consolidated environmental statement 2009 - … · consolidated environmental statement 2009 of the...

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Consolidated Environmental Statement 2009of the Villach site

bilduntertitel 8pt, line space 11pt, letter 0 pt

Issued by: Inf ineon Technologies Austria AG Inco-operationwithInf ineonTechnologiesAG, Corporate Environmental Af fairs & Operations Suppor tResponsible for the contents: Dr. Adolf Biedermann, Dr. Ingrid LawickaConcept and design: KANZIAN ENGINEERING & CONSULTING GmbHGraphics and layout: atelier CREmsner Paper: The Environmental Statement was printed on environmentally f r iendly paper.

Verified enVironmental

management

Content

1 Introduction by the Management Board 2 The Company 2.1 Company Profile of Infineon Technologies Austria AG 2.2 Site Description 2.3 Activities and Products

3 Company Policy: Environmental Protection, Occupational Safety and Health 4 Integratet Management for the Environmental Protection, Occupational Safety and Health 4.1 Organization of the Environmental Management System 4.2 Integration of Staff 4.3 Occupational Safety and Health 4.4 Observance of Legal Regulations Relevant to the Environment 4.5 Emergency Prevention and Management 4.6 Documentation of the Environmental Management 4.7 Environmental Company Audits

5EnvironmentalImpacts-Data,FactsandFigures 5.1 Input/Output Analysis 5.2 Direct Environmental Aspects 5.3 Indirect Environmental Aspects 5.4EnvironmentalAspectsandFocusPoints

6OverviewoftheEnvironmentalProgramsandEnvironmentalGoals2006-2010 6.1ImplementedMeasures2006-2009 6.2 Planned Measures 2009/10 6.3 Special Environmental Achievements 6.4 Important Changes since the Last Environmental Statement 7 Annex 7.1 Glossary 7.2 Validation 2010 7.3 Date for next Environmental Statement 7.4 Contact Persons

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2 3

Mag.MonikaKircher-KohlChief Executive Officer (CEO)

DI Reinhard Petschacher Chief Technology Officer (CTO)

1 Introduction by the Management BoardFordecades,ourthoughtsandactionsasanindustrialenterprisehavebeenconsistentlygearedtowards

sustainability in environmental protection and occupational safety. The Austrian Ministry of the

Environment recognized this commitment in conferring the EMAS Award 2009. Such an award spurs us on

intimesofeconomicinstability-andtheyear2009wasaparticularlydifficultonewithsignificantmarket

slumps, for Infineon and for the highly cyclical semiconductor industry.

The market setback and the associated reduction in capacity utilization of our production plant have had

an impact on some of the figures in this Environmental Statement. In the 2009 fiscal year, the production

volume of microchips stood at approximately 55 percent compared to the previous year. However, due to

the high fixed costs in ongoing operations, it is not possible for the consumption of materials or energy

to be reduced in equal measure.

Our commitment to environmental protection, to which we have devoted ourselves since our site was

establishedin1970,ismultifaceted:forinstance,ourproductionfacilitiesareequippedwithstate-of-

the-artenvironmentalandsafetytechnology;thenewofficebuildingopenedin2008issuppliedwith

geothermalenergyandusesInfineon’senergy-efficientproducts,e.g.inthelighting.

Power semiconductors, as developed, manufactured and marketed by Infineon Austria, make a significant

contribution to saving energy and hence to conserving resources. They are used, for instance, in industrial

plants, household appliances, motor vehicles or in consumer electronics. By means of our innovation

drivelaunchedin2008,wecreateconceptsforfuture,energy-efficientapplicationssuchasenergy-saving

solutionsforE-mobilitybynewsemiconductorproductsforelectricandhybridvehiclesornewenergy-

efficient customer solutions for the solar market. The manufacture of thin wafers, the silicon disks on

which the microchips are made, is a main area of expertise of the Villach innovation fab. As wafer thick-

ness is reduced, so the efficiency of the power semiconductors produced is increased. In 2009 Infineon

Technologies Austria received the Innovation and Research Award of Carinthia for the latest developments

of40-micrometerpowersemiconductors.ThisinnovationintroducedontothemarketbyInfineon

strengthens our leading position on the global market and makes a huge contribution to saving energy.

We are proud of this achievement and it encourages us to press ahead with improvements and

innovations, for the benefit of people and the environment.

Mag.MonikaKircher-Kohl,CEO DIReinhardPetschacher,CTO

The Infineon Management Board

2 3Company

InFInEOnTEChnOlOGIEsAG

Infineon Technologies AG offers semiconductor and system solutions addressing

three central challenges to modern society: energy efficiency, communications

and security. In the 2009 fiscal year (ending September), the company reported

sales of Euro 3.03 billion, with approximately 25,650 employees worldwide.

InfineonislistedontheFrankfurtstockExchange(tickersymbol:IFX)andin

theUsAontheover-the-countermarketOTCQXInternationalPremier

(tickersymbol:IFnnY).

2.1COMPAnYPROFIlEOFInFInEOnTEChnOlOGIEs AUSTRIA AG

Infineon Technologies Austria AG, headquartered in Villach, is a Group company

of the globally operating semiconductor manufacturer Infineon Technologies AG.

Semiconductor and system solutions for the automotive sector, industry and

communications are developed and manufactured at Infineon Austria. Drawing

on our technological expertise, we set trends and unfold our strengths along

the entire value chain. Our quest is to impress our customers by coming up with

high-quality,pioneeringproductsinaninnovativeenvironment.Thenumberof

employees working for Infineon throughout Austria is around 2,550, at Villach,

Klagenfurt, Graz, Vienna and Linz. Of this number, about 960 are engaged in

research and development (R&D).

In the 2009 fiscal year (ending September), the company generated sales of

Euro 908.2 million. The volume of output was 11 billion chips. R&D expenditure

was Euro 194.8 million, i.e. approximately 22 percent of sales.

2 The Company

4 5

InFInEOn’sVIllAChsITE

The workforce at Villach is around 2,100. Semiconductor and system solutions

addressing the three central challenges, energy efficiency, communications and

security, are developed and produced at the Villach site for Infineon’s

Automotive, Industrial & Multimarket, Wireless Solutions, Chipcard & Security

divisions.

2.2 SITE DESCRIPTIONThe company site at Villach, established in 1970, is characterized by the

combination of development, production and responsibility for business

performance.InfineonAustriahascommitteditselftoacross-divisionalinnovation

drive forging even closer ties between research, development and production.

The confidence which Infineon Technologies AG places in the Austrian site is

manifestedbythesubsidiary’sgrowingGroup-wideresponsibilities.Accordingly,

in recent years Infineon has expanded its activities in Austria particularly in the

Automotive, Industrial & Multimarket sectors. Responsibility for the global IT

management also rests with Austria. Infineon Austria is addressing a further

marketofthefuture-energyefficiency-bysettinguptheDC/DC

(DCconversion)CompetenceCenterinVillachtopooldevelopmentknow-howin

the power management sector. Villach is also home to the global reliability

product testing of automotive chips (RPT laboratory).

4 5

With 2,200 employees in Villach and Klagenfurt, Infineon Austria is the region’s

largestprivateemployer.Villachisregardedasthehigh-techhubofthe

Alpe-Adriaregionandoffersinternationalcompaniesaverygoodbusiness

environment. Infineon’s Villach site is located in the industry and business park

onthecity’ssouth-easternperiphery,intheimmediatevicinityofthetechnology

park which is home to the microelectronics education and research establishments.

Good transport connections are provided by the A2, the link to the southbound

rail line and Klagenfurt airport.

situatedinVillachisafront-endmicrochipfabmanufacturingchipsonwafersin

various technologies and complexities, in as many as 400 production steps. The

main focus is on automotive and industrial electronics and Infineon ranks among

the market leaders for these power semiconductors. The principle of leading the

way with innovations addressing markets of the future is very pertinent to

microchip production.

Experts are constantly on the search for innovative solutions along the entire

value chain, from the idea through the processes to the customer.

TheiFAB-top-level,radio-andultrasound-basedproductionlogisticsdeveloped

inAustriaanddeployedforthefirsttimeinVillach-istestamenttothestrong

pioneering spirit prevailing here. In this way, a significant contribution is made to

promotingthecompetitivenessoftheproductionsiteandtofuture-proofingit.

Site

The total site area, including leased areas, is 170,010 m2 of which 42,466 m2 are taken up with buildings.

2.3 ACTIVITIES AND PRODUCTS

HIGHTECH “MADE IN AUSTRIA“

InfineonAustria’shigh-techproductsaretobefoundinalargenumberof

applications and systems. These include sensors and controller chips for

anti-lockbrakingsystems(ABs),airbags,alternatorsorenginemanagement

systemsaswellaschipsforenergy-efficientpowersupply,whichareusedin

industrial applications, for computers, communication, consumer electronics

orlighting.Thedevelopmenttasksencompassmobilephonesoftware,RFand

baseband chips for GPRS, UMTS and for future mobile phone generations.

Another area of expertise is contactless chip technologies used, for example,

in new passports or in payment systems for debit and credit cards. Automotive

keylessentrysystems,tirepressuremonitoring,electronicticketsorRFID-based

solutions are other areas where this technology is deployed.

MICROCHIP PRODUCTION

Atthefront-endmanufacturingfacilityinVillachintegratedcircuits(microchips)

areproducedon6-inchand8-inchdiameterwafers.Theproductionofthese

semiconductor elements is technically highly complex and demanding.

The entire process from the pure silicon wafer to the finished chip on the wafer

can take as much as 50 days, requiring various mechanical, physical, chemical

and recurrent manufacturing steps.

ThechipsarethenassembledatInfineon’sback-endsitestoformfinished

semiconductor elements and solutions.

6 7

The Villach chip production offers a wide spectrum of microelectronic components

with about 1,300 basic product types. 98 percent of the site production capacity

is focused on automotive and industrial electronics. To maintain the edge in

termsofexpertiseandtouseresourcesefficiently,Villachformsthefront-end

cluster together with the Regensburg (Germany) and Kulim (Malaysia) sites.

THE CLEANROOM

During chip fabrication, even the tiniest particles can impact chip operability.

One single particle may be enough to render the chip unusable, wiping out the

work of as many as 400 process steps. Therefore the general principle applies

that the smaller the feature size of a chip, the more critical particles even of

microscopic size are. To minimize this risk, semiconductor manufacture takes

place in cleanrooms. The term describes rooms where a special atmosphere

with constant temperature and humidity prevails and where only an extremely

low number of dirt particles of defined diameter is allowed per cubic foot of air

(28.32 liters).

At the Villach site, production is carried out in class 1 and 10 cleanrooms.

Cleanroomclass1illustrateshowhighthestandardsare-nomorethanone

single particle with a maximum diameter of 0.5 microns is allowed per cubic foot

of air there. In comparison: air in a city contains millions of different particles,

and even in hospital operating rooms about 10,000 particles per cubic foot of air

are considered to be acceptable.

Products6 7

8 9

Thefront-endoperationsnecessaryforchipfabricationcanbesubdividedinto

essentially the following categories:

lAYERDEPOsITIOn

These processes include thermal processing, epitaxial growth, chemical vapour

and physical deposition. At thermal processing, for instance, gaseous precursor

materialisappliedinahigh-temperatureprocesstotheentirewafersurface.

At epitaxy, chemical vapour and physical deposition, the final layer material is

formedbychemicalandphysicalprocesses.Whethernon-conductive,

semiconductive or metal layers are deposited on the wafers depends on the

type of production process and the materials used.

lIThOGRAPhY

As chip structures become even smaller, semiconductor industry is faced with

new and greater photolithographical challenges. Lithography is used for trans-

ferring patterns onto the deposited layers. At first a photoresist is applied to

thewafersurfacewhichisalight-sensitivelayer.Theresistisexposedthrough

masksanddevelopedconsequently.Finally,manyareasofthewafersurfaceare

bare. Other areas are protected or covered by photoresist because they are to

remain untreated in the following work step or subsequent process steps.

ETCHING

The layers not covered by photoresist are removed from the wafer surface by wet

chemical or dry etch processes.

Wet chemical etch processes owe their name to the use of acidic or alkaline

etchants. Dry etch processes, on the other hand, are performed at high vacuum.

Gasesareusedwhicharedisassociatedintoreactivecomponentsinahigh-

frequency electromagnetic field.

8 9Operations

IMPLANTATION

Ion implantation, i.e. the introduction of foreign atoms into the crystal structure

of the silicon wafer, permits controlled change of the conductivity of the silicon

(doping). In performing ion implantation, atoms or molecules are ionized (ioning),

then separated by a mass separator, accelerated in an electric field (acceleration

path) and implanted into the silicon. After implantation of a specific layer a

thermal diffusion process is applied for defining the doping profile within the

layer and thus adjusting the conductivity.

Inthethermaltreatmentontheotherhand,theso-calledtemperingprocess,

layers are physically changed.

PHOTORESIST REMOVAL

After a layer is structured or implanted, the photoresist remaining on the wafer

is removed by wet chemical processes or by plasma ashing. In this process,

strongly oxidizing acids or oxygen are used.

PLANARIZATION AND BACKSIDE PROCESSING

Asaresultofincreasingdensityofelectroniccircuitcomponentsonahigh-

performance chip, the surface of a wafer becomes too “rough”. This would be

detrimental to the subsequent layer structuring and therefore these

unevennesses or topographical irregularities have to be flattened.

