class safety training fy14 - rochester institute of … · smfl class safety training basic...

Safety in the Semiconductor & Microsystems Fabrication Laboratory at RIT

Class Safety Training2013-20142013-2014

Thomas Grimsley Operations Manager - SMFL

82 Lomb Memorial DriveRochester, NY 14623-5604

Tel (585) 475-2912, Fax (585) 475-4250

http://www.smfl.rit.edu

SMFL Class Safety Training

Why am I here or why am I reading this?

Entire Fab burns down Improper storage of solvents

Accidents happen all the time. Do you know what to do and how to prevent them?

Accident waiting to happen

“But what does seem clear is that academic labs are more dangerous than those in industry, with a more relax ed approach to safety.”

"We find that the accident rate [in universities] i s 10 to 50 times greater than in the chemical industry," James Kaufm an, president of the Laboratory Safety Institute in Natick, Massa chusetts. "

She looks good with an eye patch – will you?


Objectives of this training

• Give students that are using the SMFL in a class setting, a basic

understanding of SMFL safety policies and procedures.

• Introduction to the SMFL

• Basic Cleanroom Etiquette• Basic Cleanroom Etiquette

• Basic Lab Rules

• Emergency Procedures

• Chemical Hazards & Communication

• Chemical Safety


Introduction


Introduction - SMFL Safety Policy

The Staff and Management of the SMFL, along with other RIT groups

have put into place controls, procedures and policies to provide a

safe working environment for all SMFL users

It is the responsibility of the SMFL users to be familiar with the

information in this document and conduct themselves in a information in this document and conduct themselves in a

professional and safe manner at all times in the lab.

Users that violate the safety and operating rules of the SMFL could

be denied further access to the lab at the sole discretion of the

management.


Introduction - The SMFL

• SMFL - Semiconductor & Microsystems Fabrication Laboratory

• We are an independent organization within the College of Engineering.

• Who are our customers?

• RIT undergraduates from Microelectronic, Electrical, Mechanical, and others

• RIT graduate students from Electrical Eng, Mechanical Eng, Materials

Science, Microsystems, Imaging Science

• Graduate students from other universities

• Industrial users


Introduction - Class Training

Class Safety Training – what you are doing now.

• For SMFL users that will be in the cleanroom as part of a class/lab.

• Covers basic safety information and procedures in the SMFL.

• Enables the user to work in the SMFL under the supervision of an instructor.

• Self paced presentation, self test online. Pickup safety badge in cleanroom when test is

Safety Trainingrequired for

everyone every year!

• Self paced presentation, self test online. Pickup safety badge in cleanroom when test is

successfully passed.

• Test is found in RIT’s MyCourses

• Not appropriate for unsupervised use of tools. User may not perform any

operations/processing independently.

• May only be in cleanroom with instructor/TA.

• Good for one year.


Basic Cleanroom Etiquette



Even though we are a teaching cleanroom, users should be aware of basic

cleanroom rules.

• Cleanrooms are designed to be “clean”.

– But are only as good as the practices in them.

– So the cleanroom environment is not just the room, but the personnel,

materials, tools and practices as well.materials, tools and practices as well.

– People are the primary source of particles/contamination in the

cleanroom.

– Your cleanroom gown is designed to keep the cleanroom clean and

will not protect you from chemicals.

– Your cleanroom gloves will provide some measure of protection from

chemicals but are thin and can tear.

• We wear larger, thicker gloves for chemical processing



• Behavior & Practices in the cleanroom

– Clean Room – Clean shoes – shoe cleaner is for light debris, not

muddy, grassy shoes. Leave your dirty shoes outside.

– Walk slowly – avoid quick movements.

– Do not lean over substrates / work pieces.

– Do not open any door to the outside (unless an emergency)

– Use appropriate tooling to handle materials.

– Materials brought into the cleanroom should be prepped in the outer

zones – wiped down, remove outer wrapping.

– Should your gown become soiled/dirty – change it.

– Do not open your gown once you are in the cleanroom.

– Make sure garments are tucked in – hair and beards are covered.

– Cell phones should be used in back hall & gowning. Change gloves

after using cell phones – they are very dirty.


