Download - Irsens nano-tera 2013
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IRSENS
Plenary meeting Bern May 30th, 2013
Integrated sensing platform for gases and liquids in the near and mid-infrared range
J. Faist, P. Jouy
ETH Zurich
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Sensing needs
Sensing of small molecules (CO, CO2, NxOy, ...)
Environment (Pollution, Modelling)
Medicine (Diagnosis, Monitoring)
gas fluid
Sensitive Selective Portable, Low Power
Infrared Spectroscopy Semiconductor System
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Approach: optical sensing
Laser detector
N O
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Project Synopsis: Partners
Gas
Liquid
Sources Interaction
system
Benchmarking
Software
Detection
Combine expertise of 7 Swiss groups:
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Pilot/focus applications
Gas: CO2 isotope ratios, e.g for plant respiration monitoring environment Liquid: Cocaine in saliva detection (presence yes/no) traffic security Platform: develop tools and techniques
Collaboration with industry (EPFL + industrial partner)
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in Gases
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
12C16O2: Main isotope.
13C16O2: indicator for heliobacter pyroli stomach cancer
18O12C16O: quantifiy soil exchange processes.
17O12C16O: tracer for stratospheric air.
Absorption Signature of CO2 Isotopes
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Absorption Signature of CO2 Isotopes
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Gas sensor: block diagram
Source: DFB Quantum Cascade Laser
Interaction system: cylindrical mirror cell
Detection: Quantum Cascade Detector
Compared to standard systems: - Replace MCT detector with III-V based quantum cascade detector - Develop a new interaction cell
Goal: all parts have a low production cost in large volume
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Gas sensor: toroidal multipass reflection cell
Angle of incidence: =3.103 deg Number of Passes: 29 Pathlength: 232 cm
Large incidence angle for short absorption path
B. Tuzson, M. Mangold, H. Looser, A. Manninen, L. Emmenegger, Opt. Lett. 38, 257 (2013).
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Gas sensor: toroidal multipass reflection cell
Small incidence angle for long absorption path
Angle of incidence: =1.765 deg Number of Passes: 51 Pathlength: 408 cm
B. Tuzson, M. Mangold, H. Looser, A. Manninen, L. Emmenegger, Opt. Lett. 38, 257 (2013).
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
With absorption mask
Without absorption mask -> interference, fringes
A patent was filed protecting the use of an absorption mask in a gas cell for MIR laser spectroscopy.
M. Mangold, B. Tuzson and L. Emmenegger, "Method for reducing fringes in laser spectroscopy measurements using an absorption mask in combination with multi-pass optical cells". Switzerland Patent 01884/12, 2012.
Gas sensor: toroidal cell with Fringe Killer
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Quantum cascade detector
Active region and responsivity of QCD
D. Hofstetter, J. Di Francesco, L. Hvozdarara, H.-P. Herzig, M. Beck, Appl. Phys. B 103, 967 (2011).
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Quantum cascade detector
Custom-made preamp for QCD
D. Hofstetter, J. Di Francesco, L. Hvozdarara, H.-P. Herzig, M. Beck, Appl. Phys. B 103, 967 (2011).
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Gas sensor: packaging
Measuring gases live in the exhibition!
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Gas sensor: packaging
Light source: a quantum cascade laser
Interaction system: a multipass reflection cell
Light detector: a quantum cascade detector
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
- Full control on experimental environment, laser operation, and data acquisition
- Real-time fitting engine (up to 1kHz)
- Directly linked to HITRAN database
13CO2 to 12CO2 isotope ratio measurements
100 101 102 103 104Averaging time (s)
1
0.1
Rel
. sta
ndar
d de
viat
ion
()
Isotope ratio measurement precision of 0.2 .
