we s u p p o r t y o u r i n n o v a t i o n
Heated Getter Gas Purifiers
SAES Pure Gas , Inc .
Applications
Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED
B.S
PG
.85.
0
Media
MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.
MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.
Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.
MonoTorr Heated Getter Purifiers
Heated Getter
Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics
SAES Pure Gas, Inc.4175 Santa Fe RoadSan Luis Obispo, CA, 93401, USA
Phone: +1 805-541-9299Fax: +1 805-541-9399E-mail: [email protected]
SAES Pure Gas Products and Services:
MicroTorr Point-of-Use Purifiers
SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.
Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.
Flow rates up to 1,000 slpm.
SAES Pure Gas manufacturing company is ISO9001 certified
ISO 9001:2008
Microcontamination Inspection Service
The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.
The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.
© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.
MegaTorr Area and House Gas Purification
SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.
Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia
Flow rates up to 20,000 Nm3/hr depending on the gas.
WWW.TEESING.COM | TEL +31 70 413 07 50
we s u p p o r t y o u r i n n o v a t i o n
Heated Getter Gas Purifiers
SAES Pure Gas , Inc .
Applications
Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED
B.S
PG
.85.
0
Media
MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.
MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.
Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.
MonoTorr Heated Getter Purifiers
Heated Getter
Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics
SAES Pure Gas, Inc.4175 Santa Fe RoadSan Luis Obispo, CA, 93401, USA
Phone: +1 805-541-9299Fax: +1 805-541-9399E-mail: [email protected]
SAES Pure Gas Products and Services:
MicroTorr Point-of-Use Purifiers
SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.
Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.
Flow rates up to 1,000 slpm.
SAES Pure Gas manufacturing company is ISO9001 certified
ISO 9001:2008
Microcontamination Inspection Service
The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.
The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.
© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.
MegaTorr Area and House Gas Purification
SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.
Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia
Flow rates up to 20,000 Nm3/hr depending on the gas.
WWW.TEESING.COM | TEL +31 70 413 07 50
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <10 <10
O2 <10 <10
CO <10 <10
CO2 <10 <10
CH4 <50 <10
Other Hydrocarbons <10 <10
H2 <10 <10
N2 N/A <10
PS2-GC50 Performance
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <1 <1
O2 <1 <1
CO <1 <1
CO2 <1 <1
CH4 <1 <1
Other Hydrocarbons <1 <1
H2 <1 <1
N2 N/A <1
PS3-MT3 Performance
Gas Impurity PS4-MT3 PS4-MT15
5 slpm Average Flow 15 slpm Average Flow
Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb
Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb
Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb
Gases Purified
Impurities Removed Rare Gases Nitrogen Hydrogen
H2O <1 ppb <1 ppb <1 ppb
O2 <1 ppb <1 ppb <1 ppb
CO <1 ppb <1 ppb <1 ppb
CO2 <1 ppb <1 ppb <1 ppb
Total Hydrocarbons <1 ppb <1 ppb N/A
H2 <1 ppb <1 ppb N/A
N2 <1 ppb N/A <1 ppb
PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance
PS2-GC50Maximum Flow 200 sccm
PS3-MT3Maximum Flow 5 slpm
PS4-MT3PS4-MT15Maximum Flow 50-75 slpm
PS4-MT50Maximum Flow 100-150 slpm
Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)
Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC
Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)
Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC
Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)
Optional equipment:• 110-120 VAC or 220-240 VAC
Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)
Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC
WWW.TEESING.COM | TEL +31 70 413 07 50
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <10 <10
O2 <10 <10
CO <10 <10
CO2 <10 <10
CH4 <50 <10
Other Hydrocarbons <10 <10
H2 <10 <10
N2 N/A <10
PS2-GC50 Performance
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <1 <1
O2 <1 <1
CO <1 <1
CO2 <1 <1
CH4 <1 <1
Other Hydrocarbons <1 <1
H2 <1 <1
N2 N/A <1
PS3-MT3 Performance
Gas Impurity PS4-MT3 PS4-MT15
5 slpm Average Flow 15 slpm Average Flow
Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb
Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb
Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb
Gases Purified
Impurities Removed Rare Gases Nitrogen Hydrogen
H2O <1 ppb <1 ppb <1 ppb
O2 <1 ppb <1 ppb <1 ppb
CO <1 ppb <1 ppb <1 ppb
CO2 <1 ppb <1 ppb <1 ppb
Total Hydrocarbons <1 ppb <1 ppb N/A
H2 <1 ppb <1 ppb N/A
N2 <1 ppb N/A <1 ppb
PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance
PS2-GC50Maximum Flow 200 sccm
PS3-MT3Maximum Flow 5 slpm
PS4-MT3PS4-MT15Maximum Flow 50-75 slpm
PS4-MT50Maximum Flow 100-150 slpm
Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)
Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC
Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)
Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC
Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)
Optional equipment:• 110-120 VAC or 220-240 VAC
Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)
Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC
WWW.TEESING.COM | TEL +31 70 413 07 50
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <10 <10
O2 <10 <10
CO <10 <10
CO2 <10 <10
CH4 <50 <10
Other Hydrocarbons <10 <10
H2 <10 <10
N2 N/A <10
PS2-GC50 Performance
ImpuritiesNitrogen Rare Gas
Outlet Purity (ppb)
Outlet Purity (ppb)
H2O <1 <1
O2 <1 <1
CO <1 <1
CO2 <1 <1
CH4 <1 <1
Other Hydrocarbons <1 <1
H2 <1 <1
N2 N/A <1
PS3-MT3 Performance
Gas Impurity PS4-MT3 PS4-MT15
5 slpm Average Flow 15 slpm Average Flow
Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb
Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb
Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb
Gases Purified
Impurities Removed Rare Gases Nitrogen Hydrogen
H2O <1 ppb <1 ppb <1 ppb
O2 <1 ppb <1 ppb <1 ppb
CO <1 ppb <1 ppb <1 ppb
CO2 <1 ppb <1 ppb <1 ppb
Total Hydrocarbons <1 ppb <1 ppb N/A
H2 <1 ppb <1 ppb N/A
N2 <1 ppb N/A <1 ppb
PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance
PS2-GC50Maximum Flow 200 sccm
PS3-MT3Maximum Flow 5 slpm
PS4-MT3PS4-MT15Maximum Flow 50-75 slpm
PS4-MT50Maximum Flow 100-150 slpm
Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)
Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC
Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)
Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC
Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)
Optional equipment:• 110-120 VAC or 220-240 VAC
Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)
Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC
WWW.TEESING.COM | TEL +31 70 413 07 50
we s u p p o r t y o u r i n n o v a t i o n
Heated Getter Gas Purifiers
SAES Pure Gas , Inc .
Applications
Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED
B.S
PG
.85.
0
Media
MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.
MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.
Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.
MonoTorr Heated Getter Purifiers
Heated Getter
Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics
SAES Pure Gas Products and Services:
MicroTorr Point-of-Use Purifiers
SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.
Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.
Flow rates up to 1,000 slpm.
SAES Pure Gas manufacturing company is ISO9001 certified
ISO 9001:2008
Microcontamination Inspection Service
The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.
The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.
© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.
MegaTorr Area and House Gas Purification
SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.
Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia
Flow rates up to 20,000 Nm3/hr depending on the gas.
Media
WWW.TEESING.COM | TEL +31 70 413 07 50