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Outline
1 Introduction
2 Basic IC fabrication processes
3 Fabrication techniques for MEMS
4 Applications
5 Mechanics issues on MEMS
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3. Fabrication Techniques for MEMS
3.2 Surface micromachining
3.3 LIGA process
3.1 Bulk micromachining
3.4 Hybrid micromachining
3.5 Thick micromachined structures
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3.2 Surface Micromachining
• The surface micromachined structures are constructed by : (1) structural layer, and (2) sacrificial layer
• Space between each components is limited by the thickness of the sacrificial layer
• Surface micromachining - the technique to construct micromechanical devices on top of the silicon substrate
Structural layer
Sacrificial layer
• After the sacrificial layer is removed, the structural layer will be released from the substrate
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• The primary advantage of surface micromachining is its capability of fabricating movable micromachined structures with geometriesless restricted through the conventional IC process
M. Mehregany, K.J. Gabriel, and W.S.N. Trimmer, IEEE Transactions on ED, 1988.
M.W. Putty and K. Najafi, Proc. of IEEE Solid State Sensor and Actuator Workshop, 1994.
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• In general, all of the materials can be selected as the structural and sacrificial layer, however the most common material for surface micromachining is:
+ For sacrificial layer - thermal or LPCVD SiO2 or LPCVD phosphosilicate (PSG)
+ For structural layer - LPCVD polysilicon
• The discussion in this section will include
+ Simple surface structures - constructed by one sacrificial layer and one structural layer
+ Complicated surface structures - constructed by multiple structural layers and multiple sacrificial layers
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Deposit or grow a sacrificial layer
Deposit the structural layer
Spin coat PR and then patterned with mask
• Fabrication processes for single mask structures
UV
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end pad
Pattern the structural layer
Etch the sacrificial layer
• Since the processes have undercut effect, the end pads have to be big enough to obtain a well support structure
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• Fabrication processes for two masks structures
Pattern the sacrificial layer
Spin coat PR and then patterned with 1st mask
Deposit or grow a sacrificial layer
UV
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Deposit sturcturallayer
Spin coat PR and pattern PR by 2nd mask
Pattern the sturctural layer
Etch the sacrificial layer
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R.T. Howe and R.S. Muller, J. of Electrochemical Society, 1983.
C.H. Mastrangelo and C.H. Hsu, J. of MEMS, 1993.
• Surface micromachined beams
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Deposit or grow a sacrificial layer
Pattern the sacrificial layer by1st mask.
Deposit the structural layer
Pattern the structural layer
Etch the sacrificial layer
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• Surface micromachined membrane (suspension)
C.H. Mastrangelo and C.H. Hsu, J. of MEMS, 1993.
W. Fang and J.A. Wickert, Data Storage Systems Center Annual Report, 1993.
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L. Lin, R. Howe, and A.P. Pisano, Proceedings of IEEE Workshop on MEMS, 1993.
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• Fabrication processes for three masks structures
Deposit or grow a sacrificial layer
Spin coat PR and thenpatterned with 1st mask
Pattern the sacrificial layer
Spin coat PR and then patterned with 2nd mask
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Pattern the sacrificial layeragain to define a bushing
Deposit the structural layer
Spin coat PR nad patternPR by 3rd mask
Pattern the sturctural layer
Etch the sacrificial layer
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Stiction during drying process
• Drying process is more critical for surface micromachining sincethe gap between each layer is only several microns
• The stiction is induced by two mechanisms:
Initial state Bent Stiction
+ Bent: the structure bent by the surface tension of the solution during drying
+ Stiction: the structure bonded to the substrate due to the chemical reaction between the contact area
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C.H. Mastrangelo and C.H. Hsu, J. of MEMS, 1993
bonded to the substrate
bonded to the substrate
bonded to the substrate
• Sticking of surface micromachined beams and membrane
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• Many techniques are proposed to reduce the stiction problem
+ Reduce the contact area
+ Reduce the drying time (use IPA instead of water)
+ Dry or supercritical release
+ Add supporting structures
+ Harmonic excitation
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• Reduce the contact area
+ Add bushing (or called dimple) to the substrate
Bushing
+ Surface roughening
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• Dry or supercritical release
+ Freeze drying method
1. Rinse by DI water after etching
2. Rinse by IPA (isopropyl alcohol)
3. Freeze in t-Butyl alcohol
4. Vaporized in a vacuum chamber
N. Takeshima et.al., Tech. Digest, Int. Conference on Solid-state sensors and actuators, 1991
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+ Supercritical CO2 drying method
1. The substrate is initially placed in methanol inside a pressure vessel
2. Replace methanol by liquid CO2 at 25°C and 1200 psi
3. Heat liquid CO2 to supercritical fluid
4. Vent vessel at a constant temperature (above Tc)
S
V
L
SF
Temperature
Pressure
Tc
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• Polymer columns - add polymer columns to the surface micromachinedstructures as extra supports during etching and drying processes
C.H. Mastrangelo and G.S. Saloka, Proceedings IEEE Workshop on MEMS, 1993.