Thisisperformedinthechemical-mechanicalpolishingprocessusingaspecial

polishing table with special polishing pads and agents. This process category

also includes the treatment of the backsides of the wafers. By means of

mechanical or chemical layer removal, the necessary wafer thickness is

established and then metal layers are applied for the electrical contacting of

the chips.

CLEANING

The wafers have to be cleaned between many operating processes to remove

process chemicals or particles. Cleaning is therefore a recurrent step in chip

production, using mainly ultrapure water and chemical mixes.

The wafers undergo various functional checks and tests throughout the

manufacturing process to ensure the reliability and quality of the products.

To differentiate between flawless and inoperative chips on the wafer, those of

inadequate quality are marked to prevent their further processing.

INNOVATIONS IN PRODUCTION Hallmarks of Villach microchip production are innovative processes and

technologies that are unique the world over. Infineon is driving structural change

in microchip production and is following the route to the “innovation fab”.

In the course of the transition from mass production to the innovation fab, our

employeesfocusoninnovationsinproductionalongtheentirevaluechain-

from inception, through the processes, to the customer. In this way, an

importantcontributionismadetocompetitivenessandtofuture-proofingthe

production site.

One of the greatest challenges in the field of power semiconductors is

production on wafers as thin as 40 microns, an area for which Villach has

exclusive global responsibility. Correspondingly thinned wafers are flexible like

film and require particular care in the processing.

10 11

Innovations

The Villach production facility was the first in the world to control its production

units with the aid of various radio technologies. The software for this

project(dubbediFab)comesfromtheInfineonsubsidiaryinKlagenfurtwhilethe

complex chip technology comes from the Graz Development Center. Today this

logistics system is already being successfully used at the two other factories of

the manufacturing cluster in Regensburg and Kulim.

A smart automation solution has been used for logistics control and traceability

withintheproductionprocessinkeepingwithzero-defectphilosophy.

The quality of human work is raised, customers receive enhanced product

quality and optimized delivery reliability.

Forenvironmentalprotectionthismeans:Adefectivechipmustnotcomeonto

themarketandhastobedisposedof.Aproductthatisdefect-freeinthefirst

step, in our case a wafer with the chips on it, does not waste any environmental

resources.AnotheradvantageisthatiFabrenderspaperunnecessaryin

production.InthemeantimeiFabisinoperationattheRegensburgandKulim

sites.

10 11

12 13

3 Company Policy: Environmental Protection, Occupational Safety and Health ForInfineon,aresponsibleenvironmentalprotection,safetyandhealthpolicyisnotlimitedto

compliance with legal standards and regulatory requirements. It is much rather a process of

continuous improvement, for instance of our products and of the way in which our plants and

equipment are operated. In 2005 the company consolidatet environmental protection, safety and

health protection to form IMPRES (Infineon Integrated Management Program for Environment, Safety

and Health). The program covers all the processes, strategies and corresponding goals in the areas

of occupational safety, health and environmental protection worldwide.

Forus,compliancewithlegalandregulatoryrequirementsistakenasread.

Environmental protection is much rather a process of continuous improvement.

Source: Environmental Report 2003 of Infineon Technologies AG

Benef i t :Return, Social Prestige

Occ

upati

onal

Safe

ty

Healt

h

Envir

onm

enta

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tect

ion

Indust

rial

Safe

ty

Process-optimized Projects

BASIS:Compliance with all statutory requirements is fundamental

12 13Environmental Protection

The following guidelines of our environmental policy should elucidate how, among other things,

they promote achieving our high standards:

We continuously work toward reducing the burden on people and the environment, minimizing

associated risks and lowering resource consumption, above and beyond the legal requirements.

We apply energy efficiently and contribute to climate protection.

We evaluate and consider possible effects on people and the environment at the earliest possible

stage of product and procedure planning.

We take specific measures to prevent hazards to people and the environment and, when this is

not possible, minimize these as much as possible.

Forus,thepreventionofaccidentsisanaturalobligation.Included,isthedutytomotivateour

employees to actively support health promotion.

Wegobythegeneralprinciplethataforesightedestimateoflong-termeffectshastobepreferred

toashort-termadvantageorientation.Atthesametime,theprincipleofprecautionmustalways

beconsideredandintegral,process-integratedsolutionshavetobeourgoal.

We guarantee that our policy for environmental protection, safety and health is effectively

implemented. The required technical and organizational procedures are regularly checked and

continuously improved.

Forus,productivityandcosteffectivenessarenotcontradictorytotheprotectionofpeopleand

the environment. We reduce costs through integrated methods of circulation and reuse of

materials as well as by motivated employees who work in a safe environment. Our costumers

profit from such product properties as high performance or low energy consumption.

We inform the interested public and support an open information policy.

Every employee has the responsibility to support our goals of environmental protection, safety and

health. It is a constant duty of management to increase and encourage awareness of responsibility

at all levels.

We provide costumers information about environmental compliance of our products and promote

efficient communication to ensure the possibility, as well as the steady improvement of the

developmentandtheprovisionofenvironmentalharmlessproductswithinthevalue-addedchain.

We require our business partners to follow our guidelines. We work together with authorities and

non-governmentalorganizations.

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4 Integrated Management for the Environmental Protection,Occupationalsafetyandhealth-an Intregrated Approach

ImmediatelyafterInfineonTechnologiesAGwasestablished,acompany-wideenvironmentalma-

nagement system was introduced which is subject to continuous improvement.

Productionsitesworldwidearematrix-certifiedinaccordancewiththeEnIsO14001standard.In

addition,theAustriansiteofVillachisEMAs-validated.

Finally,in2005,IMPREs(InfineonIntegratedManagementProgramforEnvironment,safetyand

Health) was established across the Group, covering all the processes, strategies and corresponding

goals in the areas of the environment, occupational safety and health, and in the same year we

received matrix certification according to the ISO 14001 and OHSAS 18001 international standards.

As part of this Updated Environmental Statement, we will address the area of environmental

protection within IMPRES below.

4.1ORGAnIzATIOnOFThEEnVIROnMEnTAlMAnAGEMEnTsYsTEM

Forus,environmentalprotectionisnotanemptyphrase,butacorporateresponsibilitythatisan

integral part of our social accountability. To meet the high standards in environmental protection,

we have laid down detailed rules for this subject in the Infineon Group and have defined the

individual areas of responsibility for the various tasks. Our IMPRES forms the basis for this.

14 15IMPRES

The exercise of responsibilities in environmental protection, safety and health

is outlined in the following diagram:

Infineon Management BoardBusiness ContinuityEnvironment & Safety

Site Management

Superiors

Employees

Contractual Partners

I Strategy and leadershipF PutintoforceofenvironmentalpolicyandtheA management systemG Audit and Control Overall communication,...

Determination of environmental protection requirements Implementation of environmental targets relevant to the workplace, determining responsibilities, updating process instructions, encouraging employees to act consciously and so on

I Provision of resources,F Environmentalprograms,A Nomination of Internal ES Experts,T Nomination of environmental internal expert

Observanceofenvironmentally-relevantruleswrittendown in the work instructions, focusing on environmental pollution and risks

The general regulation of environmental related matters is in the responsibility of the corresponding department, the monitoring of environmental protection and occupa-tional safety aspects with regard to contractual partners is part of our vendor management

Figure:DiagramillustratingtheorganizationalstructureofInfineonTechnologiesinenvironmentalprotection(source: Consolidated Environmental Statement 2006)

Sit

eCor

por

ate

Man

agem

ent

Sta

te

Laws

Environ-mental

Policy andObjectives

Environmental Management System

and Manual

Environmental Relevant (Support) Processes and

Upstream (Business) Processes

Environmental-relevant codes of practice and records

16 17

4.2InTEGRATIOnOFsTAFF

About 2,100 staff at the Villach site contribute with their motivation, flexibility and

know-howtothelong-termcorporatesuccessofInfineonTechnologiesAustriaAG.

Permanent exchange of knowledge within the Group, learning from the best within the

Group,andcross-regionalteamworkaretakenforgrantedatInfineon,creatinghigh-level

cooperation based on trust.

Education and further training play an important role in all areas. With our continuous

training cycles for production personnel, our wide range of expert and management training

courses,technicaltalksandexternalin-serviceprograms,weaimtocontinuouslyincrease

knowledge. To maintain its high standard in research, Infineon promotes training of young

technicians.Ourlong-standingcooperationwithvocationalschools,Austrianuniversities

and technical colleges is at the center of these activities.

To ensure that Infineon can successfully meet the challenges of the market also in the

future,werelyonflexibility.Flexibleshiftmodelsorflex-timeallowthecompanytodeploy

itsstaffinatime-optimizedmanner.Individualmodels,suchasteleworking(workingfrom

aworkstationathome),part-timecontracts,maternityleave,etc.,allowourstafftoorganize

their time flexibly according to their life situation.

Soon after joining the company, our employees are briefed in their first systematic training

session and at the end of the following quarter in particular in the areas of occupational

safety, health and environmental protection.

The occupational safety committee meetings for managers, safety liaison officers, the

works council and staff regularly also discuss current health, environmental protection and

occupational safety issues. In addition, Intranet publications addressing environmental

protection,environment-relatedaspectsandtheEnvironmentalstatementalsokeepthe

employees up to date.

16 17

The potential for new ideas is a valuable asset for Infineon and an important way of

improving all the time. Ideas and suggestions for improvement pay off for our staff as

wellasforthecompanyandhaveanidealplatformin“YIP”(YourIdeaPays),

theInfineon-wideIdeasManagementProgram.Ofallthesuggestionsputintopractice

at Infineon Technologies Austria AG in the 2008/09 fiscal year, the suggestions for

improvement in energy, environmental protection and occupational safety alone brought

approx. 7% of the total savings.

4.3OCCUPATIOnAlsAFETYAnDhEAlTh

In consultation with the Management Board, the Company Medical Service initiated the

“Healthy and Active” project back in 2003. The objective of this project was to

promote and support health awareness among staff through suitable measures. The

topics addressed by the “Healthy and Active” project include nutrition, exercise,

preventivemedicalcheck-ups,addictionpreventionandstressmanagement.

Safety and Health

Nordic Walking, Running, Cycling, RowingEXERCISE

Workshops, Consulting Service, Factory canteenNUTRITION

Lung function X-rays, Blood sugar, Blood lipids, Cholesterol, Blood pressure, Skin protection

HEALTH CAREWorkshop giving support to stop smoking

ADDICTION

STRESS MANAGEMENT

18 19

Promoting health is part of the company culture at Infineon Technologies

Austria AG. The aim of occupational medicine is to prevent occupational

diseasesand,inparticular,job-relateddiseases.Awiderangeofinstrumentsis

available to us. Knowledge about workplaces, work sequences, work

equipment and, above all, working materials is the prerequisite of our work.

We offer integrated stress and conflict management to support our staff in

dealing with stress of psychoemotional origin.

As part of the company’s “Healthy and Active” health promotion project, we

continuouslyofferhealth-relatedevents:InthespringweorganizeanActivity

Day on the topic of health, which gives our employees the opportunity to learn

about new aspects of health promotion and take part in selective preventive

medicalcheck-ups.Intheareaofmentalhealth,weoffermediationasone

conflict management option.

In the area of physical health, we focus on “A healthy back”. Apart from the

well-attendedbacktrainingsessionsinthefitnesscenter,wealsooffer

in-housetrainingcoursesgivenbyPilates,yogaandfitnesstrainers,especially

designed for staff at PC workstations. Workplaces are continuously evaluated

and improved technically and ergonomically.

Uponstaffrequest,massagesarealsogivenin-house.Massagesandtraining

takeplaceoutsideworkinghoursandareverypopular.non-smokerprotection

at the workplace has been established in the entire company, and staff have

the opportunity to select a healthy menu composed according to nutritional

criteria from the range of dishes offered by the company canteen.

18 19Health

Foritsinvolvement,earnestnessandemphasisonsustainability,InfineonwasawardedtheQuality

sealforCorporatehealthPromotion2009-2011bytheorganizationFondsGesundesÖsterreichfor

its “Healthy and Active” program.

Great importance has been attached to occupational safety ever since the workplaces at the Villach

factorycameintobeing,notonlyonalegalbasisbutalsoonthebasisofthein-houserules,and

it is constantly developed further. This is also evident from the very low incidence rate of accidents

at work at the Villach site of Infineon Technologies Austria AG, compared with the electrical industry

figures in Austria.

*Since 2005, a new AUVA evaluation model based on “recognized accidents at work” has been in effect, while up to and including 2005 only “accidents at work subject to reporting requirements” were notified.

Page 120. August 2009 Copyright © Infineon Technologies 2006. All rights reserved.

