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CMQ-V SeriesDigital Mass Flow Controller

User's ManualCommunications

No. CP-SP-1197E

Thank you for purchasing the CMQ-VSeries Digital Mass Flow Controller.

This manual contains information forensuring correct use of the CMQ-VSeries communication functions.

This manual should be read by thosewho design and maintain devices thatuse the CMQ-V Series communicationfunctions. Be sure to keep this manualnearby for handy reference.

If it is necessary to change the parameters of the CMQ-V Series frequently bycommunication, write data at addresses of RAM. The guaranteed data write count atthe EEPROM addresses is limited to 100,000 times.Note that the data in RAM is cleared, and the data in EEPROM is copied on RAM if thepower supply to the CMQ-V Series interrupted.

IMPORTANT

Micro FlowTM

, µFTM

, CMQTM

are trademarks of Azbil Corporation in Japan.

NOTICE

© 2007-2012 Azbil Corporation All Rights Reserved.

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbid-den. The information and specifications in this manual are subject tochange without notice.

Considerable effort has been made to ensure that this manual is freefrom inaccuracies and omissions. If you should find an error or omis-sion, please contact Azbil Corporation.

In no event is Azbil Corporation liable to anyone for any indirect, specialor consequential damages as a result of using this product.

Please read the "Terms and Conditions" from the following URL beforeordering or use:

http://www.azbil.com/products/bi/order.html

About IconsSafety precautions are for ensuring safe and correct use of this product, and forpreventing injury to the operator and other people or damage to property. Youmust observe these safety precautions. The safety precautions described in thismanual are indicated by various icons.The following describes the icons and their meanings. Be sure to read andunderstand the following descriptions before reading this manual.

Examples

i

Triangles warn the user of a possible danger that may be caused bywrongful operation or misuse of this product.These icons graphically represent the actual danger. (The example onthe left warns the user of the danger of electrical shock.)

White circles with a diagonal bar notify the user that specific actions areprohibited to prevent possible danger.These icons graphically represent the actual prohibited action. (Theexample on the left notifies the user that disassembly is prohibited.)

Black filled-in circles instruct the user to carry out a specific obligatoryaction to prevent possible danger.These icons graphically represent the actual action to be carried out.(The example on the left instructs the user to remove the plug from theoutlet.)

SAFETY PRECAUTIONS

CAUTION Cautions are indicated when mishandling this product might

result in minor injury to the user, or only physical damage to

this product.

ii

CAUTIONUse the CMQ-V Series within the operating ranges recommended in thespecifications of user's manual, CP-SP-1204E and CP-SP-1205E(temperature, humidity, voltage, vibration, shock, mounting direction,atmosphere, etc.). Failure to do so might cause malfunction.

Be sure to turn the power off before connecting the controller. Failureto do so might cause malfunction.

Wire this controller in compliance with the predetermined standards.Also wire the controller with specified cables and recognizedinstallation methods.Failure to do so might cause malfunction.

Make sure that wire scraps, chips or water do not enter inside the caseof the controller. Failure to heed this caution may lead to malfunction.

If there is a risk of a power surge caused by lightning, use AzbilCorporation's SurgeNon to prevent possible fire or equipment failure.

Be sure to check that the wiring is correct before turning the power on.Incorrect wiring could cause damage or malfunction.

Do not disassemble the controller. Doing so might cause malfunction.

iii

CMQ-V Series Digital Mass Flow ControllerManual No. CP-SP-1204E

First-time users of the CMQ-V Series, and those in charge of maintenanceor hardware design for incorporating a CMQ-V Series controller in instru-mentation should read this manual.

This manual outlines the product, tells how to install, wire, and incorporatethe product into instrumentation, and describes its operation, inspection andmaintenance, troubleshooting, and hardware specifications.

CMQ-V Series Digital Mass Flow Controller (for Hydrogen and Helium Gases)

Manual No. CP-SP-1205E

First-time users of the CMQ-V Series (for hydrogen and helium gases), andthose in charge of maintenance or hardware design for incorporating aCMQ-V Series controller (For hydrogen and helium gases) in instrumenta-tion should read this manual.

This manual outlines the product, tells how to install, wire, and incorporatethe product into instrumentation, and describes its operation, inspection andmaintenance, troubleshooting, and hardware specifications.

Digital Mass Flow Controller CMQ-V Series: Communications Manual No.CP-SP-1197E

This manual.Those using the communications functions of the CMQ-V series shouldread this manual.This manual describes an outline of communications, wiring,communications procedures, CMQ-V series communications data, trouble-shooting, and communications specifications.

The Role of This Manual

Four manuals have been prepared for the CMQ-V Series. Read the manual according to your specific requirements.

The below lists all the manuals that accompany the CMQ-V Series and gives a brief outline of the manual. If you

do not have the required manual, contact the azbil Group or your dealer.

MLP100 Loader Package for CMQ-V Series Digital Mass Flow ControllerManual No. CP-SP-1216E

This manual is supplied with the MLP100 Loader Package.

The manual describes the software used to make various settings for CMQ-V Series using a personal computer. Personnel in charge of design or set-ting of a system using CMQ-V Series must thoroughly read this manual.The manual describes installation of the software into a personal computer,operation of the personal computer, various functions, and setup proce-dures.

Organization of This User's Manual

iv

This manual is organized as follows:

Chapter 1. OUTLINEThis chapter briefly describes communication functions of the CMQ-VSeries.

Chapter 2. WIRINGThis chapter describes RS-485 wiring methods to make a communicationlink between the CMQ-V Series and other instruments.

Chapter 3. SETTINGThis chapter describes CMQ-V Series communication settings.

Chapter 4. COMMUNICATION PROCEDUREThis chapter describes communication procedures, message configuration,data read/write and signal timing operations.

Chapter 5. COMMUNICATION DATA TABLEThis chapter provides various data address tables for communications onthe CMQ-V Series.

Chapter 6. COMMUNICATION PROGRAM FOR MASTER STATIONThis chapter gives precautions for programming and an example of a com-munication program for the CMQ-V Series.

Chapter 7. TROUBLESHOOTINGThis chapter describes checkpoints to diagnose failures in CMQ-V Seriescommunications.

Chapter 8. SPECIFICATIONSThis chapter lists communication specifications for the CMQ-V Series.

APPENDIXThe appendix provides code tables.

Conventions Used in This Manual

The following conventions are used in this manual:

Handling Precautions: Handling Precautions indicate items that the user should pay attention

to when handling the CMQ-V Series.

Note : Notes indicate useful information that the user might benefit byknowing.

(1), (2), (3) : The numbers with the parenthesis indicate steps in a sequence orindicate corresponding parts in an explanation.

DISP key : This indicates a key on the setup display.

