contentsducreeje/myfluidix/materials/06...mechanical displacer rectifier - e.g. valve actuation of...
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Contents
1. Introduction
2. Fluids
3. Physics of Microfluidic Systems
4. Microfabrication Technologies
5. Flow Control
6. Micropumps7. Sensors
8. Ink-Jet Technology
9. Liquid Handling
10.Microarrays
11.Microreactors
12.Analytical Chips
13.Particle-Laden Fluids
a. Measurement Techniques
b. Fundamentals of Biotechnology
c. High-Throughput Screening
Microfluidics - Jens Ducrée Micropumps 1
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Micromembrane pump (DebiotechLausanne, CH)
Electroosmotic Pump)(M. Ramsey, ORNL, USA)
ElectrohydrodynamicMicropump(FhG-IFT, Munich)
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pumping Transport of fluid
Against „external forces / fields Gravity Pressure gradient Viscosity Etc.
Micropumps Peculiar scaling of forces in microworld Fabrication issues Novel pumping principles
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 3
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 4
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Constituents Pump chamber Actuation Flow rectifiers
- Check valves- Fixed-geometry valves- Active valves
Peristaltic Thermoviscous
Pumping cycle Supply phase
- Underpressure Pump phase
- Overpressure
6.1. Microdisplacement Pumps
Actuation principlesMechanicalPneumaticThermomechanicalThermopneumaticPiezoelectricElectrostaticElectromagnetic...
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Modeling
2. Design Issues
3. Integrated Check Valves
4. Fixed-Geometry Valves
5. Pumping Valve
6.1. Microdisplacement Pumps
Microfluidics - Jens Ducrée Micropumps 6
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Differential equations Physics
pV-diagram Mechanical engineering
Lumped element Electronic engineering
6.1.1. Modeling
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Dynamics
Dynamics results from complex coupling Mechanical displacer Rectifier
- E.g. valve
Actuation of check valves by pressure within pump chamber
External control only by actuation of membrane
Motion of displacer governed by Actuator Inner pressure Etc.
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Dynamics
Pressures In pump chamber p(t) Inlet pressure p1
Outlet pressure p2
Volumes Pump chamber V0
Membrane
Inlet
Outlet
Gas bubbles
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Volumes
Continuity of volumes (mass)
6.1.1. Differential Equations
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Mass Currents
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Final differential equation Solved numerically
6.1.1. Numerical Simulation
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Mechanical engineer
6.1.1. pV-Diagrams
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
Macroscopic displacement pump
Strong engines drive displacer Negligible feedback of pressure in pump chamber on motion
Pressure-controlled valves
Displacer merely transmits motion
Saug
-st
utze
nD
ruck
-st
utze
n
obererTotpunkt
Hubvolumen
untererTotpunkt
Hingang
Rückgang
p po
KolbenZylinderTotraum Schubstange
obererTotpunkt
unterer Totpunkt
Hubvolumen
V
p2
p1
dV
p
VH
pS
pS
pD
pD
a. b.
Wi
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
Macroscopic displacement pump
Pump rate Actuation frequency Stroke volume V
IV = V
Saug
-st
utze
nD
ruck
-st
utze
n
obererTotpunkt
Hubvolumen
untererTotpunkt
Hingang
Rückgang
p po
KolbenZylinderTotraum Schubstange
obererTotpunkt
unterer Totpunkt
Hubvolumen
V
p2
p1
dV
p
VH
pS
pS
pD
pD
a. b.
Wi
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
Micro-displacement pump
Elastic membranes as displacers Actuation principles
Piezo-electrical Electrostatic Pneumatic Thermopneumatic, etc.
Properties of membrane govern dynamics Rigidity Restoring force, etc.
