dopant diffusion revisited - university of california ...ee243/sp10/ee143/lectures/lec_10.pdf ·...
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
1
Dopant Diffusion Revisited
•Diffusion Mechanisms
•Dopant interactions with Point Defects of Si substrate
- Dopant Diffusivity affected by Dopant Concentration- Dopant Diffusivity affected by Point Defect Concentration- Point Defect Concentration affected by Dopant Concentration- Point Defect Concentration affected by Processing Steps
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
2
2) Diffusivity of Si interstitials and Si vacancies >> diffusivity of dopants
1) Thermal-equilibrium values of Si neutral interstitials and vacancies at diffusion temperatures<< doping concentration of interest (1015 –1020 /cm3)
Si Native Point Defects
At 1000oC, CIo* ~ 1012 /cm3CVo* ~ 1013 /cm3
For reference only
Si vacancy Si interstitial
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
3
(a) Interstitial Diffusion
Diffusion Mechanisms in Si (A) No Si Native Point Defect Required
10-6 cm2/secAu
Cu
Fast Diffusion
Example: Cu, Fe, Li, H
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
4
(a) Substitutional Diffusion
Diffusion Mechanisms in Si
(B) Si Native Point Defects Required (Si vacancy and Si interstitials)
(b) Interstitialcy Diffusion
Example: Dopants in Si ( e.g. B, P,As,Sb)
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
5
(c) Kick-Out Diffusion (d) Frank Turnbull Diffusion
(B) Si Native Point Defects Required (Si vacancy and Si interstitials)continued
10-12 cm2/sec
B,P
As
Slow Diffusion
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
6
Diffusivity Comparison:Dopants, Si interstitial, and interstitial diffusers
108 times higher
For reference only
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
7
High Concentration Diffusion Effects
Log C(x)
x
Low conc profile:Erfc or gaussian
Log C(x)
x
J large
J small
High conc. profile:D gets largerwhen C(x) is large
* C(x) looks “flatter”at high conc. regions
1) E-Field Enhanced Diffusion2) Charged point defects enhanced diffusion
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
8
(1) Electric-field Enhancement
Example: Acceptor Diffusion
Na(x)
Na(x)=Na-(x)
p(x)
hole gradient
x
Hole diffusion tendency
E build-in
Complete acceptorionization at diffusion temperature
At thermal equilibrium, hole current =0Hole gradient creates build-inelectric field to counteract the hole diffusion tendency
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
9
B-
+[p]holes tends to moveaway due to holeconcentration gradient
Ebuild-in
B- acceptorsexperiencean additionaldrift force
Enhanced Diffusion for B- acceptor atoms
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
10
[ ]dx
pdq
kTdxdp
pqkT
E
mequilibriuthermalatdxdp
qDEpqJ ppp
ln
1.
0
⋅=
⋅⋅=⇒
=⋅−⋅⋅⋅= µ
Calculation of build-in Electric Field E
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
11
Since
Total acceptor atom flux
A =µ
NEDF AAA ⋅⋅--= µdNA/dx
= (diffusion + drift) components
DA/[kT/q] from Einstein’s Relationship
Na-(x)
E
x
Calculation of total diffusion flux F
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
12
[ ]
[ ]22
22
2
4
1ln2
4)2(&)1(
)2(
)1(
ln
iA
A
iAA
i
A
AA
A
nNdxdN
dxpd
nNNp
ActionMassofLawnpn
NeutralitychargeNnpFrom
Ndx
pddx
dNDF
+⋅=∴
++=∴
=
+=
⋅+⋅−=
−
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
13
2
1
41
11
2
2
→<<→>>
+
+⋅⋅−=
−
hNn
hNnIf
Nndx
dNDF
Ai
Ai
factorh
A
i
AA
44 344 21
high dopant conc.
∴
low dopant conc.
Value of h depends on concentration NA
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
14
Temp range for dopant diffusion
Intrinsic Carrier Concentration ni
If n or p > ni(Tdiffusion), we will expect to observe high concentration diffusion effects.
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
15
E-Field Effect ExampleHow the uniform substrate concentration is perturbed by E-field of diffusion specie
Asdiffusion
Uniform B conc in substrate
caused by Asconc gradient
B-
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
16
(2) Diffusion Enhanced by Charged Point Defects (e.g. Vacancies)
Vo = neutralV+ = + vacancyV- = - vacancyV= = - - vacancy
…..