Betriebsunfälle IFAT im Verhältnis zuvergleichbaren Betrieben Österreichs

Häufigkeit der Betriebsunfälle (per 1.000 Mitarbeiter)

0

5

10

15

20

25

30

35

40

45

50

Ind

us

trie

un

fälle

meldepflichtige Arbeitsunfälle 6 4 5 4 3

anerkannte Arbeitsunfälle* 9 5 8 5

Branchenwert 43 30 34 35 33 33 33 27 34

2001 2002 2003 2004 2005 2005 2006 2007 2008

Quelle: AUVA Statistik

2001 2002 2003 2004 2005 2005 2006 2007 2008

Accidents subject to reporting requirements 6 4 5 4 3

Recognized occupational accidents* 9 5 8 5

Industry figures 43 30 34 35 33 33 33 27 34

50

45

40

35

30

25

20

15

10

5

0

Incidence of occupational accidents in industrial enterprises (per 1000 employees)

20 21

Legal regulations and other relevant regulatory requirements (decisions) are

observed by the company. This also includes requirements from approvals and,

where appropriate, regulatory directives and matters pertaining to insurance law.

Current legal regulations that affect occupational safety, health and environmental

protection at the site are listed in a law directory. This applies analogously to

voluntary commitments, requirements from approvals and regulatory directives, etc.

The departments managing the documents have been exactly defined at the Villach

site. The law directory is regularly reviewed and is, among other things, the basis

for the process descriptions and further company regulations in occupational safety,

health and environmental protection.

4.4OBsERVAnCEOFlEGAlREGUlATIOnsRElEVAnTTO THE ENVIRONMENT

Figure:Illustrationofthelegalregulationsrelevanttoenvironmentalprotectioninthelawdatabase

Staff at the Villach site should be aware of the risks of their work to man and the

environment. The company regulations define the duties at the workplace.

Executives are obligated to identify those hazard spots and hazard sources within

theirfieldofworkandresponsibility-ortohavethemidentified-thatmayresult

in risks to staff, other people and the environment.

The executives’ sphere of responsibillity also includes taking precautions to prevent

damage and regularly checking their effectiveness. In the event of deviations,

their cause must be determined, and adequate measures for corrective action and

prevention must be taken.

RechtsregisterZur Sicherstellung der Legal Compliance

Der wachsende Umfang und die teils hohe Komplexität von Rechtsvorschriften, vor allem in den Be-reichen Umwelt und Arbeitssicherheit, stellen für viele Betriebe eine große Herausforderung dar. Den Überblick über relevante Rechtsvorschriften zu bewahren und ständig am Laufenden zu sein, ist meist mit einem großen Aufwand verbunden.

Durch unsere Unterstützung, vor allem durch die Erstellung und laufende Aktualisierung von Rechts-registern, wird dieser Aufwand für Sie minimiert. Wir stimmen gemeinsam mit Ihnen das Rechtsregister auf Ihre rechtlichen Rahmenbedingungen ab (P ichten gemäß den einzelnen relevanten §§ aus den kun-denspezi schen Gesetzen, Verordnungen, Verträgen, etc.).

Standortbezogene Standortbezogene RechtsvorschriftenRechtsvorschriften

EinreichprojekteVerhandlungsschriften

BescheideAnzeigen

Nationale & regionale Nationale & regionale und EUund EU--VorschriftenVorschriften

Gesetze

Verordnungen

Normen

Legal ComplianceLegal Compliance

Standortbezogene Standortbezogene RechtsvorschriftenRechtsvorschriften

EinreichprojekteVerhandlungsschriften

BescheideAnzeigen

Nationale & regionale Nationale & regionale und EUund EU--VorschriftenVorschriften

Gesetze

Verordnungen

Normen

Legal ComplianceLegal Compliance

Sonstige VorschriftenSonstige Vorschriften

BranchenvereinbarungenWerksnormen

Vereinbarungen mit Kunden bzw. Lieferanten

Eine Weiterentwicklung des Rechtsregisters zur Sicherstellung der Rechtskonformität ist unsere Software KEC-LexTool®. Dies ist eine Rechtsdatenbank (österreichische oder deutsche Rechtsvorschriften) und gleichzeitig ein Werkzeug zur ef zienten Verwaltung unternehmensrelevanter Rechtsvorschriften sowie Anlagen- & Betriebsmittel.

Ein Rechtsregister

schafft eine Systematik für die zutreffenden rechtlichen Verp ichtungen

hilft bei der Umsetzung der aus den Verp ichtungen abgeleiteten Maßnahmen

dient als Kontrollinstrument und damit Basis für die Überprüfung der Legal Compliance

6

Lega

l Com

plia

nce

KEC-LexTool® –mit Softwareunterstützung zur Rechtskonformität!

Mit dem neuen Unternehmensstrafrecht (Ver-bandsverantwortlichkeitsgesetz) sowie dem neuen Umwelthaftungsgesetz wird die Verantwortung der Unternehmer zum rechtskonformen Betrieb ihrer Anlagen zusätzlich betont. KEC-LexTool®

unterstützt Sie bei der Erfassung und Ver-folgung der für Ihr Unternehmen relevanten rechtlichen Verp ichtungen (aus Rechtsvorschrif-ten, Bescheidau agen, Wartungsplänen etc.). So ermöglicht unsere Software ein professionelles Rechtsmanagement und hilft Ihnen, die Legal Compliance (Rechtskonformität) sicher zu stel-len! Die Basis von KEC-LexTool® bildet eine Rechtsdatenbank, die alle wichtigen Vorschriften aus den Bereichen Umwelt- und ArbeitnehmerIn-nenschutzrecht auf Landes-, Bundes- und EU Ebene inklusive der zugehörigen Paragraphen enthält. Sie wird in Zusammenarbeit mit dem Kunden an die spezi schen Gegebenheiten angepasst und nach Bedarf regelmäßig von uns aktualisiert.

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Ihr Nutzen durch den Einsatz von KEC-LexTool®:

Verringerung des Aufwandes zur Erfassung und Verfolgung rechtlicher Verp ichtungenOptimierte Filterung der für Sie relevanten P ichten aus RechtsvorschriftenSicherstellung der Einhaltung von ÜberprüfungsterminenUnterstützung bei der rechtzeitigen Behebung von MängelnUnterstützung bei Überprüfung gem. §82b-GewO & Wasserrechtsgesetz (WRG) §134, EBGSicherstellung der Rechtskonformität (Legal Compliance) gemäß EMAS-V und ISO 14001Werkzeug zur Bewertung der in ISO 14001 und EMAS geforderten Einhaltung derRechtskonformitätUnterstützung eines kontinuierlichen und nachvollziehbaren Verbesserungsprozesses

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20 21Legal Regulations

COnsOlIDATIOnOFPlAnTAPPROVAls

The Environmental Management Act (§ 22 UMG) gives companies that employ an

environmental management system according to EMAS the opportunity to combine all

federal law approvals for a plant in a single certificate. The Consolidation of Certificates

process, which is done on a voluntary basis and goes beyond the provisions prescribed

by law, was successfully completed by Infineon Technologie Austria AG in May 2005.

Thus, the aim of combining all plant approvals issued for operation at the Villach site in

a single certificate has been achieved, satisfying the latest statutory documentation and

monitoring requirements in the interest of legal compliance. In the 2008/09 fiscal year,

an update of the “Consolidation of Certificates” was filed with the authorities.

In addition to making the administrative procedures much easier, both with the

authorities’ management procedures and the decision management, consolidation

has given the site further advantages:

Legal compliance as a result of the approval consensus being reviewed by the

authorities

Easier future modification procedures due to the consolidation of certificates

Combining all federal law approvals in a single certificate

Clearly organized decision structure

Cutting red tape and paperwork with the authorities

Figure:Excerptfromtheapprovaldocuments

■

■

■

■

■

22 23

Protection of man and the environment is given priority at Infineon. This is why

the company has set up a professional emergency management. In collaboration

with the respective emergency and rescue services, all required safety and

precaution measures have been taken to prevent any possible incident or limit its

consequences as far as possible. In addition, all vital processes relevant to the

environment are monitored via the control system and by carrying out continuous

measurements. Previously, training was carried in relation to a specific event,

but for the calendar year 2010 further training within a routine fire brigade

exercise is planned as part of the protection concept.

In addition to the shift and standby personnel, the company fire brigade of

Infineon Villach and the company medical service are also available for dealing

with any emergencies that may arise. In the event of serious incidents which

can no longer be rectified in normal operating procedure, the site Disaster

Control Organization (BKO) is deployed. Moreover, clear and detailed alarm and

hazard defense plans have been drawn up to limit the consequences of

emergencies and accidents outside the factory premises.

Raising the alarm

Accident / MAjoR incident

emergency force and assistants

Technical Off icer-. in-charge(fire brigade, police, Red Cross, etc.) onsite

disaster preparedness organization

necessity for official measuresUse of private companies

official authority leadership

consult independent

experts

involvement of the carinthian

Government

Private companiesother

Public Relations

4.5EMERGEnCYPREVEnTIOnAnDMAnAGEMEnT

Source: Information folder for neighbors/residents 2005

22 23Documentation

hAnDlInGOFhAzARDOUsMATERIAls

In accordance with their hazardous properties, the required materials are stored at the Villach

site, transported and used in a safe manner. They are delivered in vehicles and shipping containers

specifically approved for this purpose. To reliably prevent accidental leakage of liquids, there

areleakageandretentionbasinswithspecialbasecoatingsatthesite.In-housetransports,for

example of stored chemicals and gases to the supply units of production, are carried out under

stringent safety precautions.

Theirfurthertransporttotheproductionplantstakesplacethroughdouble-walledpipelines

monitored by sensors and the like for tightness. Our production plants are equipped with extensive

safetyandemergencyswitch-offsystems,whichareswitchedbythecontrolcenter,whichis

manned 24 hours a day and seven days a week. In the event of an incident, the required emergency

measures are initiated from there within the shortest possible time.

4.6DOCUMEnTATIOnOFThEEnVIROnMEnTAlMAnAGEMEnT

The documetnation of Infineon`s environmental protection, safety and health management includes

not only the IMPRES manual, but also the complete process descriptions and work instructions

relevanttooccupationalsafety,healthandenvironmentalprotection,andfurtherIMPREs-relevant

documents.

Coordination of the relevant documents at the site is the responsibility of the officer for corporate

occupational safety and environmental protection, but the updating of the documents is the

responsibility of the authors.

The Villach site keeps and maintains a list of relevant records (process and work instructions,

etc.) in environmental protection, occupational safety and health. The records comply with

internal specifications and legal regulations.

24 25


4.7EnVIROnMEnTAlCOMPAnYAUDITs

Environmental certifications of Infineon Technologies Austria AG in chronological order:

Since 1997Infineon AG Villach (then under the name of Siemens Bauelemente OHG) validated as EMAS site and certified to EN ISO 14001.

Since 1999Villach site integrated into the matrix certification of Infineon Technologies Austria AG to ISO 14001.

Since 2005Occupational safety, health and environmental protection were consolidated to form IMPRES (Infineon Integrated Management Program for Environment, Safety and Health).Infineon receives matrix certification according to ISO 14001 and OHSAS 18001.

As part of IMPRES, the entire Villach site is reviewed regularly through internal audits. They audit

especially processes, activities, services and service providers that may give rise to increased risks at

the site. Should any defects or gaps be detected, corrective measures have to be taken.

Deviations are identified using the following methods among others:

Auditsandon-siteinspections

Monitoringofsafety-relevantprocesses,systemsandinstallations,includingmonitoringreports

Risk analyses of the site

Allaudits,includingon-siteinspections,aredocumentedinreportsalongwiththedeviations,

recommendations and persons in charge.

Regular verification and assessment of the implementation of the company’s occupational safety,

health and environmental protection policy and of the objectives and individual goals derived from

it takes place in accordance with the requirements of EMAS, EN ISO 14001 and OHSAS 18001 as

part of a management review.

■

■

■

24 25Analysis

5EnvironmentalImpacts-Data,FactsandFigures

Environmental impact is every positive or negative change to the environment

that occurs entirely or partly as a result of the activities, products or services

of an organization. Infineon is aware of the presence of various environmental

impacts and is pledged to identify new aspects and to take corresponding action

where necessary.

5.1InPUT-/OUTPUT-AnAlYsIs

In order to minimize the environmental impacts of the Villach site, processes are

optimized on the basis of systematic recording and evaluation of energy and

material flows. In particular, resources are used as efficiently as possible by

means of targeted treatment and recycling.

Activities monitoring the efficiency of the specific policies and regulations for

minimizingdirectandindirectenvironmentalaspectsincludethoseofthein-plant

Disaster Control Organization (BKO), strategic and practical exercises involving

the company’s action force, as well as audits and site inspections.

The company has an influence on direct environmental aspects and can control

them. On the other hand, indirect aspects over which the company has no or

limited control may result in significant environmental impact.

0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0

1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0

0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1

26 27

However, added significance is to be given to direct environmental aspects due to the potential

impacts on the environment. The sections below report on the direct environmental aspects applying

to the Villach site, such as the energy, fresh air, water, chemicals and other materials required, and

the waste heat, waste gases, waste water and other waste produced.