Pressure-controlled valves
Pressure in pump chamber governed by complicated interplay between Flow dynamics Mechanical motion Motion of displacer
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
Example: displacement pump actuated by underpressure
Characteristic curve of MDP at A=0 (underpressure off) and A = Ao (underpressure on) govern supply and pump phase
Assumption: switch-on (section I) and switch-off (section III) of actuation (underpressure) faster than liquid can react; Change in pressure w/o
change in volume
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
pV-Diagram Amplitude decreases with pressure head p2
Minimum pressure in pump chamber increases with pressure head p2
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. pV-Diagrams
pV-Diagram Fluidic capacitance of valves decreases amplitude Leak rate of valves decreases maximum back pressure
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Electric Equivalent
Conclusions
Valve with capacitance acts as low-pass filter
At high frequencies, whole current goes into capacitive branch
- Only motion of valve membrane
- No net pumping of current
p1
p2
Ventilmembran
MembranauflageSilizium
Strömungskanal
0,5
mm
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Lumped-element representation of two passive valves Rectification of flow
6.1.1. Electric Equivalent: Passive Valve System
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Electric Equivalent: Passive Valve
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.1. Electric Equivalent: Pump
Martin Richter„Modellierung und experimentelle Charakterisierung von Mikrofluidsystemen“Dissertation, München 1998;
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Modeling
2. Design Issues
3. Integrated Check Valves
4. Fixed-Geometry Valves
5. Pumping Valve
6.1. Microdisplacement Pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Market requirement Fail-safe pump
Bubble-tolerant pumping of liquids Trapped gas bubbles in pump chamber Highly compressible Malfunctioning of displacement principle Solution: High compression ratios
Clogging Particles carried by liquid Solution: Prefiltering of liquids
6.1.2. Design Issues
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.2. Fixed-Stroke MDP
Debiotech; Switzerland; 1998 Based in pump design by Harald van
Lintel Integrated particle filter Membrane moves between two
mechanical stops Drawback: expensive concept
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6.1.2. Fixed-Stroke MDP
Debiotech; Switzerland; 1998 Membrane moves between 2
mechanical strops fixed amplitude Independent of pressure on inlet
and outlet port
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Modeling
2. Design Issues
3. Integrated Check Valves
4. Fixed-Geometry Valves
5. Pumping Valve
6.1. Microdisplacement Pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.3. Peristaltic Micromembrane Pump
J.G. Smits; MESA; 1983„Piezoelectric micropump for peristaltic fluid displacement“; Patent NL 8302860
3 active displacers (microvalves) Piezoelectric actuation
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Milestones
1980peristaltische Verdrängerpumpe
1988Verdrängerpumpe mit Rückschlagventilen
Milestones in evolution ofmicrodisplacement pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.3. Displacement Pump with Check Valves
Harald van Lintel et al.; MESA, 1988
„A piezoelectric micropump based on micromachining of silicon“
Piezoelectrically actuated displacer
Two membrane valves
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.3. Pump Performance
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Modeling
2. Design Issues
3. Integrated Check Valves
4. Fixed-Geometry Valves
5. Pumping Valve
6.1. Microdisplacement Pumps
Microfluidics - Jens Ducrée Micropumps 33
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Milestones
1980peristaltische Verdrängerpumpe
1988Verdrängerpumpe mit Rückschlagventilen
1993ventillose Verdrängerpumpe
Milestones in evolution ofmicrodisplacement pumps
Microfluidics - Jens Ducrée Micropumps 34
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Fixed-Geometry Valves
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Fixed-Geometry Valves
Göran Stemme et al.; KTH; Stockholm, 1993
„A novel piezoelectric valve-less fluid pump “
Piezoelectrically actuated displacer
Diffuser / nozzle as rectifier
Piezoaktor Membran
Microfluidics - Jens Ducrée Micropumps 36
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Fixed-Geometry Valves
Anders Olson„Valve-Less Diffuser Micropumps“Dissertation, Stockholm 1998;
Microfluidics - Jens Ducrée Micropumps 37
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Fixed-Geometry Valves
Anders Olson„Valve-Less Diffuser Micropumps“Dissertation, Stockholm 1998;
Described by set of differential equations:
Microfluidics - Jens Ducrée Micropumps 38
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6.1.4. Fixed-Geometry Valves
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Fixed-Geometry Valves
Thorsten Gerlach et al.; TU-Illmenau; 1995
Piezoelectrically actuated displacer
KOH-etched diffuser / nozzle
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Tesla Valve
Components:
Bypass at deviating angles
Pros:
simple
compact
Drawbacks:
Low forward/backward ratio
High „leak rate“
vorwärts
rückwärts
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
vorwärts
rückwärts
6.1.4. Tesla Valve
Components:
Bypass at deviating angles
Pros:
simple
compact
Drawbacks:
Low forward/backward ratio
High „leak rate“
Microfluidics - Jens Ducrée Micropumps 42
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.4. Tesla Valve
Fred Forster et al.; University of Washington; 1998
Piezoelectrically actuated displacer
Bypass-valves (TESLA-valve) as rectifier
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Modeling
2. Design Issues
3. Integrated Check Valves
4. Fixed-Geometry Valves
5. Pumping Valve
6.1. Microdisplacement Pumps
Microfluidics - Jens Ducrée Micropumps 44
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Milestones
1980peristaltische Verdrängerpumpe
1988Verdrängerpumpe mit Rückschlagventilen
1993ventillose Verdrängerpumpe
1995Verdrängerpumpe mitVorwärts- & Rückwärtsgang
Milestones in evolution ofmicrodisplacement pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.5. Bidirectional MDP
R. Zengerle et al; FhG-IFT, 1995
„A bidirectional silicon micropump“
Electrostatic actuation
Flap valves
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.5. Bidirectional MDP
R. Zengerle et al; FhG-IFT, 1995
„A bidirectional silicon micropump“
0
/2
0
A(f
)ph
ase
shift
(f)
frequency f
Ventilklappe
Silizium
x
m x + k x + D x = f (t)flap
.. .
