Download - PREZENTACIJA OPREME Institut za nuklearne nauke “Vinča” Laboratorija za atomsku fiziku Nataša Bibić
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PREZENTACIJA OPREME
Institut za nuklearne nauke Vina Laboratorija za atomsku fiziku
Nataa Bibi
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Skanirajui elektronski mikroskop Philips SEM 501Transmisioni elektronski mikroskop Philips EM 400Van de Graaff akcelerator Proizvodja je High Voltage Engineering Corp.Cambridge-Massachusetts. Koristi Van de Graaff-ov generator500kV Jonski implanterVisoko-naponski terminal ide od minimalnog napona 30-50 kV do maksimalnog od 500 kV.
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TEM i SEM DonacijaKing College London Van de Graaff akcelerator500kV Jonski implanterDonacija Univerzitet Surrey, UKFebruar Oktobar2004.godSredstva MNZS
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History:
First record of using glass lens for magnification was by an Arabian from what is now known as Iran, Alhazen, in the 10 and 11th century.He contradicted Ptolemy's and Euclid's theory of vision that objects are seen by rays of light emanating from the eyes; according to him the rays originate in the object of vision and not in the eye. Because of his extensive research on vision, he has been considered by many as the father of modern optics.
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15th century on - Studies done with glass magnifiers to study objects in detail mostly as a curiosity by non-scientists - Antonie van Leeuwenhoek (linen draper)described three shapes of bacterial cells using his simple, single lens microscope (glass bead in metal holder).
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1935 - Max Knoll demonstrates the theory of the scanning electron microscope
Knoll and Ruska1986 Nobel Prize winnersvon Ardenne1939 - Ruska and von Borries, working for Siemens produce the first commercially available EM1938 - First scanning electron microscope produced by von Ardenne
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The greater the accelerating voltage the shorter the l
Therefore, a 50,000 volt (50 kV) electron has a wavelength of 0.0055nm and a 1MeV electron has a wavelength of 0.00123nm!
Resolution Resolution is limited to approx. 1/2 the wavelength of illuminating source.
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Transmission Electron Microscopy
l ( 150 / V )1/2 Angstroms
Substituting 200 eV for V gives l a of 0.87 Angstroms
For a beam of 100 KeV we get a wavelength of 0.0389 and a theoretical resolution of 0.0195 Angstroms!
But in actuality most TEMs will only have an actualresolution 2.4 Angstroms at 100KeV
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1 MeV 200 kV 100kV
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SEMTEM
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SEM
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TEM
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Electron scattering from specimenResolution depends on spot size Typically a few nanometersTopographic scan range: order of mm X mmX rays: elemental analysis
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Electron Microscopy is usefully because we can resolve very small things.
SEM works with reflected electrons yielding surface information.
TEM works with transmitted electrons yielding information inside your sample.
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Scanning Electron Microscope
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SEMs are patterned after Reflecting Light Microscopes and yield similar information:
TopographyThe surface features of an object or "how it looks",its texture; detectable features limited to a few nanometers
MorphologyThe shape, size and arrangement of the particles making up the object that are lying on the surface of the sample or have been exposed by grinding or chemical etching; detectable features limited to a few nanometers
CompositionThe elements and compounds the sample is composed of and their relative ratios, in areas ~ 1 micrometer in diameter Crystallographic InformationThe arrangement of atoms in the specimen and theirdegree of order; only useful on single-crystal particles >20 micrometers
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Philips SEM 501Laboratorija za atomsku fiziku
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Transmission Electron Microscopes: Widely used in materials science and biological research Capable of magnifying over a extremely wide range (~100 to >1,000,000 x) Excellent spatial resolution (better than 1 nm) Easy to use and very reliable
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Disadvantages of TEMs: Very expensive to own and operate. Specimen preparation can be time consuming and technically difficult. Specimen is usually chemically fixed and epoxy embedded. Specimen must be sliced into very, very thin sections. *the inside of an electron microscope is a very hostile environment. It is under high vacuum with zero humidity. Also, in the time it takes to make an average 2 sec exposure of your specimen with an 80 KeV beam, the amount of energy the specimen receives is about 5 x109 rads, which is approximately equivalent to the radiation delivered from a 10 megatonHydrogen bomb exploding 30 meters away!