Basic Lab Rules


Basic Lab Rules

1. All SMFL users will take some kind of safety training every year.

2. The best safety precaution (Most Important) is to understand exactly what you are doing and the potential dangers. If you do not understand something or have any questions, STOP AND ASK.

3. Protective clothing is required when working with chemicals and certain pieces of equipment.• No sandals / open toed shoes. Shorts, etc are not recommended.• Safety glasses with side shields are required at all times that meet the ANSI Z87 standard.

4. People with Class safety badges are required to be with their class.

5. Students with Class safety badges can only operate SMFL equipment under the supervision of Instructors or Teaching Assistants that are certified on that tool.

6. Users are expected to be proactive• Know where the safety equipment is, ask about the hazards of the chemicals you are using

7. All chemicals (being stored or in process ) are to be labeled all the time.

8. Inform SMFL staff of any safety and/or equipment problems.

9. Lab phones are for emergency/staff use only.

10. No food or drink in the lab or gowning room.


Basic Lab Rules

Lab Phones

Main cleanroom hallway

• Between Wet Etch 1 & 2

Thermal / CVD Room

• Near water cooler


Lab Emergencies


Lab Emergencies

In the SMFL, we have defined six emergencies.

1) Fire or Smoke Detection – Building alarm will sound

2) Toxic Gas Detection – Building alarm will sound

• There are several toxic gases in the SMFL. Most are located at the northeast end of the

building.

• There is one toxic gas (chlorine) that is in the service chase next to gowning. There are yellow • There is one toxic gas (chlorine) that is in the service chase next to gowning. There are yellow

alarm lights just for the chlorine detection.

3) Scrubber failure – Building alarm will sound

• The scrubber provides our exhaust for the wet benches and toxic gas storage.

4) Chemical Spill/Exposure

• The spill is on you or on the bench/ground

5) Hydrofluoric Acid Spill / Exposure

6) Power Failure


Lab Emergencies – General Procedure

2) Call RIT emergency number 333 (or 53333). Report emergency, nature of emergency and location (building and room number). Cleanroom phones are located in between Wet 1/Wet Etch 2 & by LPCVD tool in diffusion.

If the emergency involves HF acid, report the potential lethal nature of HF and the need for immediate medical treatment at a hospital.

1) Initiate Appropriate Response to emergency such as evacuation, first aid, eyewash, shower, fire alarm pull box, etc.

5) Fill out an accident report if applicable.

immediate medical treatment at a hospital.

3) Be available to meet with the RIT emergency crew and tell them what happened. If a chemical is involved, provide the MSDS to the emergency crew.

4) Contact SMFL Staff and Dr. Karl Hirschman – SMFL Director.


Lab Emergencies – Appropriate Responses – Building Alarm

A building alarm will sound for a fire, toxic gas detection or a scrubber failure.

1) Appropriate Response to Building Alarm, all users are to:

1) Put down their work. Leave empty handed.

2) Do not stop to take off your gown.2) Do not stop to take off your gown.

3) Immediately leave the building through the nearest exit – go through the emergency doors on the bays in the main hallway if necessary.

4) Avoid the NE exit of the building. Gas Storage area is located there.

• Avoid Dry Etch Bay & Gowning exits if Yellow Flashing Light is on – Chlorine gas detection

5) Meet outside under the bridge to Golisano for headcount.


Lab Emergencies – Building Exits

There are several exits out of the SMFL

In general, moving west out the lab is preferred as most of the toxic gases are located on the east side of the building

• Leave through the northwest exit

• Leave through gowning

• Leave through the exits on the south walls of the processing bays.

• Leave through the exit in Surface Analysis north into the IT Collaboratory

Whichever way you leave, meet under the bridge to the Golisano building.


Lab Emergencies – Building Exits

Northeast Exit

Northwest Exit

Exit through IT Collaboratory

X

Main Entrance - Gowning

Preferred Exit Path


Lab Emergencies – Northwest Exit

To Gowning

Because most of the toxic gases are located at the east end, when the building alarm goes off – head west. Towards the Go lisano bldg

Northwest Lab Exit – Interior View Northwest Lab Exit – Looking out to outer hallway

The Northwest exit in the back hall is one of our p referred exits


Lab Emergencies – Appropriate Responses – Building Alarm

Building 17 Northwest Exit

SMFL Lab Northwest Emergency Exit

West Hallway


Lab Emergencies – Gowning Exit

If the yellow alarm is going off in gowning – back o ut and find an alternate route.

