Download - MultiGas 2030 General Overview
MKS InstrumentsMultiGas 2030 FTIRMKS Instruments
MultiGas 2030 FTIR
MKS InstrumentsOn-Line Product Group
Presented by:Jim Belanger
MKS Confidential 2
MultiGas 2030 Features
Provides correction for pressure fluctuations– 0 – 1000 Torr cap.
manometer
Resolves & analyzes more compounds– 0.5 cm-1 high resolution FTIR
Analysis in 1 second– (0.2 sec for HS version) – High speed FTIR
Fastest response– Long path length, small
volume gas cell– 5.11 m, 200 mL gas cell
High speed detectors for all applications– TE or LN2 cooled MCT detectors
No field adjustments required – Permanently aligned spectrometer
MKS Confidential 3
MultiGas Features, continued Maintains permanent calibration
– Calibration supplied with instrument– Reduces need for gas cylinders– All instruments maintain same
calibration
Detection limits ppb to ppm– All with a single gas cell
State-of-the-art spectral analysis– More than 30 compounds
simultaneously
Full instrument diagnostics– Quickly pinpoint instrument failure– Demonstrates instrument compliance
Calibration - fixedSample
Carbon Monoxide Spectrum
Instrument to Instrument Precision
MultiGas 2030Hardware Overview
MultiGas 2030Hardware Overview
MKS Confidential 5
MultiGas 2030 - Top View Heated Cell
Heated Gas inletDetector Box
Electronics
Baratron pressure measurement
MKS Confidential 6
MultiGas Cell Advantage 20/20 Gas Cell
– 5.11 m, 200 mL volume– 32 passes through cell– Long path - small volume
-->provides fast response– Versions
Ni-coated Al cell Ni-coated Stainless Steel Nickeless Stainless Steel
– Alignment indexing pads Mirrors
– O-ring “face” seal Kalrez, Viton, Metal
– Corrosive resistant coating– High light throughput
Windows– KBr, MgF2-KBr, BaF2, CaF2
20/20TM Long Path (5.11m) Gas Cell
MKS Confidential 7
2 cm Gas Cell
Used for %-level analysis in particular for SynGas Reactions
255 times less sensitive then 5m gas cell
MKS Confidential 8
MG2030 MCT Detectors
LN2 Cooled Detectors– Larger Range:
Greater number of detectable species 500 cm-1 cut off (16μ)
– High Sensitivity: Lower minimum level of detection– Maintenance
12 hour coolant refill require 3-5 days coolant refill with 5L extended dewar
TE Cooled Detectors– Narrow Range:
Smaller number of detectable species 2000 cm-1 (5μ), 1350 cm-1 (7.4μ) or 1100 cm-1 (9.2μ)
– Highest Sensitivity - 2000 cm-1 (5μ), Lowest minimum level of detection Unable to detect species such as NH3
– Maintenance - None
MKS Confidential 9
MG2030 Detectors
MG2030 offers MCT Detectors– 5 micron – 16 micron detector ranges– Selection depends on gas/sensitivity/range
required
DETECTOR Range Cooling Temp Coolant Sensitivity
(D*)Comparison to
16u LN2
5 micron 5000 - 2000 cm-1 -80° C Piezo electric
element (TE) 77.1 e9 1.8x more sensitive
7.4 micron 5000 - 1350 cm-1 -80° C Piezo electric
element (TE) 6.9 e9 6x less sensitive
9 micron 5000 - 1100 cm-1 -80° C Piezo electric
element (TE) 2.3 e9 18x less sensitive
16 micron 5000 - 500 cm-1 -196° C Liquid N2 42.8 e9 Base value
Detector Sensitivity Comparison
MKS Confidential 10
Instrument Spectral Accuracy
Instrument Accuracy Optimization– Spectra linearity
Accurate absorbance in the whole range of absorbance level
– Resolution Instrument has same resolution (i.e., line width) as
the calibration spectra– Line position
Instrument spectra are “lining up” exactly with the calibration spectra
Validation– Use transferrable calibration and verify cal cylinder– Still need H2O Calibration on each instrument for CEM– Remove influences from components like CO2 and H2O
MKS Confidential 11
Field Analysis Using FTIR Monitoring VOCs
– CH4 ranges from 500 up to 3000 ppm – C2H6 in the hundreds of ppm– Propane on the order of 50 ppm and below– Need to speciate to remove Methane and Ethane– Unburned Propane largest VOC contribution after catalyst
Monitoring HAPs– Formaldehyde easy to measure by FTIR
Conventional Total Hydrocarbon (THC) analyzers– Can not separate Propane from Methane or Ethane– Use Methane Analyzer then subtracts the rest – Not sensitive– Unable to detect all HCs (e.g. formaldehyde)
MKS Confidential 12
Field Deployable FTIR
Advantages– Multiple species – one instrument
SO2, NH3, NO, HCl, HF, CO, CO2, H2O, and VOCs– Analyze components in high CO2 and H2O– Direct analysis – no chemical conversion or “fudge
factors”– Analysis method minimizes interferents– Flexibility in Changing in Method
Customer can easily modify Transferable calibrations
MKS Confidential 13
How Can MKS OLT Support You? MKS On-Line Products
– Dedicated to your gas analysis success
Numerous Applications– Compliance– Engineering– Ambient air
Support Resources– MKS Applications Team– MKS Field Services Team– Outside Applications Team
Industry Standard Technology– Field proven rugged FTIR analyzer– Industry leading software and analysis algorithms
Financing Assistance Available– Capital partners
Thank You!Thank You!