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TEMs are patterned after Transmission Light Microscopes and will yield similar information. MorphologyThe size, shape and arrangement of the particles which make up the specimen as well as their relationship to each otheron the scale of atomic diameters. Crystallographic InformationThe arrangement of atoms in the specimen and their degree of order, detection of atomic-scale defects in areas a fewnanometers in diameter
Compositional Information (if so equipped) The elements and compounds the sample is composed of and their relative ratios, in areas a few nanometers in diameter
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100 keV e- l=0.072 angstr.HRTEM sp. res. 0.2 nm
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A simplified ray diagram of a TEM consists of an electron source, condenser lens with aperture, specimen, objective lens with aperture, projector lens and fluorescent screen.
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Transmission Electron MicroscopeBasic premise of a TEM is to project a magnified image of the specimen onto a fluorescent screen where it can be viewed by the operator. The image itself is the result of beam electrons that are scattered by the specimen vs. those that are not.
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In actuality a modern TEM consists of many more components including a dual condenser system, stigmators, deflector coils, and a combination intermediate and dual projector lens.
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Total magnification in the TEM is a combination of the magnification from the objective lens times the magnification of the intermediate lens times the magnification of the projector lens. Each of which is capable of approximately 100X.
Mob X Mint X Mproj = Total Mag
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Growth of b-FeSi2 films via noble-gas ion-beam mixing of Fe/Si bilayers
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Amorphous-iron disilicide: A promising semiconductor
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TEM IMAGES
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Philips EM 400Laboratorija za atomsku fiziku
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KorisniciLokacija, ZaduenjeIskorienostLaboratorija 040 N. Bibi M.Popovi M.Novakovi S. PetroviLaboratorije 040, 020, 030,050,170Univerzitet u Novom SaduTEM i SEMPeriod od 1 godine i znaajna iskoritenost
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SAMPLE PREPARATIONDodatna oprema za pripremu uzorakaPotrebe
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Van de Graaff akcelerator High Voltage Engineering Corp. Cambridge-Massachusetts. Van de Graaff-ov generator500kV Jonski implanterVisoko-naponski terminal od minimalnog napona 30-50 kV do maksimalnog od 500 kV.
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THE ATOMIC ELECTRONSand/orTHE ATOMIC NUCLEIIn its passage through matter, an ion may interact with
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Principles of ion beam analysis
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Blok sema jonskog implantera
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IMPLANTACIJA
Kontrolisano unoenje primesa u osnovni materijal
Promena krstalne strukture na atomskoj skali pri manjim jonskim dozama.
Naruavanje kristalne strukture i/ili amorfizacija mete na povrini pri velikim dozama.
Sinteza jedinjenja
Stvaranje nano-ukljuaka i formiranje nanostruktura.
Unoenje materijala u metu u koncentracijama iznad granice rastvorljivosti.
Formiranje metastabilnih faza zahvaljujui termodinamiki neravnotenom procesu.
Unoenje nerastvorljivih materijala i stvaranje lokalnog naprezanja u kristalnoj reetci
Promena morfologije povrine i promena mehanikih osobina
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RBSIn RBS, a beam of mono-energetic (1-2 MeV) collimated light ions (H+, He+) impinges (usually at normal incidence) on a target and the number and energy of particles that are scattered backwards at a certain angle are monitored to obtain information about the composition of the target (host species and impurities) as a function of depth.
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Kinematic factor, Mass identification
Energy loss,Depth scale
Scattering cross sections,Composition, (quantitative)RBS
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KINEMATIC FACTORE can be derived from the principle of conservation of energy and momentum, and is given by (in laboratory frame of reference):The multiplication factor of Eo on the right hand side of the equation is often referred to as the kinematic factor and is denoted by k. For M/m > 1, k is a slow-varying function of , having the maximum value of 1 at = 0 and the minimum value at = 180o. For M/m = 1, the value of k is zero beyond 90o.