Gowning Exit

Yellow Alarm

The yellow alarm is for our chlorine detection syst em. The only toxic gas not on the east side of the SMFL.


Lab Emergencies – South Exits of Processing Bays

Exit through Diffusion Exit through Photo 1 Exit through Dry Etch


Lab Emergencies – North Exit through IT Collaboratory

This exit found in Surface Analysis room in Back Hallway of SMFL

Exit leads to the front (North side) Building 17Exit leads to the front (North side) Building 17


Lab Emergencies – Appropriate Responses – Chemical Spill/Exposure

Appropriate Response to Chemical Spill

� Inform SMFL staff – they will do cleanup.

� Let other lab users know about the situation

Appropriate Response to Chemical Exposure, all users are to:Appropriate Response to Chemical Exposure, all users are to:

�Immediately provide first aid.

�Eyewash/shower for at least 15 minutes. Located in main cleanroom hall in between the processing bays.

�Remove contaminated clothing. Not a time for modesty, clothing will hold the chemical next to your body.


Lab Emergencies – Appropriate Responses – Chemical Spill/Exposure

Locations of Main Safety Showers & Eyewashes

Between Dry Etch & Photo1

Between Photo1 & Photo2Between Photo2 & Diffusion

These are all found in the main cleanroom hallway.


Lab Emergencies – Appropriate Responses – Fluorine Poisons

The SMFL has some chemicals that pose a special hazard.

• Hydrofluoric Acid

• Pad Etch

• Buffered Oxide Etch – BOE

• Freckle Etch

All of these solutions contain chemistry that represent a poisoning danger.

• If these solutions get on your skin, you have been exposed to fluorine which is a poison and is lethal.

• These solutions are absorbed directly through unbroken skin and deplete calcium in your body. Death occurs from cardiac arrest and respiratory failure



HF, Pad Etch, BOE, Freckle Etch are dangerous because

1. They look like water.

3. They are absorbed through unbroken skin.

2. They are not initially painful upon contact*.

4. They deplete calcium and destroy tissue.

* For the weaker solutions typically used in the SMFL

4. They deplete calcium and destroy tissue.

5. They are potentially lethal – treat as toxic.



1) Appropriate Response to HF, Pad Etch, BOE Freckle Etch Exposure:� IMMEDIATELY rinse the contacted skin area with copious quantities of water, being

careful to wash the acid away from other parts of your body, especially finger/toe nails.

� Remove all clothing exposed to the HF.

� Continue rinsing for ~ 2 minutes. Get the HF off the skin/clothes. Do NOT dry the skin.

� Squeeze the Calcium Gluconate (Calgonate) Gel on the contacted area, cover the entire area with gel. area with gel.

� Use a double gloved hand to spread the gel, and gently massage it into the skin. Take the gel with you and continue to apply fresh gel while enroute to the Emergency Room.

� For burns to the hands, retain gel in a glove.

� Elevate burned extremities, if possible.

� Immediately go to the nearest Emergency Room. Have MSDS.

� Tell them you have Hydrofluoric Acid on you. Have MSDS.

� Continue to apply fresh gel (and gently massage it in) while waiting.



HF first aid stations are located in Wet Etch I & II, on top of the solvent cabinets

HF MSDS

Calcium Gluconate Gel – source of calcium to neutralize fluorine in your body


Lab Emergencies – Appropriate Responses – Power Failure

In the event of a building power failure,

• The lights will go off and then our backup generator will kick in.• Some lab lights will be on.• The chemical exhaust scrubber will stay on.• The fire and gas detection system will stay on.

Appropriate Response to Power Failure, users are to:Appropriate Response to Power Failure, users are to:

� Put work station in safe condition.� Exit the lab through gowning. Degown.� SMFL staff will inform you when you can go back into the lab.