Source: Consolidated Environmental Statement 2006

Waste Water Disposal

Waste Water

Waste Water Purif icationRecycling of Chemicals

Waterrecycling

Waste Separation

Waste

Recycling of Waste

Waste Disposal

Wafer withChips

FRONTEND-PRODUCTION

Noise Protection Activities

NoiseEmissions

Emissionsto the Air

Exhaust Air Treatment

Heat Recycling

Rec

ircu

lating

Air

Raw Wafers

Energy

Fresh/Recirculationg Air

Water

Gases &Chemicals

OtherMaterials

Input-Output26 27

Raw materials and supplies 2006/07 2007/08 2008/09

2,107,200

Energy

Production waste 2006/07 2007/08 2008/09

Emissions to the air

Waste water

INPUT 2006/07, 2007/08 and 2008/09 fiscal years

INPUT

OUTPUT

Raw materials and supplies 2006/07 2007/08 2008/09

2,107,200

Energy

Production waste 2006/07 2007/08 2008/09

Emissions to the air

Waste water

OUTPUT 2006/07, 2007/08 and 2008/09 fiscal years

1) Data correction due to transcription error 2)Approx.65-70%ofultrapurewaterproductionbyrecoveryfromcoolingwater3)Theincreaseinvolumeisduetotheramp-upofanewultrapurewaterproductionplant4) Approx. 1,460 GJ (heat) from renewable energy (geothermal heat Building 06)

5) Decrease of approx. 90 t in commercial scrap6) In the 07/08 and 08/09 f iscal years without externally recycled solvents7) Including the volume of waste gas from cleanroom areas and the volume of waste gas collected from other site areas

28 29

Compared with previous years, the significant reduction in the total input of resources for the

2008/09fiscalyearresultsmainlyfromextensiveunder-utilizationofsemiconductorproduction

capacity due to market conditions. As a result, the specific consumption of resources, which is

reportednormalizedto8-inchwaferManufacturedlayer(Ml)-theseareprocessedwafers,taking

intoconsiderationtheproduct-specificnumberoflithographylayers-increasedconsiderablyfor

energy and consumable media (chemicals, gases, water).

The interrelationship between consumption of input materials / resources and utilization of the

production capacity available will be discussed in the section below on energy, as an example for

the input variables concerned.

In the area of emissions, however, the specific CO2-equivalentemissionswereagainsubstantially

constant in the last fiscal year due to the CO2 reduction program being consistently carried

forward. The emissions as such also decreased in total.

5.2 DIRECT ENVIRONMENTAL ASPECTS

Direct environmental aspects are under the company’s immediate control and are directly linked

with the activities, products and services. Examination of legal regulations and material flows are

used for identification of environmental aspects. The most obvious direct environmental aspects

are emissions into the air and into water, waste and use of resources and energy.

EnERGY EnergyandsavingenergyistakenveryseriouslyatInfineonAustria,whichiswhy-alongsidethe

issueofgreenhousegasemissions-greatattentionispaidtotheresponsibleuseofenergy.

The processes are optimized by systemically recording and evaluating the energy and material

flows so as to implement measures targeted at maximizing the efficiency of consumption.

Asinpreviousyears,therewasagainafocalpointintheareaofemployeemotivation(YIP).

28 29Saving

Inthiswide-rangingscheme,allemployeesarecalledupontosubmitideasthat

contribute to cutting energy consumption in an endeavor to find and implement

areas of potential, however small they may be.

The suggestions relevant to energy accounted for the largest proportion of the

environmental suggestions submitted by the employees.

EnERGYsAVInGWIThInFInEOnPRODUCTs

Infineon products promote energy efficiency along the entire supply chain.

They reduce energy consumption in households and industry, for instance in IT

servers,lighting,television,cookers,allthewaytolarge-scaleindustrialplants.

AttheVillachsite,InfineonTechnologiesAustriaAGmanufacturesenergy-saving

productse.g.fromtheCoolsET™andCoolMOs™familyandfromtheso-called

Smart Ballast IC product range. The use of Infineon products in industrial lighting,

which accounts for 15% of global energy consumption, significantly reduces

electric power consumption.

On top of our push to save energy at product level, we are strongly committed

totheinnovationareaofelectro-mobility.InfineonAustriaisinvolvedtogether

with top industry, research and energy management companies in the nationwide

“AustrianMobilePower”platformaimedatpromotingelectro-mobilityconcepts

andatputting100,000e-carsonAustrianroadsbytheyear2020.

The recent purchase of five electric bicycles also sets an example. On the one

hand they are at the disposal of the product development division and on the

other they give the employees the opportunity to test the suitability of the

bicycles for daily use.

30 31

nEWOFFICECOMPlEXWIThMODERnEnERGYCOnCEPT

A new building for research, development and innovation was opened in

June2008.Theenergyconceptofthenewbuildingmeetsstate-of-the-artenergy

efficiency standards. This building supplied with geothermal energy also uses the

Group’sowntechnologiesandproducts,suchasenergy-savingpowerelectronics

foroperatingtheventilationsystemsortheCoolMOs™high-performancepower

transistor for lighting control.

Another positive aspect is the successful implementation of the alternative energy

supply concept in Building 06, using geothermal energy for heating.

Using a probe and a carrier medium, warmth from the earth is conducted to the

heat pump and is there raised to a higher temperature level for the heating via

the refrigeration circuit. The same circuit is used for cooling in the summer.

With the concept of the new building, Infineon Austria demonstrates that high

importance is attached to energy efficiency not only at business level, but that

the company itself and its site management are geared to this goal.

Energy30 31

sITEEnERGYsTATIsTICs

Fortrendanalysisoftheenergyconsumption,theenergyconsumptionisreportedforthefirst

timeinaten-yearviewforobjectivepresentationoftheimpactofunder-utilizationontheenergy

consumption.

Forthefirsttime,aconsumptiontargetforthespecificpowerconsumptionofthesitewassetup

on the basis of the measures in the environmental program and the planned production capacity

utilization for the 2009/10 fiscal year.

As the above diagram of externally sourced energy shows, the positive reduction trend over the last

years was interrupted in the 2007/08 and 2008/09 fiscal years. In the last fiscal year there was a

distinct increase in the specific overall energy consumption. As mentioned at the outset, this increase

isaccountedforbyanextensiveunder-utilizationofproductioncapacity,particularlyinthe2008/09

fiscal year.

Energieverbrauch in kWh / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

0

5

10

15

20

25

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10Geschäftsjahr

0,000

0,300

0,600

0,900

1,200

1,500

1,800

2,100

2,400

2,700

3,000

Energie gesamt Strom Erdgas Erdöl EL

[kWh/ML] [kWh/ML]Strom, ErdgasEnergie gesamt Erdöl EL

Energy consumption in kWh/ML on 8-inch wafers normalized per fiscal yearElectricity, natural gastotal energy Domestic fuel oil

Total energy Electricity Natural gas Domestic fuel oil

Fiscal year

32 33


As reported in international studies, a large percentage of the electric power and media consumption

(typically 50% for e.g. energy) in semiconductor manufacturing is unrelated to production volumes

and is used to maintain facilities and installed product capacities.

The necessity of a sustainable strategy for resource reduction becomes very clear if one considers

that the energy consumption of a semiconductor fab is basically unrelated to its capacity utilization.

In other words, the entire equipment, systems and subsystems need almost the same amount of

energyinthestand-bymodeaswhenfullydeployed.

Schematic representation of energy consumption in semiconductor manufacture for

varying capacity utilization

0

1

2

3

4

5

6

7

0 1 2 3 4 5

Zeitachse

Energieverbrauch Kapazitätsauslastung

normierterEnergie-verbrauch

normierteKapazitäts-auslastung

Energieverbrauch einer Halbleiterfertigung bei unterschiedlicher Auslastung (schematischer Verlauf)

0

1

2

3

4

5

6

7

0 1 2 3 4 5

Zeitachse





0

1

2

3

4

5

6

7

0 1 2 3 4 5

Zeitachse





0

1

2

3

4

5

6

7

0 1 2 3 4 5

Zeitachse





Normalized energy

consumption

Capacity utilization

Time line

Energy consumption Capacity utilization

32 33Energy Efficiency

The left diagram shows energy consumption plotted against capacity utilization in wafer

manufacturing. The electric power consumption remains almost constant despite the sharp

fluctuations in wafer manufacturing (capacity utilization). Since the semiconductor industry

in particular is often subject to sharp fluctuations in demand and capacity

utilization,itishugelyimportanttodeviseanenergy-optimizedandcost-optimizedstand-by

scenariofortheproductionfacilitiesforphasesofunder-utilization.

Theaimistokeeptheproductionequipmentreadyforproductioninsuchunder-utilization

phases, but at the same time to minimize the consumption of resources and energy.

To make the use of energy and resources as efficient as possible and to learn lasting

lessonsfromtimesofunder-utilization,asite-wideEnergyEfficiencyProjectwaslaunched

which, in addition to the focal areas mentioned, also deals with innovative approaches

through resource optimization.

Distribution of energy demand at the Infineon Villach site

0,2%

20,6%

10,0%

69,2%

Strom Energie aus Wärmepumpen und Wärmerückgewinnung Erdöl ErdgasElectricity Natural gasEnergy from heat pumps and thermal recovery Domestic fuel oil

0,2%

20,6%

10,0%

69,2%

Strom Energie aus Wärmepumpen und Wärmerückgewinnung Erdöl Erdgas

0.8%

68.3%

20.4%

20.4%

34 35

In a detailed analysis of the site energy statistics, a positive aspect in the

2008/09fiscalyearthatistobementionedisthat-despitetheunder-utilization

offactorycapacity-ahighpercentage(about20%)ofthetotalenergyrequired

was provided internally by way of waste heat utilization and heat recovery.

Theconsumptionofextra-light(El)heatingoilincreasedslightlyyear-on-year

because old reserves of heating oil were used up for cost reasons in order not to

have to purchase any additional energy.

Another major energy carrier at the site is natural gas, used 80% for operating

the heating and also for exhaust air cleaning (burn boxes).

Theconsumptionofnaturalgas,asthesite’ssecond-largestenergycarrier,

alsoincreasedfortheabove-statedreasons.

We need about 50% of the externally sourced energy for maintaining the

cleanrooms, operating the refrigeration and air conditioning plants in peripheral

areas, the office buildings as well as the ultrapure water and waste water plant.

Chemicals34 35

CHEMICALS AND GASES

In the area of chemicals and gases, the good level of specific consumption over

the last years was maintained in the 2008/09 fiscal year only for the process

gases used technically selectively. The specific consumption of solvents and

inorganic chemicals in production increased slightly. The increase in consumption

of basic gases in the last two years resulted from the provision of additional new

equipment.

Duetothemarket-relatedunder-utilizationofproductioncapacitymentioned,

basic gases and infrastructure chemicals had to be used in excess in order to

maintaintherespectiveoperationalstructuresinstand-bymode.Whatwe

understandbystand-bymodeisequipmentthatisnotinusebutisreadyfor

production, which is kept ready for operation by increased flushing with basic

gases such as nitrogen and with the least use of energy possible.

Verbrauch Chemikalien und Gase in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

-

1,0000

2,0000

3,0000

4,0000

5,0000

6,0000

7,0000

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr

0,000

0,100

0,200

0,300

0,400

0,500

0,600

Grundgase Infrastruktur Chemikalien anorganische Chemikalien Lösemittel Prozessgase

[kg/ML][kg/ML]

Grundgase

Infrastr. Chem., anorg. Chem.,Lösemittel, Spezialgase

Verbrauch Chemikalien und Gase in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

-

1,0000

2,0000

3,0000

4,0000

5,0000

6,0000

7,0000

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr

0,000

0,100

0,200

0,300

0,400

0,500

0,600

Grundgase Infrastruktur Chemikalien anorganische Chemikalien Lösemittel Prozessgase

[kg/ML][kg/ML]

Grundgase

Infrastr. Chem., anorg. Chem.,Lösemittel, Spezialgase

Basic gases

Basic gases

Infrastr. chem., inorg. chem., solvents, special gases

Infrastructure chemicals Inorganic chemicals Solvents Process gases

Fiscal year

Consumption of chemicals and gases in kg/ML on 8-inch wafers per fiscal year

36 37


WASTE MANAGEMENT

Inthelastfiscalyear,thetotalamountofwasteandthebelow-indicatedfractions-whichconstitute

about 91% of the total waste – decreased considerably. However in the period under review there

was a distinct increase in the specific total amount of waste of the site (normalized to

Manufactured Layer) due to underutilization of production capacity, despite great efforts in the

re-useandrecyclingsector.

Furtherrecoveryandoptimizationpotentialintherecyclingareadidnotarise,despiteintensive

exchange of information with other industrial enterprises.

Intheinterestofhigh-qualitywastemanagementpracticedbyalltheemployees,Infineonattaches

greatimportancetoin-houserecoverynetworks.Toillustratethepoint,allemployeesareencouraged

to reduce the volume of residual waste by collecting and segregating waste and recyclable fractions.

In the area of hazardous waste, concentrated sulfuric acid and spent solvents in particular are

collected separately and recycled externally.

Themainfractionsofnon-hazardouswasteinthe2006/07,2007/08and2008/09fiscalyearswere:

2006/07 2007/08 2008/09

Slurries from water treatment plant 2,460 2,589 1,520 t

Domestic and commercial waste 438 363 254 t

Contents of grease separators (kitchen) 209 209 206 t

Iron and steel scrap (commercial scrap) 147 58 28 t

Waste paper 140 156 87 t

Biogenic waste 138 138 138 t

Waste from building sites and demolition wood 110 51 24 t

Waste wood 64 55 25 t

36 37Waste

The hazardous waste of the site was substantially made up of the following

components:

In the area of hazardous waste, the consistent continuation of the recycling

projects allowed a distinct reduction in particular of the solvent fractions.