Contents

v

SAFETY PRECAUTIONSThe Role of This ManualOrganization of This User's ManualConventions Used in This Manual

Chapter 1. OUTLINE

Features • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 1

Chapter 2. WIRING

2-1 RS-485 Connection • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 32-2 Connector Pin Layout of the CMQ-V Series• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 4

Chapter 3. SETTING

Setting method of communication functions • • • • • • • • • • • • • • • • • • • • • • • • • • • • 6 Setting items of communication functions• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 6

Chapter 4. COMMUNICATION PROCEDURE

4-1 Outline of Communication • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 7 Communication procedures • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 7

4-2 Message Structure • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 8 Message structure • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 8 Data link layer • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 8 Application layer • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 10

4-3 Description of Commands • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 11 Continuous data read command (RS command) • • • • • • • • • • • • • • • • • • • • • • • 11 Continuous data write command (WS command)• • • • • • • • • • • • • • • • • • • • • • • 12 Continuous data read command (RD command) • • • • • • • • • • • • • • • • • • • • • • • 13 Continuous data write command (WD command) • • • • • • • • • • • • • • • • • • • • • • 14

4-4 Termination Code Table • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 15 Normal and warning termination• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 15 Error termination • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 15

4-5 Timing Specifications • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 16 Timing specifications for instruction and response message • • • • • • • • • • • • 16 RS-485 driver control timing specifications • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 16 Other precautions • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 17

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Chapter 5. COMMUNICATION DATA TABLE

5-1 Basic Communication Data Processing • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 18 Communication data types and formats • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 18 Communication data storage memory • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 18 Data address• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 19 Data read / write count • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 19 Data unit and decimal point position • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 19

5-2 Communication Data Table • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 20 Device related data • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 20 Operating status related data • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 21 Flow set value • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 23 Totalized flow related data • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 23 Function setup related data• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 24 Parameter setup related data • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 30

Chapter 6. COMMUNICATION PROGRAM FOR MASTER STATION

6-1 Precautions for Programming • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 326-2 Examples of Communication Program • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 33

Before executing the program • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 33 Executing the program • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 33 Data read/write sample program • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 34

Chapter 7. TROUBLESHOOTING

Check items in case communication is disabled • • • • • • • • • • • • • • • • • • • • • • • 39

Chapter 8. SPECIFICATIONS

RS-485 specifications• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 40

APPENDIX

Code table • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 41 Connection with CMC10L • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 42

Chapter 1. OUTLINE

If the optional model is provided with the RS-485 communications function, communication with a PC, PLC orother host devices are available using a user-configured program.The communication protocol can be selected from the Controller Peripheral Link (CPL) communications (AzbilCorporation's host communication protocol). This chapter describes the CPL communications.

FeaturesThe features of the CMQ-V's communications function are as follows:• Up to 31 units can be connected to a single master station as a host device.• When the communication specifications of the host device conform to the RS-

232C interface, the communication converter CMC10L (sold separately) isrequired. The CMC10L allows the conversion between RS-232C and RS-485.

• Almost all of the device parameters can be communicated.For details on communication parameters, refer to;

Chapter 5, COMMUNICATION DATA TABLE.

1

RS-485 connection example

Slave station(CMQ-V series, etc)

Master station

Connection between master station and slave station

RS-232C

RS-485 (3-wire system)

RS-232C/RS-485 converter

Chapter 2. WIRING

2

Handling Precautions

• Wiring way except the RS-485 communications wiring, refer to;CMQ-V series Digital Mass Flow Controller user's manual No.CP-SP-1204E or CMQ-V Series Digital Mass Flow Controller (for Hydrogen andHelium Gases) user's manual No.CP-SP-1205E.

CAUTIONUse the CMQ-V Series within the operating ranges recommended in thespecifications of user's manual, CP-SP-1204E and CP-SP-1205E(temperature, humidity, voltage, vibration, shock, mounting direction,atmosphere, etc.). Failure to do so might cause malfunction.

Be sure to turn the power off before connecting the controller. Failure to do somight cause malfunction.

Wire this controller in compliance with the predetermined standards. Alsowire the controller with specified cables and recognized installation methods.Failure to do so might cause malfunction.

Make sure that wire scraps, chips or water do not enter inside the case of thecontroller. Failure to heed this caution may lead to malfunction.

If there is a risk of a power surge caused by lightning, use Azbil Corporation'sSurgeNon to prevent possible fire or equipment failure.

Be sure to check that the wiring is correct before turning the power on.Incorrect wiring could cause damage or malfunction.

Do not disassemble the controller. Doing so might cause malfunction.

2 - 1 RS-485 Connection

3

Chapter 2. WIRING

An example of connection methods in such a case is shown below.

• Connect terminating resistors of 150Ω±5%, 1/2W min. at each end of the trans-

mission line.

• Terminal block is required for the CMQ-V series because of the connector type

connection.

• The cable to the terminal block from the CMQ-V series must be as short as pos-

sible.

• The FG grounding must not be made at the both shielded wire ends but only at

one location.

• Azbil Corporation’s CMC10L001A000 can be used as a converter of the host

station.

Handling PrecautionsBe sure to connect SG terminals each other. Failure to do so might causeunstable communications.

FG

FG

CMQ-V Series(slave station)




Terminatingresistor

Terminatingresistor

Shielded cable

Shielded cable

Terminalblock

Terminalblock

DA

DB

SG

DA

DB

SG

7

8

9

7

8

9

DA

DB

SG

FG

Master station

DA

DB

SG

DA

DB

SG

7

8

9

7

8

9

2 - 2 Connector Pin Layout of the CMQ-V Series

4

Chapter 2. WIRING

The following shows the connector pin layout of the CMQ-V Series with the communication functions:

Connector pin layoutMounted connector part number: HIF3BA-20PA-2.54DS

Manufacturer: Hirose Electric Co. Ltd.

Mating connector table (All connectors are made by Hirose Electric Co. Ltd.)

20 19

2 1

Front view

Connector type Mating connector part No. Mating contact Recommended wirepart No.

Contact crimp type HIF3BA-20D-2.54C HIF3-2226SCC AWG#22 to #26(single wire allowed)

Forced pressure HIF3BA-20D-2.54R Not required AWG#28 (Flat ribbon cable type only)

5

Chapter 2. WIRING

Connector signal table

Handling Precautions• Either pin No. 6 and pin No. 9 is able to connect as SG.

• For details on wiring way, see the CMQ-V Series Digital Mass FlowController user's manual No. CP-SP-1204E or CMQ-V Series Digital MassFlow Controller (for Hydrogen and Helium Gases) user's manual No. CP-SP-1205E.

Pin Signal name Description Remarksnumber

20 +5V (5mA max.) 5Vdc reference voltage output 5mA max.

19 FLOW OUT Instantaneous flow rate (PV) 0 to 5Vdc/ 1 to 5Vdc/ 0 to 20mAdc/voltage output/ setting flow rate 4 to 20mAdc(SP) output

18 A.GND Analog ground Common of analog signals

17 FLOW SP INPUT Instantaneous flow rate setting 0 to 5Vdc/ 1 to 5Vdc/ 0 to 20mAdc/(SP) voltage input 4 to 20mAdc

16 MODE INPUT External 3-stage switching input 3-stage switching input of Open/ GND/ 5V

15 DI3 External contact input 3 Switching input of Open/ GND

14 DI2 External contact input 2

13 DI1 External contact input 1

12 EV2 OUT Event output 2 Open collector non-insulated output

11 EV1 OUT Event output 1

10 ALM OUT Alarm output

9 SG (D.GND) RS-485 communications SG Same as the common of digital signal

8 DB RS-485 communications DB

7 DA RS-485 communications DA

6 SG (D.GND) RS-485 communications SG Same as the common of digital signal

5 TEST For test For test (connecting is prohibited)

4 POWER GND Power supply ground In order to decrease the voltage drop

3 POWER GND Power supply ground caused by wiring resistance, connect each

2 POWER (24V) Power supply +24Vdctwo wires to the power supply in parallel.

1 POWER (24V) Power supply +24Vdc

Chapter 3. SETTING

6

Setup the following to operate the communication functions of the CMQ Series:

Setting method of communication functionsFollow the following procedure to set the functions:

(1) Display the instantaneous flow rate by pressing the DISP key .

