU.

NoIER media










Tray Type (FFU)Models

● Tray Type for FFU


Mini-pleated type filters have been developed for incorporation into various types of semiconductor production equipment, FFU and forstacking on ULPA filters

NoIER media


552*430*185T630*335*155T ,Flexible

Available size



Yes, beadIon exchange resin

Yes, beadActivated carbon media


~ 1 m/sRelated face velocity


Mini-Pleated TypeModels

● Mini-Pleated Type


NoIER media

LowAC mediaDust emission


Available size





~120 PaPressure drop



Multi-Trays (MAU & RAU)Models

Multi-tray type filters are designed for installation in high air speed areas where the air speed is ~2.5m/sec, such as inside an make-up air unit (MAU) and recirculation air unit (RAU)

● Multi-Tray Type for MAU & RAU

CAFILDEX Chemical Filter Classification


NoIER media



YesExchangeable media







Box TypeModels

Box type filters have been developed for installation on a fan filter unit (FFU) and for stacking on ULPA filters.

● SAAF Box Type

CAFILDEX Chemical Filter Classification


Pressure Drops Test Results

● SAAF Panel Type ● SAAF Tray Type for MAU

0.2 0.3 0.4 0.5 0.60

1

2

3

4

5

Pre

ssur

e D

rop

, [m

mA

q]

Face Velocity , [m/s]0.5 1.0 1.5 2.0 2.5 3.0

0

5

10

15

20

Pre

ssur

e D

rop

, [m

mA

q]

Face Velocity , [m/s]

Filter Size: 610*1200*60T Filter Size: 610*610*450T



● SAAF Tray Type for FFU ● SAAF Mini-Pleated Type

0.2 0.3 0.4 0.5 0.6 0.70

1

2

3

4

5

6

Pre

ssur

e D

rop

, [m

mA

q]

Face Velocity , [m/s]0.5 1.0 1.5

0

2

4

6

8

10

Pre

ssur

e D

rop

, [m

mA

q]


Filter Size: 510*510*350T Filter Size: 552*430*185T



● SAAF Multi-Tray Type for MAU & RAU

● SAAF Box Type

0.2 0.3 0.4 0.5 0.6 0.70

1

2

3

4

5

6

Pre

ssur

e D

rop

, [m

mA

q]

Face Velocity , [m/s]0.5 1.0 1.5 2.0 2.5 3.0

0

2

4

6

8

10

12

14

16

Pre

ssur

e D

rop

, [m

mA

q]


Filter Size: 592*592*150T Filter Size: 640*640*470T(4ft * 4 ft FFU)


Acceleration Test& Expected Life Span Result for NH3

Test Conditions▪ Media size : 38T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ NH3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 100 200 300 400 500 600 700 8000

10

20

30

40

50

60

70

80

90

100

NH

3 R

emov

al E

ffici

ency

, [%

]

Time , [min]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth

s]Concentration , [ppbv] ; at Breakthrough 80%


Acceleration Test& Expected Life Span Result for NH3

Test Conditions▪ Media size : 25T, 4.5ppi▪ L.V. : 0.45 m/s▪ Sample : Ion exchange media▪ NH3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 2 4 6 8 10 12 14 160

10

20

30

40

50

60

70

80

90

100

NH

3 R

emov

al E

ffici

ency

, [%

]

Time , [hours]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for NO2

Test Conditions▪ Media size : 40T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ NO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 100 200 300 400 5000

10

20

30

40

50

60

70

80

90

100

NO

2 R

emov

al E

ffici

ency

, [%

]

Time , [min]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for SO2

Test Conditions▪ Media size : 30T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ SO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 100 200 300 400 500 600 7000

10

20

30

40

50

60

70

80

90

100

SO

2 R

emov

al E

ffici

ency

, [%

]

Time , [min]0 5 10 15 20 25 30 35 40 45 50

0

10

20

30

40

50

60

70

80

90

100

Expe

cted

Life

Spa

n , [

mon

ths]

Concentration , [ppbv] ; at Breakthrough 80%


Acceleration Test& Expected Life Span Result for SO2

Test Conditions▪ Media size : 20T, PU-Foam ▪ L.V. : 0.65 m/s▪ Sample : Ion Exchange Resin media▪ SO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 1 2 3 40

10

20

30

40

50

60

70

80

90

100

SO

2 R

emov

al E

ffici

ency

, [%

]

Time , [hours]0 10 20 30 40 50

0

10

20

30

40

50

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for O3

Test Conditions▪ Media size : 20T, #20~40, PU-Foam media ▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ O3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 200 400 600 8000

10

20

30

40

50

60

70

80

90

100

O3

Rem

oval

Effi

cien

cy ,

[%]

Time , [min]0 10 20 30 40 50 60 70 80 90 100

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for PGMEA

Test Conditions▪ Media size : 23T, Ø2mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ PGMEA Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 200 400 600 800 1000 1200 14000

10

20

30

40

50

60

70

80

90

100

PG

ME

A R

emov

al E

ffici

ency

, [%

]

Time , [min]0 50 100 150 200

0

10

20

30

40

50

Expe

cted

Life

Spa

n , [

mon

ths]

Concentration , [ppbv] ; at Breakthrough 80%


Acceleration Test& Expected Life Span Result for Toluene

Test Conditions▪ Media size : 23T, Ø2mm pellet▪ L.V. : 0.65 m/s▪ Sample : Activated Carbon▪ Toluene Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 200 400 600 800 1000 12000

10

20

30

40

50

60

70

80

90

100

Tolu

ene

Rem

oval

Effi

cien

cy ,

[%]

Time , [min]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for HCHO

Test Conditions▪ Media size : 60T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnated Activated Carbon▪ HCHO Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 100 200 300 400 500 6000

10

20

30

40

50

60

70

80

90

100

HC

HO

Rem

oval

Effi

cien

cy ,

[%]

Time , [min]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth



Acceleration Test& Expected Life Span Result for H2S

Test Conditions▪ Media size : 30T, Ø3mm granular▪ L.V. : 0.65 m/s▪ Sample : Impregnated Activated Alumia▪ H2S Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH

0 50 100 150 200 250 300 350 400 4500

10

20

30

40

50

60

70

80

90

100

H2S

Rem

oval

Effi

cien

cy ,

[%]

Time , [min]0 10 20 30 40 50

0

10

20

30

40

50

60

70

80

90

100

Exp

ecte

d Li

fe S

pan

, [m

onth


chemicalfilters for clean environments

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