2006/07 2007/08 2008/09

Solvent mixtures 643 357 179 t

Spent acids (sulfuric acid) 575 590 430 t

Other aqueous concentrates 141 187 156 t

Waste in kg/ML normalized to 8-inch wafers per fiscal yearAbfälle in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

0,0000

0,1000

0,2000

0,3000

0,4000

0,5000

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr

Summe Abfälle Ungefährliche Abfälle Gefährliche Abfälle mit Schwefelsäure Gefährliche Abfälle ohne Schwefelsäure

[kg/ML]

Intheareaofdisposaloftheabove-mentionedspentsolventmixtures,again

approx.42%oftheDMFandPGMEAsolventsrequiredinoperationcouldbe

provided by an internal recycling operation. The pilot project launched in the

2007/08 fiscal year for recycling cyclopentanone and NMP was successfully carried

forward in the 2008/09 fiscal year. Thus, in the last fiscal year it was possible

to recycle approx. 55% of the solvents cyclopentanone and NMP required, by

external recycling operations for the purposes of recycling management.

This makes our spent solvent mixtures not only valuable energy carriers in the

areaofthermalre-utilization,butalsoasourceofsecondaryrawmaterials.

Fiscal year

Total waste Non-hazardous waste Hazardous waste containing sulfuric acid Hazardous waste containing no sulfuric acid

38 39

WATER AND WASTE WATER TREATMENT

The Villach site covers a large portion of its water demand from four wells. In the

2008/09fiscalyearagainaboutonethirdofthissite-producedwaterwaspurified

using special treatment plants to obtain ultrapure water for use in production.

However there was a distinct increase in specific water consumption and in the

resultantamountofwaterduetounder-utilizationofproductioncapacityas

wet-chemicalsystemshavetobepermanentlyflushedinthestand-bymodeorat

part load. This increase in specific water consumption could not be compensated

even by consistent multiple use of cooling water. The water required for cooling

production and infrastructure installations is made available on site, while the

drinking water and the water for sanitary installations is obtained from the local

public utility.

The optimization project introduced last year in the field of fully deionized water

production was positively finalized when the new deionized water treatment plant

in Hall 14 went into operation. As a result, two old plants were disconnected

from the network. Therefore, at present the site is supplied with the technically

necessary ultrapure water by four plants. A consumption target was defined for

the specific water consumption of the 2009/10 fiscal year, along the same lines

as the power consumption.

Water consumption and amount of waste water from production in m3/ML normalized to 8-inch wafers per fiscal yearWasserverbrauch und Abwassermenge aus der Produktion in m3 / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

0,00

0,10

0,20

0,30

0,40

0,50

0,60

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10Geschäftsjahr

Wasserverbrauch m3 Abwasser aus der Produktion m3

[m3/ML]

Fiscal year

Water consumption m3

Waste water from production m3

Waste water38 39

WASTE WATER

Anewin-housewatertreatmentplant,equippedwithstate-of-the-artautomatic

online analysis and a suitable retention basin, purifies polluted waste water from

production. A reduced specific waste water volume was derived from the

above-statedreductiontargetofsite-specificwaterconsumptionasatargetfor

the 2009/10 fiscal year. Typical values for direct and indirect discharge of our

waste water can be found in the following tables.

As can be seen from these tables, they comply with the prescribed limit values

for both direct and indirect discharge and in most cases are even far below them.

Until July 2007 the waste water was discharged indirectly, i.e. into the urban

sewerage system, in compliance with the limit values prescribed by the authorities.

Waste water substances etc. Limit value 1) Measured value (average) 2)

Arsenic 0.1 <0.01 mg/l

Fluoride 50 31.9 mg/l

Sulfate 400 108.8 mg/l

sulfate-inspectionchamber 3) 400 30.1 mg/l

Filterablesubstances 250 78.6 mg/l

1) According to official stipulations (until 07.2007)2) Measured values 2006/07 fiscal year (10.2006 to 07.2007)3)Precipitationchange-precipitationwithouth2SO4

InAugust2007,afteracorrespondingtestrun,thego-aheadwasgivenfordirect

dischargeofnon-pollutedwastewaterthroughthenewwaterplantintotheGail

receiving water course.

40 41

Substance Limit value acc. to notification

Measured value 07/08


Filterablesubstances mg/l 250 229 42

Ammonium-n(nh4) kg/d 240 102.1 39.2

Fluoride(F) mg/l 50.0 49.1 35.0

Phosphorus (P total) kg/d 60 59.6 27.1

Nitrogen (N total) kg/d 250 116.7 82.7

Sulfate (SO4) mg/l 400 136.0 56.4

AOX1) mg/l 0.5 0.027 0.021

Copper (Cu) mg/l 0.10 0.05 0.04

Molybdenum (Mo) mg/l 1.00 0.06 0.03

Nickel (Ni) mg/l 0.30 0.06 0.03

Zinc(Zn) mg/l 2.00 0.06 0.03

Boron (B) mg/l 1.00 0.17 <0.05

HC total 2) mg/l 3.00 <0.1 <0.1

POX3) mg/l 0.05 <0.01 <0.011) Adsorbable organically bound halogens2) Hydrocarbons3) Purgeable organically bound halogens

Sampling container AEV semiconductors indirect charge - external monitoring




pH value 6.5-8.5 7.9 8.3

Filterablesubstances mg/l 50 <10 36

Ammonium-n(nh4) mg/l 20 2.0 1.1

Fluoride(F) mg/l 50 3.0 1.8

Phosphorus (P ges) mg/l 2 0.6 0.5

TOC 1) mg/l 30 2.6 <0.5

CSB 2) mg/l 120 <15 <15

AOX3) mg/l 0.5 0.018 <0.010

Antimony (Sb) mg/l 0.10 <0.01 <0.01

Arsenic (As) mg/l 0.10 <0.01 <0.01

Lead (Pb) mg/l 0.10 <0.01 <0.01

Cadmium (Cd) mg/l 0.05 <0.001 <0.001

Chromium (Cr) mg/l 0.10 <0.01 <0.01

Copper (Cu ) mg/l 0.20 0.03 0.04

Molybdenum (Mo) mg/l 0.10 <0.01 <0.01

Nickel (Ni) mg/l 0.30 <0.01 <0.01

Selenium (Se) mg/l 0.10 <0.01 <0.01

Zinc (Zn) mg/l 1.00 <0.02 <0.02

Tin (Sn) mg/l 1.00 <0.01 <0.01

Boron (B) mg/l 1.00 <0.05 <0.05

HC 4) total mg/l 1.00 <0.01 <0.01

POX5) mg/l 0.10 <0.010 <0.01

Anionic surfactants mg/l 2.00 <0.001 <0.01

BTXE6) mg/l 0.10 <0.005 <0.005

non-ionicsurfactants mg/l 1.00 <0.10 <0.01

Sampling container AEV semiconductors direct charge - external monitoring

1) Total organically bound carbon2) Chemical oxygen demand3) Adsorbable organically bound halogens4) Hydrocarbons5) Purgeable organically bound halogens6) Sum of volatile aromatic hydrocarbons

Exhaust air40 41

EXhAUsTAIR

Forthefreshairsupplyofcleanrooms,largevolumesofairfromtheoutsidearesuckedin,cleaned

to remove particles, and, after several recirculation cycles (multiple circulation), filtered and released

intotheenvironment.Process-relatedimpuritiesoftheexhaustairareremovedfromtheexhaustair,

if necessary, by using purification plants. The values achieved by these plants are distinctly below

the limit values stipulated by the authorities. The classes of substances that are environmentally

relevant in the exhaust air sector are collected in defined exhaust air flows based on their chemical

properties.

In the area of acid/alkaline exhaust air (process exhaust air), wet scrubbers are used, the organic

componentsarepurifiedbymeansofafter-combustionplants,whileperfluorinatedcompounds

(PFCs)fromthefieldofsemiconductorproductionarecombustedinahigh-temperatureprocessand

subsequently cleaned by a wet chemical method. As can be seen from the following table, the

measured values are clearly below the allowed air emission values.

1) According to official stipulations, as of: f iscal year 06/07, 07/08 and 08/092) Data correction due to transcription error

Productionhall 14 Limit value 1)

2006/07 2007/08 2008/09

Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3

hydrogenfluoride(hF) 3 mg/m3 0.62 mg/m3 0.45 mg/m3 0.35 mg/m3

Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3

Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 5.81 mg/m3 2) 4.61 mg/m3 2.44 mg/m3

Ammonia ( NH3 ) 30 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3

Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3

Arsine ( AsH3 ) 0.5 mg/m3 0.020 mg/m3 ≤ 0.017 mg/m3 ≤ 0.017 mg/m3

Phosphine ( PH3 ) 0.5 mg/m3 0.067 mg/m3 2) 0.044 mg/m3 0.028 mg/m3

Organic carbon 30 mg/m3 4.88 mg/m3 4.94 mg/m3 6.38 mg/m3

Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3

Measured values (average values)

Air emissions Hall 14 - Measured values in the 2006/07, 2007/08 and 2008/09 fiscal years




pH value 6.5-8.5 7.9 8.3

Filterablesubstances mg/l 50 <10 36

Ammonium-n(nh4) mg/l 20 2.0 1.1

Fluoride(F) mg/l 50 3.0 1.8

Phosphorus (P ges) mg/l 2 0.6 0.5

TOC 1) mg/l 30 2.6 <0.5

CSB 2) mg/l 120 <15 <15

AOX3) mg/l 0.5 0.018 <0.010

Antimony (Sb) mg/l 0.10 <0.01 <0.01

Arsenic (As) mg/l 0.10 <0.01 <0.01

Lead (Pb) mg/l 0.10 <0.01 <0.01

Cadmium (Cd) mg/l 0.05 <0.001 <0.001

Chromium (Cr) mg/l 0.10 <0.01 <0.01

Copper (Cu ) mg/l 0.20 0.03 0.04

Molybdenum (Mo) mg/l 0.10 <0.01 <0.01

Nickel (Ni) mg/l 0.30 <0.01 <0.01

Selenium (Se) mg/l 0.10 <0.01 <0.01

Zinc (Zn) mg/l 1.00 <0.02 <0.02

Tin (Sn) mg/l 1.00 <0.01 <0.01

Boron (B) mg/l 1.00 <0.05 <0.05

HC 4) total mg/l 1.00 <0.01 <0.01

POX5) mg/l 0.10 <0.010 <0.01

Anionic surfactants mg/l 2.00 <0.001 <0.01

BTXE6) mg/l 0.10 <0.005 <0.005

non-ionicsurfactants mg/l 1.00 <0.10 <0.01

Sampling container AEV semiconductors direct charge - external monitoring

42 43

1) Adsorbierbare organisch gebundene Halogene 2) Kohlenwasserstoffe 3) Ausblasbare organisch gebundene Halogene

BeprobungsbehälterAEVhalbleiterDirektFremdüberwachung


2006/07 2007/08 2008/09

Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3

hydrogenfluoride(hF) 3 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3

Chlor ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3

Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 2.29 mg/m3 ≤ 0.82 mg/m3 ≤ 0.82 mg/m3

Ammonia ( NH3 ) 30 mg/m3 1.66 mg/m3 0.72 mg/m3 ≤ 0.70 mg/m3


Arsine ( AsH3 ) 0.5 mg/m3 n.a. n.a. n.a.

Phosphine ( PH3 ) 0.5 mg/m3 ≤ 0.007mg/m3 ≤ 0.007mg/m3 ≤ 0.007 mg/m3

Organic carbon 30 mg/m3 3.17 mg/m3 9.19 mg/m3 6.37 mg/m3



2006/07 2007/08 2008/09

Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 0.31 mg/m3 ≤ 0.30 mg/m3

hydrogenfluoride(hF) Hall 16 2) 1 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3

Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3

Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 5.18 mg/m3 4.62 mg/m3 8.47 mg/m3

Ammonia ( NH3 ) 30 mg/m3 1.71 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3


Arsine ( AsH3 ) 0.5 mg/m3 0.045 mg/m3 0.042 mg/m3 0.029 mg/m3

Phosphine ( PH3 ) 0.5 mg/m3 0.051 mg/m3 0.042 mg/m3 0.040 mg/m3

Organic carbon 30 mg/m3 9.28 mg/m3 ≤ 1.61 mg/m3 ≤ 1.61 mg/m3






1) According to official stipulations, as of: f iscal year 06/07, 07/08 and 08/092) ThehFlimitvalueforhall16wasestablishedbyrulingoftheFederalMinistryofEconomicAffairs ofsept.8,1998,item318.956/3-III/A/2a/98,at1mg/m3

n.a. not applicable

42 43Emissions

Based on the requirements of the EMAS III Regulation (EC) No.1221/2009,

thenOX(nitrogenoxide),sO2 (sulfur dioxide) and dust emissions are reported

on for the first time in this Consolidated Environmental Statement.

ThenOXemissionsofthesiteareapprox.11,500kginthe2008/09fiscalyear,

about 11% of which come from the natural gas (2,389,199 m3)andextra-light

heating oil (18,420 kg) used. The emissions from the production areas were

evaluated using an assessment of the loads of the exhaust air streams and their

nOXcontamination.

ThenOXemissionsfromtheheatingmixusedwerecalculatedonthebasis

oftheannualemissiondeclarationforboilerplants(FederalGazetteII

No. 292/2007), which is communicated electronically to the Environment

Agency in the form of an annual report.