>> “PV” lamp and “L/min” lamp ("mL/min" in MQV9200) start lighting.

(2) Keep pressing the key and the ENT key at the same time for 3 seconds or

more.

>> The item No. c-0 1 appears on the 7-segment display and mode changes to

the function setup mode.

(3) Select a desired setup item by pressing either key or key and then press

the ENT key.

>> The current setting flashes on the 7-segment display.

(4) Select a desired setting by pressing either key or key.

(5) After a desired setup mode is selected, confirm it by pressing the ENT key.

>> At this point the setup is updated. (After about one second, the item number

display is returned.)

(6) If other setting items are desired, return to (3) for setting. If no other item is

desired to be set, proceed to the item (7).

(7) Press the DISP key to make the status from the function setup mode to instan-

taneous flow rate display.

Handling Precautions

• If any key is not pressed for one minute after the function setup mode,the display automatically returns to the instantaneous flow rate display.

• If the DISP key is pressed without pressing the ENT key after carryingout the operation in step (4), the setting remains at the previous valuewithout being update.

Setting items of communication functions

Function Item Setup item and description Factory Remarks

setup item setting

c-30 Station address 0: Communications function 0 The communications function doesdisabled not work at 0. Set a different ad-

1 to 127: Station address dress from the slave station.

c-3 1 Transmission speed 0: 38400bps 11: 19200bps2: 9600bps3: 4800bps4: 2400bps

c-32 Data format 0: 8 bit data, even parity, 1 stop bit 01: 8 bit data, no parity, 2 stop bits

Chapter 4. COMMUNICATION PROCEDURE4 - 1 Outline of Communication

Communication proceduresThe communication procedure is as follows:

(1)The instruction message is sent from the host device (master station) to one unit

(slave station) to communicate with.

(2)The slave station receives the instruction message, and performs read or write

processing according to the content of the message.

(3)The slave station sends a message corresponding to the processing content as a

response message.

(4)The master station receives the response message.

7

4 - 2 Message Structure

8


Message structureThe following shows the message structure:Messages are broadly classified into two layers; the data link layer and theapplication layer.

• Data link layerThis layer contains the basic information required for the communication suchas the destination of the communication message and the check information ofthe message.

• Application layerData is read and written in this layer. The content of the layer variesaccording to the purpose of the message.

Messages comprise parts (1) to (9) as shown in the figure below.The command (details sent from the master station) and the response (detailsreturned from the slave station) are stored in the application layer.

Data link layer Outline

The data link layer is of a fixed length. The position of each data item and thenumber of its characters are already decided. Note, however, that the datapositions of the data link layer from ETX onwards shift according to the numberof characters in the application layer. The character length, however, remainsunchanged.

Response start conditions • The device sends the response message only when (1) message structure, station

address, sub-address, checksum and message length of a single frame in the datalink layer are all correct. If even one of these is incorrect, no response messagesare sent, and the device waits for new message.

• Number of word addresses accessible by a single frame

02H 58H 0DH03H

STX X ETX

0AH

CR LF

(2)(1) (3) (4) (5) (6) (7) (8) (9)

Data link layer Application layer Data link layer

1 frame

(1) STX (start of message)(2) Station address(3) Sub-address(4) Device code(5) Send message = command,

response message = response

(6) ETX (end of command/response)(7) Checksum(8) CR (delimiter)(9) LF (delimiter)

Type Description of command RAM area EEPROM area

RS Decimal format read command 1 to 10 1 to 10

WS Decimal format write command 1 to 10 1 to 10

RD Hexadecimal format read command 1 to 10 1 to 10

WD Hexadecimal format write command 1 to 10 1 to 10

9


List of data link layer data definitionsThe following list shows the definitions for data in the data link layer:

Description of data items• STX (02H)

When STX is received, the device judges this to be the start of the send message.For this reason, the device returns to the initial state whatever reception state itwas in, and processing is started on the assumption that the STX, the firstcharacter, has been received. The purpose of this is to enable recovery of thedevice's response at the next correct message (e.g. RETRY message) from themaster station in the event that noise, for example, causes an error in the sentmessage.

• Station addressOf the messages sent by the master station, the device creates response messagesonly when station addresses are the same. Station addresses in the messages areexpressed as two-digit hexadecimal characters.The station address is set up by the station address setup (setup setting C65).However, when the station address is set to 0 (30H 30H), the device creates noresponse even if station addresses match.The device returns the same station address as that of the received message.

• Sub-addressThe C35/36 does not use the sub-address. For this reason, set "00" (30H 30H).The device returns the same sub-address as that of the received message.

• Device codeThe device sets X (58H) or x (78H) as the device code. This code is determinedfor each device series, and other codes cannot be selected. The device returns thesame device code as that of the received message. X (58H) is used as the default,and x (78H) is used for judging the message as the resend message.

• ETXETX indicates the end of the application layer.

• ChecksumThis value is for checking whether or not some abnormality (e.g. noise) causesthe message content to change during communications.The checksum is expressed as two hexadecimal characters.

Data name Character code Number of Meaning of datacharacters

STX 02H 1 Start of message

Station address 0 to 7FH are expressed as 2 Identification of devicehexadecimal character codes. to communicate with

Sub-address "00" (30H, 30H) 2 No function

Device code "X" (58H) or "x" (78H) 1 Device type

ETX ETX (03H) 1 End position of theapplication layer

Checksum 00H to FFH are expressed as two- 2 Checksum of messagedigit hexadecimal character codes.

CR 0DH 1 End of message (1)

LF 0AH 1 End of message (2)

10


• How to calculate a checksum(1) Add the character codes in the message from STX through ETX in single

byte units.(2) Take two's complement of the low-order one byte of the addition result.(3) Convert the obtained two's complement to a two-byte ASCII code.The following is a sample checksum calculation:[Sample message]

STX: 02H'0': 30H (first byte of the station address)'1': 31H (second byte of the station address)'0': 30H (first byte of the sub-address)'0': 30H (second byte of the sub-address)'X': 58H (device code)'R': 52H (first byte of the command)'S': 53H (second byte of the command)(omitted)ETX: 03H

(1) Add the character codes in the message from STX through ETX in singlebyte units.The add operation in single byte units is as follows:02H + 30H + 31H + 30H + 30H + 58H + 52H + 53H + • • • + 03H.Assume that the result is 376H.

(2) The low-order one byte of the addition result 376H is 76H. The two'scomplement of 76H is 8AH.

(3) Convert the obtained 8AH to a two-byte ASCII code.The result is:'8': 38H'A': 41H,and the two bytes, '8'(38H) and 'A'(41H), are the checksum.

• CR/LFThis indicates the end of the message. Immediately after LF is received, thedevice enters a state allowed to process the received message.