Ultra-compact CO2 isotope analyzer
Good commercialization potential
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in Liquids
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids
QCL Source
QCD Detector
Inlets and mixer Outlet
Waveguide
M Technological blocks: M QCL source, waveguide, QCD detector, microfluidics
M Benchmarking of the measurements M Compatible solvent: TCE (tetrachloroethylene) M Extraction and spectroscopy: ATR and direct detection
M Integration
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids: benchmarking with FTIR
100011001200130014001500160017001800
0
0.01
0.02
0.03
0.04
0.05
0.06
Abs
orba
nce
Wavenumber [cm1]
Comparison between spectra of pure cocaine, TCE phase of an extract from saliva spiked with pure cocaine and of an extract of saliva spiked with street cocaine (from the Forensic Science Institute Zurich)
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids: Si/Ge waveguides
Evanescence interaction:
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids: waveguide geometries
10 mm Limit of detection: 50 g/ml
Limit of detection: 5 g/ml
Improvements to integrate:
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Droplet Generation Parallel Flow Extraction Drainage
Merging Parallel Flow
outlet
inlet
Measurements in liquids: real microfluidic extraction
Saliva PCE Cocaine
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids: all integrated system
Cocaine measurement in saliva using the all in one chip:
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Measurements in liquids: status
Cocaine concentration
in saliva Detection limit of
our system Real life
equivalence
After one dose: 500 g/ml
5 g/ml
Legal limit: 20 ng/ml
All integrated system
Long waveguide-liquid interaction
100 g/ml
Integration of reference channel and stabilization to
reach I / I = 10-5
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Other developments: VCSEL
Technology development: Wafer-fused VCSELs emitting around 7600 cm-1
AlGaAs/GaAs based material (High refractive index contrast)
InAlGaAs/InP based material (High efficiency for 1200-1600 nm range)
Spectroscopy applications:
HF step detection Ammonia and methane spectra
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Wafer fused 1310 nm VCSEL performance
10 Gbps @ 20C, ER=3.5 dB, 231)
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Other developments: APD and SPAD array
light source
Performance (APD/linear mode) Min. Max Unit
Dark current @ 1V reverse bias 2 20 pA
Active area 4 40 m2
Breakdown voltage 9 13 V
Performance (Geiger mode)
DCR @ Ve = 1V 10 60 kHz
Id/Iref @ Ve=3V 25 %
FWHM Time jitter 900 ps
Excess bias voltage 0 4 V
Avalanche photo diodes:
Single Photon Avalanche Diodes array:
Exceptionally good current-voltage characteristics!
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Publications this year
M Sensing cocaine in saliva with infrared laser spectroscopy, Kerstin M.-C. Hans, Matthias Mller, Michele Gianella, Ph. Wgli and Markus W. Sigrist, Proc. SPIE 8591, 85910F (2013)
M Infrared detection of cocaine in saliva with a one-step extraction submitted
M Low-loss germanium strip waveguides on silicon for the mid-infrared, Y.-C. Chang, V. Paeder, L. Hvozdara, J.-M. Hartmann, and H. P. Herzig, Optics Letters 37, 2883 (2012).
M Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip , Y.-C. Chang, P. Wgli, V. Paeder, A. Homsy, L. Hvozdara, P. van der Wal, J. Di Francesco, N. F. de Rooij, and H. Peter Herzig, Lab on a Chip 12, 3020 (2012).
M Compact multipass optical cell for laser spectroscopy, B. Tuzson, M. Mangold, H. Looser, A. Manninen, L. Emmenegger, Opt. Lett. 38, 257 (2013).
M Droplet-based liquid-liquid extraction and on-chip IR-waveguide-spectroscopy: detection of cocaine in human saliva, P. Waegli, PhD manuscript (2012).
M A Ge-on-Si Single Photon Avalanche Diode Operating in Geiger Mode at Infrared Wavelengths, M. Aminian, A. Sammak, L. K. Nanver, and E. Charbon, SPIE Defense, Security and Sensing 2012
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
Conclusion
M All integrated gas detection demonstrator M First combination of QCL with QCD M State of the art measurements on CO2 isotopes (13C/12C ratio: 0.6 accuracy in 1s and 0.1 in 250s)
M Improvement of the detection limit (better QCD sensitivity, optimization of the gas cell)
M Multi gas detection (IrNOX and IrSens II) M Commercialization/industralization
M Integrated microfluidic system for liquid-liquid extraction mounted on a Si/Ge waveguide
M ATR measurements down to 5 g/ml concentrations
M Preconcentration microfluidic system M Integration of a reference channel and longer
waveguide-liquid interaction
M Development of wafer-fused VCSELs around 7600 cm-1 M Detection of several species (HF, Ammonia, Methane) M Characterization of APD with extremely good I-V properties M Optimization of VCSELs geometry for industrial production M Characterization of SPADs arrays
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Nano-Tera annual meeting, 30. 5. 2013 IrSens Jerome Faist
ETH K.Hans, Markus Sigrist M. Beck, B. Hinkov, P. Jouy, J. Faist EPFL E. Kapon, A. Sirbu, V. Yakovlev E. Charbon, P. Keijzer, M.Aminian A. Homsy, P. Wagli, N. DeRooij, L. Hvozdara, J. Di Francesco, Yu-Chi Chang, H.P Herzig
EMPA B. Tuzson, J. Jagerska, M. Mangold, L. Emmenegger
UNINE A. Wirthmueller, D. Hofstetter
FHNWS H. Looser, W. Koch
IrSens team