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polymer column
C.H. Mastrangelo and G.S. Saloka, Proceedings IEEE Workshop on MEMS, 1993.
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G.K. Fedder and R.T. Howe, Proceedings IEEE Workshop on MEMS, 1991.
• Fuses - a very long cantilever beam supported by a structure temporary, and then cut after drying
Before drying
After drying
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Deposit or grow a sacrificial layer
Spin coat PR and then patterned with 1st mask
Pattern the 1st sacrificial layer
• Fabrication processes for a surface micromachined rotor with bushing
UV
Complicate surface structure
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Deposit the 1st structural layer
Spin coat PR and patterned with 2nd mask
Pattern the 1st sturctural layer
Deposit the 2nd sacrificial layer
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Spin coat PR and then patternedwith 3rd mask
Pattern the 1st and 2nd sacrificial layer
Deposit the 2nd structural layer
UV
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Spin coat PR and then patternedwith 4th mask
Pattern the 2nd structural layer
Etch the sacrificial layer
UV
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M. Mehregany, K.J. Gabriel, and W.S.N. Trimmer, IEEE Transactions on ED, 1988.
• Surface micromachined rotor
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• Surface micromachined slider driven tweezers
M. Mehregany, K.J. Gabriel, and W.S.N. Trimmer, IEEE Transactions on ED, 1988
slider
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slider crank
hinge
L.-S. Fan, Y.-C. Tai, and R.S. Muller, IEEE Transaction on ED, 1988.
• Surface micromachined spring, slider, hinge and crank
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spring
L.-S. Fan, Y.-C. Tai, and R.S. Muller, IEEE Transaction on ED, 1988.
Microspring
spring
anchor
anchor
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Define the hub
Define the junction ofthe spring and the rotor
Deposit the 2nd structural layer
Define the spring
Remove the sacrificial layer
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Surface micromachined actuators
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Comb-drive actuator
Stationary electrode
Isolation
Interconnect (ground plane)
W.C. Tang, T.-C.H. Nguyen, and R.T. Howe, IEEE MEMS Conference, 1989
Movable plateComb electrode
Movable plate
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Deposit dielectric films (prevent electrical breakdown)
Deposit and pattern 1st poly asinterconnect layer
Deposit and pattern 1st PSG as sacrificial layer
Remove the sacrificial layer
Deposit and pattern 2nd poly as structural layer
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• Surface micromachined impact vibromotor
A.P. Lee and A.P. Pisano, J. of MEMS, 1992
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Micromotor
Driving electrode
Isolation
Human hair Micromotor
SEM photograph by T. Boot and R.M. White at U.C. Berkeley
Interconnect, or electrostatic shield
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Poly 2
Poly 1
Poly 0
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M. Mehregany el al., Sensors and Actuators, 1990
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K. Deng, M. Mehregany, and A.S. Dewa, J. of MEMS, 1994
U. Beerschwinger et al., J. of MEMS, 1994
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Sandia National Lab, USA
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Fukuta, 1997
Scratch drive actuator (SDA)
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T. Akiyama and K. Shono, J. of MEMS, 1993
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Electrothermal actuator
J.H. Comtois and V.M. Bright, Sensors and Actuators A, 1997
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Micro hinge and self assembly
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MDLNTHU
Microhinge (out-of-plane)
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MDLNTHU
Deposit 1st sacrificial layer
Deposit and Pattern 1st sturctural layer
Deposit 2nd sacrificial layer
Deposit and Pattern 2nd sturcturallayer
Remove sacrificial layers
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MDLNTHU
• Employ stress-beam to increase moving space
• Fully integration with process
Stress-beam
Micro-structure
R
W. Fang, 1995
Self assembly
Stress-beam
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MDLNTHU
Y.-P. Ho, M. Wu, H.-Y. Lin and W. Fang, IEEE Optical MEMS ‘02, 2002
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D. C. Miller, 2000
Deviation of Deflection
0
20
40
60
80
100
120
140
1 2 3 4 5 6Time(month)
Def
lect
ion(
um)
Y.P. Ho, 2002
• Reliability issue need to be considered
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Y.-P. Ho and W. Fang, 2002
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M. Wu and W. Fang, 2002 H.-Y. Lin and W. Fang, 2002
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C.-Y. Wu, and W. Fang, 2002
• Active self-assembly
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OMM, 1999
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Micromachine
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UC BerkeleyUCLA
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J.H. Comtois and V.M. Bright, Sensors and Actuators A, 1997
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Beam and plate
19841988
Crank and spindle
19891992
Hinge
1993MUMPs
19951997
1998
Optical switchOptical bench
Motor Thermal actuatorComb actuator Optical scanner
2000
SDA
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• 7 layers total+ Nitride—Poly0 —PSG1 —
Poly1—PSG2—Poly2—Metal
2 released polysilicon layers2 PSG sacrificial layers
1 metal layer
• 8 masks
+ Poly0, Dimple, Anchor1, Poly1, Poly1_Poly2_Via, Poly2, Anchor2, Metal
Multi-User-MEMS-Process
+ Hole1, Hole2, Hole-metal...