x(f,t) = eA(f)i(2 ft - ) (f)
Bewegung der Ventilklappe Motion of flap
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.5. Bidirectional MDP
driv
ing
pres
sure
tran
sien
t va
lve
flow
valv
em
ovem
ent
0
0
0
time [unscaled]
= 0
harmonic actuation
valve is closedat: x = 0
check valveprevents back flow > 0
0
0
0
time [unscaled]
= 3/4 phase shift betweendriving pressureand valve opening
valve is open when the driving pressure is directed in reverse direction back flow
< 0
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.5. Milestones
1980peristaltische Verdrängerpumpe
1988Verdrängerpumpe mit Rückschlagventilen
1993ventillose Verdrängerpumpe
1995Verdrängerpumpe mitVorwärts- & Rückwärtsgang
1996pumpendes Mikroventil mitVorwärts- & Rückwärtsgang
Milestones in evolution ofmicrodisplacement pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1.5. VAMP
M. Stehr et al; HSG-IMIT; 1996
„The VAMP - A microvalve with bidirectional pump effect“
ph
Grundplatte
Dichtfläche
Anschluß 1 Anschluß 2
Variable Gap Mechanism
0 50 100 150 200 250-1000
-500
0
500
1000
1 --> 2 type A1voltage 150 Vfluid: water
2 --> 1pum
p ra
te [µ
l/min
]
actuation frequency [Hz]
Spannung < 0: Ventil geschlossenSpannung > 0: Ventil ist offen Spannung Mikropumpe
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Milestones
1980peristaltische Verdrängerpumpe
1988Verdrängerpumpe mit Rückschlagventilen
1993ventillose Verdrängerpumpe
1995Verdrängerpumpe mitVorwärts- & Rückwärtsgang
1996pumpendes Mikroventil mitVorwärts- & Rückwärtsgang
?Milestones in evolution ofmicrodisplacement pumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Check-Valved Microdisplacement Pumps
Common sources of failure
Failure due to gas bubbles Reduced volume of pump
chamber Higher compression ratio
Leakage External or integrated particle
filters
Economical High fabrication costs
Low production numbers
FhG-IFT: 1996
Forschungszentrum Karlsruhe
IMM-Mainz
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Pressure-Controlled Microdosage
Operating principles Pressurized reservoir Capillary (glass, silicon-etched)
High hydrodynamic resistance
Adjustment of resistance to desired flow rate
Flow rate Constant in time Unchangeable
Optional Active valve to interrupt flow
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Implantable Drug-Delivery System
Tricumed (Kiel) Spring mechanism exerts pressure
on reservoir Resistance by long and tiny capillary
etched in silicon
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
6.1. Extracorporal Drug-Delivery System
Electrochemical Dosage
Pressure generated by electrochemical reaction
No resistance required
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Advantages No moving parts Fabrication of electrodes well compatible with microtechnology Planar flow profiles
Two technological branches Static fields
- Charge carriers Interfaces Injected
Traveling fields- Gradient of electrical properties
Conductivity Permittivity
6.2. Electric-Field Mediated Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Electro-Osmotic Pumping
2. Static Electrohydrodynamic Pumping
3. Traveling-Wave EHD Pumping
6.2. Electric-Field Mediated Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Electric field
Electric double layer on wall of capillary
Net motion of bulk fluid
Characteristics Flow controlled by electric potential Pulseless pumping Planar flow profile No moving parts
6.2.1. Electro-Osmotic Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Speed of flow
Speed on mm s-1 time scale
Pump rate
Against back pressure p Porosity Tortuosity Detailed treatment of potential
6.2.1. Electro-Osmotic Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Equivalent pressure Without back pressure Equivalent flow rate of PDF
Thermodynamic efficiency
6.2.1. Electro-Osmotic Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Tee section Potential drives flow from (sep) to (g) Coating of ground channel (g)
Continuity of mass Pressure on liquid located in intersection Pumping into free-floating channel (ff)
6.2.1. EOF-Induced Hydraulic Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Electro-Osmotic Pumping
2. Static Electrohydrodynamic Pumping
3. Traveling-Wave EHD Pumping
6.2. Electric-Field Mediated Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Charge surplus in insulating liquid
Pair of grid electrodes
Coulomb force on bulk liquid in electric field
Pump rate scales with field strength
Direct conversion of electric into mechanical energy
6.2.2. Static Electrohydrodynamic Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Electro-Osmotic Pumping
2. Static Electrohydrodynamic Pumping
3. Traveling-Wave EHD Pumping
