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Design Rules EE213 VLSI Design

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Design Rules

EE213 VLSI Design

Stick Diagrams

• VLSI design aims to translate circuit concepts onto silicon

• stick diagrams are a means of capturing topography and layer information - simple diagrams

• Stick diagrams convey layer information through colour codes (or monochrome encoding

• Used by CAD packages, including Microwind

Design Rules

• Allow translation of circuits (usually in stick diagram or symbolic form) into actual geometry in silicon

• Interface between circuit designer and fabrication engineer

• Compromise– designer - tighter, smaller– fabricator - controllable, reproducable

Page 4: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Lambda Based Design Rules

• Design rules based on single parameter, λ

• Simple for the designer

• Wide acceptance

• Provide feature size independent way of setting out mask

• If design rules are obeyed, masks will produce working circuits

• Minimum feature size is defined as 2 λ

• Used to preserve topological features on a chip

• Prevents shorting, opens, contacts from slipping out of area to be contacted

Page 5: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Design Rules - The Reality

• Manufacturing processes have inherent limitations in accuracy and repeatability

• Design rules specify geometry of masks that provide reasonable yield

• Design rules are determined by experience

Page 6: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Problems - Manufacturing

• Photoresist shrinking / tearing

• Variations in material deposition

• Variations in temperature

• Variations in oxide thickness

• Impurities

• Variations between lots

• Variations across the wafer

Page 7: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Problems - Manufacturing

• Variations in threshold voltage

– oxide thickness

– ion implantation

– poly variations

• Diffusion - changes in doping (variation in R, C)

• Poly, metal variations in height and width -> variation in R, C

• Shorts and opens

• Via may not be cut all the way through

• Undersize via has too much resistance

• Oversize via may short

Page 8: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Meta Design Rules

• Basic reasons for design rules

• Rules that generate design rules

• Under worst case misalignment and maximum edge movement of any feature, no serious performance degradation should occur

Page 9: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

Advantages of Generalised Design Rules

• Ease of learning because they are scalablem portable, durable

• Longlevity of designs that are simple, abstract and minimal clutter

• Increased designer efficiency

• Automatic translation to final layout

Page 10: Design Rules EE213 VLSI Design. Stick Diagrams VLSI design aims to translate circuit concepts onto silicon stick diagrams are a means of capturing topography

References

• Pucknell and Eshraghian pages 62 - 92

• Fabricius pages76 - 82

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