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DIFFERENTIAL SCATTERING CROSS SECTIONThe theoretical differential cross section for a given scattering angle is given by: The higher order terms are usually negligible for M>m and the differential cross section can be expressed in the following form, which has the unit of mb/sr (millibarn per steradian) when MeV is used as the unit for Eo:
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A = QNtA- ukupan broj detektovanih estica- efikasni presek rasejanja- prostorni ugaoQ- ukupan broj upadnih esticaN- kocentracija atoma mete t- debljina
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Thickness = 200APtPtCoCoCoThickness = 1000A
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4460.60.60
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0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Channel
Yield
Sheet1
80000
81000
82000
83000
84000
85000
86000
87000
88000
89000
90000
91000
92000
93000
94000
95000
96000
97000
98000
99000
100000
101000
102000
103000
104000
105000
106000
107000
108000
109000
110000
111000
112000
113000
114000
115000
116000
117000
118000
119000
120000
121000
122000
123000
124000
125000
126000
127000
128000
129000
130000
131000
132000
133000
134000
135000
136000
137000
138000
139000
140000
141000
142000
143000
144000
145000
146000
147000
148000
149000
150000
151000
152000
153000
154000
155000
156000
157000
158000
159000
160000
161000
162000
163000
164000
165000
166000
167000
168000
169000
170000
171000
172000
173000
174000
175000
176000
177000
178000
179000
180000
181000
182000
183000
184000
185000
186000
187000
188000
189000
190000
191000
192000
193000
194000
195000
196000
197000
198000
199000
200000
201000
202000
203000
204000
205000
206000
207000
208000
209000
210000
211000
212000
213000
214000
215000
216000
217000
218000
219000
220000
221000
222000
223000
224000
225000
226000
227000
228000
229000
230000
231000
232000
233000
234000
235000
236000
237000
238000
239000
240000
241000
242000
243000
244000
245000
246000
247000
248000
249000
250000
251000
252000
253000
254000
255000
256000
257000
258000
259000
260000
261000
262000
263000
264000
265000
266000
267000
268000
269000
270000
271000
272000
273000
274000
275000
276000
277000
278000
279000
280000
281000
282000
283000
284000
285000
286000
287000
288000
289000
290000
291000
292000
293000
294000
295000
296000
297000
298000
299000
300000
301000
302000
303000
304000
305000
306000
307000
308000
309000
310000
311000
312000
313000
314000
315000
316000
317000
318000
319000
320000
321000
322000
323000
324000
325000
326000
327000
328000
329000
330000
331000
332000
333000
334000
335000
336000
337000
338000
339000
340000
341000
342000
343000
344000
345000
346000
347000
348000
349000
350000
351000
352000
353000
354000
355000
356000
357000
358000
359000
360000
361000
362000
363000
364000
365000
366000
367000
368000
369000
370000
371000
372000
373000
374000
375000
376000
377000
378000
379000
380000
381000
382000
383000
384000
385000
386000
387000
388000
389000
390000
391000
392000
393000
394000
395000
396000
397000
398000
399000
400000
401000
402000
403000
404000
405000
406000
407000
408000
409000
410000
411000
412000
413000
414000
415000
416000
417000
418000
419000
420000
421000
422000
423000
424000
425000
426000
427000
428000
429000
430000
431000
432000
433000
434000
435000
436000
437000
438000
439000
440000
441000
442000
443000
444000
445000
446000
447000
448000
449000
4500.50.50
4513.13.10
45212.412.40
45339390
454100.1100.10
4552132130
456380.1380.10
457572.6572.60
458732.6732.60
4598008000
460746.8746.80
4615955950
462402.7402.70
4632302300
4641101100
