Download - MAPS development at IPHC for HEP and X-ray applicationsrd.kek.jp/slides/20171130/KEK_MAPSdevel_MKachel.pdf · IMNC, IPHC, CPPM, CERMEP, NeuroPSi. Currently integrating prototype sensor

MAPS development at IPHC for HEP and X-ray applications

Maciej [email protected]

IPHC & PICSEL group

MAPS for high energy physics

MAPS for low energy X-ray applications

Summary and Future

KEK, 30 Nov. 2017

mailto:[email protected]

M.Kachel - MAPS development at IPHC for HEP and X-ray applications 2

Institut Pluridisciplinaire Hubert Curien

IN2P3INC

INEE INSB

300 employees(100 researchers) Pluri-disciplinary: subatomic physics, chemistry, ethology

PICSEL group Complementary expertise

Physicists: 3 permanent, 1 post-doc

Micro-electronics designers: 11 permanents, 3 PhD students

5 test engineers Since 1999: 120 publications, 14

PhD defended ~50 sensors designed (MIMOSA

series)

M.Kachel - MAPS development at IPHC for HEP and X-ray applications

Partners Academics:

CERN, USA (Berkeley, Brookhaven), DESY (Hambourg), IHEP in China, CMOS foundries:

AMS, TSMC, STM , Tower-Jazz, ESPROS, X-FAB,

3

IPHC-PICSEL group: MAPS Detection of high energy particles with MAPS sensors

Pioneers in using Monolithic Active Pixel Sensors since 1998- Single particle detection position at m level

Very low signal (200 e-) Pixel noise 10 to 20 e- Pixel size 10 - 100 m Low occupancy 1%

Readout in 2 ways: Analog - external ADC Digital on-chip discrimination / ADC

Detection surface: Individual sensors: 1 to 4 cm2 Module with several sensors: .. tens of cm2 Full detector: few 100 cm2

P- substrate

N-WELLnn

P - WELLn n

collecting diodeNMOS NMOS

P - WELL

epitaxial layer ~20 m


IPHC-PICSEL strategy

5

EUDET 2006/2010Beam Telescope

Spin-off: Interdisciplinary applications, biomedical, space

ILC >2025Internatinal Linear Collider

CBM 2018Compressed Baryonic Matter

EUDET (R&D for ILC, EU project)

STAR (Heavy Ion physics)

CBM (Heavy Ion physics)

ILC (Particle physics)

HadronPhysics2 (generic R&D, EU project)

AIDA (generic R&D, EU project)

FIRST (Hadron therapy)

ALICE/LHC (Heavy Ion physics)

EIC (Hadronic physics)

Belle II (Particle physics)

CLIC (Particle physics)

ALICE 2019A Large Ion Collider at LHC

STAR 2014Solenoid Tracker At RHIC


IPHC-PICSEL: STAR experiment

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MIMOSA28 (ULTIMATE)

- ~ 1M pixels- Thinned to 50 m- 10 chips per ladder- Power dissipation

~350 mW /cm2

400 MIMOSA-28 sensors 360 106 pixels Air flow cooling Top 35C s.p. 4 mmat. budget = 0.39 % X0 / layer Read-out time ~ 190 s

Operated 2014-2016


PLUME Pixel Ladder with Ultra low Material Embedding

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Mimosa 26 sensors

Thickness 2 mm 8 Mpixels, Readout time 115 s, Material budget 0.4 % of X0 Weight - 10 g Power - 9 Watts (air cooled)


PLUME BEAST @ KEK


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SALAT - Single Arm Large Area TelescopeMotivation -> Big surface and thin reference planes

4.2 cm

4.6 cm

4 x Chips thinned down to 50 m glued on a 50 m thick mylar layer 3.6 M-pixels over 15.3 cm2 < 200 s integration time Gap between the pixels ~ 100 m

Build with AIDA european project


Molecular imaging with + emitters in moving rats MAPSSIC project:

Constraint on size and power dissipation 16 x 128 pixels pitch 30 x 50 m Pixel based on Alpide architecture (ALICE) Power consumption ~ 160 W Expected flux - few counts / s slow readout IMNC, IPHC, CPPM, CERMEP, NeuroPSi