Application layerThe table below shows the configuration of the application layer.

Item Description

Command "RS" (decimal number format continuous address data read command)

"WS" (decimal number format continuous address data write command)

"RD" (hexadecimal number format continuous address data read command)

"WD" (hexadecimal number format continuous address data write command)

Data delimiter RS, WS: "," (comma)RD, WD: None

Word address RS, WS: "501W", etc.RD, WD: "01F5", etc.

Read count Numerical value of characters expressed as "1" for example

Numerical value RS, WS: Numerical value of characters expressed as "100" for exampleto be written RD, WD: Numerical value of characters expressed in hexadecimal as

"0064" for example

4 - 3 Description of Commands

11


Continuous data read command (RS command)This command reads data of continuous addresses by a single command.

Send messageThis command enables the content of continuous data addresses starting with the

specified read start address to be read as a single message. The figure below

shows the structure of the application layer of the send message when the data is

read.

Response messageIf the message is correctly received, a response message corresponding to the

command content is returned.

The figure below shows the structure of the application layer of the response

message when the data is read.

Maximum number of read data per messageUp to 10 words for both RAM and EEPROM areas

(2)(1) (3) (4)

Application layer

(1) Continuous read command(2) Data delimiter(3) Data address(4) Number of read data

R 0S , 1 5 1 W , 1(2)

0

• Normal termination (reading of single data item)

0

• Normal termination (reading of multiple data items)

0 0

• Abnormal termination

X X The abnormal termination code is entered at XX. For details of codes, refer to; 4-4, Termination Code Table (on page 15).

(2)(1) (3)

(1) Termination code(2) Data delimiter(3) Data(4) Data 2 to (n-1)(5) Data n

,

(1) (2) (3) (4) (5)

, , ,

(2) (2)

(1)

12


Continuous data write command (WS command)This command writes data to continuous addresses.

Send messageThe figure below shows the structure of the application layer of the send message

for the data write command.

Response messageThe figure below shows the structure of the application layer of the response

message for the data write command.

Maximum number of write data per messageUp to 10 words for both RAM and EEPROM areas

(2)(1) (3) (4)

(1) Write command(2) Data delimiter(3) Start write data address(4) Write data (first word)(5) Write data (second word)

W 0S , 1 5 1 W , 1(2)

, 6 5(2) (5)

0

• Normal termination

0

• Abnormal termination or warning

X X The abnormal termination code is entered at XX.For details of codes, refer to; 4-4, Termination Code Table (on page 15).

(1)

(1)

(1) Termination code

13


Continuous data read command (RD command)This command reads continuous data in two-byte units. This command is suitable

for handling data in ladder programs sent by PLC communications as the data is of

a fixed length.

The start data address is expressed as four hexadecimal digits. The number of read

data is expressed as four digits, and data is expressed as four X n (n is a positive

integer) hexadecimal digits.

Send messageThe read start data address (four hexadecimal digits) and the number of read data

(four hexadecimal digits) are sent.

Response messageIf the message is sent successfully, the termination code is taken to be normal (two

decimal digits) and returned appended with the number of read data (four

hexadecimal digits X number of read data) specified by the command. If message

transmission ends in error, the termination code is taken to be in error (two

decimal digits) and returned without the read data.

Maximum number of read data per messageUp to 10 words for both RAM and EEPROM areas

(1) Fixed length continuous data read command(2) Start data address(3) Number of read data

R

(1)

D

(2) (3)

0

• Normal termination (reading of single data item)

(1)

0

• Normal termination (reading of multiple data items)

0

(1)

0

(2) (3) (4)

• Abnormal termination

X

(1)

X The abnormal termination code is entered at XX.For details of codes, refer to; 4-4, Termination Code Table (on page 15).

(2)

(1) Termination code(2) Data(3) Data 2 to data (n-1)(4) Data n

14


Continuous data write command (WD command)This command writes continuous data in two-byte units. This command is suitable

for handling data in ladder programs sent by PLC communications as the data is of

a fixed length.

The start data address is expressed as four hexadecimal digits. Data is expressed

as four X n (n is a positive integer) hexadecimal digits.

Send messageThe write start data address (four hexadecimal digits) and the number of write data

(four X n hexadecimal digits) are sent.

Response messageIf writing is successful, the normal termination code (two decimal digits) is

returned. If only part of the data is written, and the remaining data is not written,

the warning termination code (two decimal digits) is returned. If none of the data

is written, the abnormal termination code (two decimal digits) is returned.

Maximum number of write data per messageUp to 10 words for both RAM and EEPROM areas

W

• Writing of single data item

D

• Writing of multiple data items

(1) Fixed length continuous data write command(2) Start data address(3) Data 1(4) Data 2 to data (n-1)(5) Data n

(1) (2) (3)

(5)

W

(1)

D

(2) (3) (4)

0

• Normal termination

(1)

0

• Abnormal termination or warning

X

(1)

X The abnormal termination code is entered at XX.For details of codes, refer to; 4-4, Termination Code Table (on page 15).

(1) Termination code

4 - 4 Termination Code Table

15


When an error occurred in the application layer, an abnormal termination code is returned as a response message.

Normal and warning termination

Error termination

Termination Type Contents and actioncode

00 Normal Communications end normally.

21 Alarm Wrote data in the address that could not be set in thecommunication due to the setup allotment by externalswitching inputs.The controller continues the process without writing any in theconcerned address.

23 Alarm The controller stops reading due to access to the addressoutside the scope.The controller stops writing due to access to the addressoutside the scope, however writes inside addresses.

Termination Type Contents and actioncode

40 Error “W” has not been set at the address.All messages are aborted.

41 Error “WS”, or “RS” has not been set.All messages are aborted.

43 Error ETX(03H) is not set in the correct position.“,” is not set after the address.All messages are aborted.

46 Error The address is erroneous.All messages are aborted.

47 Error There is an error in the number of word addresses to read.All messages are aborted.

48 Error There is an error in the written numeric.Write has been executed, except for the error address.

99 Error An undefined command or other message error.All messages are aborted.

Timing specifications for instruction and response messageThe cautions below are required with regard to the timing to transmit a instruction

message from the master station and a response message from the slave station.

Response monitor timeThe maximum response time from the end of the instruction message transmission

by the master station until when the master station receives a response message

from the slave station is two seconds ((1) in the figure below). So, the response

monitor time should be set to two seconds.

Generally, when a response time-out occurs, the instruction message is resent.

For details, see Chapter 6 “COMMUNICATION PROGRAM FOR MASTERSTATION.”

Transmission start timeA wait time of 10ms is required before the master station starts to transmit the next

instruction message (to the same slave station or a different slave station) after the

end of receiving response message ((2) in the figure below).

RS-485 driver control timing specificationsWhen the transmission/reception on the RS-485 3-wire system is directly con-

trolled by the master station, care should be paid to the following timing:

(enable)

(enable)

(disable)

(disable)

Master stationdriver control

Slave stationdriver control

Transmissionline

(instruction message)

Effective data

Effective data

(1) End of master station transmission - Driver disable time = 500µs max.(2) End of slave station reception - Driver enable time = 15ms min.(3) End of slave station transmission - Driver disable time = 10ms max.(4) End of master station reception - Driver enable time = 10ms min.

