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Page 1: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Yu ShiDept. of Materials Science & Engineering

Page 2: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

10-6m 10-7m 10-8m 10-9m 10-10m10-5m 10-11m

optical microscope

electron microscope

Scanning probe microscope

photolithography

E-beam lithography

If you can see, then you should be able to write…

Page 3: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

4,000 years ago… Invention of AFM in 1986…

1995 by Jaschke & Butt…

1999…

Butt et al. Langmuir 11, 1061 (1995).Mirkin et al. Science 283, 661 (1999).

Page 4: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Source: http://www.nanoink.net

Page 5: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Mirkin et al. Science 283, 661 (1999).

Page 6: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Mirkin et al. Nature Nanotechnology 2, 145 (2007).

Page 7: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Mirkin et al. Nature Nanotechnology 2, 145 (2007).

55,000 cantilevers and 88,000,000 gold dots!

Page 8: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Source: http://www.nanoink.net

Page 9: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

Q & A…

Page 10: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe
Page 11: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe
Page 12: Yu Shi Dept. of Materials Science & Engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m optical microscope electron microscope Scanning probe

“DPN is finding applications in certain areas that impact the semiconductor industry such as mask fabrication, inspection and repair…”

“…However, its unique attributes have positioned it on a different path aimed largely at exploiting the properties and applications of nanopatterned soft materials…”

-- C. A. Mirkin (2007)Mirkin et al. Nature Nanotechnology 2, 145 (2007).


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