Si vacancy
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
17
Possible Point Defect Configurations
For reference only
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
18
• Neutral interstitial and vacancy point defects present at thermal equilibrium
• Charged Point Defects enhanced by heavy doping; total point defect concentrations enhanced by ~10x
I+, Io, I-
V+, Vo, V-, V=
•Point defects Injected by interfaces during oxidation(total point concentrations enhanced by ~10x)
• Implantation collisions (total point defect concentration enhanced by ~ 1000X)
How processing steps affect point defect concentrations
At 1000oC, CIo* ~ 1012 /cm3
CVo* ~ 1013 /cm3
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
19
K c = [Vo] nr
[V -r ]=
[Vo] n ir
[V i -r ]
[V -r]
[V i -r ]= [
nni
] r
where n = electron concentration , [ ] denotes the concentrations ,subscript i denotes condition for intrinsic Si
1) Negatively charged vacanciesVo + r • electrons ↔ V -r (r = 1,2,3…)
2) Positively charged vacanciesVo + r • holes ↔ V +r (r =1,2,3…)
[V +r]
[V i +r]= [
pni
] r = [nin ] r
p =hole concentration
Law of Mass Action
For the reaction : a•A + b • B ↔ c • C
[A] a [B]b
[C]c= Kc
[ ] denotes concentrationKc = equilibriumConstant at Temp T
Derivation of charged vacancy concentration
same Kc for undoped Si
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
20
...2
+
⋅+
⋅+
⋅+= =−+
ii
ii
ii
o
nn
Dnn
Dnp
DD
Why each diffusivity written with ni as normalization factor ?
Dtotal
Consider the +charge vacancy first , D+ ∝ [V+].From Law of Mass Action: [V+] ∝ p Therefore , D+ ∝ p and can be written as D+ = K• p where K is a proportionality constant
Let us multiply K by ni and call it Di+, then D+ = Di
+• (p / ni )The physical meaning of Di
+ is diffusivity D+ for undoped siliconbecause p = ni for undoped silicon
Similarly, Di- and Di
= are diffusivity values for undoped Si due to –charge and = charge vacancies
Charged Vacancy Enhanced Diffusion
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
21
...++++= =−+ DDDDD ov
...2
+
⋅+
⋅+
⋅+= =−+
ii
ii
ii
o
nn
Dnn
Dnp
DD
Do = Dio exp(-Eia / kT) <-- diffusion coefficient for diffusion vianeutral vacancies
Di+ = Do
+ exp(-Ea+/kT) <-- diffusion coefficient for diffusion via
singly positively charged vacancies
Di- = Do
- exp(-Ea-/kT) <-- diffusion coefficient for diffusion via
singly negatively charged vacancies
Di= = Do
= exp(-Ea=/kT) <-- diffusion coefficient for diffusion via
doubly negatively charged vacancies
Note that p/ni = n/ni = 1 for intrinsic (i.e. undoped) material!
Charged Vacancy Enhanced Diffusion
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
22
Example : High Concentration Arsenic diffusion profile becomes “box-like”
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
23
First, Check if doping concentration is > ni(T) or < ni(T)
If doping conc < ni:D= Do
Use constant diffusivity solutions(profile is erfc or half-gaussian)
If doping conc > ni:
Use D = Dv = h [ Do + D+ + D- + D= + ...](Solution requires numerical techniques)
Summary of High-Concentration Diffusion
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
24
Oxidation Enhanced Diffusion (OED)
Field Oxide
Example:Channel-stop implant diffuses faster during field oxidation
Diffusivity is enhanced for B and P underneath a growing oxide
SiO2
SiSi[I]
Injected Si[I] interstitialsenhance dopant diffusion
Note: The dopant Sb shows retarded diffusivity during oxidation=> it diffuses primarily via the vacancy mechanism
DOED = D + ∆D ∆D ∝ [dXox / dt]n where 0.4 < n < 0.6
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
25
Transient Enhanced Diffusion (TED)
Dopant Implantation
Sisubstrate
Implantationinduced excesspoint defects
x
C(x)
no annealing
900oC, several sec (TED)Extremely rapid diffusion due to excess point defects
Implantation createslarge number of excess Siinterstitials and vacancies.(1000X than thermal process).After several seconds of annealing, the excess point defects recombine.
900oC, several minutes(After excess point defects recombine. slower diffusion)
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Professor N Cheung, U.C. Berkeley
Lecture 10EE143 S06
26
•Difficult to make ultra-shallow (< 0.1µm) junctionswith implantation and annealing
Annealingtime
JunctionDepth xj
TED
Normal diffusion (with high concentration effects)
seconds
Junction Depth versus post-implantation annealing time