� Power failures are bad for the tools and it may take several hours to get the lab operational again.


Chemical Hazards & Communication



Working in the SMFL may involve the use of hazardous chemicals.

Types of Chemical Hazards – Health, Physical, or DualChemical hazards can have acute (short term) or chronic (long term) effects.Materials can also pose a dual hazard – Acetic acid is a corrosive and a combustible.

Health HazardsCorrosive - any liquid or solid that has a pH lower than 2 or greater than 12.5 or Corrosive - any liquid or solid that has a pH lower than 2 or greater than 12.5 or

has a severe corrosive rate on steel. Can cause serious skin burns. Many of our acids and bases are corrosive.

Irritant – non-corrosive chemicals that cause reversible inflammatory effects (swelling and redness).

Toxic - substances that are poisonous to human beings or other animals. Some are poisonous to the touch; others are harmful if inhaled; still others are toxic only if swallowed. Some produce immediate sickness, while others may not cause obvious symptoms for months or even year. Hydrofluoric Acid.

Carcinogen - substances that are capable of causing cancer.



Working in the SMFL may involve the use of hazardous chemicals.

Physical HazardsFlashpoint - the minimum temperature at which a substance gives off flammable

vapors which in contact with spark or flame will ignite.Flammable - any liquid having a flash point below 100 degrees F.Combustible - any liquid having a flash point above 100 degrees F.Pyrophoric - Any material that ignites spontaneously in dry or moist air at or below Pyrophoric - Any material that ignites spontaneously in dry or moist air at or below

130 degrees C.Oxidizer – A substance which will support combustion or will combust on contact with

other materials – do not mix with flammables – can react with metals – doesn’t always have oxygen. Gains electrons.

Reactive – Any substance which releases great amounts of energy when exposed to other materials or with the addition of energy. (i.e. reacts violently with water or unstable).

Unstable – Substances which will explode, violently decompose or polymerize with a small initiating force.



Organic Solvents• Represent both a physical and a health hazard.

Examples would be acetone, alcohols, paint thinner, turpentine, photoresist is mostly solvent.

Are potentially hazardous because,1. They are generally flammable.2. They are always stored separately from oxidizers (some acids)2. They are always stored separately from oxidizers (some acids)3. They can be absorbed through unbroken skin.4. They target the organs and nervous system, stored in body where they are

toxic.Some are teratogens or carcinogens – read MSDS.

Represent a significant fire hazard.One gallon of acetone could do significant damage to the lab.

React violently/explosively with chemical oxidizers – peroxide, nitric acid.

Spills need to be cleaned up immediately.Some vapors are lighter than air, some are heavier.


Chemical Hazards & Communication - MSDS

Material Safety Data Sheets (MSDS)

• A packet of information designed to give the worker/operator a basic understanding of the chemical they are working with.

• Contains information on;

• Makeup of the chemical solution – listed by percentages.

• Main Hazards – Toxic, flammable, etc

Material

Safety

Data

Sheets• Main Hazards – Toxic, flammable, etc

• First aid measures & safety equipment

• Physical properties & stability – flash point, pH, reacts with oxidizers, etc

• Disposal considerations & transport regulations

• Reading the MSDS for a chemical is a great first step in understanding the dangers of that chemical.

• MSDS’s are located on the SMFL website – use the computers in Gowning, Wet Etch 1 and Wet Etch 2 to access them.

Sheets

Signs near computersfor accessing MSDS


Chemical Hazards & Communication - MSDS

Main Entrance

Material

Safety

Data

Sheets


Special Hazards


Special Hazards – Fluorine Poisons

The SMFL has some chemicals that pose a special hazard.

• Hydrofluoric Acid

• Pad Etch

• Buffered Oxide Etch – BOE

• Freckle Etch

All of these solutions contain chemistry that represent a poisoning danger.

• If these solutions get on your skin, you have been exposed to fluorine which is a poison and is lethal.

• These solutions are absorbed directly through unbroken skin and deplete calcium in your body. Death occurs from cardiac arrest and respiratory failure


Special Hazards – Tetramethyl Ammonium Hydroxide - TMAH

TMAH is used in two main areas of semiconductor processing.

