untitled--(VLS)
Hirabayashi O2-C2H2



22~25 °C
3-1 ASTeX

(secondary
85
X-ray
k 15 kV 1.5 nm
(2)



86
TEM
(chemical
EFTEM)
Gatan image filter (GIF)
87

2000

SEM Raman
Ni 10-6
Torr~1 Å/sec
88
stub
tuner
5 min
1000 W 60 Torr
(optical pyrometer) 1130 oC
(9 sccm) 291 sccm
3 % 5 min 2 hr

30 min

TEM
10 µm
{100}{111}
3-2(a-d) SEM
90
3-3 (a)(b)
91
HFCVD 3-5
( 3-3)
cm-1 peak sp2 1136 cm-1
peak paek
(nanocrystalline diamond)

3-7(a) 3-7(b) SEM Raman
1350 cm-1 1580 cm-1(disorder carbon)
(crystalline graphite) 3-8(a)
92
G1
262 eV sp2
sp2 sp3

sp2 sp3 100
sp2 sp2
2000
3000
4000
5000
6000
7000
8000
9000
200
400
600
800
1000
1200
In te
ns ity
Fig 3-6(b)
disorder carbon
(b) C KVV a b
c(Highly oriented pyrolytic graphite)[16]
96
3.3.3

EDS
3-9(b)
<0001><0001>
3-10<111><0001> (
P63/mmc a = 2.52 Å ;c = 4.12 Å)<0001> (
P63/mmc a = 2.47 Å ; c = 6.93 Å)
3-2 3-10 3-2

{ }1010
98
DIFFRACTION
SPOT
3-2
0011 2.182 Å Hexagonal Diamond
1021 1.260 Å 0112 1.235 Å
0011 2.139 Å Graphite 1021 1.235 Å
100
()
3-11(b)
) 3-4
>< 2110 1110 B
d
<111> 10.03o >< 4110 <0001> 9.03o
10o >< 4110
<0001> 14.83o B
<121><111> 19.47o
>< 2110 <0001> 17.64o
(19.5o) >< 2110 <0001>
27.91o
(shape effect)(
)
(

<121> >< 2110
B d c
d 1110 c 1021
1021 1110
c 220 d 111
111
(A axis B axis)
A axis :
B axis :
CUBIC DIAMOND
1021 1.260 Å 613.65 Hexagonal Diamond
1220 1.055 Å 8.49 1110 2.044 Å 13.37
1021 1.235 Å 17.3 Graphite 1220 1.057 Å 1.64
106
3-13(a) 3-13(b)) 3-13(a)<323><121>
<111><111>
<202> TEM
<323><121>
<323>
<121> >< 4110
>< 2110 <0001>
<111>

High order
order Laue zone (FOLZ) Laue circle
FOLZ ZOLZ

(H)d FOLZ ZOLZ(R) Laue circle
[4]
{0001}[111][0001]
CBED
FOLZ Ewald sphere
(R) FOLZ ZOLZ 6.22
Å 3-16 (a)<111>
FOLZ ZOLZ 6.18 Å 3-16 (b)
0001 FOLZ
ZOLZ 6.93 Å CBED

1021 3-11(b) B d
c CBED
FOLZ ZOLZ
[111] 3m
[0001] 6m 3-15(b) m
pattern
108


109
Laue circle
m
(b) 0001
(twin)
{ }2243/1 (Forbiddem diffraction spots) [5]
forbidden diffraction
FCC(


180o(

3-19<111><123>3-20(a-f)
( 3-20(a))[111]
[121]( 3-20(b-c))[231]
113
3-20(d))(matrix)(twin)
()

Wang[8]



(SAD) FOLZ
<121>
3-18 (a)[231](b)
[231] (*)(double
(c)[121](d)[231](e)[231]
111 (f) [231]
T111
EwaldEwald spheresphere

(bulk plasmon) 23 eV
(shoulder)(surface plasmon) sp2
[9] log-ratio
(low energy loss region)
I0 I0
Diffraction mode (image-coupled mode)camera length 150
mm Philips Tecnai 20GIF camera length
150 mm GIF(collection angle; β) 3.9 mrad
(λ)[18]
)/2ln( )/(106
0 )511/1( 1022/1
λ = 156 nmλ Iu Io
(3) 30 nm
SEM( 3-3)
( 3-23) [10-11]
EELS

log-ratio Zero loss peak Low energy
loss EFTEM GIF
log-ratio (elastic
image)(energy slit width) 5 eV
(unfiltered image low energy loss
) 3-24(a-e)



120 nm 6 nm
24~30 nm
<110> 60o
[231]


121
image(c) thickness mapping image(d)(e)
3-24(c) ab cd

57.6
220 {220}
{220}
123
Moiré fringe?
{ }0211 {220} 0.02 Å
{220}{ }0211 (3)Moiré fringe
54.7 Å
Moiré fringe
[111]dia//[0001]g ( )dia202 // ( )g0121 Evans

[111]dia//[0001]g ( )dia202 // ( )g0121 [12]
Lambrecht, Li Jungnickel
[13-15]

3-27
HRTEM
3-28(a-d)[111]
3-28 (b) 20 min
124
210 min
( 3-28(d))

126
3-28 (a) 0 min(b) 20 min(c) 90
min(d) 210 minMoiré fringe

128
3-29 (b)[110]
20 nm 3-29 (b)

111T
( 3-29 (d))
{111}/{001}
3-29 (e) TEM
3-29(a)
3-30(a) 3-29 (a)
ab c
129
3-30 (b)
3-30 (c)(

HRTEM HRTEM

{111}
(100)/(111)
[1-3](100)/(111)
3-29 (b)
(
{ }2243/1
([111] ZOLZ)
[111] { }2243/1

131
]101[ (c)(d)
3-29 (a) (e)
{111}/{001}
[111] ZOLZ FOLZ
[111] { }2243/1
]011[ ZOLZ
60 Torr 3 % 2

SEM


(pin hole)


136
1000 w 60 Torr 3 % 15
min30 min 60 min 3-35 15 min

{001}
3-39(a-c)
(
3-40 (a-c)

(roughening)




3-36()
{001}
3-41(c)


{100} CVD
{111}{100}()
Wang [8] TEM
{111}
{100}
SEM (b)
SEM
143
144

SEM
(b)
(c)
( 3-43(a)){001}{001}

153
{100}(b)


155
[110] 20~30 nm
()


3.5
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158
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