(InternalconversionfactorsfromRecknagel,sprenger,schramek;heizung-undKlimatechnik03/04).

The SO2 emission of the site was determined stoichiometrically as no SO2 is used

as process gas in production and sulfur dioxide emissions from the heating mix

used(naturalgasandextra-lightheatingoil)arelimitedbytheproduct

specifications (sulfur typically < 0.01 %).

Theemissionassessmentof<10kgsulfurdioxidefromnaturalgasandextra-light

heating oil was hence based on the product specifications of the heating mix

because no measured values exist in this regard.

In terms of dust emissions, an expert conducts an annual review with reference

to the regulatory requirements (max. 5 mg/Nm3) as part of the respective check

system. The measured values for the last fiscal year are between 0.1 and 3 mg/Nm3.

The assessment of site dust emissions is approx. 5.5 t per annum and again

results from an assessment of the load of the exhaust air streams.

0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0

1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0

0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1

44 45

Formanyyears,wehavedevotedparticularattentiontoreducingtheemissions

ofperfluorinatedcompounds(PFCs),whichareusednotonlyintheproduction

ofwafersbutalsointestingfacilities.ThecontributionofPFCstothegreen-

house effect exceeds by far that of carbon dioxide. In order to reduce the effect

of the emissions on climate, we paid special attention to sustainable reduction

measures-especiallyintheareaofexhaustairpurificationandtheuseofsulfur

hexafluoride(sF6) in testing facilities.

TheearnestnessofInfineon’saimtoreducePFCemissionsisdemonstrated,for

example, by its voluntary commitment in Europe. Thus, it was planned that by

theyear2010emissionofPFCscomparedwiththeyear1995shouldhavebeen

reducedbytenpercent-calculatedinCO2 equivalents. By taking holistic

measures to accomplish this challenging plan, we have succeeded in already

achieving this goal.

PFC emissions for Infineon in the EU 1995 to 2010 CO2-equivalents (%) PFC Emissionen in der EU

0

100

200

300

400

500

600

700

800

900

1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010

CO2

- Äqu

ival

ente

in

[%]

geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen Selbstverpflichtung

PFC Emissionen in der EU

0

100

200

300

400

500

600

700

800

900

1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010

CO2

- Äqu

ival

ente

in

[%]

geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen SelbstverpflichtungEstimated emissions (growth by volume 15% per year, without reduction measures)Actual emissionsGoal of voluntary self-commitment

CO2

equi

vale

nts

(%)


0

100

200

300

400

500

600

700

800

900

1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010

CO2

- Äqu

ival

ente

in

[%]



0

100

200

300

400

500

600

700

800

900

1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010

CO2

- Äqu

ival

ente

in

[%]


44 45Reduction

At the Villach site, in order to reduce the emissions of greenhouse gases as specified by the Kyoto

Protocol, we have opted for and implemented sustainable reduction measures, in particular in the

field of exhaust gas cleaning and use of sulfur hexafluoride. This has allowed us to achieve not only

a significant reduction of the emissions, but also comply, of course, with the Austrian Ordinance for

Industrial Gases, which stipulates a 30% reduction in CO2 equivalents.

Reduction in SF6 consumption at the Villach site

Giventoday’sstate-of-the-arttechnology,sF6 is a process gas that is essential to the semiconductor

industry.EventhoughthetechnicalpossibilitiesofoptimizingsF6 consumption are by now largely

exhausted,lastyearwemanagedtoachieveafurtherreductioninsF6 consumption by metrological

optimization. Reduction measures will continue to be constantly reviewed and, should it be possible

to identify measures, they will be implemented if they are technically and economically feasible.

SF6 Verbrauchsreduktion am Standort Villach

0,0

20,0

40,0

60,0

80,0

100,0

2000/01 2001/02 2002/03 2003/04 2004/05 2005/06 2006/07 2007/08 2008/09

%

SF6 Verbrauchsreduktion in [%]SF6 - Verbrauchsreduktion in [%]

Estimated emissions (growth by volume 15% per year, without reduction measures)Actual emissionsGoal of voluntary self-commitment

Reduction of SF6 consumption in [%]

Aspects46 47

CO2-Emissionen in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr

0,0

10,0

20,0

30,0

99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr

0,00

0,50

1,00

1,50

2,00

2,50

3,00

CO2 Äquivalente Produktion (PFC, SF6, NF3) CO2 Emissionen Heizung (Notstromversorgung, PFC-Abreinigung)

[kg/ML] [kg/ML]

CO2-ÄquivalentePFC

CO2-EmissionenHeizung

Based on the new EMAS III Regulation (EC) No.1221/2009, the emissions of CO2

(carbon dioxide), CH4 (methane) and N2O (dinitrogen monoxide) related to CO2

equivalents are additionally examined for the first time in this Consolidated

Environmentalstatement.sincetheglobalwarmingpotentialoftheseabove-stated

process gases related to CO2 equivalents is relatively low and overall in fiscal

year 2008/09 is only approx. 1% of the total emissions, this component was not

takenintoaccountintheten-yeardiagramabovebytakinga“deminimis

approach” based on the 2004/156/EC guideline. The consumption of CO2-relevant

hydrofluorocarbons(hFCs)asrefrigerant,whichagainaccountsfordistinctly<1%

in the given CO2 emissions, can also be disregarded.

The slight increase in emissions in the area of heating, emergency power supply

and exhaust air purification results from the energy mix used. The emissions

related to CO2 equivalents from the production area range within the settled level.

NOISE

Infineonkeepsanupdatednoiseregister,andnoise-generatingmachines,such

as compressors, refrigerating machines and heat pumps, are housed in closed

supply rooms. This avoids any exposure of the residents living nearby to noise.

CO2 equivalents PFC CO2 emissions heating

CO2 equivalents PFC CO2 emissions heatingCO2 emissions in kg/ML to 8-inch wafers normalized per fiscal year

CO2equivalentsPFC CO2 emissions heating

Fiscalyear

Aspects46 47

5.3 INDIRECT ENVIRONMENTAL ASPECTS

In addition to the direct environmental aspects, consideration also has to be paid to the indirect

aspects which might result in significant environmental impact over which the organization has no

or only limited control. In the area of communication, for example, great importance is attached to

regular, open dialog with neighbors, customers, authorities and the media.

EnVIROnMEnTAllYsOUnDPROCUREMEnT

The environmental aspects in the procurement process are also considered within the company.

Alongside the company’s process descriptions for environmentally sound procurement of services

and equipment, the suppliers’ environmental performance is appraised using a rating scheme.

Consideration is also paid to whether suppliers have an environmental management system.

Almost 90% of our site’s suppliers have a certified environmental management system in place.

EnERGY-EFFICIEnTPRODUCTs

Infineon is committed to responsible use of natural resources not only in production. The company

also conducts ongoing research into more efficient use of the energy flows in the semiconductors

produced. Longer service life and improved recycling properties of the products are factored into

thedesignofInfineonchips.Furthermorethereisadevelopmentmanualspecificallygearedto

environmentally sound product design.

Infineon’s “Power Management Supply & Discretes” division concentrates on reducing power loss

in electronic equipment, and on efficient use of energy. Consumers benefit directly from Infineon’s

developments by saving money on energy. Microchips are used in a wide spectrum of applications

and their energy savings potential is vast. They reduce energy consumption in households and in

industry,forinstanceinITservers,lighting,TVsets,cookers,allthewaytolarge-scaleindustrial

plants.

To give a few examples: the CoolSET™ family of chips significantly reduces power consumption by

waking up a TV set from its standby mode more efficiently. Induction stoves equipped with Infineon

IGBT products are 25% more efficient and save as much as 70 percent electricity. Industrial lighting

accounts for a 15 percent share in the global electricity consumption. Various Infineon products

from the CoolMOS™ and Smart Ballast IC product range substantially reduce the power consumed

by lighting and therefore contribute to achieving the targets for CO2 emissions.

48 49

EnVIROnMEnTAlCOnDUCTOFCOnTRACTORsAnDOUTsIDECOMPAnIEs

Infineon’s global supplier management is an integral part of IMPRES. Infineon exercises responsibili-

ty for people and the environment even from the start of the design and production process. Ser-

vice providers and suppliers are also obliged to meet our standards in environmental protection,

occupational safety and health, and in working and social conditions. To support our suppliers

and service providers in this quest, the Infineon Group has formulated principles which are based

on our globally applicable “Business Conduct Guidelines” and form the basis for successful collabo-

ration with our suppliers. In addition to these principles and the environmental and occupational

safety aspects in the master purchase agreements, we have formulated the requirements to be met

bysuppliersinso-called“TechnicalTermsofDelivery”.Theyfollowacleardocumenthierarchyin

which the specific requirements are defined at different levels and in varying degrees of detail.

Beyond compliance with international and national statutory regulations, our requirements include

proof of the existance of an environmental protection, occupational safety and health management

system, and compliance with bans on substances and restrictions that surpass statutory

requirements. The implementation of standards and measures is promoted by stable partnerships

andopencommunication.Furthermore,ourglobalkeysuppliersarealsosurveyedandratedon

occupational safety, environmental protection and social responsibility by use of an eSupplier

Questionnaire,andtheyareindividuallydevelopedwhererequired.

LOGISTICS AND TRANSPORT

Traffic and transportation represent a very important indirect environmental impact of the company.

Constant optimization in dispatch and close attention to certified or validated logistics partners

ensure environmentally benign transportation.

48 49Aspects

6.2GEPlAnTEMAssnAhMEn2008-2009

5.4EnVIROnMEnTAlAsPECTsAnDFOCUsTOPICs

In the interest of a practiced environmental management system, it is a matter of course

for Infineon to register and assess potential environmental aspects of production and

auxiliary processes, such as use of resources, emissions, waste situation and recycling,

but also the environmental conduct of contractors and suppliers. Regulatory requirements,

internal regulations and processes assist in assessing these environmental impacts, along

withchecklists.Usingthisprocedure,continualimprovementandtop-levelenvironmental

protection is ensured.

In assessing the most important direct and indirect environmental aspects of facilities

(in specified normal operation or otherwise), goals are defined and associated measures

to prevent or mitigate significant environmental impact are adopted. In procuring e.g.

new production plant or peripheral installations, particular importance is attached to the

environmental friendliness of the process used and minimized emissions.

The company supports carpooling. Coordinating carpooling for business travel is among

the Travel Management options available on the Intranet, allowing significant savings in

distances traveled, fuel and even in related travel costs.

50 51

Summary: The assessment of the environmental aspects at Infineon Technologies Austria AG, Villach site, again confirmed the positive environmental situation for the 2008/09 fiscal year.

Plausibility Check of the Environmental Aspects of Infineon Technologies Austria AG

1) Adsorbierbare organisch gebundene Halogene2) Kohlenwasserstoffe 3) Ausblasbare organisch gebundene Halogene

Beprobungsbehälter AEV Halbleiter Direkt Fremdüberwachung

Impact on the environment YES NO Measures defined/started

Emissions into the atmosphere • C C C P/M Continuing optimization of the company exhaust air cleaning systems, taking into account the Kyoto aspects

Formation of waste water • C C C P Adaptation of the waste water treatment plants to operational requirements and state-of-the-art technology

Non-hazardous waste • B B B M Various conceptual studies in the area of waste management logistics / recycling

Hazardous waste • B B B M Various conceptual studies in the area of waste management logistics / recycling

Noise emissions • C C C M Selective noise measurements when required

Odor emissions • C C C M Analysis of problems when required (very rarely)

Formation of dust • B/C B/C B/C M Regular dust measurements by ext. institute

Consumption of resources

Water consumption / fully deionized water • B/C B B/C P/M Permanent optimization of consumption (waste water reduction), replace-

ment of two existing deionized water treatment plants by a new plant

Consumables, auxiliary materials • B/C B/C B/C M Continuous optimization of resources, processes and consumption of

fully deionized or ultrapure water

Chemicals, gases • B B B M Continuous optimization of resources, process and consumption, input/output analysis

Demand for other hazardous substances • B B B P/M Recycling of solvents

Media consumption • B/C B/C B/C P/MFurther reduction in transportation of hazardous materials through preparation of oxygen or nitrogen from the on-site fractionation plant Dilution of chemicals on site, central supply systems

Energy demand, waste heat • B B B/C P/MTypical heat recovery of approx. 20 - 25% of the total amount of energy used by means of heat pumps and heat exchangers Extensive energy reduction programs

Ground / Groundwater • C C C M Ground monitoring through regular groundwater tests

Other

Impacts on the environment in operation other than specified • B B B P/M

Continuation of the Disaster Control Organization (BKO)Maintaining a multi-site safety function plan and business continuity conceptsExplosion zone concept (VEXAT)Running a validated environmental protection laboratory

Legal compliance • B/C B/C B/C P/M

Keeping a legal databaseConsistent continuation of consolidationExtended safety concepts (VEXAT, ADR)Implementation of current EC directives

Sustainable development • B/C B/C B/C M

Segregation and recycling concepts in various areasTraining and education concepts on the areas of the environment, safety and healthCommissioning of projects, master thesesPromoting the YIP company suggestion schemeInnovations for E-Mobility and solar technology

New company premises • B B/C B/C P Test operation of new production lines

Process innovations • B B B/C P

Consistent and systematic evaluation of environmental and safety aspects and securing new technologies including, among others, the field of ion implantationForward-looking technologies including, among others, electrochemical plating, E-Mobility etc.