End of master station transmission

End of slave station transmission

(response message)

(1) (4)

(2) (3)

Instructionmessage

Responsemessage

Instructionmessage

Responsemessage

Transmis-sion line

(1) End of master station transmission - Transmission start time of slave station = Max. 2000ms

(2) End of slave station transmission - Transmission start time of master station = Min. 10ms

(1) (2)

4 - 5 Timing Specifications

16


17


Other precautions•The time required for the master station to finish the transmittal of instruction

message and for the slave station to start the transmittal of response message

becomes longer if the number of data to write and read increases.

When the faster response time is required by the slave station, make sure to keep

the number of data to read / write at the minimum in one message.

•When the number of data is one data to read / write in one message, the time

required for the master station to finish the instruction message and for the slave

station to transmit the response message is about 30ms.

Chapter 5. COMMUNICATION DATA TABLE5 - 1 Basic Communication Data Processing

18

Communication data types and formats

Types of communication dataThe communications data are categorized as follow:

• Device related data

• Operating status related data

• Instantaneous flow rate related data

• Integrated flow related data

• Function setup related data

• Parameter setup related data

Format of communication dataCommunication data is classified into the following formats: Numeric data: Data indicating a numeric value (PV, SP, etc.). Bit data: Data where each bit is significant (alarms, etc.). Bit data must

be composed by transmission and decomposed by reception.

Communication data storage memory

Memory typeThe communication data are stored in the following two types of memory:

• RAM: Stored data is cleared when the power is turned OFF. However

data can be written to this memory any number of times.

• EEPROM: Stored data is retained even when the power is turned OFF,

whereas data write operations are limited to a total of 100,000

times owing to device characteristics.

Communication object memoryIn communication, it is necessary to read/write data from/into the abovementioned

two types of memory according to the purpose and use. There is a difference

between the object memories as follows:

• RAM: Data is read/written from/into RAM only. If the power supply

is turned off after writing data into RAM, and then it is turned

on again, the data in EEPROM is copied on RAM, so the data in

RAM becomes the same as in EEPROM.

• EEPROM: Data are written in both RAM and EEPROM.

If it is necessary to change the parameters of the CMQ Series frequently bycommunication, write data at addresses of RAM. The guaranteed data write count atthe EEPROM addresses is limited to 100,000 times.Note that the data in RAM is cleared, and the data in EEPROM is copied on RAM if thepower supply to the CMQ Series interrupted.

IMPORTANT

19


Data address

The data addresses are allocated as shown in the table below.

Data read / write count

The number of data which can be continuously read/written by once communica-

tion is as shown in the table below.

Data unit and decimal point positionRead/write data is not appended with a decimal point.

The unit and decimal point position is determined for each data item.

For details on the data unit and decimal point position, see the CMQ-V SeriesDigital Mass Flow Controller User's manual No.CP-SP-1204E or CMQ-V SeriesDigital Mass Flow Controller (For Hydrogen and Helium Gases) User's man-

ual No.CP-SP-1205E.

Communication data RAM EEPROM

Offset value Address Offset value AddressDecimal Decimal Decimal Decimal

(Hexadecimal) (Hexadecimal) (Hexadecimal) (Hexadecimal)

Device related data 1000 1001 to 1199 4000 4001 to 4199(03E8) (03E9 to 04AF) (0FA0) (0FA1 to 1067)

Operating status 1200 1201 to 1399 4200 4201 to 4399related data (04B0) (04B1 to 0577) (1068) (1069 to 112F)

Instantaneous flow- 1400 1401 to 1599 4400 4401 to 4599rate related data (0578) (0579 to 063F) (1130) (1131 to 11F7)

Integrated flow rate 1600 1601 to 1799 4600 4601 to 4799related data (0640) (0641 to 0707) (11F8) (11F9 to 12BF)

Function setup 2000 2001 to 2199 5000 5001 to 5199related data (07D0) (07D1 to 0897) (1388) (1389 to 144F)

Parameter setup 2200 2201 to 2399 5200 5201 to 5399related data (0898) (0899 to 095F) (1450) (1451 to 1517)

Read

Write

RAM EEPROM

1 to 10 1 to 10

1 to 10 1 to 10

5 - 2 Communication Data Table

20


The enabling conditions for the address and R/W (Read/Write) of each data are specified in the following table:

The meaning of R/W column marks:

Possible

Impossible

Device related data

Note• For RD and WD commands, the data is required four hexadecimal digits.

Item Data range RAM EEPROM Remarks

Address R W Address R WDecimal Decimal

(Hexadecimal) (Hexadecimal)

Gas type 0: User setting 1001 4001 Gas type change is 1: Nitrogen/Air (03E9) (0FA1) possible by function2: Oxygen setup (Address 5018)3: Argon4: Carbon dioxide5: Natural gas 13A

(Heating value: 46MJ/m3)

6: Propane7: Methane8: Butane9: Hydrogen

10:Helium11:Natural gas 13A(Heating value: 45MJ/m3)

Full- scale flow Depend on flow rate 1002 4002 The decimal point rate range (03EA) (0FA2) is removed.

Decimal point 0: No decimal point 1003 4003

position of 1: XXXX. (03EB) (0FA3)instantaneous 2: XXX.Xflow rate 3: XX.XX

4: X.XXX

Decimal point 0: No decimal point 1004 4004

position of 1: XXXXXXXX. (03EC) (0FA4)integrated 2: XXXXXXX.Xflow rate 3: XXXXXX.XX

4: XXXXX.XXX

Instantaneous 0: mL/min 1005 4005

flow rate unit 1: L/min (03ED) (0FA5)

Integrated 0: L 1006 4006

flow rate unit 1: m3 (03EE) (0FA6)

21


Operating status related data


• The flow rate unit "L/min" becomes "mL/min" in MQV9200.




Alarm status bit Refer to *1 1201 4201 For RS command,(04B1) (1069) status is shown in

decimal numbers

Event status bit Refer to *2 1202 4202 For RS command, (04B2) (106A) status is shown in

decimal numbers

Control status bit Refer to *3 1203 4203 For RS command, (04B3) (106B) status is shown in

decimal numbers

Operation mode 0:Valve full close 1204 4204 When the valve is in full1:Valve control (04B4) (106C) close or full open by2:Valve full open external inputs, write

operation is disabled.

Instantaneous SP 0:SP-0 1205 4205 When SP No. switchingNo. in use 1:SP-1 (04B5) (106D) is selected by external

2:SP-2 inputs, write operation3:SP-3 is disabled.4:SP-4 The value larger than5:SP-5 the one selected with 6:SP-6 SP No.(Address 5004)7:SP-7 of the function setup

can not be written.

Instantaneous (0 to 100%FS) 1206 4206

SP value in use L/min (04B6) (106E)

Instantaneous (0 to 100%FS) 1207 4207

PV value L/min (04B7) (106F)

Valve actuation 0.0 to 100.0% 1208 4208 The decimal point iscurrent (04B8) (1070) removed .

The value in the datarange (L/min) is thevalue removeddecimal point thatobtained by full scaleflow rate multiplied bythe percentage inparentheses.