6.2. Electric-Field Mediated Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Gradient Conductivity Permittivity
Traveling E-field
Net pumping action
6.2.3. Traveling-Wave EHD Pumping
•Layered fluids
•Suspended particles
•Externally generated fluid anisotropy
•Self-generating fluid anisotropy
Microfluidics - Jens Ducrée Micropumps 66
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 67
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pressure head
Pump rate
6.2.3. Magneto-Hydrodynamic Pumping
Lorentz force
current
Microfluidics - Jens Ducrée Micropumps 68
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 69
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Characteristics Active-channel technique Valve-less Ultrasonic
Momentum transfer from channel wall to fluid
6.4. Acoustic Streaming
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Flexural plate wave (FPW) Traveling mechanical wave Grazing channel wall
Interdigital transducer Thickness of few µm Spacing of electrodes by about 100 µm Frequencies of some MHz
6.4. Acoustic Streaming
Microfluidics - Jens Ducrée Micropumps 71
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Velocity profile
Evanescent length
Flow velocities ver small for y > levan
For y > levan : Flow rate widely
independent of channel height
6.4. Acoustic Streaming
Microfluidics - Jens Ducrée Micropumps 72
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Flow control by surface acoustic waves (SAWs)
6.4. Advalytix
Microfluidics - Jens Ducrée Micropumps 73
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 74
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Capillary effects
Variations in surface tension
Variations in contact angle
Contact between different phases Transport of discrete sampels
- Plugs- Droplets
6.5. Pumping by Interfacial Tension
Microfluidics - Jens Ducrée Micropumps 75
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Thermocapillary Pumping
2. TCF of Droplets on Free Surfaces
3. Electrowetting
4. Electrocapillary Pumping
6.5. Pumping by Interfacial Tension
Microfluidics - Jens Ducrée Micropumps 76
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Thermocapillary flow (TCF) Difference in surface tension Thermal gradient Difference in internal pressures at menisci of liquid plug
Implementation by precisely controlled heaters
6.5.1. Thermocapillary Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Thermocapillary Pumping
2. TCF of Droplets on Free Surfaces
3. Electrowetting
4. Electrocapillary Pumping
6.5. Pumping by Interfacial Tension
Microfluidics - Jens Ducrée Micropumps 78
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
TCF based delivery of droplets on free surface Chemically patterned substrate Hydrophilic stripes
Equation of motion Direction of flow x Lateral coordinate y Height profile h(x) Temperature profile T(x) Width of stripes w
Flow speed of 600 µm s-1
Viscosity of 5 mPa s Width of 800 µm Temperature gradient of 14.4 K cm-1
6.5.2. TCF of Droplets on Free Surfaces
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Thermocapillary Pumping
2. TCF of Droplets on Free Surfaces
3. Electrowetting
4. Electrocapillary Pumping
6.5. Pumping by Interfacial Tension
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Gradient in local cohesion energy Controlled by voltage on electrodes Voltage-induced surface charges
Gradient in cohesion energy Net capillary pressure Pumping
6.5.3. Electrowetting
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Thermocapillary Pumping
2. TCF of Droplets on Free Surfaces
3. Electrowetting
4. Electrocapillary Pumping
6.5. Pumping by Interfacial Tension
Microfluidics - Jens Ducrée Micropumps 82
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Control of contact angle by voltage
Array of 1000s of hydrophobically coated 3D microchannels
Electrostatic control of interfacial tension Induced image charges Reversible fluid displacement
Electrocapillary pressure
6.5.4. Electrocapillary Pumping
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
1. Microdisplacement Pumps
2. Electric-Field Mediated Pumping
3. Magneto-Hydrodynamic Pumping
4. Acoustic Streaming
5. Pumping by Interfacial Tension
6. Miscellaneous
6. Micropumps
Microfluidics - Jens Ducrée Micropumps 84
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Working diagram Flow rate Backpressure
Maximum flow rate ( p = 0 ) Maximum backpressure ( I = 0 ) Working point
6.6. Miscellaneous
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Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Pr axisbe ispiel: Ausar beitun gsphaAu sarbeit ung de r Stand ard-Ze lle
Comparison of pump principles Maximum backpressure Maximum flow rate
6.6. Miscellaneous
Microfluidics - Jens Ducrée Micropumps 86