• In higher concentrations (25%) it is used as a crystal etch of silicon – similar to KOH etching.

• High concentration TMAH is deadly and has caused many deaths – no antidote.

• In lower concentrations (2.4%), it is used as a positive photoresist developer.

The SMFL does not have high concentration TMAH.

The lab does have CD-26, a positive photoresist developer that has a 2.4% TMAH concentration.

Even though there are no reported cases of death from exposure to 2.4% TMAH, care should be taken when using positive photoresist developer.

• TMAH acts to paralyze the diaphragm – stopping breathing

• Corrosive, high pH

• No known antidote.


Chemical Safety


Chemical Safety

Working in the SMFL may involve the use of hazardous chemicals.A hazardous chemical may be:

ToxicCorrosiveFlammableReactive

How do you protect yourself from exposure to hazardous chemicals?

Three levels of protection.

The first and primary way of protection is knowledge . Know the hazards of the chemicals you are working with.

Read the Material Safety Data Sheets (MSDS)!


Chemical Safety

Second level of protection - Exhausted Hoods/Benches• All chemical operations to be done at exhausted benches.

• Proper chemical gear required – Aprons, gloves, face shield

• Don’t lean over tanks or stick your head under the hood.

Benches should be clean and dry before and after your use.


Chemical Safety

Chemical containers are labeled.

Chemical containers are well inside hood.

Bench is not cluttered / crowded.

Bench is dry.

“A good looking bench”

Clean bench = Happy bench


Chemical Safety

Third Level of Protection - Personal Protection Equi pment (PPE)

Found in Wet Etch Bays.

• Put Apron on first – adjust to cover chest

• Put Face shield on next – adjust by rear knob to fit head.

• Put chemical gloves on last. Do not touch face shield or face with gloves on.face shield or face with gloves on.

• Remove in reverse order.

• Rinse off chemical gloves an dry before putting them away.


Chemical Safety

Third Level of Protection - Personal Protection Equi pment (PPE)

Chemical gloves – go on last as they may still have chemistry on them.

Required at all wet benches and for all manual chemical processes

If you are in front of a bench with chemistry – you are wearing PPE! This includes observers.

To be kept in Wet Etch Areas . To be kept in Wet Etch Areas .

• Do not walk around the lab or cross over to lithography with your PPE on.

• Do not use computer or phones with chemical gloves on!

• Don’t touch your face with gloves on.

PPE is either on your body or hung up.

The PPE is considered to be your last line of defense . If something splashes on your PPE, you did something wrong.

People can get a false sense of security from wearing PPE. Remember, your best defense is your knowledge of the chemicals you are working with.


Chemical Safety – Chemical Labeling

Storage & Labeling of Chemicals

All chemicals to be labeled – all the time. Current requirements are for name of chemical and indication of dangers involved.

Secondary containers – use labels in lab.Stored Chemicals – Appropriate containers may be obtained from SMFL staff.

• DO not use food/beverage containers for chemical storageChemicals in Use

Chemical in use labels available in wet etch areas.Free standing signs for common chemicals.

Chemical:___________

Date /Time for Completion:_____________

Date:__________________

Name:__________________

Chemical In Use

Project:_______________

Chemical:___________

Date /Time for Completion:_____________

Date:__________________

Name:__________________

Chemical In Use

Project:_______________

NFPA Diamond


Chemical Safety – Chemical Labeling – New GHS System

In 2015 – a new system of chemical labeling will be rolled out. Requirement is for training to be done by 12/2013

Product Name or Identifier

Signal Word

Physical, Health,

New GHS chemical label will have these Physical, Health,

Environmental Hazards

Supplemental Information

Precautionary Measures

First Aid Statements

Company Name/Address/Phone

label will have these elements.

Much more information than what is currently required


Chemical Safety – Chemical Labeling – New GHS System

Currently acceptable label

Will

GHS compliant label

Will transition

to

this label


Chemical Safety – Chemical Waste

Once you are done with the chemistry, where it goes depends on what it is.• Organic solvents

• Dispose of in organic solvent waste bottles in solvent cabinet.• Do not pour down sinks

• Acid & Bases not used for etching metal• Pour down chemical sinks with plenty of running water once cool• Chemical sinks in the SMFL go to a acid/base neutralization tank.• Chemical sinks in the SMFL go to a acid/base neutralization tank.