22


*1 : Alarm status bit configuration (Address 1201) 0: Normal 1: Error

*2 : Event status bit configuration (Address 1202) 0: OFF 1: ON

*3 : Alarm status bit configuration (Address 1203) 0: OFF 1: ON

Bit No. Description

0 Event output 1 status

1 Event output 2 status

2 Undefined (0 fixed)

3 External contact 1 input status



6 External 3-stage switching input status 1 (0V input)

7 External 3-stage switching input status 2 (5V input)

Bit No. Description

0 OK lamp (PV control status)0: Light-out 1: Lighting (Instantaneous PV OK)

1 Slow start operation0: Normal operation 1: Slow start operation

2 Digital setting / Analog setting0: Digital setting 1: Analog setting

3 Totalizing count status0: Totalized flow PV < Totalized flow event SP1: Totalized flow PV ≥ Totalized flow event SP

4 SP ramp control function0: Function disabled 1: SP ramp control enabled




Bit No. Description

0 Deviation lower limit alarm of instantaneous flow rate (AL01)

1 Deviation upper limit alarm of instantaneous flow rate (AL02)

2 Valve amperage lower limit alarm (AL11)

3 Valve amperage upper limit alarm (AL12)

4 Sensor error (common to AL81, AL82 and AL83)

5 Input / output adjustment data error (AL91)

6 Sensor calibration data error (AL92)

7 User setup data error (AL93)

8 Valve overheat prevention limit operation (AL71)

9 Sensor error 1 (AL81)



23


Flow set value


• The flow rate unit "L/min" becomes "mL/min" in MQV9200.

Totalized flow related data





Flow set value SP-0 (0 to 100%FS) 1401 4401 L/min (0579) (1131)

Flow set value SP-1 (0 to 100%FS) 1402 4402 L/min (057A) (1132)

Flow set value SP-2 (0 to 100%FS) 1403 4403 L/min (057B) (1133)

Flow set value SP-3 (0 to 100%FS) 1404 4404 L/min (057C) (1134)

Flow set value SP-4 (0 to 100%FS) 1405 4405 L/min (057D) (1135)

Flow set value SP-5 (0 to 100%FS) 1406 4406 L/min (057E) (1136)

Flow set value SP-6 (0 to 100%FS) 1407 4407 L/min (057F) (1137)

Flow set value SP-7 (0 to 100%FS) 1408 4408 L/min (0580) (1138)

The value in thedata range (L/min)is the valueremoved decimalpoint that obtainedby full scale flowrate multiplied bythe percentage inparentheses.




Totalized flow event 0 to 9999 1601 4601 setting lower 4 digits (0641) (11F9)

Totalized flow event 0 to 9999 1602 4602 setting upper 4 digits (0642) (11FA)

Totalized flow lower 0 to 9999 1603 4603 4 digits (0643) (11FB)

Totalized flow upper 0 to 9999 1604 4604 4 digits (0644) (11FC)

Same as RAMaddress 2218 and5218 in parameterset up.

Same as RAMaddress 2219 and5219 in parameterset up.

When resetting thetotalized value,make sure to write“0” for the bothlower and upperdigits.

Function setup related data


24


Item Data rangeRAM EEPROM

RemarksAddress R W Address R WDecimal Decimal

(Hexadecimal) (Hexadecimal)Key lock Run 0: Key lock disabled 2001 5001

1: Settings other than (07D1) (1389)instantaneous SP and integrated SP are key-locked

2: All settings key-locked

RUN key operation 0: RUN key disabled 2002 5002 selection and (Operation starts in the (07D2) (138A)operation mode control mode when theselection when power is turned ON)power turned ON 1: RUN key enabled (1)

(Operation is started up in the operating modeused before power shut-down when the power is turned ON)

2: RUN key enabled (2)(Operation is started upin the fully closed modewhen the power is turn-ed ON)

Flow rate setup 0: Digital setup (set by key 2003 5003 method (SP setup operation or (07D3) (138B)method selection) communications)

1: Analog setup (set by external analog input voltage)

Number of flow set 0: Number of SPs = 1 2004 5004 value selection (SP-0 only) (07D4) (138C)(number of SPs 1: Number of SPs = 2selection) (SP-0, SP-1)

2: Number of SPs = 3(SP-0 to SP-2)






Input range selection (1)Analog output selection 2005 5005 of analog setup is set at voltage output (07D5) (138D)(analog SP input (C-06 = 0, 1, 4, or 5).range selection) 0: 0 to 5V internal

reference input1: 0 to 5V external

reference input2: 1 to 5V external

reference input

25




(Hexadecimal) (HexadecimalInput range selection (2)Analog output selection 2005 5005 of analog setup is set at current output (07D5) (138D)(analog SP input (C-06 = 2, 3, 6, or 7)range selection) 0 : 0 to 20mA external

reference input1 : 0 to 20mA external

reference input2 : 4 to 20mA external

reference input

Analog output type 0: 0 to 5V instantaneous 2006 5006 and range selection flow rate output (07D6) (138E)(analog PV output 1: 1 to 5V instantaneousrange selection) flow rate output

2: 0 to 20mA instantaneousflow rate output

3: 4 to 20mA instantaneousflow rate output

4: 0 to 5V setting flow rateoutput

5: 1 to 5V setting flow rateoutput

6: 0 to 20mA setting flowrate output

7: 4 to 20mA setting flowrate output

Event 1 output type 0: Not used (OFF fixed) 2007 5007 assignment 1: ON when the totalized (07D7) (138F)

Event 2 output type flow event occurs 2008 5008 assignment 2: Totalized pulse output (07D8) (1390)

3: ON when the flow rate is OK4: ON in control mode5: ON in fully open mode6: ON in control or fully

open mode7: ON in fully closed mode8: PV upper limit event9: PV lower limit event 110:PV lower limit event 2-1 to -10: Inverse output of

above 1 to 10(Normal operation: ON,Event occurrence: OFF)

External 3-stage 0: Not used 2009 5009 switching function 1: Switching of operating (07D9) (1391)assignment mode 1

2: Switching SP No.3: Switching of totalizing

operation 4: Switching of analog I/O

voltage range(simultaneous external switching of C-05 and C-06)

5: Switching of operatingmode 2

26




(Hexadecimal) (Hexadecimal)External contact 0: Not used 2010 5010 input 1 function 1: Reset totalized flow count (07DA) (1392)assignment 2: Stop totalizing flow External contact count 2011 5011 input 2 function 3: Switching of SP No. (07DB) (1393)assignment 4: Switching of instantaneous

External contact flow rate setup method 2012 5012 input 3 function 5: Valve forced fully closed (07DC) (1394)assignment 6: Valve forced fully open

7: Switching of slow startoperation or switching ofinstantaneous SP rampcontrol operation

8: Switching of operatingmode(control by contact ON,forced fully closed bycontact OFF)

9: Flow rate zero adjust-ment

10:Switching of gas typesetup

11:Switching of flow rate range12:Switching of SP ramp13:Alarm reset

Automatic valve 0: Function disabled 2013 5013 shut-off when the 1: Function enabled (07DD) (1395)totalized flowevent occurs

On/off of totalized 0: Function disabled 2014 5014 flow reset function 1: Function enabled (07DE) (1396)at start of control

Flow rate alarm 0: Function disabled 2015 5015 setup type 1: Only upper limit alarm (07DF) (1397)

