electrical measurements of sputtered nicr on grid spacers (gs2mm) 07-11-2011 dean walters, anil mane...
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![Page 1: Electrical measurements of sputtered NiCr on grid spacers (GS2mm) 07-11-2011 Dean Walters, Anil Mane Guy Harris, Jeff Elam](https://reader035.vdocuments.net/reader035/viewer/2022062517/56649efc5503460f94c0f040/html5/thumbnails/1.jpg)
Electrical measurements of sputtered NiCr on grid spacers (GS2mm)
07-11-2011
Dean Walters, Anil Mane Guy Harris, Jeff Elam
![Page 2: Electrical measurements of sputtered NiCr on grid spacers (GS2mm) 07-11-2011 Dean Walters, Anil Mane Guy Harris, Jeff Elam](https://reader035.vdocuments.net/reader035/viewer/2022062517/56649efc5503460f94c0f040/html5/thumbnails/2.jpg)
Objective
To deposit NiCr layer(150-200nm/side) on grid spacers for better electrical contact.
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As received After NiCr coating
• Appearance of NiCr coated grid looks good
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Photograph after NiCr electrode
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NiCr
Glass
• Grid edges are sharp but much better than previous vender• Overall deposition looks great.
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Thickness values based on Resistance on the grid spacer
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Considered Bulk rho of NiCr
Pt # Resistance (ohm) Thickness (nm)1 62 5.342 22 15.043 64 5.174 15 22.075 15 22.076 14 23.647 19 17.428 17 19.479 9 36.78
10 11 30.0911 18 18.3912 15 22.0713 12 27.5814 14 23.6415 57 5.8116 20 16.5517 68 4.87
1 2 3
4 5 6
7 8 9 10 11
12 13 14
15 16 17
• Thickness non-uniformity on the grid spacer• We need to improve the Thickness NU and then we can target thickness= 50nm• I think 50nm uniform thickness of NiCr will be sufficient for good electrical contact?
Similar number and trend observed for other side of the grid spacer
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Rings of Equal Thickness (nm) – Anil’s data
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X Y Thk1 0 8 4.92 8 8 53 8 0 5.34 0 0 5.85 8 4 156 0 4 16.57 4 0 17.48 4 2 19.59 2 2 22
10 6 2 22.111 6 4 22.112 2 6 23.613 6 6 23.614 2 4 27.615 4 6 30.116 4 4 36.8
0
1
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4
5
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8
9
0 2 4 6 8 10
16
22
5
30
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3D Plot and Diagonal Cut
Making a cut through the data using both diagonals a cross section plot was made.
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02
46
8
05
10152025303540
02
46
8
02468
0 2 4 6 8 10 120
5
10
15
20
25
30
35
40
f(x) = 0.03192791 x⁴ − 0.73614619 x³ + 4.36316181 x² − 1.43009569 x + 5.81R² = 1
Series1Polynomial (Series1)Series3
All measurements18.6 Average9.21 Std Dev
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Four groups of glass samples were coated while being taped onto the surface of the tooling.They were in locations 4, 12, 6, 14 for each set.
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(0,8) (4,8) (8,8)
(0,0) (4,0) (8,0)
1 2 3
4 5 6
7 8 9 10 11
12 13 14
15 16 17
Sample ID
Sheet resistance Thickness from
Rs ohm/sqbulk NiCr resistivity
(nm)
A 20.7 67.6B 24.7 56.7C 22.8 61.3D 25.9 54.1E 14.6 95.6F 16.6 84.4G 17.6 79.6H 18.4 75.9I 10.6 132J 11.6 121.1K 12.1 115.7L 10.8 129.8M 22.1 63.4N 22.5 62.3O 21.6 64.9
Grp 4
Grp 2
Grp 3
QCM=30
Avg 59.93Std Dev 5.92
Avg 83.88Std Dev 8.56
Avg 124.65Std Dev 7.60
Avg 63.53Std Dev 1.31
QCM=20
Grp 1
QCM=40
QCM=20
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Conclusion
Grid Data – Average of the data was 18 nm– Maximum of data was 36.8 nm
Data from Flat Glass Samples– Average of Group #1 is 60 nm– Average of Group #2 is 84 nm– Average of Group #3 is 125 nm
The setup for Group #1 (& #4) were the same as the grid data. There is nearly a 4X difference between those averages and the is a 2X difference
the maximum point and the samples.
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