EDAX OperationEDAX Operation

Operation of the Phoenix EDAX Operation of the Phoenix EDAX systemsystem

Basic information on EDS analysisBasic information on EDS analysis Introduction to Mapping, Line scans, Introduction to Mapping, Line scans,

and OIM or EBSDand OIM or EBSD

Set the EDS parameters according to the type of

analysis needed. Use the SETUP Menu to select the time.

Set up SEM Set up SEM

Column set up to Analysis modeColumn set up to Analysis mode Area of interest selectedArea of interest selected Column and aperture alignedColumn and aperture aligned Analysis Scan Mode selectedAnalysis Scan Mode selected Condenser Lens 1 set Condenser Lens 1 set Dead time at ~32%Dead time at ~32% CPS above 1000CPS above 1000

Check the cps and %Deadtime

To collect a spectrum set the SEM on the area

or point of interest. Use the second menu button (paint-roller) to clear the screen

of the previous spectrum. Click the first menu button (stop watch) to acquire a spectrum.

Once the spectrum is acquired use the Peak Identification control panel by clicking on

“AUTO” to label the peaks present. To remove a element, select the element from the

“Saved Elem” list box and click the

“Delete” button

Add an element:

1. Typing four characters (SiKa or AgLa) “Element” box.

2. Select an element that is near the element you want to add and click “Z- or Z+”

3. Click the cursor on the peak to identify, then click the choice from the “Pos Elem” box

Once the spectrum has been labeled click on the “File” and “Save”. The file can be saved as the raw data or as an image of the spectrum. A saved spectrum will no longer be able to be manipulated. All data is to be saved on the D drive and will be periodically removed.

Auto acquisition of spectrums

Auto quantify spectrums

Auto identify spectrums

Compare spectrums

Returns the spectrum to original state

Reduces the height of the spectrum

Increases the height of the spectrum

Shrinks the spectrum in the X direction

Expands the spectrum

If the “Dead time” is to high or not high enough and you have checked the SEM parameters then you can change the “AMP Time” in the “EDAM” control box

If the back ground is off for your spectrum you can change the parameters from Auto to Manual or from Manual to Auto. In Manual you have the ability to add or delete specific points along the spectrum for a better background fit.

After the spectrum is saved do a deconvolution fit on the spectrum.

This is done with the HPD (HalographicPeak Deconvolution) button in Peak Identification control window. The deconvolution shows up as line across the very top of the spectrum (red).A background will also show up as a line on the bottom of the spectrum (blue). This will allow you to see if the software will correctly quantify the spectrum.

Background

Deconvolution Cursor

If deconvolution does not follow the top of the peaks use the EPIC table in the Peak Identification window to adjust the specific element parameters

When the deconvolution and background are correct the spectrum can be quantified. Either

select the “Quantify” control panel or the Auto Quantify button. In the “Quantify” control panel there are options to adjust the quantification of the spectrum. For general purposes these are not necessary.

Use the “Quantify” button at the bottom to analyze the spectrum. Once done a “Results” box will appear. You can show only one result or multiple results. These can be printed or saved and imported to an Excel file.

Elemental MappingElemental Mapping

A system creates an elemental map based on ROI (region of interest).

Elements of interest are defined in the software. Counts are collected from that region of the spectra and mapped. Each pixel intensity is relative to the concentration of that element. Elements are given different colors for easier viewing. Higher counts have better results.

Line ScanLine Scan

Collecting x-ray data from a number of Collecting x-ray data from a number of points along a preselected line.points along a preselected line.

EDS SummaryEDS Summary

Signal comes from interaction volumeSignal comes from interaction volume Features of < 1um will have matrix Features of < 1um will have matrix

information in the spectra information in the spectra Don’t coat with element of interestDon’t coat with element of interest Count times should be long enough to Count times should be long enough to

discern low concentrations from discern low concentrations from backgroundbackground