2: Only lower limit alarm 3: Upper/lower limit alarm

Operation selection 0: Control continued 2016 5016 at alarm occurrence (alarm ignored) (07E0) (1398)

1: Forced fully closed2: Forced fully open

Slow start setup 0: Slow start disabled 2017 5017 1 to 8: Slow start enabled (07E1) (1399)

(equivalent to approx. 1to 6 seconds settling time)

27




(Hexadecimal) (Hexadecimal)Gas type selection 1 0: Conversion factor for 2018 5018 *1

each gas type set by (07E2) (139A)the user

1: Air, nitrogen2: Oxygen3: Argon4: Carbon dioxide (CO2)5: Natural gas 13A (LNG)

(Heating value: 46MJ/m3)6: 100% propane7: 100% methane8: 100% butane9:Hydrogen

10:Helium11: Natural gas 13A (LNG)


Flow rate display 0: 20˚C, 1 atmosphere 2019 5019 unit selection 1: 0˚C, 1 atmosphere (07E3) (139B)(reference condi- 2: 25˚C, 1 atmospheretions) 3: 35˚C, 1 atmosphere

Valve amperage 0: Function disabled 2020 5020 alarm setup type 1: Only upper limit alarm (07E4) (139C)selection 2: Only lower limit alarm

3: Upper/lower limit alarms

Direct setup 0: Function disabled 2021 5021 function ON/OFF 1: Function enabled (07E5) (139D)

Control dead 0: Function disabled 2022 5022 zone setting 1: Function enabled (07E6) (139E)

PV filter 0: Without filter 2023 5023 (process for filtering 1: Two samplings moving (07E7) (139F)of instantaneous averageflow rate) 2: Four samplings moving

average3: Eight samplings moving

average

*1: The oxygen can not be set for other controllers except those shipped only for the oxygen gas application.The hydrogen and helium gases can not be set for other controllers not subject to hydrogen and heliumgas applications. Also the controllers subjected to the hydrogen and helium gases can not be set for thestandard gases of Items 1 to 8 and 11 given in the data range.


28




Flow rate range 0: Standard range 2024 5024 setup 1 10 to 99: 10% to 99% of (07E8) (13A0)

Flow rate range standard range. (When 2025 5025 setup 2 calculating the range (07E9) (13A1)

reduction, the least sig-nificant digit is truncated.)

-10 to -99: 10% to 99% ofstandard range. (Whencalculating the rangereduction, the least sig-nificant digit is not truncated.)

Gas type selection 2 0: Conversion factor for 2026 5026 *1

each gas type set by (07EA) (13A2)the user

1: Air, nitrogen2: Oxygen3: Argon4: Carbon dioxide (CO2)5: Natural gas 13A (LNG)

(Heating value: 46MJ/m3)6: 100% propane7: 100% methane8: 100% butane9: Hydrogen

10: Helium11: Natural gas 13A (LNG)


SP ramp control 0: Function disabled 2027 5027 function 1: SP ramp control 1. (07EB) (13A3)

(In SP ramp-up: ramp 1,in SP ramp-down: ramp 2)

2: SP ramp control 2.(In external contact OFF:ramp 1, in external contact ON: ramp 2)

Analog scaling 0: Function disabled 2028 5028 function 1: Function enabled (07EC) (13A4)

Forced PV 0: Function disabled 2029 5029 (instantaneous 1: Function enabled (07ED) (13A5)flow rate) zerofunction

*1: The oxygen can not be set for other controllers except those shipped only for the oxygen gas application.The hydrogen and helium gases can not be set for other controllers not subject to hydrogen and heliumgas applications. Also the controllers subjected to the hydrogen and helium gases can not be set for thestandard gases of Items 1 to 8 and 11 given in the data range.

29




(Hexadecimal) (Hexadecimal)Station address 0: Communications 2030 5030

setting function disabled (07EE) (13A6)1 to 127: Station address

Transmission 0: 38400bps 2031 5031

speed selection 1: 19200bps (07EF) (13A7)2: 9600bps3: 4800bps4: 2400bps

Data format selection 0: 8 data bits, even parity, 2032 5032

1 stop bit (07F0) (13A8)1: 8 data bits, no parity,

2 stop bits

SP limit function 0: SP limit function 2035 5035 disabled (07F3) (13AB)

1: Only upper limit enabled2: Only lower limit enabled3: Upper and lower limits

enabledOperational 0: Low differential pressure 2036 5036 differential pressure (50 ± 50kPa) (07F4) (13AC)setting (control 1: Standard differential optimization) pressure (200 ± 100kPa)

2: High differential pressure(300+0, -100kPa)

Flow rate display 0: Flow rate is displayed in 2037 5037 unit change func- the standard flow rate (07F5) (13AD)tion unit.

1: Flow rate is displayed in [L/min] fixed.

-1:Flow rate is displayed in[mL/min] fixed.

PV (instantaneous 0: Decimal point position is 2038 5038 flow rate) display not changed (07F6) (13AE)decimal point posi- 1: Decimal point position istion change function shifted one digit left

-1:Decimal point position isshifted one digit right

This func-tion is validonly for theMQV9200/9500/0002/0005.

This func-tion is in-valid for theMQV0050(J, K).

Though anormalterminationcode isreturnedaftersending thewriteinstructionmessage,the datacannot bewritten.

Parameter setup related data


• When the function setup is not valid, parameter setup is invalid.

• The decimal point of all data is removed.




(Hexadecimal) (Hexadecimal)Instantaneous flow rate (0.5 to 100%FS) 2201 5201 O.K judgment range (0899) (1451)

Instantaneous flow rate (0.5 to 100%FS) 2202 5202 O.K judgment hysteresis (089A) (1452)

Instantaneous flow rate (0.5 to 100%FS) 2203 5203 deviation upper limit alarm (089B) (1453)

Instantaneous flow rate (0.5 to 100%FS) 2204 5204 deviation upper limit alarm (089C) (1454)hysteresis

Instantaneous flow rate (0.5 to 100%FS) 2205 5205 deviation lower limit alarm (089D) (1455)

Instantaneous flow rate (0.5 to 100%FS) 2206 5206 deviation lower limit alarm (089E) (1456)hysteresis

Instantaneous flow rate 0.5 to 999.9s 2207 5207 deviation alarm judgment (089F) (1457)delay time

Event output 1 delay 0.0 to 999.9s 2208 5208 (08A0) (1458)

Event output 2 delay 0.0 to 999.9s 2209 5209 (08A1) (1459)

User setup conversion 0.04 to 9.999 2210 5210 factor (08A2) (145A)

Valve amperage upper 0.1 to 100.0% 2211 5211 limit alarm (08A3) (145B)

Valve amperage lower 0.0 to 99.9% 2212 5212 limit alarm (08A4) (145C)

Event output 1 upper/ (0 to 100%FS) 2213 5213 lower limit flow rate setup (08A5) (145D)

Event output 2 upper/ (0 to 100%FS) 2214 5214 lower limit flow rate setup (08A6) (145E)

SP ramp control ramp 1 MQV9200/9500: 2215 5215 0.0 to 999.9 (08A7) (145F)

SP ramp control ramp 2 MQV0002/0005: 2216 5216 0.000 to 9.999 (08A8) (1460)

MQV0010/0020/0050:

0.00 to 99.99MQV0200/0500:

0.0 to 999.9MQV1000:

0 to 9999

Delay doesnot apply tototalizer pulseoutput.

