Download - Solaria Vmp
Presented toPresented to
SolariaSolaria
11/13/200811/13/2008
VarioProfileVarioProfile
VarioProfileVarioProfile
VarioProfile
Dimensions < 18” X 18” X 12”
Weight ~ 70 lb.
Electrical < 60 VDC
Safety EMO, covers
ElectronicsElectronics
VMP Electronics
Dimensions 7” X 17” X 19” rack
Weight ~ 27 lb.
Electrical 120VAC, 6A
Safety EMO, Start button
Interface USB or Ethernet
Significant VMP capabilitiesSignificant VMP capabilities
Thickness and Flatness measurementsThickness and Flatness measurements– Simultaneous measurements of multiple material Simultaneous measurements of multiple material
layerslayers– Air gaps between sample and 6” diameter Air gaps between sample and 6” diameter
reference glass used to measure flatnessreference glass used to measure flatness Automatic measurement of multiple regionsAutomatic measurement of multiple regions Fast gantry with XYZ capabilityFast gantry with XYZ capability Easy to use GUIEasy to use GUI
Silicon Thickness MapSilicon Thickness Map
Silicon Thickness RepeatabilitySilicon Thickness Repeatability
Flatness MeasurementFlatness Measurement
Principle of operationPrinciple of operation– Measures interference between sample and Measures interference between sample and
reference glassreference glass– Analysis of the air gap is the flatnessAnalysis of the air gap is the flatness
Accuracy, expect < 1umAccuracy, expect < 1um Repeatability < 0.5umRepeatability < 0.5um More work to be done to qualifyMore work to be done to qualify
Air Gap to SiliconAir Gap to Silicon
VarioProfile SpecVarioProfile Spec(preliminary)(preliminary)
Description SpecificationOptical bandwidth 1260nm – 1360nmSilicon thickness range 5 um – 1000 umDigital video camera 640 X 480 pixels, realtimeObjective lens 5X, 0.10NARing illuminator LED, low powerMotorized XYZ Stage Travel 100 mm X 100 mm X 10 mmManual Z focus travel 75 mmXY Stage repeatability +/-5 umStage velocity > 100 mm/sData acquisition time 1 second per measurementThree point alignment Maps to design coordinatesAutomatic measurement Measures a rectangular array of points
Color thickness map Plots rectangular array indicating thickness as a function of XY position
Single point continuous thickness measurement
Move to a position in design coordinates and measure continuously
Survey Output FormatSurvey Output Format
Easy to import Easy to import columnar datacolumnar data
Analysis usingAnalysis using– DataFitDataFit
Regression curve fittingRegression curve fitting
– ExcelExcel Surface plotsSurface plots StatisticsStatistics
– Other?Other?