Currently integrating prototype sensor

probe in the brain : - section ~500x500 m2

- sensitive volume (18 um) immune to


From previous project PIXSIC

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Current main project of PICSEL groupMIMOSIS - sensor for CBM experiment


MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group

*D. Kim, et al. Front end optimization for the monolithic active pixel sensor of the ALICE Inner Tracking System upgrade JINST, Volume 845, 11 February 2017, Pages 583-587

MIMOSIS pixel details: schematic

Vdiode

AMP

THR

Memory 1

Memory 2

MEM_SEL MEM_SEL

MEM

_RST

MEM

_FLUSH

MASKPIXEL_OUT

Sensingdiode

- Pixel design based on Alpide*- Modifications in sensing part and the memory part

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PrsentateurCommentaires de prsentationDifference with Alpide no trigger

13

Current main project of PICSEL group

MIMOSIS pixel details: layout

Single pixel


diode

MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group

14

But there is more than 1 pixel

Full sensor Overview Matrix of pixels 504 x 1024 Pixel pitch 26.88 x 30.24 m2 Configurable by I2C Integration time 5 s Readout: 8 x e-link @ 320 Mbit/s Small prototype produced First full scale submission

- Q3 2018


Monolithic Active Pixel Sensors for low energy X-ray applications

Motivation MAPS for Imaging Devices

Monolithic Sensor(ex: MAPS)

Hybrid Pixel SensorCCD

Sensitive Volume

Detector

Readout &Processing Cell

Pixel detector

Small pixel pitch Wide energy range Low noise (cooling) No single particle

image Limited counting rate

Single particle counting High counting rate Noise impacted by

detector connection High cost

Bonding detector

Single particle counting Small pixel pitch Low noise Low cost Moderate counting rate


PrsentateurCommentaires de prsentationparticles= photon, proton, electron, alpha..Single particle counting provides more information augmented imaging filterout energy improve resolution filter-out the noise !! Especially

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Depletion studies of MAPS Principle

Undepleted MAPS Fully depleted MAPS

p-- epitaxial layer

nwell

deep pwell

pwell

p+ n+ n+

nwell

n+ p+ p+ p+ p+

p substrate

collecting diode (~1 V)NMOS

transistorPMOS

transistor

Depletion RegionX-ray

photon

nwell

deep pwell

pwell

p+ n+ n+

nwell

n+ p+ p+ p+ p+

NMOStransistor

PMOS transistor

X-ray photon

collecting diode (~15 V)

high res p-- substrateor epitaxial layer

Charge collection by drift and diffusion Diode at ~ 1.0 V

Charge collection by drift Diode at higher voltage ~ 15-20 V

Motivation for having depleted sensors: Larger depleted volume -> Increased signal Drift -> Faster charge collection

-> Larger pixels possible (small clusters)


Depletion studies of MAPS

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Pipper sensor (FSI)

Epitaxial layer 18 um Czochralski substrate

Collecting diode

bias

read

Vdiode

Column OUTPUT

Prorotype - 32x128 pixels Pixel size 22x22 m2 Analog outputs AC coupled collecting diode Produced on two substrates:

Epitaxial layer 18m High resistivity substrate

Laboratory measurements with 55Fe in function of diode bias (1-20V)

Energy resolution obtained ~ 300eV


Depletion studies of MAPS (II)

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METAL layers + oxide ~10mMETAL layers + oxide ~10m

Goal: costless BSI sensor

[J. HEYMES]

Depleted zone

p+ layer

col. diode

Thinning 50 m Ion implant. Annealing

Preliminary studies on CZ wafer with 55Fe

col. diode

Post processing done in Jan 2017


Counting low energy X-rays - Mimosa 22SX

Vclamp

Cc

Rf

power

_powerCollecting diode

Vdiode

Column OUTPUT

Requirements: X-Ray Energy Range [few 100 eV 5 keV] with 100% QE

Counting Dynamic [1-107] ph/pix/s

High occupancy

High Spatial Resolution (pixel pitch ~ 20 m)

First prototype specs Tower Jazz 180 nm CIS

128 x 256 pixels with 22m pixel pitch

Collecting diode AC coupled to the amplifier

Discriminator with 2 thresholds -> energy window

Binary outputs

16 mm of active area

Mimosa 22SX

Strategy for counting: Small pixels amplification only Rolling shutter readout Column Discriminator Serialization and readout