Health activities • B B/C B/C P/M

Continuation of company health promotion with an integrated approach Carrying out activities as required and in line with internal requirements,focusing on:

■ Health care ■ Exercise ■ Nutrition■ Mental health (stress management, mediation)

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■

■■

Environmental aspectsESH

relevanz

Assessment of the

environmental relevance Measures

Assessment of the Environmental Relevance:

A B

B/C C

The high environmental impact of the plant or activity or its group requires measures for reducing its impact

The acceptable environmental impact does not need immediate action, measures for reducing its impact have already been taken or comply with state-of-the-art technology

There is no immediate need for action - Measures have already been taken (continuous improvement programs, dynamic process)

Due to measures taken, no action is required or the environmental impact cannot be influenced

Goals

6 Overview of the Environmental Programs and Environmental Goals 2006-2010

The environmental protection, occupational safety and health program at the

Villach site is founded on the environmental protection, occupational safety and

health goals of Infineon Technologies AG. On the basis of the respective input

and output analyses and the site aspects evaluated as being significant, the

package of goals and measures is reviewed, adjusted and established once a

year. In the process, the measures, schedules and parties responsible for the

respective projects are fixed.

In the Environmental Statements over the last years, Infineon Technologies

Austria AG has focused conceptually on disclosing major strategic projects in the

field of waste water, exhaust air and recycling. Consideration is given to the state

of the art in new equipment for innovations, increases in capacity and replacement

investments. Extracts of environmentally relevant project activities which have

contributed significantly to improving the environmental performance of the site,

or will do so, are set out below.

50 51

52 53

6.1 IMPLEMENTED MEASURES 2006 – 2009

IMPRES Program 2006/2007 - Implemented Measures

Area Goal Measure Result2007

Waste water New waste water treatment plant Company test phase of indirect discharge up to 06/2007,go-aheadfordirectdischarge07/2007 ¸

Exhaust air Capacity expansion and technical optimization

Fur therexpansionandoptimizationoftheplants for purif ying exhaust air containing solvents

¸Waste Waste management concept Establishment of a comprehensive waste

management concept with material f low analysis ¸Health Healthy and capable staf f

Continuation of the “Healthy and Active” project with a focus on exercise, stress and conf lict management

¸

Noise Noise protection, legal compliance Implementation of the EU Directive on noise and vibration ¸

Production New working processes and company facilities

Safety and environmental evaluation and safeguarding of process innovations and of the planned expansion of facilities

¸Safety at the workplace Explosion protection, legal compliance

Further-reaching,in-housedetailedanalysisand optimization of the explosion zone safety concept(VEXAT)

¸Implementation of measuring instrument optimization in the area of quality assuranceforsF6 reduction

sF6-f reemeasurementinspecialreliabilitytests ¸

safeguardingproductionramp-up Installationoffur therPFCexhaustairpurif ication plants (6 plants) ¸

Environmental protection analysis

Expansion of the company environmental protection laboratory

Evaluation and introduction of new equipment and processes in the area of analytical standard processes and methods

¸Reduction of energy consumption and NOx

Replacement of an old boiler by a new“state-of-the-ar t” boiler ¸

Optimization study for reduction of the primary energy consumption

Feasibilitystudylookingintonewheatingconcepts for site expansion Building 06 ¸

Hazardous materials

Reduction of transports of hazardous materials

By supply of TMAH (developer) in concentratedform(on-sitedilution) ¸

Kyoto

Energy

52 53Measures


Waste Increased waste recycling for the purposes of recycling management

Conceptualstudyonin-housematerialflowanalysis-forextendedreutilizationandrecyclingprojects

¸Spent solvents

Increased recycling of spent solvents with the main focus on cyclopentanone

Recycling of more than 200 t cyclopentanone and NMP (205 t have been achieved) ¸

Health Healthy and capable staff

Continuation of the “Healthy and Active” project with the main focus on stress management. Start of new projects with the main focus on skin protection for staff and company health promotion for 50+ staff

¸

Safety at the workplace

Extended maternity protection evaluation in cleanrooms

Assessment of individual workstations acc. to maternity protection aspects ¸

Environmental analysis

Furtherextensionoftheenvironmentalprotection laboratory

Further-reachingevaluationofmethodswithrespect to various parameters of waste water constituents (GC/MS, ICP/MS for organic materials and metals)

¸

Alternative heating concept Building 06Optimization of the total energy consumption through use of the primary energy carrier geothermal energy (approx. 650 MWh)

¸

Optimization study Energy consumption in production and peripheral installations ¸

Hazardous materials

Reduction of transports of hazardous materials

set-upofaTEOscentralsupplyandexpansionofthe air fractionation plant for liquid gases ¸

Increase in environmental and energy awareness

Foldercampaignwiththemainfocusonenvironment and energy ¸

Information to staff /publicImage film containing visualized key messages on environmental protection, safety and health activities

¸


Internal /External communication


¢Project could not be implemented as planned for cost-relatedreasons.Areplacementprojectwaslaunched in the 2009/10 f iscal year. ¸ Project has been successfully implemented

Energy



Waste Basic assessment of waste f lows from production and peripheral installations

Market study on utilization of spent acids and various other waste f lows ¸

Health Healthy and capable staf f

Continuation of the “Healthy and Active” project with a focus on stress management. Star t of new projects focused on “Healthy back” and “mediation”

¸Workplace safety / Production

Innovation-newcompanyfacilitiesand work processes

Safety and environmental evaluation of the Can Pak production line ¸

Optimization of energy consumption in production areas

Optimization of cleanroom air purif ication (1MW/year) ¸switch-of fofventilationinstallationsattheweekend and overnight in of f ice buildings ¸Optimization of illumination levels ¸Optimization of refrigerating machines and heat pumps by installing electric expansion valves (1MW/year)

¢

E-MobilityInnovation projects on the integration of electric vehicles into an overall mobility and energy provision concept

Promoting electric vehicles (e.g. as company or commuter vehicles), including creating a suitable infrastructure for electric mobility and raising awareness

¸

Expansionofthecompany’son-siteinstallation -100%in-houseproductionofnitrogen ¸ConceptualstudyfordilutingMF320directlyon site ¸

Raising environmental and energy awareness

“Innovation Day” with a focus on new technolo-gies and energy ef f iciency in Inf ineon products and developments, at least 2 events in the current f iscal year

¸

Information to staf f and public

Communicating Inf ineon Austria’s focal aras of innovation, internally and externally, as part of the“InnovationDays”:energy-ef f icientsemiconductor solutions, in particular in the following future markets: ßsolar systems ßLED lighting ßE-Mobilitywithelectricand ßhybrid vehicles

¸

Energy

Optimization of energy consumption in peripheral areas

Reduction of transport of hazardous materials

Hazardous materials

Internal /External communication

54 55

¢Project could not be implemented as planned for cost-relatedreasons.Areplacementprojectwaslaunched in the 2009/10 f iscal year. ¸ Project has been successfully implemented

Program


54 55

6.2 PLANNED MEASURES 2009/2010

Area Goal Measure Status Date

Waste / waste water Treatment/use of waste water Furtheroptimizationstudyonthetreatment/useof

waste water from the ECP area n 10/2010

Exhaust air Replacement of two outmoded exhaust air purificationplantsbystate-of-the-artplants

Replacement of old exhaust air purification plants gas tower Hall 15 and special gas chambers Hall 16 ¸ 02/2010

Health Healthy and capable staff

Continuation of company health promotion with an integrated approach, carrying out activities as needed and in coordination with internal guidelines, focusing on: health care, exercise, nutrition and mental health (stress management, mediation)

n 10/2010

Workplace safety / Production

Provisionofextendedsafety-relatedinformation at the workplace

Conceptual revision of standard operating procedures and workplace regulations n 10/2010

Optimization of energy consumption in production, peripheral and office areas (“ Energy Efficiency Management”)

Conduct of a comprehensive concept study on energy efficiency for energy management optimization. (Implementation projects resulting from feasibility studies)

n 10/2010

Optimization of power consumption ofsub-equipment

studyonsynchronizationofsub-equipment(e.g. vacuum pumps) with the operating hours of production equipment

n 10/2010

Optimization of lightingEvaluationandroll-outoflEDtechnology(pilot project) for selective test areas in production and periphery

n 10/2010

Reduction of power consumption for generating compressed air

Deploymentofoptimizedprocesscontrolforenergy-optimized control of the individual air compressors n 10/2010

Green IT studyonenergy-optimizedserverandserverroomcooling n 10/2010

Recycling / reuse of exhaust gases containing hydrogen

Study on conversion to electricity/reprocessing of thehydrogenused;processingforrecyclingtotheprocess

n 10/2010

Hazardous materials

Reduction of transport of hazardous materials

Technical implementation of the conceptual study fordilutingMF320directlyonsite n 10/2010

Raising environmental and energy awareness

Action program in the company suggestion scheme with a focus on saving energy

“Innovation Days” with a focus on new technologies inInfineonproducts,developmentsandprocesses;setting them into relation with energy efficiency, three events planned in current fiscal year

n 10/2010

Information to staff and publicCooperationwithexternalpartners(FederationofAustrianIndustry,printandTVmedia);variouspublications on the subject of energy efficiency

n 10/2010

Provision of measuring equipment for electromagnetic fields Purchase of a qualified measuring instrument ¸ 01/2010

Use of environmentally friendly heat pumps with increased energy efficiency

Replacementofheatpumpno.1bystate-of-the-artsystem with optimized energy recovery rate (COP = 5.16), and operation of the system with environmen-tally friendly refrigerant (R 134a), reprocessing of the R22 still present from heat pump No. 1

¸ 02/2010

E-MobilityInnovation projects on the integration of electric vehicles into an overall mobility and energy provision concept

Technology projects with leading automotive and power supply companies to increase the energy efficiencyinE-Mobility,includingtestchipforraising efficiencyinlithium-ionbatteriesbyintelligentbattery management and balancing system and start ofdevelopmentofahighlyefficientAC/DCon-boardbattery charger

n 10/2010

n Not yet implemented n Partially implemented ¸ Project successfully implemented

IMPRES Program 2009/10 - Goals for 2010

Energy

Internal /External Communication

Environmental technology

Program


-

6.3 SPECIAL ENVIRONMENTAL ACHIEVEMENTS

In the area of special environmental achievements, the Villach site – as demonstrated below for the

lastthreeyears-hasdisplayedhighinnovativenessandaforward-lookingapproach.

A few important examples are listed below:

Area Projects

New water treatment plantThe new water treatment plant was completed and went into operation,

andthego-aheadfordirectdischargewasgiveninfiscalyear2006/07

Exhaust air treatmentInfiscalyear2006/07,thein-housepurificationplantforexhaustair

containing solvents was extended by a concentrator in Hall 16 for

further purification of dilute exhaust streams

Reduction in greenhouse gases

In the last three years, we again succeeded in substantially

maintaining the previous year’s good emission level in the area of

testing facilities and wafer production. The emission targets attained

resulted in the ESG Award 2007 within the Group

WasteIn fiscal years 2006/7 and 2007/08, comprehensive market and market

and recycling studies (as part of a waste benchmark and master

thesis, among others) were drawn up

Recycling

Theinternalrecyclingquotaofsolvents(redistillationofDMFand

PGMEA) was again approx. 42% in the last fiscal year. In fiscal year

2007/08 a new recycling scheme was evaluated and implemented

successfully for the solvent fractions cyclopentanone and NMP.