30

Unit: L/min(standard)(mL/min(standard) forthe MQV9200.)


31





Analog scaling (10 to 100% FS) 2217 5217 (08A9) (1461)

Cumulative flow event 0 to 9999 2218 5218 setting (last 4 digits) (08AA) (1462)

Cumulative flow event 0 to 9999 2219 5219 setting (first 4 digits) (08AB) (1463)

PV forced zero function 0.0 to 999.9s 2220 5220 delay (08AC) (1464)

SP upper limit flow rate (0 to 100% FS) 2221 5221 (08AD) (1465)

SP lower limit flow rate (0 to 100% FS) 2222 5222 (08AE) (1466)



Same asaddress 1601and 4601.

Same asaddress 1602and 4602.

Chapter 6. COMMUNICATION PROGRAM FOR MASTER STATION6 - 1 Precautions for Programming

32

The maximum response moniter time of the instrument is 2 seconds. So, set the response time-out to 2

seconds.

If no response is obtained within 2 seconds, retransmit the same message.

The above retransmission is required since a message may not be properly transmitted due to noise or the

like during communications.

NoteWhen “X” is used as the device ID code in the instruction message, the device

ID code of the response message also becomes “X”. Likewise, the code in the

response message becomes “x” when “x” is used as the device code in the

instruction message.

Use the “X” and “x” device ID codes alternately during message retransmis-

sion from the master station, to make it easier to identify whether the received

response message is the current one or the preceding one.

6 - 2 Examples of Communication Program

33


The program in this section is written in Borland's C++Builder5.0 or Borland C++Compiler5.5 for

Windows95/98/NT/2000.

This program is given here as a reference when the user makes a program, and does not assure all the operations.

You can download Borland C++Compiler5.5 from Borland Home Page.

Before executing the programMake sure to check the settings for communications type, station address, transmis-

sion speed and data format of the instrument.

Executing the programThis program is used for reading and writing data. When the program is executed,

the application layers of the instruction message and response message

communicated are indicated.

command:RS,1001W,2

result:00,0,0

command:WS,1204W,2

result:00

Sample indication of execution results

Processing of the sample program• Communication settings

Call open() and initialize the RS-232C serial port.

• Command execution

Set a desired character string in 'command' and call AppCPL().

34

Data read/write sample program

Handling PrecautionsAzbil Corporation won't be absolutely responsible for any trouble caused byapplying this program sample.


35


36


37


38


Chapter 7. TROUBLESHOOTING

Check items in case communication is disabled

(1) Check the power supply.

(2) Check the wiring.

(3) Check if the communication conditions for the CMQ-V Series meet those for

the host computer.

If any one of the following setting items is different between both stations,

communication is disabled:

The underlined items mean that they can be set on the CMQ-V Series side.

Transmission seed : 38400, 19200, 9600, 4800, 2400bps

Data length : 7, 8 bits

Parity : No parity, odd parity, even parity

Stop bit : 1 stop bit, 2 stop bits

(4) Check if the destination address of the command frame transmitted from the

host computer meets the address set to the CMQ-V Series.

The address of the CMQ-V Series set to “0” for factory setting.

Even when the destination address of the command frame is set to 00 (30H,

30H), the CMQ-V Series does not respond to such a message.

(5) Use the upper-case character codes for all the character codes other than the

device code (“X” or “x” in this controller).

(6) Are those multi-dropped controllers belong operated themselves with different

device address setups?

(7) Is the communication timing conformed with the Chapter 4-5 TimingSpecifications (page 16)?

39

Chapter 8. SPECIFICATIONS

40

RS-485 specifications

Item Remarks

Transmission mode Balanced

Transmission line 3-wire system

Transmission speed (bps) 2400, 4800, 9600, 19200, 38400

Transmission distance 500m max.(300m when connected with the MA500DIM and CMC410.)

Communications flow Half duplex

Synchronization Start-stop synchronization

Data format 8 data bits, 1 stop bit, even parity8 data bits, 2 stop bits, no parity

Error detection Parity check, checksum

Station address 0 to 127(Communication function is inhibited when set to “0”.)

Network type 1: N(31 units max.)

The rest of items Conforms to RS-485 interface specifications.

APPENDIX

Code table

The shaded parts of the table above ( ) are not used for this communication

system.

0 1 2 3 4 5 6 7

0 Space 0 @ P ` p

1 ! 1 A Q a q

2 STX " 2 B R b r

3 ETX # 3 C S c s

4 $ 4 D T d t

5 % 5 E U e u

6 & 6 F V f v

7 ' 7 G W g w

8 ( 8 H X h x

9 ) 9 I Y i y

A LF * : J Z j z

B + ; K [ k

C , < L \ l |

D CR - = M ] m

E . > N ^ n ~

F / ? O _ o ^

Upper

Lower

41

APPENDIX

Connection with CMC10LThe CMC10L001A000 is available as an RS-232C/RS-485 (3-wire system) con-

verter from Azbil Corporation's. The following diagram shows an example of

wiring using a straight cable for a host computer in the terminal mode:

• Connect terminating resistors of 150Ω±5%, 1/2W min. at each end of the trans-

mission line.

• Terminal block is required for the CMQ-V series because of the connector type

connection.

• The cable to the terminal block from the CMQ-V series must be as short as pos-

sible.

• The FG grounding must not be made at the both shielded wire ends but only at

one location.

Handling PrecautionsBe sure to connect SG terminals each other. Failure to do so might cause

FG

FG





Terminatingresistor

Terminatingresistor

Shielded cable

Shielded cable

Terminalblock

Terminalblock

DA

DB

SG*

*

DA

DB

SG

7

8

9

7

8

9

DA

*

*

DB

SG

DA

DB

SG

7

8

9

7

8

9

SG

RD

SD

RS

CS

DR

SG

Host computer CMC10L

ER

MOD.

TER.

TER.

2 2

3

77

88

66

55

44

3

DA

DB

1 1CD

MOD.

* : The pin No. 6 can be used as SG.

42

APPENDIX

unstable communications.

1CDRDSD

RS

23

123

5

678

5

678

4 4ERSGDR

CS

CDRDSD

RS

ERSGDR

CS

RDSDRSCSDRERCDSG

RSCSDRERCDSG

RDSD

237 786415

86415

23

1FGSDRDRSCSDRERCDSG

RSCSDRERCDSG

SDRD

234 7562087

86415

32

RS-232C Cable type MODE switch

TERMINAL Straight MODEM

TERMINAL Cross TERMINAL

MODEM Straight TERMINAL

MODEM Cross MODEM

43

Revision History

Printed Manual Number Edition Revised pages Descriptiondate

Jan. 2007 CP-SP-1197E 1st Edition

Apr. 2012 2nd Edition Company name changed.

Specifications are subject to change without notice. (09)

1-12-2 Kawana, FujisawaKanagawa 251-8522 Japan

URL: http://www.azbil.com1st edition: Jan. 2007 (U)2nd edition: Apr. 2012 (F)

cmq-v series digital mass flow controller - azbil · cmq-v series digital mass flow controller...

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