Counting outside of the pixels


Mimosa 22SX energy window


NIR laser emulates a space-correlated continuous energy spectrum Short laser pulses (100ns) sent at the beginning of every recorded

frame Unfocused laser spot > center ~6000 eV, outer ring ~ 500 eV

NIR laser

Equivalent Stable number of pulses detected throughout range of thresholds=> suggest constant detection efficiency from 800 to 6000 eV

Reconstructed laser spot profile

M22SX results with X-rays

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Piece of a flex PCB - aluminum strips Image obtained with Mimosa 22SX

1. Front Side Illumination vs Back Side Illumination: Higher diode voltage => deeper depletion Higher number of counts BSI => full depletion of 40m probable Quantitative interpretation needs to account for charge sharing

Need low X-ray energy tests to verify that full depletionis achieved and entrance window is operational

2. X-ray Image (single photon counting)

Obtained with 55Fe very low flux Thickness of the aluminum strips calculated => 15 m for the thin (150m), and 50m for the thick strips


M22SX results Soleil 1.5keV

Post process M22SX Vdiode = 40V

We can see 1.5 keV photons!

23M.Kachel - MAPS development at IPHC for HEP and X-ray applications

A spin-off application for M22SX

Dose Monitoring at CYRC Cyclotron at IPHC: 24 MeV protons Milimeter beam size

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First tests with Mimosa 22SX Linear behaviour in the measured fluence range At least 1000 protons/pix/s possible

Motivation:Monitor dose for small beam size (problematic with current detector)


Depleted MAPS good for HEP!

Tests performed with irradiated Pipper2 chip at the University of Frankfurt


1013 neq/cmT=-60C

5x1014 neq/cmT=-60C

1V3V

10V 20V

1V3V

10V20V

1013 neq/cm2 performance restored after cooling 1015 neq/cm2 degraded, but we still see the energy peak

Summary future Plans

PICSEL group capabilities: Design of sensors for HEP experiments / low X-ray applications Readout systems Sensor integration into modules / detectors

Future plans : Sensor following MIMOSIS architecture (towards ILC)

- Integration time < 1s- Power pulsing-

Large(r) scale depleted imager with analog readout- Active area ~1cm2 - Applications : X-ray spectroscopy, Hadron therapy, - SOI technology would be an ideal candidate (depletion wise..)


Thank you for your attention

Short-term fellowship at KEK

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Plan for the Short-term fellowship at KEK

Hands-on the SOI technologyDesing of the analog part of MIMOSIS pixel usedfor CBM experiment Schematic + layout + simulations How much we benefit from the SOI vs TJ 0.18m :

- Pixel size- Power- Speed

Future collaboration

31M.Kachel - MAPS development at IPHC for HEP and X-ray applications

MAPS development at IPHC for HEP and X-ray applicationsDiapositive numro 2PICSEL groupIPHC-PICSEL group: MAPSIPHC-PICSEL strategyIPHC-PICSEL: STAR experimentPLUME Pixel Ladder with Ultra low Material Embedding PLUME BEAST @ KEKDiapositive numro 9Molecular imaging with + emitters in moving ratsCurrent main project of PICSEL groupMIMOSIS - sensor for CBM experimentMIMOSIS - sensor for CBM experimentCurrent main project of PICSEL groupCurrent main project of PICSEL groupMIMOSIS - sensor for CBM experimentCurrent main project of PICSEL groupMonolithic Active Pixel Sensors for low energy X-ray applicationsMotivation MAPS for Imaging DevicesDiapositive numro 17Depletion studies of MAPSDepletion studies of MAPS (II)Counting low energy X-rays - Mimosa 22SXMimosa 22SX energy windowM22SX results with X-raysM22SX results Soleil 1.5keVA spin-off application for M22SXDepleted MAPS good for HEP!Summary future PlansDiapositive numro 27Diapositive numro 28Diapositive numro 29Short-term fellowship at KEKPlan for the Short-term fellowship at KEK

Download - MAPS development at IPHC for HEP and X-ray applicationsrd.kek.jp/slides/20171130/KEK_MAPSdevel_MKachel.pdf · IMNC, IPHC, CPPM, CERMEP, NeuroPSi. Currently integrating prototype sensor

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