ece 658: semiconductor material and device characterization peide (peter) ye office: birck 1291...
DESCRIPTION
Teaching Philosophy for ECE 658 Motto “Durch Messung zu Wissen”(German) “During or through measurement to understand” (English) The best way to learn ECE 658 is to measure the devices in the lab and understand what you are measuring. 4 lectures + 2 hours (lab or discussion sessions) every two weeksTRANSCRIPT
ECE 658: Semiconductor Material and Device Characterization
Peide (Peter) YeOffice: Birck 1291
E-mail: [email protected]: 494-7611
Course website: http://cobweb.ecn.purdue.edu/~yep/courses.htmLocation: EE 226
Time: MWF 8:30-9:20 amOffice Hour: 10:00am-7:00pm anytime
Course Description: An examination of modern characterization techniques routinely employed to determine semiconductor material and device parameters.Concepts and theory underlying the techniques are reviewed, and sampleexperimental results are presented. Emphasis is on techniques employing electrical measurements.
Course Objectives: This course is intended for graduate students in MN and related areas who are either i) interested in pursuing research in semiconductor materials, structures or devices, or ii) seeking the broad device background on the-state-of-the-art technologies for a future R&D career in the microelectronic industry.
Fundamentals State-of-the-art
Teaching Philosophy for ECE 658
• Motto “Durch Messung zu Wissen”(German) “During or through measurement to
understand” (English)• The best way to learn ECE 658 is to
measure the devices in the lab and understand what you are measuring.
• 4 lectures + 2 hours (lab or discussion sessions) every two weeks
Required Textbook:
$65 at Amazon
(1)Resistivity (2)Carrier/Doping Density
(3) Rc and Schottky Barries
(4) Rs,Lg,VT
(5) Defects (6) Oxide integrity
(7) Carrier lifetime
(8) Mobility
Course GradingFinal Exam : 100%
Home work / attendance/literature research / discussion:
determining the final grade in borderline cases
From 612--Prof. M.Lundstrom
yep/
Lecture 1: Resistivity
Insulator
semiconductor
metal
(1) DOS(2) Mobility
easy
(1) DOS(2) Mobility
Lecture 1: Resistivity
1.1 Introduction
Lecture 1: Resistivity1.2 The Four-Point Probe
Big difference: two point and four point measurements
Big difference
For an arbitrarily shaped sample,
What decides F, next Lecture
Homework: Reading relevant pages