46543.743.70
46614.214.20
4673.73.60
4680.60.60
469000
470000
471000
472000
473000
474000
475000
476000
477000
478000
479000
480000
481000
482000
483000
484000
485000
486000
487000
488000
489000
490000
491000
492000
493000
494000
495000
496000
497000
498000
499000
500000
501000
502000
503000
504000
505000
506000
507000
508000
509000
510000
511000
512000
513000
514000
515000
516000
517000
518000
519000
520000
521000
522000
523000
524000
525000
526000
527000
528000
529000
530000
531000
532000
533000
534000
535000
536000
537000
538000
539000
540000
541000
542000
543000
544000
5451.701.7
54615.1015.1
54765.6065.6
548219.50219.5
549600.50600.5
5501359.701359.7
5512578.902578.9
5524128.404128.4
5535617.605617.6
5546535.706535.7
5556523.206523.2
5565584.405584.4
5574085.604085.6
5582538.802538.8
5591330.501330.5
560583.60583.6
561211.70211.7
56262.7062.7
56314.2014.2
5641.501.5
565000
566000
567000
568000
569000
570000
571000
572000
573000
574000
575000
576000
577000
578000
579000
580000
581000
582000
583000
584000
585000
586000
587000
588000
589000
590000
591000
592000
593000
594000
595000
596000
597000
598000
599000
600000
Sheet1
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Channel
Yield
Sheet2
1000.400.3
1010.400.3
1020.400.3
1030.400.3
1040.400.3
1050.400.3
1060.400.3
1070.400.3
1080.400.3
1090.400.3
1100.400.3
1110.400.3
1120.400.3
1130.400.3
1140.400.3
1150.400.3
1160.400.3
1170.400.3
1180.400.3
1190.400.3
1200.400.3
1210.400.3
1220.400.3
1230.400.3
1240.400.3
1250.400.3
1260.400.3
1270.400.3
1280.400.3
1290.400.3
1300.400.3
1310.400.3
1320.400.3
1330.400.3
1340.400.3
1350.400.3
1360.400.3
1370.400.3
1380.400.3
1390.400.3
1400.400.3
1410.400.3
1420.400.3
1430.400.3
1440.400.3
1450.400.3
1460.400.3
1470.400.3
1480.400.3
1490.400.3
1500.400.3
1510.400.3
1520.400.3
1530.400.3
1540.400.3
1550.400.3
1560.400.3
1570.400.3
1580.400.3
1590.400.3
1600.400.3
1610.400.3
1620.400.3
1630.400.3
1640.400.3
1650.400.3
1660.400.3
1670.400.3
1680.400.3
1690.400.3
1700.400.3
1710.400.3
1720.400.3
1730.400.3
1740.400.3
1750.400.3
1760.400.3
1770.400.3
1780.400.3
1790.400.3
1800.400.3
1810.400.3
1820.400.3
1830.400.3
1840.400.3
1850.400.3
1860.400.3
1870.400.3
1880.400.3
1890.400.3
1900.400.3
1910.400.3
1920.400.3
1930.400.3
1940.400.3
1950.400.3
1960.400.3
1970.400.3
1980.400.3
1990.400.3
2000.400.3
2010.400.3
2020.400.3
2030.400.3
2040.400.3
2050.400.3
2060.400.3
2070.400.3
2080.400.3
2090.400.3
2100.400.3
2110.400.3
2120.400.3
2130.400.3
2140.400.3
2150.400.3
2160.400.3
2170.400.3
2180.400.3
2190.400.3
2200.400.3
2210.400.3
2220.400.3
2230.400.3
2240.400.3
2250.400.3
2260.400.3
2270.400.3
2280.400.3
2290.400.3
2300.400.3
2310.400.3
2320.400.3
2330.400.3
2340.400.3
2350.400.3
2360.400.3
2370.400.3
2380.400.3
2390.400.3
2400.400.3
2410.400.3
2420.400.3
2430.400.3
2440.400.3
2450.400.3
2460.400.3
2470.400.3
2480.400.3
2490.400.3
2500.400.3
2510.400.3
2520.400.3
2530.400.3
2540.400.3
2550.400.3
2560.400.3
2570.400.3
2580.400.3
2590.400.3
2600.400.3
2610.400.3
2620.400.3
2630.400.3
2640.400.3
2650.400.3
2660.400.3
2670.400.3
2680.400.3
2690.400.3
2700.400.3
2710.400.3
2720.400.3
2730.400.3
2740.400.3
2750.400.3
2760.400.3
2770.400.3
2780.400.3
2790.400.3
2800.400.3
2810.400.3
2820.400.3
2830.400.3
2840.400.3
2850.400.3
2860.400.3
2870.400.3
2880.400.3
2890.400.3
2900.400.3
2910.400.3
2920.400.3
2930.400.3
2940.400.3
2950.400.3
2960.400.3
2970.400.3
2980.400.3
2990.400.3
3000.400.3
3010.400.3
3020.400.3
3030.400.3
3040.400.3
3050.400.3
3060.400.3
3070.400.3
3080.400.3
3090.400.3
3100.400.3
3110.400.3
3120.400.3
3130.400.3
3140.400.3
3150.400.3
3160.400.3
3170.400.3
3180.400.3
3190.400.3
3200.400.3
