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MEMS Technology for Jet Fuel Atomization
James Nabity, Sean RooneyTDA Research, Inc
Turbine Engine Technology Symposium 2004Fuel-Injector Technology Workshop
2 September 2004
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1. REPORT DATE SEP 2004 2. REPORT TYPE
3. DATES COVERED 00-00-2004 to 00-00-2004
4. TITLE AND SUBTITLE MEMS Technology for Jet Fuel Atomization
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6. AUTHOR(S) 5d. PROJECT NUMBER
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Acknowledgements
• ONR – Dr. Chris Brophy • AFOSR - Dr. Mitat Birkan• AF - Dr. Balu Sekar• University of Colorado
– Dr. John Daily, Professor– Mr. Gopi Krishnan, PhD candidate
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Outline
• Objective• Atomizer technologies• MEMS atomizer• Approach to design, build and test• Conclusions
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Objective
• Develop a MEMS atomizer to produce small (<50µm) droplets– improve gas turbine flameholding – reduce emissions
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Baseline Technologies
• Air blast / air assist (Many types; internal mixed type shown here)
• Others: Simple Orifice, Poppet Orifice, Ultrasonic, Electrostatic Charge, Inkjet
Applied DC voltage draws down the pressure plate or diaphragm
-+
Initial state Remove voltage to release diaphragm and eject droplet
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Droplet Size Measurements
0
5
10
15
20
25
30
35
40
0 50 100 150 200
size, µm
volu
me,
%
Seiko-Epson 777 Inkjet[Nabity]
Internally Mixed Air-BlastAtomizer [Kushari]
40um
33um
A. Kushari, Y. Neumeier, O. Israeli, E. Lubarsky, and B.T. Zinn, “Internally Mixed Liquid Injector for Active Control of Atomization Process,” Journal of Propulsion and Power, Vol. 17, No. 4, July-August 2001.
ddroplet = 1.89*do
do
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The Basic Design
• Electrostatically actuated diaphragm pump with passive valves:
Diaphragm
Plenum
Outlet
Inlet
•Electrostatic for high displacement/low power.
•Passive valves for simplicity.
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What is Important?
• Need high pump efficiency:• Valves are critical
• Dielectric – cleanliness is everything
η =QnetQideal
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Approach
• Analytical & numerical performance modeling– Fuel ejection & droplet formation– Micropump operation (especially, the valving)– Stiction
• Fabrication– Materials, processes and assembly
• Engine integration• Testing
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Fluidic Valve Performance Evaluation
forward
reverse
Flow rectification
Steady 2.2Periodic 1.4
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L = w
1 2 e
-md2ydt2
Fe Fk
zp-+
fillcycle
expulsioncycle
∞
CV
G0
τw
LL = w
1 2 e
-md2ydt2
Fe Fk
zp-+
fillcycle
expulsioncycle
∞
CVCV
G0
τw
L
Performance Modeling
• TDA’s Quasi 1-D Micropump Model
• ANSYS fully coupled modeling
Diaphragm
Plenum
Outlet
InletLdiaph = 1000 µm
tdiaph = 10 µm
tplenum = 100 µm
tpassages = 100 µm
Lpassages = 330 µm
Winpassages = 66.7 µm
αvalve = 5 degrees
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ANSYS Results(30um sinusoidal deflection at 700 Hz)
-10
-5
0
5
10
Vol
ume
Flow
(mm
3 /sec
)
2.82.62.42.22.01.81.6
Time(msec)
Inlet Outlet Net
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Model Performance Predictions
0
1
2
3
4
5
6
7
0 200 400 600 800 1000actuation frequency, Hz
volu
met
ric fl
ow ra
te, c
c/m
in ANSYS
1-d model
pyramidal
uniform
net
total
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Stiction
nozzle
diaphragm is free-standing where stand-offs prevent stiction, but collapses elsewhere
fuel inlet
nozzle
diaphragm is free-standing where stand-offs prevent stiction, but collapses elsewhere
fuel inlet
• Nemesis to MEMS
• Therefore, use Mastrangelo elastocapillary & peel numbers
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Materials
• Silicon – most commonly used material– 3-inch SSP wafer costs about $10– <1800°F
• Silicon carbide – 20X the cost, but good to 2900°F
• Silicon carbide nitride – also expensive, but highest temperature and strength
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Wafer Level Microprocessing
CAD drawing
Mask
Pattern & etch
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Assembly & Packaging
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Gas Turbine
MEMSatomizer
fuel/airmixture
fuelspray
3 wirepower feeds
fluidiccheck valves
slotnozzles
micropumpchamber
MEMSatomizer
fuel/airmixture
fuelspray
3 wirepower feeds
fluidiccheck valves
slotnozzles
micropumpchamber
fluidiccheck valves
slotnozzles
micropumpchamber
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Test Setup
Malvern Mastersizer
Modified dry feed unit
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Conclusions
• Analytical & computational tools Developed
• Design completed• MEMS fabrication processes defined• Atomizers built• Testing underway
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Contact Info
Mr. James Nabity, Principal InvestigatorTDA Research, Inc.12345 W 52nd AveWheat Ridge, CO 80033
(303) [email protected]