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MDLNTHU
MUMPs process (MCNC - CRONOS - JDS-Uniphase)
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Applications
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OMM
• 2D optical switch by OMM
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MDLNTHU
Lucent
• 3D optical switch
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L.-Y. Lin and M. C. Wu, UCLA, 1995
• Free space optical bench
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MDLNTHU
UC Berkeley
• Optical scanner for display or barcode reader
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MDLNTHU
• Optical scanner
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MDLNTHU
Wang and Nguyen, 1997
• Low frequency bandpass filter
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Other surface processes platform
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Summit process (Sandia National Lab)
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Sandia National Lab, USA
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MDLNTHU
Sandia National Lab, USA
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MDLNTHU
Summit V process (Sandia National Lab)
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Thin film materials
• The thin film materials for surface micromachining can be characterized as (1) materials for structural layer, and (2) materials for sacrificial layer
• Several important issues need to be considered in selecting the proper thin film materials for structural and sacrificial layers
+ Residual stresses
+ Selectivity to etchants
+ Mechanical property
+ Conformal coverage
+ Process compatibility
+ Compatible with the standard IC process
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MDLNTHU
LPCVD Polysilicon
• Reaction of silane at 500 to 700 °C and 300-500 mTorr to generate silicon
SiH4 Si + 2H2
+ Amorphous silicon for T < 580 C o
+ Polysilicon for T > 580 Co
+ Crystal structure of the amorphous silicon can transfer to polysilicon by high temperature annealing
• Comformal coverage
• Young's modulus vary from 140 GPa to 210 GPa(Al is 70 GPa, steel is 210 GPa)
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MDLNTHU
LPCVD Oxides
• Reaction of silane and oxygen at 450 C and 300-500 mTto generate oxide
o
SiH4 + O2 SiO2 + 2H2
+ Low temperature oxide (LTO) - LPCVD undoped oxide
+ Phosphosilicate glass (PSG) - LPCVD phosphorous doped oxide
+ Borosilicate glass (BSG) - LPCVD boron doped oxide
• Comformal coverage
• Selectivity to polysilicon is very high (for example, selectivity of polysilicon/LTO is ~ 10 )5
• Film is under compressive residual stress
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MDLNTHU
LPCVD Nitrides
• Reaction of dichlorosilane and ammonia at 700-900 C and 300-500 mT to generate silicon nitride
o
3SiCl2H2 + 4NH3 Si3N4 + 6HCl + 6H2
• Comformal coverage
• Film is under large tensile residual stress
• The residual stress can be reduced by changing the composition of Si3N4 to SixNy (silicon rich, x:y ~ 1:1.1)
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Residual stresses
• In general, the structures is under a uniform residual stress and a gradient residual stress
• The residual stresses of the deposited films will lead cracking (by tensile residual stress) and delamination (by both tension and compression) to the deposited films
• In addition, the mechanical structures will be deformed by the residual stresses
20 μmbending
+ The Ti film is deposited by sputtering
W. Fang and J.A. Wickert, J. of Micromech. and Microeng., 1996
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MDLNTHU
Limitation of the structure design
• Stiffness and patterning of the structure layers are two major concerns during design
• Spin coat the PR is difficult for a surface with large variation of its height
• The structure is easy to have large deformation under capillary force or residual stress if its stiffness is small (for example, a cantilever beam with small beam thickness or large beam length)
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MDLNTHU
Basic features
Mask number
MotionApproach to construct complicated structures
Materials
Applications
Surface micromachining
Bulk micromachining
> 1_ > 2_
In-planeOut-of-planeBonding and
etch stop layerLayer construction
PolysiliconSi or doped - SiSiO2
Fluidic system yesAccelerometer yes yes
Pressure transducer yes yes
silicon nitride
Actuatorangularlinear
out-of-plane yes
yesyes
Design of the structures Flexiblelimited