3210.400.3
3220.400.3
3230.400.3
3240.400.3
3250.400.3
3260.400.3
3270.400.3
3280.400.3
3290.400.3
3300.400.3
3310.400.3
3320.400.3
3330.400.3
3340.400.3
3350.400.3
3360.400.3
3370.400.3
3380.400.3
3390.400.3
3400.400.3
3410.400.3
3420.400.3
3430.400.3
3440.400.3
3450.400.3
3460.400.3
3470.400.3
3480.400.3
3490.400.3
3500.400.3
3510.400.3
3520.400.3
3530.400.3
3540.400.3
3550.400.3
3560.400.3
3570.400.3
3580.400.3
3590.400.3
3600.400.3
3610.400.3
3620.400.3
3630.400.3
3640.400.3
3650.400.3
3660.400.3
3670.400.3
3680.400.3
3690.400.3
3700.400.3
3710.400.3
3720.400.3
3730.400.3
3740.400.3
3750.400.3
3760.400.3
3770.400.3
3780.400.3
3790.400.3
3800.400.3
3810.400.3
3820.400.3
3830.400.3
3840.400.3
3850.400.3
3860.400.3
3870.400.3
3880.400.3
3890.400.3
3900.400.3
3910.400.3
3920.400.3
3930.400.3
3940.400.3
3950.400.3
3960.400.3
3970.400.3
3980.400.3
3990.400.3
4000.400.3
4010.400.3
4020.400.3
4030.400.3
4040.400.3
4050.400.3
4060.400.3
4070.400.3
4080.400.3
4090.400.3
4100.400.3
4110.400.3
4120.400.3
4131.20.80.3
4144.84.40.3
41517.116.70.3
41651.250.80.3
417127.2126.80.3
418263.7263.30.3
419461.8461.40.3
420694.2693.80.3
421914.8914.40.3
4221084.21083.80.3
4231189.411890.3
4241241.91241.50.3
4251262.61262.20.3
4261268.41268.10.3
4271268.91268.50.3
4281267.71267.30.3
4291266.21265.80.3
4301264.61264.30.3
4311263.11262.70.3
4321261.61261.20.3
4331260.11259.70.3
4341258.61258.20.3
4351257.11256.70.3
4361255.61255.20.3
4371254.11253.70.3
4381252.61252.20.3
4391251.11250.80.3
4401249.61249.30.3
4411248.21247.80.3
4421246.71246.30.3
4431245.21244.80.3
4441243.81243.40.3
4451242.31241.90.3
4461240.81240.50.3
4471239.412390.3
4481237.91237.50.3
4491236.51236.10.3
45012351234.70.3
4511233.61233.20.3
4521232.21231.80.3
4531230.71230.30.3
4541228.91228.50.3
4551225.11224.80.3
4561215.412150.3
4571189.81189.50.3
4581131.41131.10.3
45910211020.70.3
460850.48500.3
461635.6635.20.3
462415.9415.50.3
463233.6233.20.3
464110.9110.50.3
4654443.70.3
46614.514.20.3
46743.70.3
46810.60.3
4690.400.3
4700.400.3
4710.400.3
4720.400.3
4730.400.3
4740.400.3
4750.400.3
4760.400.3
4770.400.3
4780.400.3
4790.400.3
4800.400.3
4810.400.3
4820.400.3
4830.400.3
4840.400.3
4850.400.3
4860.400.3
4870.400.3
4880.400.3
4890.400.3
4900.400.3
4910.400.3
4920.400.3
4930.400.3
4940.400.3
4950.400.3
4960.400.3
4970.400.3
4980.400.3
4990.400.3
5000.400.3
5010.400.3
5020.400.3
5030.400.3
5040.400.3
5050.400.3
5063.503.4
50721.9021.9
50888.4088.4
509282.90282.8
510744.50744.4
5111634.401634.3
5123028.203028.1
5134802.104802
5146635.706635.6
5158173.908173.8
5169219.509219.4
5179793.109793
51810044.4010044.3
51910128.7010128.6
52010145.7010145.6
52110140.6010140.5
52210129.6010129.5
52310118.4010118.4
52410107.3010107.2
52510096.2010096.1
52610085.1010085
52710074010073.9
52810062.9010062.8
52910051.8010051.8
53010040.8010040.7
53110029.8010029.7
53210018.7010018.7
53310007.7010007.7
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0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Channel
Yield
Chart4
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0.6
3.6
14
43.2
109.6
231.9
414
634
849.2
1018.2
1120.1
1153.1
1119.6
1017.8
849.6
635.2
415.6
233.3
110.6
43.7
14.2
3.7
0.6
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
4.1
25.3
100.1
313.3
805.8
1728.7
3132.8
4867.8
6609
8021
8926.6
9318.5
9239.9
8677.9
7588
6025.2
4235.7
2580
1338.7
584
211.8
62.7
14.3
1.5
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Channel
Yield
Sheet5
100000
101000
102000
103000
104000
105000
106000
107000
108000
109000
110000
111000
112000
113000
114000
115000
116000
117000
118000
119000
120000
121000
122000
123000
124000
125000