• Acids & Bases used for etching metals• Get disposal container from SMFL• Do not pour down sinks.

• Chemical mixtures – incompatible waste streams• Get disposal container from SMFL• Do not pour down sinks.

Know what you are disposing of – get assistance from your instructor,

don’t assume.


To summarize

If you don’t know what you are doing or are unsure – stop and ask.

Safety glasses at all times.

Know the exits for the lab.

Protective gear when working with chemicals.

Chemical work at exhausted benches.

All chemicals are labeled.

Know how to dispose of your chemistry – seek help – don’t assume.

A clean lab is a happy lab.


Test Your Knowledge


What’s wrong? #1


What’s wrong? #1

Joking around with your friends can be fun but not in a lab that has chemicals that are “death in a bottle”. Concentrated HF.

There is no horseplay or unprofessional behavior in the SMFL at all.


What’s wrong? #2


What’s wrong? #2

How can you do your work when all about is cluttered and disorganized.

This bench is an accident waiting to happen.

- Unlabeled chemicals- Unlabeled chemicals

- Chemicals too close to the edge of the bench – bad airflow

- Chemistry being stored on the bench and not placed back in the cabinets

General clutter leads to accidents and spills


What’s wrong? #3


What’s wrong? #3

Chemicals pose both physical and health hazards. Wouldn’t you want to protect yourself from these dangers?

This person is putting their head under the fume hood thus disrupting the airflow that takes the chemical fumes away and thereby exposing oneself.airflow that takes the chemical fumes away and thereby exposing oneself.

They are also not wearing any chemical safety gear. PPE


What’s wrong? #4


What’s wrong? #4

Being in a hurry to do your work does not excuse bad behavior in the SMFL

This person is wearing their safety gear (apron) while working at a microscope outside of wet etch.

This can leave traces of chemistry in areas where it shouldn’t be, thereby possibly exposing others without protection.

The PPE stays in the Wet Etch bays. It may take longer to do things the right way but there is a reason for it.


What’s wrong? #5


What’s wrong? #5

Do you enjoy the acrid, biting smell of hot acids? How do you feel about emergency rooms?

This person is leaning over one of the chemical tanks.

This can expose you to chemical fumes as you are disrupting the exhaust This can expose you to chemical fumes as you are disrupting the exhaust airflow.

Stand up and let the hood do it’s work.


What’s wrong? #6


What’s wrong? #6

What is it?

Is it water? Is it hydrofluoric acid? Do you feel lucky?

Why isn’t it under a fume hood?

All chemicals are labeled all the time.

All chemicals are at the benches or under the hoods, all the time.


What’s wrong? #7


What’s wrong? #7

Where does the chemical gear (PPE) go when you are through with it?

Where does chemistry belong?

The chemical gear is on your body or hung properly.

No chemicals should be on the center white work benches


What’s wrong? #8


What’s wrong? #8

What should you be using to handle the wafers?

Never touch the wafers with your hands. Use the tweezers or vacuum wands provided.

You are putting contaminants on the wafer that will hurt the performance of the devices and possibly contaminate the processing tools.


What’s wrong? #9


What’s wrong? #9

What is the dirtiest thing you own?

Why would you stand in front of a chemical bench without protecting yourself?

What if someone just mixed incompatible chemicals that are close to reacting violently?

Do not use your cell phone in the cleanroom. They are very dirty.

If you are in front of a bench with chemicals on it, put on your PPE. Otherwise, back away from the bench.


Thank you for your attention.

There is a lot of information in this presentation, but our goal is to provide you with a safe working environment.

Our job is to make sure that the tools are working properly and that the information and safety equipment you need is available.

Your job is to learn and understand the dangers of what you are doing.

Review this material as much as you need. If you have further questions, or are unsure about this material, please contact T. Grimsley.

Your next step is to take and pass the SMFL Class Safety Exam on RIT’s MyCourses.

class safety training fy14 - rochester institute of … · smfl class safety training basic...

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