As part of this project, for fiscal year 2008/09 almost 55% of these

chemicalsrequiredin-housewererecoveredbyexternalredistillation

measures for the purposes of recycling management

Environmental analysisExpansionofthein-houseenvironmentalprotectionlaboratoryinthe

last3fiscalyearsforintegralandhigh-resolutionmeasurement

techniques in the field of environmental analysis

Renewable energy carriers

In the 2008/09 fiscal year, the use of heat exchangers and heat pumps

tested and proven over many years again allowed us to achieve

approx. 20% savings in the amount of energy required relative to the

total amount used

56 57

Begriffserklärung

Changes

7.1BEGRIFFsERKläRUnGAbwasseremissionsverordnung

ist der systematische und dokumentierte Verif izierungsprozess im Unternehmen, mit dem Daten und Vorgänge ermittelt und bewertet werden

neueProduktionsliniezurFertigungvonWafern

AbkürzungfürChemisch-MechanischesPolieren

CO2,chemischeFormelfürKohlenstoffdioxid;dadieTreibhausgaseunterschiedlicheKlimawirksamkeithaben,brauchtmaneinegemeinsameEinheit,umsievergleichenzukönnen;dieseEinheitheißtCO2-äquivalentundberechnetsichausderMenge

der Emissionen eines bestimmten Gases multipliziert mit dessen Klimawirksamkeit

organisches Lösungsmittel

Gleichstromwandlung

AbkürzungfürdaslösungsmittelDimethylformamid

AbkürzungfürEcoManagementandAuditscheme(engl.);EG-Öko-Audit-system

BegrifffürInnovationsprojektbeiInfineonzurUnterstützungvonenergieeff izientenElektro-undhybridfahrzeugen

umdieUnternehmenbeimAuf-undAusbauvonbetrieblichenUmweltmanagementsystemenzuunterstützen,hatdieInternationalstandardizationOrganisation(IsO)dieweltweitgültigeEnIsO14001entwickelt

AbkürzungfürEnvironmentandsafety(engl.);UmweltschutzundArbeitssicherheit

ArtderFertigung,beideraufdenWafernChipsgefertigtwerden

GefahrstoffesindstoffeundzubereitungenmiteinerodermehrerenderfolgendenGefährlichkeitsmerkmale:explosions-gefährlich,brandfördernd,hoch-oderleichtentzündlich,entzündlich,giftig,sehrgiftig,gesundheitsschädlich,ätzend,reizend,

sensibilisierend, krebserzeugend, fortpflanzungsgefährdend, erbgutverändernd, oder auf sonstige Weise chronisch schädigend, Krankheitserregerübertragend,umweltgefährlich

symbolfürGigajoule

Gaschromatographie / Massenspektroskopie, analytisches Verfahren im Bereich organischer Verbindungen

einkristallinerWerkstoff,derbeiErwärmungeinemitderTemperaturanwachsendeelektrischeleitfähigkeitzeigt;halbleitersindz.B.siliziumoderGermanium;derBegriffwirdauchfürICsausdiesemWerkstoffverwendet

engl. Integrated Circuit, integrierter Schaltkreis

InductivelyCoupeledPlasma/Massenspektroskopie,analytischesVerfahrenfüreinennachweisvonMetallen

Infineon Integrated Management Program for Environment, Safety and Health

Zusatzprotokoll der Vereinten Nationen mit dem Ziel des Klimaschutzes

symbolfürliter

Sicherstellung der Rechtssicherheit

allegutachterlichzertif iziertenEinheiten/standorteeinesUnternehmenssindaufeinemzertif ikataufgeführt

Produktionschemikalie

AbkürzungfürManufacturedlayer(engl.);produktspezif ischeAnzahlvonlithographieebenen

AbkürzungfürMegawattstunde

Abkürzungfürdaslösungsmitteln-MethylPyrolidon

Nkm3:Abkürzungfürnormkubikkilometer

symbolfürnanometer

(Occupational Health and Safety Assessment Series) ist ein internationaler Standard zur Bewertung und Zertif izierung eines Arbeitsschutzmanagementsystem

AEV

Audit

Can Pak

CMP

CO2 -Äquivalent

Cyclopentanon

DC/DC

DMF EMAS

E-Mobil i t y

EN ISO 14001

ES

Front-End

Gefahrstof f

GJ

GC/MS

Halble i ter

IC

ICP/MS

IMPRES

Kyoto Protokol l

l

Legal Compl iance

Matr ix-Zer t i f ikat

MF 320

ML

MWh

NMP

Nkm3

nm

OHSAS 18001

7 Anhang

-

Area Projects

New water treatment plantThe new water treatment plant was completed and went into operation,

andthego-aheadfordirectdischargewasgiveninfiscalyear2006/07

Exhaust air treatmentInfiscalyear2006/07,thein-housepurificationplantforexhaustair

containing solvents was extended by a concentrator in Hall 16 for

further purification of dilute exhaust streams

Reduction in greenhouse gases

In the last three years, we again succeeded in substantially

maintaining the previous year’s good emission level in the area of

testing facilities and wafer production. The emission targets attained

resulted in the ESG Award 2007 within the Group

WasteIn fiscal years 2006/7 and 2007/08, comprehensive market and market

and recycling studies (as part of a waste benchmark and master

thesis, among others) were drawn up

Recycling

Theinternalrecyclingquotaofsolvents(redistillationofDMFand

PGMEA) was again approx. 42% in the last fiscal year. In fiscal year

2007/08 a new recycling scheme was evaluated and implemented

successfully for the solvent fractions cyclopentanone and NMP.

As part of this project, for fiscal year 2008/09 almost 55% of these

chemicalsrequiredin-housewererecoveredbyexternalredistillation

measures for the purposes of recycling management

Environmental analysisExpansionofthein-houseenvironmentalprotectionlaboratoryinthe

last3fiscalyearsforintegralandhigh-resolutionmeasurement

techniques in the field of environmental analysis

Renewable energy carriers

In the 2008/09 fiscal year, the use of heat exchangers and heat pumps

tested and proven over many years again allowed us to achieve

approx. 20% savings in the amount of energy required relative to the

total amount used

6.4 IMPORTANT CHANGES SINCE THE LAST ENVIRONMENTAL STATEMENT

Looking back over the last three fiscal years, the following changes have been implemented at the

Villach site:

Fiscal year Changes

2006/07

The start of operation of the new water treatment plant, equipped

withretentionbasinandstate-of-the-artonlineanalysis,andthe

expansionofthein-house,state-of-the-artenvironmentalprotection

laboratorymarkthesuccessfulcompletionofmajormulti-year

environmental protection projects at the Villach site.

2007/08

As part of the continued expansion of the site by Building 06, an

energy concept was prepared and successfully put into practice.

This new office and development complex was presented during a

ceremony,followedbya“FamilyDay”,inwhichthecurrentstateof

environmental technology at the site was presented not only to staff

but also to interested members of the public.

2008/09

Infineon Technologies Austria AG won the Innovation and Research

Award 2009 of Carinthia for outstanding expertise in thin wafer

technology, which makes a significant contribution to the energy

efficiency of end devices.

Launch and implementation of a comprehensive “Energy Efficiency

Project” for the areas of administration, infrastructure and production

under the conceptual leadership of a Strategic Energy Manager.

The project will continue in the 2009/10 fiscal year with a focus on

innovation.

56 57

7.1GlOssARY

7 Annex

58 59

AEV

Af f i l iated companies

Audit

AUVA

CanPAK

Cleanroom

CMP

CO2 -equivalent

Cyclopentanone

DC/DC

DMF

EMAS

E-Mobil i t y

EN ISO 14001

Environment (based on EN ISO 14001)

Environmental aspec t s

Environmental impac t

Environmental management system

(based on EN ISO 14001)

Environmental Statement

ESH

Front end

Ful ly deionized water

GJ

GC/MS

Green IT

Hazardous mater ial

Abwasseremissionsverordnung(AustrianWaste-WaterEmissionOrdinance)

entities with more than 50 percent of their proprietary shares belonging to the company are called aff iliated companies

is the systematic and documented verif ication process in the company by means of which data and processes are determined and assessed

AustriansocialInsuranceforOccupationalRisks(AllgemeineUnfall-versicherungsanstalt)

new production line for wafer manufacture

used for the manufacture and inspection of micromechanical and electronic components and systems posing special require-ments as regards, for example, freedom from particles

abbreviation for Chemical Mechanical Polishing

CO2,chemicalformulaforcarbondioxide;asthegreenhousegaseshavedifferenteffectsontheclimate,acommonunitofmeasurementisneededsothattheycanbecomparedwithoneanother;thisunitiscalledCO2 equivalent and is calculated from the volume of the emissions of a certain gas multiplied by its impact factor

organic solvent

DC conversion

abbreviation for the solvent dimethyl formamide

abbreviation for Eco Management and Audit Scheme

termforinnovationprojectatInfineontosupportenergy-eff icientelectricandhybridvehicles

the International Standardization Organization (ISO) developed the globally applicable standard EN ISO 140001 in order to support companies in developing and expanding company environmental management systems

comprisesthesurroundinginwhichthecompany,orpartsofit,is/areactive;thisincludesair,water,landandothernaturalresources, people and nature, as well as their interrelation

describe the portion of activities, products or services etc. of the company or its constituent parts or its sites which interact or can interact with the environment

each positive or negative change to the environment which is completely or partially the result of the activities, products, services etc. of the company or its constituent parts or its sites

environmentalmanagementispartoftheorganization’smanagementsystem;theenvironmentalmanagementsystemincludesthe organizational structure, planning activities, practices, processes and resources required for developing, implementing, achieving, assessing and maintaining the environmental policy

with this document, the company sites which are validated according to the ordinance (EC) No. 761/2001, regularly report their activities,individualenvironmentaltargets,environmentally-focusedachievements,environmentalimpactsetc.tothewiderpublic

abbreviation for Environment, Safety and Health

type of production where chips are made on the wafers

ultrapure water

symbol for gigajoule

gas chromatography / mass spectroscopy, analytical technique in the field of organic compounds

optimized air conditioning for servers

substances and preparations with one or more of the following dangerous properties: explosive, oxidizing, highly or readily f lammable, toxic, highly toxic, detrimental to health, caustic, irritating, sensitizing, carcinogenic, toxic for reproduction, muta-genic, chronically damaging in some other way, pathogenic, or harmful to the environment

Glossary

Glossary58 59

l

ICP/MS

IMPRES

IMPRES-related objec t ive

IMPRES pol icy

IMPRES program

IT

Kyoto Protcol

Legal Compl iance

Mat r ix cer t i f icate

MF 320

ML

MWh

NMP

Nkm3

nm

OHSAS 18001

PFC

PGMEA

RPT

Semiconduc tor

Slur r ies

State of the ar t

t

TEOS

Wafer

Y IP

symbol for liter

Inductively Coupled Plasma/ Mass Spectroscopy, analytical technique for determining metal

Infineon Integrated Management Program for Environment, Safety and Health

Overall objective harmonized with the IMPRES policy, which the organization sets itself in the IMPRES manual

The organization’s collective aims and direction relating to its performance, as formulated at managerial level

isadescriptionoftheEsh-relatedindividualgoalsoftheorganization’ssites

Information Technology comprises all the methods, concepts and techniques for processing, storing, transmitting and providing access to information and data

protocoltotheUnitednationsFrameworkConventiononClimateChange

assurance that legal responsibilities are met

all units/sites of an organization certif ied by an expert are specif ied on a certif icate

production chemical

abbreviationforManufacturedlayer;product-specif icnumberoflithographylayers

abbreviationformegawatt-hour

abbreviationforthesolventn-methyl-2-pyrrolidone

abbreviation for standard cubic kilometer

symbol for nanometer

(Occupational Safety and Health Assessment Series) is an international standard for the assessment and certif ication of a respective management system

abbreviation for perfluorinated compounds

abbreviation for the solvent propylene glycol monomethyl ether acetate

reliability product testing of automotive chips

a crystalline material displaying increasing electrical conductivity as temperature rises, examples of semiconductors are siliconorgermanium;thetermisalsoappliedtoICsmadeofthismaterial

are suspensions of solids, in some cases with chemical additives, which are used in the CMP process

is the level of development of advanced processes, installations or operating methods which makes a measure seem fit for protectinghealth,safeguardingemployeesandlimitingenvironmentaldamage.Comparable,tried-and-testedprocesses,

installations or operating methods should be used for determining the state of the art

symbol for a metric tonne

tetraethylorthosilicate(organicsiliconcompoundforaphysico-chemicaldepositionofsiliconlayers)

Diskofsemiconductormaterial(silicon)withadiameterofupto300millimeters;intheproductionofICsitiscutfrommonocrystalline silicon and serves as a substrate for integrated circuits

Companysuggestionscheme“Yourideapays”

7.2 VALIDATION

60 61

Begriffserklärung

Environmental Statement60 61

COnTACTPERsOnFOREnVIROnMEnTAlPROTECTIOn&InDUsTRIAlsAFETY

hEADOFPUBlICRElATIOns

GEnERAlInFORMATIOn:

7.4 CONTACT PERSONS

Dr. Adolf Biedermann

Senior Staff Engineer Environmental Protection & Safety

Tel:+43(0)51777-2656

[email protected]

[email protected]

www.infineon.com/austria

Dr. Ingrid Lawicka

Senior Manager Public Affairs & Communication

Tel:+43(0)51777-2004

[email protected]

7.3DATEFORnEXTEnVIROnMEnTAlsTATEMEnT

The next Environmental Statement is an “Updated Environmental Statement” which will be

presentedinFebruary2011.

Thenext“ConsolidatedEnvironmentalstatement”willbepresentedinFebruary2013.

In the intervening years “Updated Environmental Statements” will be published.

The following contact persons are available for further information on the subjects of

environmental protection, occupational safety and health protection:

InFInEOnTEChnOlOGIEsAUsTRIAAG Other sites in Austria:

Graz siteBabenbergerstraße108020 GrazTel.:+43(0)51777-0Fax:+43(0)51777-900

Vienna siteLinke Wienzeile 4/1/3 1060 ViennaTel.:+43(0)51777-0Fax:+43(0)51777-11500

DICE GmbH & Co. KGFreistädterstraße4004040 LinzTel.:+43(0)51777-15100Fax:+43(0)51777-15999

Infineon Technologies IT Services GmbHLakeside B059020 KlagenfurtTel.:+43(0)51777-0Fax:+43(0)51777-4666

Villach sitesiemensstraße29500 VillachTel.:+43(0)51777-0Fax:+43(0)51777-3501E-mail:info-austria@inf ineon.com

[ www.inf ineon.com/austria ]

InFInEOnTEChnOlOGIEsAUsTRIAAG,Mai 2010, issued by Infineon Technologies Austria AG

inco-operationwithInfineionTechnologiesAG,CorporateEnvironmentalAffairs&Operationssupport

consolidated environmental statement 2009 - … · consolidated environmental statement 2009 of the...

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